Improved Physical Design for Manufacturing Awareness and Advanced VLSI

Increasing challenges arise with each new semiconductor technology node, especially in advanced nodes, where the industry tries to extract every ounce of benefit as it approaches the limits of physics, through manufacturing-aware design technology co-optimization and design-based equivalent scaling. The increasing complexity of design and process technologies, and ever-more complex design rules, also become hurdles for academic researchers, separating academic researchers from the most up-to-date technical issues.This thesis presents innovative methodologies and optimizations to address the above challenges. There are three directions in this thesis: (i) manufacturing-aware design technology co-optimization; (ii) advanced node design-based equivalent scaling; and (iii) an open source academic detailed routing flow.To realize manufacturing-aware design technology co-optimization, this thesis presents two works: (i) a multi-row detailed placement optimization for neighbor diffusion effect mitigation between neighboring standard cells; and (ii) a post-routing optimization to generate 2D block mask layout for dummy segment removal in self-aligned multiple patterning.To achieve advanced node design-based equivalent scaling, this thesis presents two improved physical design methodologies: (i) a post-placement flop tray generation approach for clock power reduction; and (ii) a detailed placement approach to exploit inter-row M1 routing for congestion and wirelength reduction.To address the increasing gap between academia and industry, this thesis presents two works toward an open source academic detailed routing flow: (i) a complete, robust, scalable and design ruleaware dynamic programming-based pin access analysis framework; and (ii) TritonRoute – the open source detailed router that is capable of delivering DRC-clean detailed routing solutions in advanced nodes.This thesis concludes with a summary of its contributions and open directions for future research

A Multiple-objective ILP based Global Routing Approach for VLSI ASIC Design

A VLSI chip can today contain hundreds of millions transistors and is expected to contain more than 1 billion transistors in the next decade. In order to handle this rapid growth in integration technology, the design procedure is therefore divided into a sequence of design steps. Circuit layout is the design step in which a physical realization of a circuit is obtained from its functional description. Global routing is one of the key subproblems of the circuit layout which involves finding an approximate path for the wires connecting the elements of the circuit without violating resource constraints. The global routing problem is NP-hard, therefore, heuristics capable of producing high quality routes with little computational effort are required as we move into the Deep Sub-Micron (DSM) regime. In this thesis, different approaches for global routing problem are first reviewed. The advantages and disadvantages of these approaches are also summarized. According to this literature review, several mathematical programming based global routing models are fully investigated. Quality of solution obtained by these models are then compared with traditional Maze routing technique. The experimental results show that the proposed model can optimize several global routing objectives simultaneously and effectively. Also, it is easy to incorporate new objectives into the proposed global routing model. To speedup the computation time of the proposed ILP based global router, several hierarchical methods are combined with the flat ILP based global routing approach. The experimental results indicate that the bottom-up global routing method can reduce the computation time effectively with a slight increase of maximum routing density. In addition to wire area, routability, and vias, performance and low power are also important goals in global routing, especially in deep submicron designs. Previous efforts that focused on power optimization for global routing are hindered by excessively long run times or the routing of a subset of the nets. Accordingly, a power efficient multi-pin global routing technique (PIRT) is proposed in this thesis. This integer linear programming based techniques strives to find a power efficient global routing solution. The results indicate that an average power savings as high as 32\% for the 130-nm technology can be achieved with no impact on the maximum chip frequency

Timing-Constrained Global Routing with RC-Aware Steiner Trees and Routing Based Optimization

In this thesis we consider the global routing problem, which arises as one of the major subproblems in the physical design step in VLSI design. In global routing, we are given a three-dimensional grid graph G with edge capacities representing available routing space, and we have to connect a set of nets in G without overusing any edge capacities. Here, each net consists of a set of pins corresponding to vertices of G, where one pin is the sender of signals, while all other pins are receivers. Traditionally, next to obeying all edge capacity constraints, the objective has been to minimize wire length and possibly via (edges in z-direction) count, and timing constraints on the chip were only modeled indirectly. We present a new approach, where timing constraints are modeled directly during global routing: In joint work with Stephan Held, Dirk Mueller, Daniel Rotter, Vera Traub and Jens Vygen, we extend the modeling of global routing as a Min-Max Resource Sharing Problem to also incorporate timing constraints. For measuring signal delays we use the well-established Elmore delay model. One of the key subproblems here is the computation of Steiner trees minimizing a weighted sum of routing space usages and signal delays. For k pins, this problem is NP-hard to approximate within o(log k), and even the special case k = 2 is NP-hard, as was shown by Haehnle and Rotter. We present a fast approximation algorithm with strong approximation bounds for the case k = 2. For k > 2 we use a multi-stage approach based on modifying the topology of a short Steiner tree and using our algorithm for the two-pin case for computing new connections. Moreover, we present a layer assignment algorithm that assigns z-coordinates to the edges of a given two-dimensional tree. We also discuss the topic of routing based optimization. Here, the starting point is a complete routing, and timing optimization tools make changes that require incremental adaptations of the underlying routing. We investigate several aspects of this problem and derive a new routing flow that includes our timing-aware global router and routing based optimization steps. We evaluate our results from this thesis in practice on industrial 14nm microprocessor designs from IBM. Our theoretical results are validated in practice by a strong performance of our timing-aware global routing framework and our new routing flow, yielding significant improvements over the traditional global routing method and the previously used routing flow. Therefore, we conclude that our approaches and results from this thesis are not only theoretically sound but also give compelling results in practice