为了降低微机械隧道陀螺仪系统的非线性,增大器件的带宽并提高系统的信噪比,隧尖与相应隧道电极之间的隧道间距应控制在1nM附近,且其必须在闭环模式下工作。本文鉴于线性二次高斯(lQg)控制理论的抗干扰特性和鲁棒性以及哥氏加速度的时变特征,采用时变卡尔曼滤波器和lQg最优控制器串联而成的lQg预测控制策略设计了隧道陀螺仪闭环控制系统。首先,根据隧道陀螺仪的工作原理设计了总体控制方案。然后,在建立隧道式陀螺仪的扩展动态方程的基础上,设计了lQg预测控制器的两个串联环节即时变卡尔曼滤波器和状态反馈调节器。最后,通过SIMulInk建立了隧道式陀螺仪的lQg预测控制系统并进行数值仿真。结果表明,即使输入角速度是缓变的随机信号,lQg预测控制器也能将隧道间距维持在1nM附近。控制系统能够精确地估计欲测量的输入角速度,估计精度达到10-4 rAd/S。In order to decrease the nonlinearity of a Micromechanical Tunneling Gyroscope(MTG),enlarge its band width and raise the signal-to-noise ratio of the system,the tunneling gap between the tunneling tip and the corresponding tunneling electrode should be controlled in 1 nm,moreover the MTG must operate in the closed-loop mode.Based on the anti-interference and robustness of the Linear Quadratic Gauss(LQG) control theory and time-varying characteristics of Coriolis acceleration,this paper uses the predictive-LQG control strategy formed by a series of time-varying Kalman filter and an optimal LQG controller to design a closed-loop control system for the MTG.First,the overall control scheme was designed according to the operating principle of the MTG.Then,the two series of the predictive-LQG controllers were designed on the basis of the establishment of the extended dynamic equation of the MTG.Finally,the predictive-LQG controller system of the MTG was built up by Simulink,and a numerical simulation was performed.The simulation results prove that the tunneling gap has been controlled in 1 nm and the measured input angular rate could be estimated accurately by the predictive-LQG controller even if the input angular rate is a slowly varying random signal.And the estimation accuracy can reach 10-4rad/s.国家自然科学基金资助项目(No.50875222/51035002);青年科学基金资助项目(No.51105320);中央高校基本科研业务费专项基金资助项目(No.2010121039
