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    Soft computing based controllers for automotive air conditioning system with variable speed compressor

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    The inefficient On/Off control for the compressor operation has long been regarded as the major factor contributing to energy loss and poor cabin temperature control of an automotive air conditioning (AAC) system. In this study, two soft computing based controllers, namely the proportional-integral-derivative (PID) based controllers tuned using differential evolution (DE) algorithm and an adaptive neural network based model predictive controller (A-NNMPC), are proposed to be used in the regulation of cabin temperature through proper compressor speed modulation. The implementation of the control schemes in conjunction with DE and neural network aims to improve the AAC performance in terms of reference tracking and power efficiency in comparison to the conventional On/Off operation. An AAC experimental rig equipped with variable speed compressor has been developed for the implementation of the proposed controllers. The dynamics of the AAC system is modelled using a nonlinear autoregressive with exogenous inputs (NARX) neural network. Based on the plant model, the PID gains are offline optimized using the DE algorithm. Experimental results show that the DE tuned PID based controller gives better tracking performance than the Ziegler-Nichols tuning method. For A-NNMPC, the identified NARX model is incorporated as a predictive model in the control system. It is trained in real time throughout the control process and therefore able to adaptively capture the time varying dynamics of the AAC system. Consequently, optimal performance can be achieved even when the operating point is drifted away from the nominal condition. Finally, the comparative assessment indicates clearly that A-NNMPC outperforms its counterparts, followed by DE tuned PID based controller and the On/Off controller. Both proposed control schemes achieve up to 47% power saving over the On/Off operation, indicating that the proposed control schemes can be potential alternatives to replace the On/Off operation in an AAC system

    ํ”Œ๋ผ์ฆˆ๋งˆ ์‹๊ฐ ์žฅ์น˜๋ฅผ ์œ„ํ•œ ์ ์‘๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ์˜ ์„ค๊ณ„

