玻璃浆料薄膜的微接触转印制备

在使用玻璃浆料对MEMS器件进行封装的过程中,中间层即玻璃浆料薄层的厚度、宽度等参数会对封装强度和气密性等产生至关重要的影响。为了有效控制玻璃浆料层的宽度、厚度,文中首次研究了利用微接触转印方法进行玻璃浆料薄膜的制备。在对微接触转印工艺流程和微接触转印装置的优化设计之后,采用了不同厚度的凸模进行了玻璃浆料的微接触转印实验。实验结果表明:通过微接触转印可以制得表面光滑边缘整齐的玻璃浆料薄膜,其宽度随着凸模厚度的减小而减小,厚度基本保持不变;在凸模厚度为70μm时,获得了玻璃浆料薄膜的宽度和厚度分别为200μm和52μm,可控性较高

Research on the Control System of Micromachined Tunneling Gyroscope

微机械隧道陀螺仪当隧道间距在10Å数量级时，才会产生隧道电流；隧道电流和隧道间距之间存在指数非线性关系，使得开环工作的微机械隧道陀螺仪动态范围变窄；隧道电流微弱，极易被噪声淹没。因此微机械隧道陀螺仪必须工作在闭环控制状态，实现并维持10Å的隧道间距，增大器件的动态范围，抑制干扰，提高系统的信噪比。然而，在微机械隧道陀螺仪反馈闭环控制系统的设计过程中，需要解决隧道陀螺仪的建模、控制方案的设计、控制策略的选择以及控制系统的实现等一系列关键技术问题，本文围绕这些问题进行了如下研究工作： 1)结合微机械隧道陀螺仪工作的哥氏效应和隧道效应，建立了敏感方向的数学模型，通过仿真和实...The tunneling current only occurs when the gap between the two tunneling electrodes of the micromchined tunneling gyroscope is in order of 10 Å. The strong nonlinear exponential relationship between the tunneling current and tunneling gap would result in a very narrow-band device when the gyroscope operates in open-loop mode. The tunneling current is so feeble that it would be overlaid by s...学位：工学博士院系专业：物理与机电工程学院机电工程系_测试计量技术及仪器学号：B20042900

The Fabrication Process of Tunneling Vibratory Microgyroscopes

振动梁式微机械隧道陀螺仪是一种以悬臂梁作为换能构件,以电子隧道效应为输出敏感方式的高精度和高灵敏的角振动传感器,解决了传统机械陀螺仪因尺寸减小而导致的灵敏度降低的缺点。结合微机械隧道陀螺仪的尺寸特点:硅尖与下电极的距离为1μm,齿厚和齿间距之间的距离为4μm,梁的厚度为50μm,提出硅正面刻蚀—玻璃上电极制作—硅玻键合—硅背面减薄—硅背面刻蚀的DDSOG(DeepDrySiliconOnGlass)工艺方案,成功实现了整个器件的工艺制备。本文就DDSOG工艺中的关键工艺进行了一一论述,该工艺不仅能用于隧道陀螺仪的制备,同时也可以制作其它高深宽比传感器或执行器。Micro-machined tunneling gyroscope with cantilever is a kind of angular rate sensor with high sensitivity and resolution,in which cantilever works as transducer and electron tunneling effect is employed as sensor.It overcomes the traditional one's reduction in sensitivity when miniaturized.The Deep Dry Silicon On Glass(DDSOG)process,which includes the silicon front side etching,the technology of electrodes on the glass,the wafer bonding,the silicon thickness reduction and silicon deep etching on the back side,has been introduced to fabricate the microgyroscope based on its dimension characteristics:1μm gap between silicon tip and its underside electrode,4μm finger gap and width,50μm thickness of cantilever.This process can be used to fabricate not only the micro-machined tunneling gyroscope but also other sensor and actuators.国家自然科学基金资助(50675184);; 福建省科技计划重点项目资助(2002H022);; 回国留学人员基金资助;; 厦门大学新世纪优秀人才基金资

电视机跌落仿真中Group功能的应用

本文总结了Patran的Group分组功能在电视机跌落模拟中的整个装配模型的读入和处理、各个零件模型的网格划分和网格属性定义、载荷条件的定义中的应用。Group功能将复杂模型分解为若干个简单的图形,起到很好的简化效果

闽南文化研究国际笔谈会论点选载

2013年12月21日,由闽南师范大学闽南文化研究院主办的“2013闽南文化研究国际笔谈会“在国际学术交流中心召开。来自海峡两岸及日本、新加坡等国家的闽南文化研究方面的专家、学者二十余人出席了会议。会议围绕着闽南文化的内涵、外延及特征,闽南文化的当代价值与社会功能,闽南文化研究的理论与方法,闽南文化的跨文化阐释,闽南文化的世界性及其意义,闽南文化与两岸交流,闽南文化的生态保护,闽南文化学科建设与人才培养等议题展开了深入的研讨,言简意赅,探幽发微,对当下闽南文化理论研究势必产生积极的影响。本期节录专家们的精彩发言,以飨读者,也希望由此来带动和促进闽南文化研究的进一步升华

Application of BP neural net to the electronic control system of LPG engine

研究了BP神经网络在LPG发动机电控系统中的应用。通过应用误差反传算法训练了网络,建立了LPG进气量和EGR率与两个主要参数之间的影响关系。试验表明神经网络对减少废气排放起了较大的作用。Application of BP neural network in LPG engine is studied.The relationships between the operating parameters and quantity of LPG supply as well as EGR rate are established through training the net with the algorithm of back-prop-agation.The test indicates that the neural network can decrease the exhaust gas effectively

