Characterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source

Molecular contamination of a grazing incidence collector for extreme ultraviolet (EUV) lithography was experimentally studied. A carbon film was found to have grown under irradiation from a pulsed tin plasma discharge. Our studies show that the film is chemically inert and has characteristics that are typical for a hydrogenated amorphous carbon film. It was experimentally observed that the film consists of carbon (~70 at. %), oxygen (~20 at. %) and hydrogen (bound to oxygen and carbon), along with a few at. % of tin. Most of the oxygen and hydrogen are most likely present as OH groups, chemically bound to carbon, indicating an important role for adsorbed water during the film formation process. It was observed that the film is predominantly sp3 hybridized carbon, as is typical for diamond-like carbon. The Raman spectra of the film, under 514 and 264 nm excitation, are typical for hydrogenated diamond-like carbon. Additionally, the lower etch rate and higher energy threshold in chemical ion sputtering in H2 plasma, compared to magnetron-sputtered carbon films, suggests that the film exhibits diamond-like carbon properties.Comment: 18 pages, 10 figure

Innovative Project Clusters in the System of Forming Competitiveness and Economic Development of Regional Art Educational Institutions

The article is devoted to pressing issues of development and implementation of regulatory economic policy in the field of creating innovative educational clusters as a tool for shaping a smart economy. Provided and reasonably generalized vision of regional policy as a complex phenomenon. The conceptual foundations of the formation of the cluster policy of the region are proved and systematically argued, which, unlike the existing ones, is based on the scenario, development of targeted plans and development projects for individual regions, substantiation of the direction of measures to promote the development of clusters, determination of methods, levers and appropriate types of managerial impact, implementation which at the regional level will achieve a socio-economic effect for each participant in cluster interaction. The conceptual vision of the regional policy of clustering is provided on the basis of stimulating the innovative and educational space of the region and the basic principles are determined that should ensure the successful implementation of managerial regulatory influence – the knowledge-intensiveness and the relationship with innovative scientific developments; complexity in analysis, diagnostics of processes, decision making; synergistic combination of knowledge; optimization of costs, time and resources and others.Статтю присвячено актуальним питанням розробки та впровадження регуляторної економічної політики у сфері створення інноваційно-освітніх кластерів як інструменту формування смарт-економіки. Надано та обґрунтовано узагальнене бачення регіональної політики як комплексного явища. Доведено та системно аргументовано концептуальні основи формування кластерної політики регіону, що, на відміну від наявних, базуються на алгоритмі сценарування, розробленні цільових планів та проектів розвитку окремих регіонів, обґрунтуванні спрямованості заходів сприяння розвитку кластерів, визначенні методів, важелів та доцільних видів управлінського впливу, реалізація яких на рівні регіону дозволить досягти соціально-економічного ефекту для кожного учасника кластерної взаємодії. Надано концептуальне бачення регіональної політики кластеризації на основі стимулювання інноваційно-освітнього простору регіону та визначено базові принципи, що повинні забезпечити успішну реалізацію управлінського регуляторного впливу − наукоємність та зв’язок з інноваційними науковими доробками; комплексність в аналізі, діагностуванні процесів, прийнятті рішень; синергетичне поєднання знань; оптимізація витрат, часу та ресурсів та інших

Numerical and experimental studies of the carbon etching in EUV-induced plasma

We have used a combination of numerical modeling and experiments to study carbon etching in the presence of a hydrogen plasma. We model the evolution of a low density EUV-induced plasma during and after the EUV pulse to obtain the energy resolved ion fluxes from the plasma to the surface. By relating the computed ion fluxes to the experimentally observed etching rate at various pressures and ion energies, we show that at low pressure and energy, carbon etching is due to chemical sputtering, while at high pressure and energy a reactive ion etching process is likely to dominate

Interannual variability of the Black Sea Proper oxygen and nutrients regime: The role of climatic and anthropogenic forcing

The Black Sea is a unique, stratified, enclosed ocean basin of great importance. The water column provides a wealth of information concerning aerobic-anaerobic biogeochemistry, the responses of which can have links to anthropogenic and climatic forcing. Herein, we synthesize dissolved oxygen (DO) and nutrient data (phosphate, dissolved inorganic nitrogen (DIN), and silicate) for the period 1984-2010 received in the northeastern and western areas of the Sea. In the subsequent analysis we discuss the role of anthropogenic and climatic forcing in the context of the Black Sea oxic layer and oxic/anoxic interface characteristics.The DO concentration in the surface layer and in the Cold Intermediate Layer (CIL) decreased in warm periods and increased in cold periods, correlating to North Atlantic Oscillation (NAO) index variation. The biogeochemical regime of the Black Sea oxygenated upper layer has notably changed since 1999. After 1999 DO concentration in the CIL decreased by 20% while the concentrations in the surface layer changed very little. This provides evidence that the CIL waters were not fully replenished during the winters of the last decade.The nutrient concentrations (DIN and phosphate) in the surface layer decreased significantly in the 2000s compared with the 1980s-1990s. This decrease is regarded as improvement of the Black Sea ecosystem state. Oxygen and nutrient dynamics in the middle pycnocline have been decoupled since 1999. Presently physical (climatic) forcing is the dominant affecting factor controlling the Sea oxygen and nitrogen regime. © 2013 Elsevier Ltd