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    ํ•™์œ„๋…ผ๋ฌธ (๋ฐ•์‚ฌ)-- ์„œ์šธ๋Œ€ํ•™๊ต ๋Œ€ํ•™์› : ๊ณต๊ณผ๋Œ€ํ•™ ํ™”ํ•™์ƒ๋ฌผ๊ณตํ•™๋ถ€(์—๋„ˆ์ง€ํ™˜๊ฒฝ ํ™”ํ•™์œตํ•ฉ๊ธฐ์ˆ ์ „๊ณต), 2019. 2. ์ด์œค์šฐ.The semiconductor etching process, which is one of the most critical processes in the manufacturing of semiconductors and one that comprises numerous steps, requires higher sophistication as 10 nm semiconductors are mass produced. Currently, the semiconductor etching process is mostly done by physical and/or chemical etching with plasma. In addition, the plasma etching is getting increasingly popular with the miniaturization of the process to a scale of less than 10 nm. The result of a plasma etching process is represented in the form of an etch profile which is determined by the plasma variables. Therefore, the performance of the process depends on these variables, and it is essential to measure and control them in real time. Although research on the control of plasma etching processes has been actively carried out, the plasma etching process strongly relies on the experience and skill level of seasoned engineers at the industry level. This is because a plasma-based system is very complicated and sensitive, and has a time-varying characteristics. However, even though previous studies show excellent results, they employed invasive diagnostic tools, and have single variable control schemes where a counter change of another plasma variable during control actions for other variables might occur due to the highly interactive plasma characteristics. Moreover, they did not consider the time-varying characteristics of plasma-based systems. Therefore, this thesis proposes a multivariable control strategy which can cope with interaction effects and a design of an adaptive model predictive controller which maintains its performance wherein systems vary with time. At first, the plasma variables which are considered as controlled variables were selected as the electron density and the electron temperature. This is because one of the etch profile, especially etch rate, can be expressed as functions of those plasma variables and the variables can be measured by the optical emission spectroscopy which is a non-invasive diagnostic tool. The plasma variables were paired with instrumental variables through singular value decomposition and relative gain array for constructing the optimal multivariable system model. Two parallel proportional integral derivative (PID) controllers were designed based on the output errors then conducted plasma variable control simulations. Through the simulations, the exist of interaction between the variables was obviously verified. For resolving the interaction effectively, decoupler controllers were applied to the PID controllers. As it performed the control experiment of the Ar plasma electron density and electron temperature excellently, the possibility of multivariable control of plasma-based system is demonstrated. In spite of the meaningful control results using the PID controllers, there are obvious limitations in relation to the exquisiteness and to the characteristics of decoupler controllers as it highly dependent to the accuracy of the system model. In order to maintain performance even in the case of a system change, an advanced control strategy is required and model predictive control can be an alternative. Therefore, a model predictive controller was designed where the Bayesian optimization is used as tuning method for the maximization of the exquisiteness. The controller verified its capability as it conducted