Time-varying predictive-LQG control for micromechanical tunneling gyroscope

为了降低微机械隧道陀螺仪系统的非线性,增大器件的带宽并提高系统的信噪比,隧尖与相应隧道电极之间的隧道间距应控制在1nM附近,且其必须在闭环模式下工作。本文鉴于线性二次高斯(lQg)控制理论的抗干扰特性和鲁棒性以及哥氏加速度的时变特征,采用时变卡尔曼滤波器和lQg最优控制器串联而成的lQg预测控制策略设计了隧道陀螺仪闭环控制系统。首先,根据隧道陀螺仪的工作原理设计了总体控制方案。然后,在建立隧道式陀螺仪的扩展动态方程的基础上,设计了lQg预测控制器的两个串联环节即时变卡尔曼滤波器和状态反馈调节器。最后,通过SIMulInk建立了隧道式陀螺仪的lQg预测控制系统并进行数值仿真。结果表明,即使输入角速度是缓变的随机信号,lQg预测控制器也能将隧道间距维持在1nM附近。控制系统能够精确地估计欲测量的输入角速度,估计精度达到10-4 rAd/S。In order to decrease the nonlinearity of a Micromechanical Tunneling Gyroscope(MTG),enlarge its band width and raise the signal-to-noise ratio of the system,the tunneling gap between the tunneling tip and the corresponding tunneling electrode should be controlled in 1 nm,moreover the MTG must operate in the closed-loop mode.Based on the anti-interference and robustness of the Linear Quadratic Gauss(LQG) control theory and time-varying characteristics of Coriolis acceleration,this paper uses the predictive-LQG control strategy formed by a series of time-varying Kalman filter and an optimal LQG controller to design a closed-loop control system for the MTG.First,the overall control scheme was designed according to the operating principle of the MTG.Then,the two series of the predictive-LQG controllers were designed on the basis of the establishment of the extended dynamic equation of the MTG.Finally,the predictive-LQG controller system of the MTG was built up by Simulink,and a numerical simulation was performed.The simulation results prove that the tunneling gap has been controlled in 1 nm and the measured input angular rate could be estimated accurately by the predictive-LQG controller even if the input angular rate is a slowly varying random signal.And the estimation accuracy can reach 10-4rad/s.国家自然科学基金资助项目(No.50875222/51035002);青年科学基金资助项目(No.51105320);中央高校基本科研业务费专项基金资助项目(No.2010121039

无源MEMS压力开关的设计与制备

为了克服传统机械式和电子式压力开关的体积大、制作工艺复杂以及不易与后续电路集成等缺点,论文采用具有金属引线台阶覆盖能力的玻璃浆料封装技术进行了无源MEMS压力开关的设计和制备。设计的无源MEMS压力开关的整体结构方案主要包括硅盖板上的压力敏感膜、硅岛、上电极和微阻挡凸台以及玻璃基底上的玻璃浆料和下电极。通过仿真优化了压力敏感膜、硅岛和上下电极的关键尺寸。经过三次湿法腐蚀工艺流程制得了双阻挡凸台、硅岛和感压膜片。通过玻璃浆料热压工艺将硅盖片、玻璃基底和金属引线三者键合成一体,工艺结果显示双阻挡凸台的高度和感压膜片的厚度很好地控制在8μm和50μm,而且经测试,MEMS压力开关的阈值压力为125kPa。国家自然科学基金资助项目(No.61404111

The Preliminary Study of Micromachined Tunneling Gyroscope with a Fan-shaped Comb Drive Electrode

设计了一种扇形梳齿驱动式隧道陀螺仪,意在取代现有的平板驱动方式,以此来提高陀螺仪的灵敏度.从扇形梳齿驱动的工作原理出发,推导了该型陀螺仪的运动方程,分析了结构参数与其灵敏度的内在联系.在此基础上,对陀螺仪设计中与陀螺仪性能相关的机械耦合、静电驱动频率和敏感方向刚度等问题进行了有益的探讨,揭示了静电驱动频率的选择与敏感方向品质因子和驱动方向品质因子大小之间的内在联系,为陀螺仪的尺寸优化设计奠定了理论基础.A tunneling-based micromachined gyroscope with a fan-shaped comb drive electrode,instead of plate-drive electrodes at existing designs,is put forward in this paper.From the principle of the gyroscope,the dynamic equation of this model gyroscope is derived and the inherent relations between structure and sensitivity are also analyzed.Based on this result,the effects of the mechanical coupling,the electrostatic drive frequency and the spring constant of sensitive direction on the performance of the gyroscope are comprehensively discussed.The internal relations between the selection of the electrostatic drive frequency and Q-values of different directions are also found out.Thus,a theoretical foundation of optimal structure for micromachined gyroscope has been laid.国家自然科学基金(50275127);; 福建省自然科学基金(A0110003);; 福建省科技计划重点项目(2002H022)资

The λ Closed-loop Control System of an LPG Engine

【中文文摘】为了有效地减少LPG(液化石油气)发动机的尾气排放,设计了空燃比闭环控制原理,分析了PI控制策略的具体实现过程,最后给出了试验结果,结果表明:闭环控制和PI策略的结合可以将空燃比稳定在理论值附近,从而大大降低了3种尾气的排放. 【英文文摘】In order to reduce exhaust emissions of the LPG engine, the principle of air-fuel ratio closed loop control is first designed in this paper. Then the concrete implementation of PI strategy is analyzed. And the experimental result indicates that the combination of closed loop control and PI strategy can remain the air-fuel ratio near its stoichiometric valu