Chemical mapping of polymer photoresists by scanning transmission x-ray microscopy

Scanning transmission x-ray microscopy (STXM) is shown to be a powerful imaging technique that provides chemical selectivity and high spatial resolution (~35 nm) for studying chemically amplified photoresists. Samples of poly (4-t-butoxycarbonyloxystyrene) PTBOCST resist, imprinted by deep ultraviolet lithography with a line/space pattern of 1.10 μm/ 0.87 μm followed by a post-exposure bake, are used to demonstrate STXM imaging capabilities to extract photoresist latent images. Chemical contrast is obtained by measuring the x-ray absorption at an energy of 290.5 eV, corresponding to a carbon K shell electronic transition to the unoccupied π* molecular orbital of the PTBOCST carbonyl group. A quantitative analysis provides the spatial distribution of the fraction of the unexposed and deprotected polymers remaining after the post-exposure bake stage as well as the thickness of both regions. Both chemical and topographical contributions to the total contrast are estimated. Advantages and limitations of STXM in comparison with other imaging techniques with chemical specificity are discussed

BENEFICIAL EFFECTS OF STRIATAL RESTORATION OF CYP46A1 EXPRESSION ON CHOLESTEROL METABOLISM AND NEURODEGENERATION IN HUNTINGTON'S DISEASE MOUSE MODEL (R6/2)

8th Plenary Meeting of the European-Huntingtons-Disease-Network, Barcelona, SPAIN, SEP 19-21, 2014International audienceno abstrac

Substrate and p-layer effects on polymorphous silicon solar cells

International audienc

Substrate and p-layer effects on polymorphous silicon solar cells

The influence of textured transparent conducting oxide (TCO) substrate and p-layer on the performance of single-junction hydrogenated polymorphous silicon (pm-Si:H) solar cells has been addressed. Comparative studies were performed using p-i-n devices with identical i/n-layers and back reflectors fabricated on textured Asahi U-type fluorine-doped SnO2, low-pressure chemical vapor deposited (LPCVD) boron-doped ZnO and sputtered/etched aluminum-doped ZnO substrates. The p-layers were hydrogenated amorphous silicon carbon and microcrystalline silicon oxide. As expected, the type of TCO and p-layer both have a great influence on the initial conversion efficiency of the solar cells. However they have no effect on the defect density of the pm-Si:H absorber layer

AAV-CYP46A1 brain administration restores cholesterol metabolism and is neuroprotective in Huntington's disease

Conference on Changing the Face of Modern Medicine - Stem Cells and Gene Therapy, Florence, ITALY, OCT 18-21, 2016International audienceno abstrac