Ar plasma electron density control in a drift-free system. However, the performance of it deteriorated in control simulations of time-varying systems and in a control experiment performed in a system where O2 plasma was injected into an Ar plasma system inducing the high nonlinearity. Therefore, a more advanced control strategy which can overcome the difficulty was required. In an adaptive control method, once the information from the system is entered into the adjustment mechanism part, the part makes a decision to deliver it to the controller. Then the controller is modified in accordance with the decision and releases the optimal control action. The typical adaptive control algorithm, which is the recursive least squares algorithm, was used in this thesis. Using the algorithm with Kalman filter interpretation, the time-delay effect which comes from the plasma etching reactor can be considered. The recursive model parameter estimator utilizing this algorithm was tuned by Bayesian optimization. When the recursive model parameter estimator detects changes of the system model parameters in real time and transmits it to the model predictive controller, the controller calculates the optimal manipulated variable based on the modified model. The adaptive model predictive controller performed the same simulations and experiment as those performed by the model predictive controller. Unlike the model predictive controller, the proposed controller performed control excellently even when the system changes over time. Numerically, it showed the improved control ability by 24.7% and 30.4% in terms of the mean absolute percentage error and the number of deviated sample, respectively compared to the conventional model predictive controller. These results demonstrate that the adaptive model predictive controller designed in this theses is invaluable for plasma-based system control and is the effective controller for the plasma etching reactor. It is expected to make a significant contribution to plasma-based processes that require high sophistication and flexibility.์ˆ˜ ๋งŽ์€ ๊ณต์ •์œผ๋กœ ์ด๋ฃจ์–ด์ง„ ๋ฐ˜๋„์ฒด ์ œ์กฐ ๊ณต์ • ๋‚ด์—์„œ ๊ฐ€์žฅ ํฐ ๋น„์ค‘์„ ์ฐจ์ง€ํ•˜๊ณ  ์žˆ๋Š” ๋ฐ˜๋„์ฒด ์‹๊ฐ ๊ณต์ •์€ ์ตœ๊ทผ 10 nm๊ธ‰ ๋ฐ˜๋„์ฒด์˜ ์–‘์‚ฐ์ด ์ด๋ค„์ง์— ๋”ฐ๋ผ ์‹๊ฐ์˜ ๋†’์€ ์ •๊ต์„ฑ์ด ์š”๊ตฌ๋˜๊ณ  ์žˆ๋‹ค. ๋ฐ˜๋„์ฒด ์‹๊ฐ ๊ณต์ •์€ ํ˜„์žฌ ์‚ฐ์—…๊ณ„์—์„  ํ”Œ๋ผ์ฆˆ๋งˆ๋ฅผ ์ด์šฉํ•˜์—ฌ ๋ฌผ๋ฆฌ์ , ํ™”ํ•™์  ์‹๊ฐ์„ ์ผ์œผํ‚ค๋Š” ๋ฐฉ๋ฒ•์„ ํ†ตํ•ด ์ด๋ฃจ์–ด์ง€๊ณ  ์žˆ์œผ๋ฉฐ, ๊ณต์ •์ด 10 nm ๊ธ‰ ์ดํ•˜ ์Šค์ผ€์ผ๋กœ ๋ฏธ์„ธํ™”๋œ ํ›„๋กœ ์ด ๋ฐฉ๋ฒ•์ด ๋”์šฑ ๊ฐ๊ด‘ ๋ฐ›๊ณ  ์žˆ๋‹ค. ๊ณต์ •์˜ ๊ฒฐ๊ณผ๋Š” ์‹๊ฐ ํ”„๋กœํ•„์„ ๊ธฐ์ค€์œผ๋กœ ๊ฒฐ์ •๋˜๋Š” ๋ฐ ์ด ์‹๊ฐ ํ”„๋กœํ•„์ด ํ”Œ๋ผ์ฆˆ๋งˆ ๋ณ€์ˆ˜๋“ค์— ํฌ๊ฒŒ ์˜์กดํ•จ์ด ์ž…์ฆ๋จ์— ๋”ฐ๋ผ ์ด ๋ณ€์ˆ˜๋“ค์„ ์‹ค์‹œ๊ฐ„์œผ๋กœ ์ธก์ •ํ•˜๊ณ  ์ œ์–ดํ•˜๋Š” ๊ฒƒ์ด ๊ณต์ •์˜ ํ•ต์‹ฌ์ด ๋˜์—ˆ๋‹ค. ๊ทธ๋™์•ˆ ํ”Œ๋ผ์ฆˆ๋งˆ ๋ณ€์ˆ˜ ์ œ์–ด์— ๊ด€ํ•œ ์—ฐ๊ตฌ๋“ค์ด ํ™œ๋ฐœํžˆ ์ง„ํ–‰๋˜์–ด ์™”์œผ๋‚˜ ์•„์ง๊นŒ์ง€ ์‚ฐ์—…๊ณ„์—์„  ๊ทธ ์ด๋ก ๋“ค์„ ๋ฐ”๋กœ ํ™œ์šฉํ•˜์ง€ ๋ชปํ•˜๊ณ  ๊ฒฝํ—˜ ๋งŽ์€ ์—”์ง€๋‹ˆ์–ด์˜ ๊ฐ์— ์˜์กดํ•˜๊ณ  ์žˆ๋‹ค. ๊ทธ ์ด์œ ๋Š” ๊ทผ๋ณธ์ ์œผ๋กœ ์‹œ์Šคํ…œ์ด ๋งค์šฐ ๋ณต์žกํ•˜๊ณ  ์˜ˆ๋ฏผํ•  ๋ฟ ์•„๋‹ˆ๋ผ ์‹œ๊ฐ„์— ๋”ฐ๋ผ ๋ณ€ํ•˜๋Š” ํŠน์„ฑ์„ ๊ฐ–๊ณ  ์žˆ๊ธฐ ๋•Œ๋ฌธ์ด๋‹ค. ๊ทธ๋Ÿฌ๋‚˜ ์ด์ „์˜ ์—ฐ๊ตฌ๋“ค์€ ํ›Œ๋ฅญํ•œ ๊ฒฐ๊ณผ๋ฅผ ๋ณด์˜€์Œ์—๋„ ๋ถˆ๊ตฌํ•˜๊ณ , ํ”Œ๋ผ์ฆˆ๋งˆ ์‹œ์Šคํ…œ์— ์ง์ ‘์ ์œผ๋กœ ์˜ํ–ฅ์„ ๋ฏธ์น˜๋Š” ์นจํˆฌ์„ฑ ์„ผ์„œ๋ฅผ ์ด์šฉํ–ˆ๊ฑฐ๋‚˜, ํ”Œ๋ผ์ฆˆ๋งˆ ๋ณ€์ˆ˜๋“ค๊ณผ ์žฅ์น˜ ๋ณ€์ˆ˜๋“ค์ด ์„œ๋กœ ๋ณต์žกํ•˜๊ฒŒ ์–ฝํ˜€ ์žˆ์–ด ์•ผ๊ธฐ๋˜๋Š” ์ƒํ˜ธ์ž‘์šฉ์„ ๊ฐ„๊ณผํ•  ์ˆ˜๋ฐ–์— ์—†๋Š” ๋‹จ๋ณ€์ˆ˜ ์ œ์–ด๋ฅผ ์ˆ˜ํ–‰ํ•œ ๋ฐ์— ๊ทธ์น˜๊ณ  ์žˆ๋‹ค. ๊ฒŒ๋‹ค๊ฐ€ ์™ธ๋ž€ ๋•Œ๋ฌธ์— ๋ฐœ์ƒ๋˜๋Š” ์‹œ๊ฐ„์— ๋”ฐ๋ผ ๋ณ€ํ•˜๋Š” ํŠน์„ฑ์„ ๊ณ ๋ คํ•˜์ง€ ๋ชปํ•˜๊ณ  ์žˆ๋‹ค. ๋”ฐ๋ผ์„œ, ๋ณธ ํ•™์œ„๋…ผ๋ฌธ์—์„œ๋Š” ๋ณ€์ˆ˜๊ฐ„ ์ƒํ˜ธ์ž‘์šฉ์„ ์ตœ์†Œํ™”ํ•˜๋Š” ๋‹ค๋ณ€์ˆ˜ ์ œ์–ด ์ „๋žต๊ณผ ์‹œ์Šคํ…œ์ด ์‹œ๊ฐ„์— ๋”ฐ๋ผ ๋ณ€ํ•˜๋Š” ์ƒํ™ฉ์—์„œ๋„ ์„ฑ๋Šฅ์ด ์•…ํ™”๋˜์ง€ ์•Š๋Š” ์ ์‘๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ์˜ ์„ค๊ณ„๋ฅผ ์ œ์•ˆํ•œ๋‹ค. ๋จผ์ €, ์ „์ž ๋ฐ€๋„์™€ ์ „์ž ์˜จ๋„๊ฐ€ ์ œ์–ด ๋Œ€์ƒ์ด ๋˜๋Š” ํ”Œ๋ผ์ฆˆ๋งˆ ๋ณ€์ˆ˜๋กœ ์„ ์ •๋˜์—ˆ๋‹ค. ์ด๋Š” ์‹๊ฐ ํ”„๋กœํ•„, ํŠนํžˆ ์‹๊ฐ๋ฅ ์ด ์ด ๋ณ€์ˆ˜๋“ค์— ๋Œ€ํ•œ ํ•จ์ˆ˜๋กœ ํ‘œํ˜„๋  ์ˆ˜ ์žˆ์œผ๋ฉฐ, ์ด ๋ณ€์ˆ˜๋“ค์€ ์นจํˆฌ์„ฑ ์„ผ์„œ์ธ ๊ด‘ํ•™์  ๋ฐœ๊ด‘ ๋ถ„๊ด‘๋ฒ•์„ ํ†ตํ•ด ์ธก์ •๋  ์ˆ˜ ์žˆ๊ธฐ ๋•Œ๋ฌธ์ด๋‹ค. ๊ทธ ๋‹ค์Œ์—, ์ตœ์ ์˜ ๋‹ค๋ณ€์ˆ˜ ์‹œ์Šคํ…œ ์ •์˜๋ฅผ ์œ„ํ•ด ํŠน์ด์น˜ ๋ถ„์„๊ณผ ์ƒ๋Œ€์ด๋“๋ฐฐ์—ด์„ ์ด์šฉํ•˜์—ฌ ๊ฐ€์žฅ ํšจ๊ณผ์ ์œผ๋กœ ์ œ์–ด๋ฅผ ์ˆ˜ํ–‰ํ•  ์ˆ˜ ์žˆ๋Š” ์žฅ์น˜ ๋ณ€์ˆ˜ ์„ ์ •์ด ์ด๋ฃจ์–ด์กŒ๋‹ค. ์ด๋ฅผ ๋ฐ”ํƒ•์œผ๋กœ ๋‘ ๊ฐœ์˜ ๋ณ‘๋ ฌ๋กœ ์—ฐ๊ฒฐ๋œ ๋น„๋ก€์ ๋ถ„๋ฏธ๋ถ„์ œ์–ด๊ธฐ๋ฅผ ์„ค๊ณ„, ์•„๋ฅด๊ณค ํ”Œ๋ผ์ฆˆ๋งˆ ์ „์ž ๋ฐ€๋„์™€ ์ „์ž ์˜จ๋„์˜ ์ œ์–ด ์‹œ๋ฎฌ๋ ˆ์ด์…˜์„ ์ˆ˜ํ–‰ํ•˜์˜€๋‹ค. ํ•ด๋‹น ์‹œ๋ฎฌ๋ ˆ์ด์…˜์—์„œ ๋ณ€์ˆ˜๋“ค ๊ฐ„ ์ƒํ˜ธ ์ž‘์šฉ์ด ํ™•์—ฐํ•จ์„ ์ž…์ฆํ•˜์˜€์œผ๋ฉฐ ์ด๋ฅผ ํšจ๊ณผ์ ์œผ๋กœ ํ•ด๊ฒฐํ•˜๊ธฐ ์œ„ํ•ด ๋””์ปคํ”Œ๋Ÿฌ ์ œ์–ด๊ธฐ๊ฐ€ ๋น„๋ก€์ ๋ถ„๋ฏธ๋ถ„์ œ์–ด๊ธฐ์— ๊ฒฐํ•ฉ๋˜์—ˆ๋‹ค. ์ด ์ œ์–ด๊ธฐ๋Š” ์•„๋ฅด๊ณค ํ”Œ๋ผ์ฆˆ๋งˆ์˜ ์ „์ž ๋ฐ€๋„์™€ ์ „์ž ์˜จ๋„ ์ œ์–ด๋ฅผ ํ›Œ๋ฅญํ•˜๊ฒŒ ์ˆ˜ํ–‰ํ•จ์œผ๋กœ์จ ๋‹ค๋ณ€์ˆ˜ ํ”Œ๋ผ์ฆˆ๋งˆ ์‹œ์Šคํ…œ์˜ ์ œ์–ด ๊ฐ€๋Šฅ์„ฑ์„ ๋ถ„๋ช…ํ•˜๊ฒŒ ์ž…์ฆํ•˜์˜€๋‹ค. ๋‹ค๋ณ€์ˆ˜ ํ”Œ๋ผ์ฆˆ๋งˆ ์‹œ์Šคํ…œ์˜ ์ œ์–ด ๊ฐ€๋Šฅ์„ฑ์ด ์ž…์ฆ ๋์Œ์—๋„ ๋ถˆ๊ตฌํ•˜๊ณ , ์ด ์ œ์–ด ์ „๋žต์€ ๋น„๋ก€์ ๋ถ„๋ฏธ๋ถ„์ œ์–ด๊ธฐ์˜ ์ •๊ต์„ฑ ์ธก๋ฉด์—์„œ์˜ ํ•œ๊ณ„์™€ ๋””์ปคํ”Œ๋Ÿฌ ์ œ์–ด๊ธฐ์˜ ์‹œ์Šคํ…œ ๋ชจ๋ธ์— ๋Œ€ํ•œ ๋†’์€ ์˜์กด๋„ ํŠน์„ฑ์œผ๋กœ ์ธํ•œ ํ•œ๊ณ„๊ฐ€ ์กด์žฌํ•œ๋‹ค. ์‹œ์Šคํ…œ์ด ๋ณ€ํ•˜๋Š” ์ƒํ™ฉ์—์„œ๋„ ์„ฑ๋Šฅ์„ ์œ ์ง€ํ•˜๊ธฐ ์œ„ํ•ด์„  ๋”์šฑ ์ˆ˜์ค€ ๋†’์€ ์ œ์–ด ์ „๋žต์ด ์š”๊ตฌ๋˜๋ฉฐ, ๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ฐ€ ๊ทธ ๋Œ€์•ˆ์ด ๋  ์ˆ˜ ์žˆ๋‹ค. ๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ์˜ ์„ค๊ณ„๋Š” ์ œ์–ด์˜ ์ •๊ต์„ฑ์„ ๊ทน๋Œ€ํ™” ์‹œํ‚ค๊ธฐ ์œ„ํ•ด ๋ฒ ์ด์‹œ์•ˆ ์ตœ์ ํ™” ๊ธฐ๋ฒ•์„ ํ†ตํ•ด ์ด๋ฃจ์–ด์กŒ๋‹ค. ์ด ๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ๋Š” ์ธ์œ„์ ์ธ ์™ธ๋ž€์ด ์ ์šฉ๋˜์ง€ ์•Š์€ ์ˆœ์ˆ˜ ์•„๋ฅด๊ณค ํ”Œ๋ผ์ฆˆ๋งˆ ์‹œ์Šคํ…œ์—์„œ์˜ ์ „์ž ๋ฐ€๋„ ์ œ์–ด๋ฅผ ํ›Œ๋ฅญํ•˜๊ฒŒ ์ˆ˜ํ–‰ํ•จ์œผ๋กœ์จ ๊ทธ ์„ฑ๋Šฅ์„ ์ž…์ฆํ•˜์˜€๋‹ค. ํ•˜์ง€๋งŒ, ์‹œ์Šคํ…œ์ด ์‹œ๊ฐ„์— ๋”ฐ๋ผ ๋ณ€ํ•˜๋Š” ์ƒํ™ฉ์„ ๋ชจ์‚ฌํ•œ ์‹œ๋ฎฌ๋ ˆ์ด์…˜๊ณผ ์‚ฐ์†Œ ํ”Œ๋ผ์ฆˆ๋งˆ๊ฐ€ ์•„๋ฅด๊ณค ํ”Œ๋ผ์ฆˆ๋งˆ ์‹œ์Šคํ…œ์— ์ฃผ์ž…๋˜์–ด ์‹œ์Šคํ…œ ๋ณ€ํ™”๋ฅผ ์•ผ๊ธฐ์‹œํ‚ค๋Š” ์ƒํ™ฉ์—์„œ ์ˆ˜ํ–‰๋œ ์ œ์–ด ์‹คํ—˜์—์„œ ์ œ์–ด๊ธฐ์˜ ์„ฑ๋Šฅ์ด ํ™•์—ฐํžˆ ์•…ํ™”๋จ์„ ํ™•์ธํ•  ์ˆ˜ ์žˆ์—ˆ๋‹ค. ๋”ฐ๋ผ์„œ ์ด๋ฅผ ๊ทน๋ณตํ•  ์ˆ˜ ์žˆ๋Š” ๋”์šฑ ๋ฐœ์ „๋œ ์ œ์–ด ์ „๋žต์ด ์š”๊ตฌ๋˜์—ˆ๋‹ค. ์ ์‘ ์ œ์–ด ๊ธฐ๋ฒ•์€ ์‹œ์Šคํ…œ์—์„œ ์–ป์–ด์ง„ ์ •๋ณด๋ฅผ ์กฐ์ ˆ ๋ฉ”์ปค๋‹ˆ์ฆ˜ ๋ถ€๋ถ„์œผ๋กœ ๋ณด๋‚ด ์‹ค์‹œ๊ฐ„์œผ๋กœ ์ œ์–ด๊ธฐ์˜ ์ˆ˜์ • ์‚ฌํ•ญ์„ ๊ฒฐ์ •ํ•˜์—ฌ ์ด๋ฅผ ๋ฐ”ํƒ•์œผ๋กœ ์ œ์–ด๋ฅผ ์ˆ˜ํ–‰ํ•˜๋Š” ๊ธฐ๋ฒ•์ด๋‹ค. ๋ณธ ํ•™์œ„๋…ผ๋ฌธ์—์„œ๋Š” ๋Œ€ํ‘œ์ ์ธ ์ ์‘ ์ œ์–ด ์•Œ๊ณ ๋ฆฌ์ฆ˜์ธ ์ˆœํ™˜ํ˜• ์ตœ์†Œ์ž์Šน๋ฒ• ์•Œ๊ณ ๋ฆฌ์ฆ˜์„ ํ™œ์šฉํ•˜์˜€๋‹ค. ์ด ์•Œ๊ณ ๋ฆฌ์ฆ˜์— ์นผ๋งŒ ํ•„ํ„ฐ ํ•ด์„์„ ์ ‘๋ชฉ์‹œํ‚ด์— ๋”ฐ๋ผ, ํ”Œ๋ผ์ฆˆ๋งˆ ์‹๊ฐ ์žฅ์น˜๋กœ๋ถ€ํ„ฐ ๋น„๋กฏ๋˜๋Š” ์‹œ๊ฐ„ ์ง€์—ฐ์˜ ํšจ๊ณผ๋ฅผ ๊ณ ๋ คํ•  ์ˆ˜ ์žˆ๊ฒŒ ํ•˜์˜€๋‹ค. ์ด ์•Œ๊ณ ๋ฆฌ์ฆ˜์ด ํƒ‘์žฌ๋œ ์ˆœํ™˜ํ˜• ๋ชจ๋ธ ํŒŒ๋ผ๋ฏธํ„ฐ ์ถ”์ •๊ธฐ๋Š” ๋ฒ ์ด์‹œ์•ˆ ์ตœ์ ํ™” ๊ธฐ๋ฒ•์„ ํ†ตํ•ด ํŠœ๋‹๋˜์—ˆ๋‹ค. ์ˆœํ™˜ํ˜• ๋ชจ๋ธ ํŒŒ๋ผ๋ฏธํ„ฐ ์ถ”์ •๊ธฐ๊ฐ€ ์‹ค์‹œ๊ฐ„์œผ๋กœ ๊ฐ์ง€ํ•˜๋Š” ๋ชจ๋ธ ํŒŒ๋ผ๋ฏธํ„ฐ์˜ ๋ณ€ํ™”๋ฅผ ๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ์— ์ „๋‹ฌํ•˜๋ฉด ์ˆ˜์ •๋œ ๋ชจ๋ธ์„ ๊ธฐ๋ฐ˜์œผ๋กœ ์ œ์–ด๊ธฐ๋Š” ์ตœ์ ์˜ ์กฐ์ ˆ ๋ณ€์ˆ˜๋ฅผ ๊ณ„์‚ฐํ•œ๋‹ค. ์ด๋ ‡๊ฒŒ ์„ค๊ณ„๋œ ์ ์‘๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ๋Š” ์•ž์„œ ๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ๊ฐ€ ์ˆ˜ํ–‰ํ•œ ๊ฒƒ๊ณผ ๋™์ผํ•œ ์‹œ๋ฎฌ๋ ˆ์ด์…˜๊ณผ ์‹คํ—˜์„ ์ˆ˜ํ–‰ํ•˜์˜€๋‹ค. ๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ์™€ ๋‹ฌ๋ฆฌ ์ ์‘๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ๋Š” ์‹œ๊ฐ„์— ๋”ฐ๋ผ ์‹œ์Šคํ…œ์ด ๋ณ€ํ•˜๋Š” ์ƒํ™ฉ์—์„œ๋„ ํ›Œ๋ฅญํ•œ ์ œ์–ด๋ฅผ ์ˆ˜ํ–‰ํ•˜์˜€์œผ๋ฉฐ, ํ‰๊ท ์ ˆ๋Œ€์˜ค์ฐจ์œจ์„ ๊ธฐ์ค€์œผ๋กœ ํ–ˆ์„ ๋•Œ ๊ธฐ์กด์˜ ๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ๋ณด๋‹ค 24.7%์˜ ํ–ฅ์ƒ๋œ ์ œ์–ด ์„ฑ๋Šฅ์„ ๋ณด์—ฌ์ฃผ์—ˆ๋‹ค. ์ด ๊ฒฐ๊ณผ๋Š” ๋ณธ ํ•™์œ„๋…ผ๋ฌธ์—์„œ ์ œ์•ˆํ•˜๊ณ  ์žˆ๋Š” ์ ์‘๋ชจ๋ธ์˜ˆ์ธก์ œ์–ด๊ธฐ๊ฐ€ ์‹œ์Šคํ…œ์˜ ๋ณ€ํ™”๊ฐ€ ๋นˆ๋ฒˆํ•œ ํ”Œ๋ผ์ฆˆ๋งˆ ์‹œ์Šคํ…œ์—์„œ์˜ ์ œ์–ด์— ๋งค์šฐ ๊ฐ€์น˜ ์žˆ์Œ๊ณผ ๋”๋ถˆ์–ด ํ”Œ๋ผ์ฆˆ๋งˆ ์‹๊ฐ ์žฅ์น˜์— ์œ ํšจํ•œ ์ œ์–ด๊ธฐ๋ผ๋Š” ๊ฒƒ์„ ๋ฐ˜์ฆํ•œ๋‹ค. ์ด ๊ฒฐ๊ณผ๊ฐ€ ํ”Œ๋ผ์ฆˆ๋งˆ ๊ธฐ๋ฐ˜ ์‹œ์Šคํ…œ์„ ๋Œ€์ƒ์œผ๋กœ ํ•˜๋Š” ๋ชจ๋“  ์ œ์–ด ๊ณต์ •์˜ ๋ฐœ์ „์— ํฌ๊ฒŒ ์ด๋ฐ”์ง€ํ•  ๊ฒƒ์„ ๊ธฐ๋Œ€ํ•˜๋Š” ๋ฐ”์ด๋‹ค.Abstract i Contents v List of Figures viii List of Tables xii CHAPTER 1. Introduction 1 1.1. Research motivation 1 1.2. Research objectives 4 1.3. Description of the equipment used in this thesis 5 1.4. Outline of the thesis 9 CHAPTER 2. Design of Multi-Input Multi-Output Controller for Plasma-based System 10 2.1. Introduction 10 2.2. Theoretical backgrounds 13 2.2.1. Estimation of plasma variables from optical emission spectroscopy 13 2.2.2. The influence of oxygen in plasma etching reactor 16 2.2.3. Singular value decomposition and condition number 18 2.2.4. Relative gain array method 21 2.2.5. Multi-loop control system 23 2.3. MIMO control results in the Ar plasma system 31 2.3.1. Variable selection and pairing 31 2.3.2. Disturbance rejection control results for SISO systems 37 2.3.3. Simulation of multi-loop control scheme and decoupling control scheme 41 2.3.4. Set-point tracking control experiment of multi-loop controller with decoupler controllers 58 2.4. Concluding remarks 62 CHAPTER 3. Disturbance Rejection Control of Plasma Electron Density by Model Predictive Controller 64 3.1. Introduction 64 3.2. Model predictive control 68 3.2.1. Concept of model predictive control 68 3.2.2. Description of model predictive control algorithm 71 3.2.2.1. State estimation algorithm 71 3.2.2.2. Optimization algorithm 76 3.3. Design of model predictive controller for Ar plasma system 78 3.3.1. System identification of Ar plasma system 78 3.3.2. Optimal MPC weight parameters from integral squared error based Bayesian optimization 80 3.3.3. Experimental results of Ar plasma electron density control 84 3.4. Disturbance rejection control using model predictive controller 86 3.4.1. Development of time-varying system model for control simulation 86 3.4.2. Design of model predictive controller for disturbance rejection control 91 3.4.3. Experimental result of disturbance rejection control in Ar/O2 plasma system 101 3.5. Concluding remarks 104 CHAPTER 4. Design of Adaptive Model Predictive Controller for Plasma Etching Reactor 106 4.1. Introduction 106 4.2. Recursive model parameter estimation 112 4.2.1. Recursive least squares algorithm with forgetting factor 113 4.2.2. Recursive least squares algorithm with Kalman filter interpretation 116 4.3. Adaptive model predictive control algorithm 119 4.4. Time-varying system control using adaptive model predictive controller 123 4.4.1. Initial system identification (Scaling method) 123 4.4.2. Design of adaptive model predictive controller for time-varying system 125 4.4.3. Set-point tracking control results in drifted system 143 4.5. Concluding remarks 152 CHAPTER 5. Conclusion 154 5.1. Summary of contributions 154 5.2. Future work 157 Nomenclature 159 References 167 Abstract in Korean (๊ตญ๋ฌธ์ดˆ๋ก) 174Docto

