Wafer-scale growth of highly textured piezoelectric thin films by pulsed laser deposition for micro-scale sensors and actuators

Piezoelectric lead-zirconate-Titanate (PZT) thin films were deposited on 4-inch (111)Pt/Ti/SiO2/Si(001) wafers using large-Area pulsed laser deposition (PLD). This study was focused on the homogeneity in film thickness, microstructure, ferroelectric and piezoelectric properties of PZT thin films. The results indicated that the highly textured (001)-oriented PZT thin films with wafer-scale thickness homogeneity (990 nm ± 0.8%) were obtained. The films were fabricated into piezoelectric cantilevers through a MEMS microfabrication process. The measured longitudinal piezoelectric coefficient (d 33f = 210 pm/V ± 1.6%) and piezoelectric transverse coefficient (e 31f = -18.8 C/m2 ± 2.8%) were high and homogeneity across wafers. The high piezoelectric properties on Si wafers will extend industrial application of PZT thin films and further development of piezoMEMS

3D fractals as SERS active platforms: Preparation and evaluation for gas phase detection of G-nerve agents

One of the main limitations of the technique surface-enhanced Raman scattering (SERS) for chemical detection relies on the homogeneity, reproducibility and reusability of the substrates. In this work, SERS active platforms based on 3D-fractal microstructures is developed by combining corner lithography and anisotropic wet etching of silicon, to extend the SERS-active area into 3D, with electrostatically driven Au@citrate nanoparticles (NPs) assembly, to ensure homogeneous coating of SERS active NPs over the entire microstructured platforms. Strong SERS intensities are achieved using 3D-fractal structures compared to 2D-planar structures; leading to SERS enhancement factors for R6G superior than those merely predicted by the enlarged area effect. The SERS performance of Au monolayer-over-mirror configuration is demonstrated for the label-free real-time gas phase detection of 1.2 ppmV of dimethyl methylphosphonate (DMMP), a common surrogate of G-nerve agents. Thanks to the hot spot accumulation on the corners and tips of the 3D-fractal microstructures, the main vibrational modes of DMMP are clearly identified underlying the spectral selectivity of the SERS technique. The Raman acquisition conditions for SERS detection in gas phase have to be carefully chosen to avoid photo-thermal effects on the irradiated area

Controlled Doping Methods for Radial p/n Junctions in Silicon

P/n and n/p junctions with depths of 200 nm to several micrometers have been created in flat silicon substrates as well as on 3D microstructures by means of a variety of methods, including solid source dotation (SSD), low-pressure chemical vapor deposition (LPCVD), atmospheric pressure chemical vapor deposition, and plasma-enhanced chemical vapor deposition. Radial junctions in Si micropillars are inspected by optical and scanning electron micro­scopies, using a CrO3-based staining solution, which enables visualization of the junction depth. When applying identical-doping parameters to flat substrates, ball grooving, followed by staining and optical microscopy, yields similar junction depth values as high-resolution scanning electron microscopy imaging on stained cross-sections and secondary ion mass spectrometry depth profilometry. For the investigated 3D microstructures, doping based on SSD and LPCVD give uniform and conformal junctions. Junctions made with SSD-boron doping and CVD-phosphorus doping could be accurately predicted with a model based on Fick's diffusion law. 3D-microstructured silicon pillar arrays show an increased efficiency for sunlight capturing. The functionality of micropillar arrays with radial junctions is evidenced by improved short-circuit current densities and photovoltaic efficiencies compared with flat surfaces, for both n- and p-type wafers (average pillar arrays efficiencies of 9.4% and 11%, respectively, compared with 8.3% and 6.4% for the flat samples)

3D-Fractal engineering based on oxide-only corner lithography

This paper reports a new highly simplified machining process for three dimensional (3D)-fractal nanofabrication based on oxide-only corner lithography. It consists of a repeated sequence of wet etching (silicon), thermal oxidation and wet etching (silicon oxide). The previously reported 3D-fractal fabrication process needed additional low pressure chemical vapor deposition (LPCVD) steps of silicon nitride, as well as local oxidation of silicon (LOCOS). Employing this new procedure, a three generation folded silicon oxide fractal sheet with approx. a 10 µm footprint has been fabricated

