Stability control of nonlinear micromechanical resonators under simultaneous primary and superharmonic resonances

Fast effects of a slow excitation on the main resonance of a nonlinear micromechanical resonator are analytically and experimentally investigated. We show, in particular, how the bifurcation topology of an undesirable unstable behavior is modified when the resonator is simultaneously actuated at its primary and superharmonic resonances. A stabilization mechanism is proposed and demonstrated by increasing the superharmonic excitation

My Palm Leaf Maid

https://digitalcommons.library.umaine.edu/mmb-vp/2221/thumbnail.jp

Non linear dynamics of Mathieu resonators for resonant gyroscope applications

A complete model describing the non linear dynamics of Mathieu resonators is presented in order to study the stability of resonant MEM gyroscopes

Compact and explicit physical model for lateral metal-oxide-semiconductor field-effect transistor with nanoelectromechanical system based resonant gate

We propose a simple analytical model of a metal-oxide-semiconductor field-effect transistor with a lateral resonant gate based on the coupled electromechanical equations, which are self-consistently solved in time. All charge densities according to the mechanical oscillations are evaluated. The only input parameters are the physical characteristics of the device. No extra mathematical parameters are used to fit the experimental results. Theoretical results are in good agreement with the experimental data in static and dynamic operation. Our model is comprehensive and may be suitable for any electromechanical device based on the field-effect transduction

Large-Scale Integration of Nanoelectromechanical Systems for Gas Sensing Applications

We have developed arrays of nanomechanical systems (NEMS) by large-scale integration, comprising thousands of individual nanoresonators with densities of up to 6 million NEMS per square centimeter. The individual NEMS devices are electrically coupled using a combined series-parallel configuration that is extremely robust with respect to lithographical defects and mechanical or electrostatic-discharge damage. Given the large number of connected nanoresonators, the arrays are able to handle extremely high input powers (>1 W per array, corresponding to <1 mW per nanoresonator) without excessive heating or deterioration of resonance response. We demonstrate the utility of integrated NEMS arrays as high-performance chemical vapor sensors, detecting a part-per-billion concentration of a chemical warfare simulant within only a 2 s exposure period

Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films

We demonstrate piezoelectrically actuated, electrically tunable nanomechanical resonators based on multilayers containing a 100-nm-thin aluminum nitride (AlN) layer. Efficient piezoelectric actuation of very high frequency fundamental flexural modes up to ~80 MHz is demonstrated at room temperature. Thermomechanical fluctuations of AlN cantilevers measured by optical interferometry enable calibration of the transduction responsivity and displacement sensitivities of the resonators. Measurements and analyses show that the 100 nm AlN layer employed has an excellent piezoelectric coefficient, d_(31)=2.4 pm/V. Doubly clamped AlN beams exhibit significant frequency tuning behavior with applied dc voltage

From MEMS to NEMS: closed-loop actuation of resonant beams beyond the critical Duffing amplitude

International audienceBecause of its moderate cost in terms of electronics, resonant sensing has become commonplace in the context of MEMS and NEMS devices. It is usual to drive such resonators below the critical open-loop Duffing amplitude, above which the oscillations become unstable. However, when scaling sensors down to NEMS, nonlinearities may occur at very low amplitudes, making oscillations very difficult to detect. This paper describes a very general way to compute the critical amplitude in open-loop operation for beam resonators, before it focuses on closed-loop Duffing-type resonators. The major contribution of this paper is the use of describing function analysis validated by numerical simulations to show that it is possible to obtain stable oscillations with amplitudes much larger than the critical Duffing amplitude. As a practical consequence, the measured currents are significantly increased and the constraints on the sensing electronics can be relaxed

Large amplitude dynamics of micro/nanomechanical resonators actuated with electrostatic pulses

International audienceIn the field of resonant NEMS design, it is a common misconception that large-amplitude motion, and thus large signal-to-noise ratio, can only be achieved at the risk of oscillator instability. In the present paper, we show that very simple closed-loop control schemes can be used to achieve stable largeamplitude motion of a resonant structure, even when jump resonance (caused by electrostatic softening or Duffing hardening) is present in its frequency response. We focus on the case of a resonant accelerometer sensing cell, consisting in a nonlinear clamped-clamped beam with electrostatic actuation and detection, maintained in an oscillation state with pulses of electrostatic force that are delivered whenever the detected signal (the position of the beam) crosses zero. We show that the proposed feedback scheme ensures the stability of the motion of the beam much beyond the critical Duffing amplitude and that, if the parameters of the beam are correctly chosen, one can achieve almost full-gap travel range without incurring electrostatic pull-in. These results are illustrated and validated with transient simulations of the nonlinear closed-loop system

The structure of epitaxial V2O3 films and their surfaces : a medium energy ion scattering study

Medium energy ion scattering, using 100 keV H+ incident ions, has been used to investigate the growth of epitaxial films, up to thicknesses of ~200 Å, of V2O3 on both Pd(111) and Au(111). Scattered-ion energy spectra provide a measure of the average film thickness and the variations in this thickness, and show that, with suitable annealing, the crystalline quality is good. Plots of the scattering yield as a function of scattering angle, so-called blocking curves, have been measured for two different incidence directions and have been used to determine the surface structure. Specifically, scattering simulations for a range of different model structures show poor agreement with experiment for half-metal (….V’O3V) and vanadyl (….V’O3V=O) terminations, with and without surface interlayer relaxations. However, good agreement with experiment is found for the modified oxygen-termination structure, first proposed by Kresse et al., in which a subsurface V half-metal layer is moved up into the outermost V buckled metal layer to produce a VO2 overlayer on the underlying V2O3, with an associated layer structure of ….O3VV’’V’O3