    Analysis and Application of Advanced Control Strategies to a Heating Element Nonlinear Model

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    open4siSustainable control has begun to stimulate research and development in a wide range of industrial communities particularly for systems that demand a high degree of reliability and availability (sustainability) and at the same time characterised by expensive and/or safety critical maintenance work. For heating systems such as HVAC plants, clear conflict exists between ensuring a high degree of availability and reducing costly maintenance times. HVAC systems have highly non-linear dynamics and a stochastic and uncontrollable driving force as input in the form of intake air speed, presenting an interesting challenge for modern control methods. Suitable control methods can provide sustainable maximisation of energy conversion efficiency over wider than normally expected air speeds and temperatures, whilst also giving a degree of โ€œtoleranceโ€ to certain faults, providing an important impact on maintenance scheduling, e.g. by capturing the effects of some system faults before they become serious.This paper presents the design of different control strategies applied to a heating element nonlinear model. The description of this heating element was obtained exploiting a data driven and physically meaningful nonlinear continuous time model, which represents a test bed used in passive air conditioning for sustainable housing applications. This model has low complexity while achieving high simulation performance. The physical meaningfulness of the model provides an enhanced insight into the performance and functionality of the system. In return, this information can be used during the system simulation and improved model based and data driven control designs for tight temperature regulation. The main purpose of this study is thus to give several examples of viable and practical designs of control schemes with application to this heating element model. Moreover, extensive simulations and Monte Carlo analysis are the tools for assessing experimentally the main features of the proposed control schemes, in the presence of modelling and measurement errors. These developed control methods are also compared in order to evaluate advantages and drawbacks of the considered solutions. Finally, the exploited simulation tools can serve to highlight the potential application of the proposed control strategies to real air conditioning systems.openTurhan, T.; Simani, S.; Zajic, I.; Gokcen Akkurt, G.Turhan, T.; Simani, Silvio; Zajic, I.; Gokcen Akkurt, G