Three-dimensional fractal geometry for gas permeation in microchannels

The novel concept of a microfluidic chip with an integrated three-dimensional fractal geometry with nanopores, acting as a gas transport membrane, is presented. The method of engineering the 3D fractal structure is based on a combination of anisotropic etching of silicon and corner lithography. The permeation of oxygen and carbon dioxide through the fractal membrane is measured and validated theoretically. The results show high permeation flux due to low resistance to mass transfer because of the hierarchical branched structure of the fractals, and the high number of the apertures. This approach offers an advantage of high surface to volume ratio and pores in the range of nanometers. The obtained results show that the gas permeation through the nanonozzles in the form of fractal geometry is remarkably enhanced in comparison to the commonly-used polydimethylsiloxane (PDMS) dense membrane. The developed chip is envisioned as an interesting alternative for gas-liquid contactors that require harsh conditions, such as microreactors or microdevices, for energy applications

3d Self-Aligned Fabrication of Suspended Nanowires by Crystallographic Nanolithography

Known templating procedures mostly create out-of-plane nanowires where individual connections at both ends are complicated. Here we introduce a templating procedure for wafer scale fabrication of in-plane nanowires. The template fabrication process employs two simple interference lithography masking patterns and relies on self-aligned crystallographic processing. In-plane nanowires with diameters down to 10 nm can be fabricated wafer scale through this 3D templating procedure. As a first demonstration arrays of suspended silicon nitride wires have been created.</p

Bacterial viability on chemically modified silicon nanowire arrays

The global threat of antimicrobial resistance is driving an urgent need for novel antimicrobial strategies. Functional surfaces are essential to prevent spreading of infection and reduce surface contamination. In this study we have fabricated and characterized multiscale-functional nanotopographies with three levels of functionalization: (1) nanostructure topography in the form of silicon nanowires, (2) covalent chemical modification with (3-aminopropyl)triethoxysilane, and (3) incorporation of chlorhexidine digluconate. Cell viability assays were carried out on two model microorganisms E. coli and S. aureus over these nanotopographic surfaces. Using SEM we have identified two growth modes producing distinctive multicellular structures, i.e. in plane growth for E. coli and out of plane growth for S. aureus. We have also shown that these chemically modified SiNWs arrays are effective in reducing the number of planktonic and surface-attached microorganisms

Three-phase mass transfer in pillared micro channels

no abstrac

Microfluidic devices as gas – Ionic liquid membrane contactors for CO2 removal from anaesthesia gases

This work proposes a microfluidic gas – ionic liquid contactor for CO2 removal from anaesthesia gas, containing Xe. The working principle involves the transport of CO2 through a polymer flat membrane followed by its capture and enzymatic bioconversion in the ionic liquid solvent. Microfluidic devices enable a rapid and inexpensive screening of potential CO2 absorbers. The alveolar – type design of the ionic liquid chamber was adopted to reduce mass transfer limitations of CO2 through the liquid phase. Polydimethylsiloxane (PDMS) was the chosen polymer for dense membrane, as well as for the microfluidic device fabrication, mainly due to the high permeability of gases, O2 and CO2, and low cost. The selected ionic liquid was cholinium propionate (CP) with a water activity of 0.753, due to its high affinity towards CO2 and biocompatibility with the enzyme used for CO2 conversion to bicarbonate, carbonic anhydrase (CA). The CO2 and Xe permeability and CO2/Xe selectivity were determined in the microfluidic devices developed and compared to those exhibited by free standing PDMS membranes mounted on a standard permeation cell. The performance of the microfluidic devices as gas – ionic liquid contactors was evaluated for a given solvent flow rate with pure gas streams of CO2 and Xe. The obtained results show that cholinium propionate with or without the enzyme has no effect on the Xe transport, but remarkably enhances the affinity towards carbon dioxide leading to enhancement factor up to 1.9 in the presence of 0.1 mg CA/gIL

Three-phase mass transfer in pillared micro channels

no abstrac