设计了一种扇形梳齿驱动式隧道陀螺仪,意在取代现有的平板驱动方式,以此来提高陀螺仪的灵敏度.从扇形梳齿驱动的工作原理出发,推导了该型陀螺仪的运动方程,分析了结构参数与其灵敏度的内在联系.在此基础上,对陀螺仪设计中与陀螺仪性能相关的机械耦合、静电驱动频率和敏感方向刚度等问题进行了有益的探讨,揭示了静电驱动频率的选择与敏感方向品质因子和驱动方向品质因子大小之间的内在联系,为陀螺仪的尺寸优化设计奠定了理论基础.A tunneling-based micromachined gyroscope with a fan-shaped comb drive electrode,instead of plate-drive electrodes at existing designs,is put forward in this paper.From the principle of the gyroscope,the dynamic equation of this model gyroscope is derived and the inherent relations between structure and sensitivity are also analyzed.Based on this result,the effects of the mechanical coupling,the electrostatic drive frequency and the spring constant of sensitive direction on the performance of the gyroscope are comprehensively discussed.The internal relations between the selection of the electrostatic drive frequency and Q-values of different directions are also found out.Thus,a theoretical foundation of optimal structure for micromachined gyroscope has been laid.国家自然科学基金(50275127);; 福建省自然科学基金(A0110003);; 福建省科技计划重点项目(2002H022)资