    Development, implementation and performance evaluation of a self-tuning regulator adaptive controller applied to a FCC process

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    Orientador: Rubens Maciel FilhoTese (doutorado) - Universidade Estadual de Campinas, Faculdade de Engenharia QuรญmicaResumo: Este trabalho teve como principal objetivo o desenvolvimento e implementaรงรฃo de um controlador adaptativo do tipo regulador auto-ajustรกvel (STR - Self Tuning Regulator), com a subsequente comparaรงรฃo de seu desempenho com um controlador PID (proporcionalintegrativo-derivativo) e dois controladores preditivos: um preditivo baseado em redes neurais artificiais e um controlador DMC (Dynamic Matrix Control). Esses esquemas de controle foram todos implementados na ferramenta de simulaรงรฃo desenvolvida, o FCCGUI (Fluid Catalytic Cracking Graphical User Interface). Como modelo para estimativa dos parรขmetros do controlador adaptativo foi treinada e validada uma rede neural. Esse modelo caixa-preta forneceu uma abordagem eficiente para identificaรงรฃo e controle nรฃo-linear do processo de craqueamento catalรญtico. Para implementaรงรฃo do controlador adaptativo foram estruturadas trรชs novas malhas de controle PID a partir de estudos estatรญsticos desenvolvidos para a anรกlise dos efeitos das variรกveis de processo e suas interaรงรตes. Dentre essas novas malhas de controle, optou-se pela implementaรงรฃo do controle adaptativo no par manipulada-controlada CTCV-SEVER (abertura de catalisador regenerado - severidade da reaรงรฃo). Apรณs aperfeiรงoamentos e reestruturaรงรตes no simulador FCCGUI, foram realizadas vรกrias simulaรงรตes para avaliaรงรฃo grรกfica e numรฉrica do desempenho do controlador atravรฉs do critรฉrio de desempenho dinรขmico ITAE (Integral of Time and Absolute Error). O controlador adaptativo apresentou bons resultados, tanto para testes servo quanto para regulatรณrios em comparaรงรฃo com a estratรฉgia PID sem adaptaรงรฃo, bem como para as demais estratรฉgias disponรญveis no simulador, MPC-RNA (Model Predictive Control baseado em uma Rede Neural Artificial) e DMC. A capacidade de ajuste dos parรขmetros do controlador torna-o uma estratรฉgia promissora para sistemas que sofrem com alteraรงรตes contรญnuas em suas variรกveis de processo ou mudanรงas de setpointAbstract: This work had as main objective the development and implementation of an selftuning regulator (STR) adaptive controller, with subsequent comparison of its performance with a PID (proportional-integral-derivative) controller and two predictive controllers, namely a predictive based on artificial neural networks (MPC-ANN) and a dynamic matrix controller (DMC). These control schemes were all implemented in the developed simulation tool, the FCCGUI - Fluid Catalytic Cracking Graphical User Interface. An artificial neural network, used as a model to estimate controller parameters, was trained and validated. This black box model provided an efficient approach for identification and nonlinear control of the catalytic cracking process. To implement the adaptive controller, three new PID control loops were structured based on statistical studies designed to analyze the effects of process variables and their interactions. The implementation of adaptive control was chosen to be in the manipulated-controlled pair CTCV-SEVER (regenerated catalyst valve opening - reaction severity). After restructuring and improvements in the simulator FCCGUI, several simulations were performed for graphical and numerical evaluation of controller performance through ITAE (Integral of Time and Absolute Error) dynamic performance criterion. The adaptive controller presented good results for both tests: servo and regulatory, in comparison with PID strategy without adaptation and other strategies available to the simulator, MPC-ANN and DMC. The ability to adjust the parameters of the controller makes it a promising strategy for systems that suffer from continuous changes in their process variables or setpointsDoutoradoDesenvolvimento de Processos QuรญmicosDoutor em Engenharia Quรญmic