The heterogeneity of the properties of the coprolites <i>Aporrectodea caliginosa</i> and <i>Lumbricus rubellus</i> in model experiment with chernozem soil

The changes in the physical and microbiological properties of the coprolites of earthworms Aporrectodea caliginosa and Lumbricus rubellus were evaluated in laboratory experiments using the arable horizon of migratory-mycelial chernozem. In coprolites the following physical parameters were determined: particle size distribution, specific surface area, calculated by the effective particle diameter; microbiological parameters: the total number of cultured bacteria and the enzymatic kinetics of lipases according to the Michaelis –Menten model with the calculation of the maximum reaction rate (Vm) and Michaelis constant (Km). The model experiment included two stages: the first stage – earthworms of two species were kept together, in the second – separately. The control was the source soil and the soil with litter. Coprolites and the soil in which earthworms lived were analyzed and compared with the control. Two types of earthworms give a non-additive effect on physical and microbiological properties. Depending on the species composition, the nature of the change is different. For the two species contained together a decrease in the specific surface area in coprolites was noted, as well as an increase in the fraction of the fine sand due to the reduction of the fractions of silt, fine and medium dust. For A. caliginosa kept separately it was found, that the specific surface of coprolites increases compared to the control, the silt and fine, medium, coarse dust, fractions rise due to a significant reduction of the fine sand fraction. For L. rubellus coprolites a decrease in the specific surface area, an increase in the fractions of medium, fine sand and coarse dust, due to the reduction of silt, fine and medium dust fractions, are shown. The number of cultured heterotrophic bacteria is higher in coprolites compared to the control. The greatest increase is observed in the variant where two species are kept together. The lipase activity (Vm) of the soil also increases when two species are kept together compared with the control and with A. caliginosa kept separately. Under the influence of L. rubellus the lipase activity decreases. Coprolites differ in all the investigated properties from the control (soil and soil with litter), as well as from the soil where earthworms lived

The research program of the Liquid Scintillation Detector (LSD) in the Mont Blanc Laboratory

A massive (90 tons) liquid scintillation detector (LSD) has been running since October 1984 in the Mont Blanc Laboratory at a depth of 5,200 hg/sq cm of standard rock. The research program of the experiment covers a variety of topics in particle physics and astrophysics. The performance of the detector, the main fields of research are presented and the preliminary results are discussed

A photoluminescence study of excitonic grade CuInSe2 single crystals irradiated with 6 Mev electrons

High-quality single crystals of CuInSe2 with near-stoichiometric elemental compositions were irradiated with 6 MeV electrons, at doses from 1015 to 3 × 1018 cm−2, and studied using photoluminescence (PL) at temperatures from 4.2 to 300 K. Before irradiation, the photoluminescence spectra reveal a number of sharp and well resolved lines associated with free- and bound-excitons. The spectra also show broader bands relating to free-to-bound transitions and their phonon replicas in the lower energy region below 1.0 eV. The irradiation with 6 MeV electrons reduces the intensity of the free- and the majority of the bound-exciton peaks. Such a reduction can be seen for doses above 1016 cm−2. The irradiation induces new PL lines at 1.0215 eV and 0.9909 eV and also enhances the intensity of the lines at 1.0325 and 1.0102 eV present in the photoluminescence spectra before the irradiation. Two broad bands at 0.902 and 0.972 eV, respectively, are tentatively associated with two acceptor-type defects: namely, interstitial selenium (Sei) and copper on indium site (Cu In). After irradiation, these become more intense suggesting an increase in the concentration of these defects due to irradiation

The northeastern Black Sea redox zone: Hydrochemical structure and its temporal variability

Detailed studies of the vertical structure of hydrochemical parameters in the northeastern Black Sea near Gelendzhik are presented and discussed. This work is based on a set of systematic observations carried out in this region during R/V Akvanavt and R/V Ashamba cruises from 1997 to 2005 and also on data from previous studies from 1984 to 1997. The Black Sea region near Gelendzhik is far from the influences of the Bosporus input and Danube River inflow. Therefore, the vertical structure in this region is more stable compared to the western Black Sea and reflects integrated, rather than local, changes of the Black Sea. Seasonal variations in the distribution of chemical parameters at the redox interface are connected to seasonal variations in hydrophysical processes and organic matter production. In winter, maxima of organic phosphorus and urea were absent in the vicinity of the onset of hydrogen sulfide. The concentrations of nitrate were lower in winter than in summer. Winter mixing in the anticyclone eddies led to reduced vertical gradients in the redox layer and to the disappearance of an upper phosphate minimum. Study of the interannual dynamics of oxygen concentrations in the Cold Intermediate Layer and anoxic waters boundary in the density field position revealed climatic-scale changes that may be connected with changes in the North Atlantic Oscillation (NAO) index. © 2006 Elsevier Ltd. All rights reserved