Atomic layer deposition: Low temperature process well adapted to ULSI and TFT technologies

The high k dielectrics is an important materials to be integrate in future Ultra Large Scale Integration (ULSI) and future TFT technology. Indeed, to keep on the Moore\u27s Law curve, the reduction of silicon oxide (SiO2) thickness still required, but this reduction is hindered by tunneling current leakage limit. Consequently, it is important to replace SiO2 by another materials with high dielectric constant. The use of this material in manufacturing of gate dielectric in Thin-film transistor (TFT) and in Complementary Metal Oxide Semiconductor (CMOS) will increase gate capacitance with maintaining a low leakage current. Titanium dioxide is a good candidate due to its high dielectric constant in its rutile crystalline phase (180).This rutile structure is obtained at low temperature (250°C) by ALD deposition when TiO2 is deposited on ruthenium dioxide (RuO2) layer thanks to the small lattice mismatch between these two materials

Mechanisms of attenuation of pulmonary V'O_{2} slow component in humans after prolonged endurance training

In this study we have examined the effect of prolonged endurance training program on the pulmonary oxygen uptake (V'O2 ) kinetics during heavy-intensity cycling-exercise and its impact on maximal cycling and running performance. Twelve healthy, physically active men (mean\ub1SD: age 22.33\ub11.44 years, V'O2peak 3198\ub1458 mL \ub7 min-1 ) performed an endurance training composed mainly of moderate-intensity cycling, lasting 20 weeks. Training resulted in a decrease (by 3c5%, P = 0.027) in V'O2 during prior low-intensity exercise (20 W) and in shortening of \u3c4 p of the V'O2 on-kinetics (30.1\ub15.9 s vs. 25.4\ub11.5 s, P = 0.007) during subsequent heavy-intensity cycling. This was accompanied by a decrease of the slow component of V'O2 on-kinetics by 49% (P = 0.001) and a decrease in the end-exercise V'O2 by 3c5% (P = 0.005). An increase (P = 0.02) in the vascular endothelial growth factor receptor 2 mRNA level and a tendency (P = 0.06) to higher capillary-to-fiber ratio in the vastus lateralis muscle were found after training (n = 11). No significant effect of training on the V'O2peak was found (P = 0.12). However, the power output reached at the lactate threshold increased by 19% (P = 0.01). The power output obtained at the V'O2peak increased by 14% (P = 0.003) and the time of 1,500-m performance decreased by 5% (P = 0.001). Computer modeling of the skeletal muscle bioenergetic system suggests that the training-induced decrease in the slow component of V'O2 on-kinetics found in the present study is mainly caused by two factors: an intensification of the each-step activation (ESA) of oxidative phosphorylation (OXPHOS) complexes after training and decrease in the "additional" ATP usage rising gradually during heavy-intensity exercise

Dental Health and Mortality in People With End-Stage Kidney Disease Treated With Hemodialysis: A Multinational Cohort Study

Background Dental disease is more extensive in adults with chronic kidney disease, but whether dental health and behaviors are associated with survival in the setting of hemodialysis is unknown. Study Design Prospective multinational cohort. Setting & Participants 4,205 adults treated with long-term hemodialysis, 2010 to 2012 (Oral Diseases in Hemodialysis [ORAL-D] Study). Predictors Dental health as assessed by a standardized dental examination using World Health Organization guidelines and personal oral care, including edentulousness; decayed, missing, and filled teeth index; teeth brushing and flossing; and dental health consultation. Outcomes All-cause and cardiovascular mortality at 12 months after dental assessment. Measurements Multivariable-adjusted Cox proportional hazards regression models fitted with shared frailty to account for clustering of mortality risk within countries. Results During a mean follow-up of 22.1 months, 942 deaths occurred, including 477 cardiovascular deaths. Edentulousness (adjusted HR, 1.29; 95% CI, 1.10-1.51) and decayed, missing, or filled teeth score ≥ 14 (adjusted HR, 1.70; 95% CI, 1.33-2.17) were associated with early all-cause mortality, while dental flossing, using mouthwash, brushing teeth daily, spending at least 2 minutes on oral hygiene daily, changing a toothbrush at least every 3 months, and visiting a dentist within the past 6 months (adjusted HRs of 0.52 [95% CI, 0.32-0.85], 0.79 [95% CI, 0.64-0.97], 0.76 [95% CI, 0.58-0.99], 0.84 [95% CI, 0.71-0.99], 0.79 [95% CI, 0.65-0.95], and 0.79 [95% CI, 0.65-0.96], respectively) were associated with better survival. Results for cardiovascular mortality were similar. Limitations Convenience sample of clinics. Conclusions In adults treated with hemodialysis, poorer dental health was associated with early death, whereas preventive dental health practices were associated with longer survival

The content change of total protein and crude fibre depending on the dose of fertilization and phenological phase of grasses

The experiment was conducted in 2008–2010 in the mountain area. Cumulation of protein and crude fiber were assesed in four grasses: Festuca pratensis, Dactylis glomerata, Phleum pratense, Arrhenatherum elatius. The experience was two-factor. The first factor was varied nitrogen (50, 100, 150 kg ha–1) with constant phosphorus-potassium fertilization. The second factor was the phonological stage – first was at the earing, second – during flowering. Results of assesment shows that Festuca pratensis and Arrhenatherum elatius increased the protein content in plants and reduced the aging process with increasing nitrogen fertilization. In mountain conditions the optimal dose of nitrogen Phleum pratense seems to be 100 kg ha–1 while for Dactylis glomerata best dose was 150 kg

Real-time studies of Ge growth on nanostructured Si substrates

Nanostructured substrates are an interesting path towards the production of quantum dots devoted to microelectronic applications. In this work we report results on the effects of different nanopatterning methods to obtain lateral ordering of Ge islands grown on Si. By using Scanning Tunneling Microscopy we have studied in real-time the wetting layer growth and islands formation on nanopatterned Si substrates at 500 °C. We compare results obtained on Si substrates nanopatterned by using two different techniques: STM lithography and natural patterning induced by surface instabilities such as step bunching. Different issues on both cases have been addressed: substrate preparation, Ge dots placement and growth mode. We have observed that, on Si(001), the Ge islands nucleate near the holes and on Si(111) step bunching can guide the growth of aligned rows of islands.</p

Qualification of a sublimation tool applied to the case of metalorganic chemical vapor deposition of In2O3 from In(tmhd)3 as a solid precursor

International audienceno abstrac

The rate of dry matter yield increase and total nitrogen in the grass

The experiments was conducted in 2009–2010 in the mountain area. The rate of dry matter yield increase and total nitrogen was assessed in four grasses: Festuca pratensis, Dactylis glomerata, Phleum pratense, Lolium perenne. The evaluation of growth dynamics of dry matter and nitrogen accumulation in the year of sowing was made in four periods: I – 31 days after emergence of grasses, II – at harvest time, III – 21 days after first cut, IV – 51 days later. In the second year of the experiment growth was assessed four times, every 2 weeks from the beginning of vegetation. Results of investigations shows that pace growth of dry matter yield was lower than accumulation pace of total nitrogen

High capacitance 3D MIM structures achieved by ALD deposited TiO2 for advanced DRAM applications

International audienc

Self-ordering of Ge islands on step-bunched Si(111) surfaces

The controlled positioning of germanium (Ge) islands on silicon(111) without lithographic patterning was studied. The step-bunched (SB) silicon(111) surfaces were used as templates. Scanning tunneling microscope images showed that the Ge islands were regularly spaced. The results show an ordered distribution of equally spaced rows of islands on the wide terraces of SB substrates