    Setpoint Tracking Predictive Control in Chemical Processes Based on System Identification

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    A Kraft recovery boiler in a pulp-paper mill provides a means for recovery of the heat energy in spent liquor and recovery of inorganic chemicals while controlling emissions. These processes are carried out in a combined chemical recovery unit and steam boiler that is fired with concentrated black liquor and which produces molten smelt. Since the recovery boiler is considered to be an essential part of the pulp-paper mill in terms of energy resources, the performance of the recovery boiler has to be controlled to achieve the highest efficiency under unexpected disturbances. This dissertation presents a new approach for combining system identification technique with predictive control strategy. System identification is the process of building mathematical models of dynamical systems based on the available input and output data from the system. Predictive control is a strategy where the current control action is based upon a prediction of the system response at some number of time steps into the future. A new algorithm uses an i-step-ahead predictor integrated with the least-square technique to build the new control law. Based on the receding horizon predictive control approach, the tracking predictive control law is achieved and performs successfully on the recovery boiler of the pulp-paper mill. This predictive controller is designed from ARX coefficients that are computed directly from input and output data. The character of this controller is governed by two parameters. One parameter is the prediction horizon as in traditional predictive control and the other parameter is the order of the ARX model. A recursive version of the developed algorithm can be evolved for real-time implementation. It includes adaptive tuning of these two design parameters for optimal performance. The new predictive control is proven to be a significant improvement compared to a conventional PID controller, especially when the system is subjected to noise and disturbances

    The application of a new PID autotuning method for the steam/water loop in large scale ships

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    In large scale ships, the most used controllers for the steam/water loop are still the proportional-integral-derivative (PID) controllers. However, the tuning rules for the PID parameters are based on empirical knowledge and the performance for the loops is not satisfying. In order to improve the control performance of the steam/water loop, the application of a recently developed PID autotuning method is studied. Firstly, a 'forbidden region' on the Nyquist plane can be obtained based on user-defined performance requirements such as robustness or gain margin and phase margin. Secondly, the dynamic of the system can be obtained with a sine test around the operation point. Finally, the PID controller's parameters can be obtained by locating the frequency response of the controlled system at the edge of the 'forbidden region'. To verify the effectiveness of the new PID autotuning method, comparisons are presented with other PID autotuning methods, as well as the model predictive control. The results show the superiority of the new PID autotuning method

    Robust predictive control for respiratory CO2 gas removal in closed-loop mechanical ventilation: an in-silico study

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    In this study a physiological closed-loop system for arterial CO2 partial pressure control was designed and comprehensively tested using a set of models of the respiratory CO2 gas exchange. The underlying preclinical data were collected from 12 pigs in presence of severe changes in hemodynamic and pulmonary condition. A minimally complex nonlinear state space model of CO2 gas exchange was identified post hoc in different lung conditions. The control variable was measured noninvasively using the endtidal CO2 partial pressure. For the simulation study the output signal of the controller was defined as the alveolar minute volume set value of an underlying adaptive lung protective ventilation mode. A linearisation of the two-compartment CO2 gas exchange model was used for the design of a model predictive controller (MPC). It was augmented by a tube based controller suppressing prediction errors due to model uncertainties. The controller was subject to comparative testing in interaction with each of the CO2 gas exchange models previously identified on the preclinical study data. The performance was evaluated for the system response towards the following five tests in comparison to a PID controller: recruitment maneuver, PEEP titration maneuver, stepwise change in the CO2 production, breath-hold maneuver and a step in the reference signal. A root mean square error of 2.69 mmHg between arterial CO2 partial pressure and the reference signal was achieved throughout the trial. The reference-variable response of the model predictive controller was superior regarding overshoot and settling time

    A Robust Adaptive Dead-Time Compensator with Application to A Solar Collector Field

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    This paper describes an easy-to-use PI controller with dead-time compensation that presents robust behaviour and can be applied to plants with variable dead-time. The formulation is based on an adaptive Smith predictor structure plus the addition of a filter acting on the error between the output and its prediction in order to improve robustness. The implementation of the control law is straightforward, and the filter needs no adjustment, since it is directly related to the plant dead-time. An application to an experimentally validated nonlinear model of a solar plant shows that this controller can improve the performance of classical PID controllers without the need of complex calculations.Ministerio de Ciencia y Tecnologรญa TAP95-37
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