HRTEM observations of La2Zr2O7 thin layers on LaAlO3 obtained by chemical methods

11 pagesInternational audienceLa2Zr2O7 (LZO) films have been grown by metalorganic Decomposition (MOD) to be used as buffer layers for coated conductors. LZO can crystallize into two similarstructures: fluorite or pyrochlore. Coated conductor application focuses on pyrochlore structure because it is a good barrier against oxygen diffusion. Classical X-ray diffraction is not able to separate the contribution of these two structures. TEM and HRTEM were used to determine the local distribution of these two phases in epitaxial LZO layers grown on LaAlO3. A characteristic feature of LZO thin films deposited by MOD is the formation of nanovoids in an almost single crystal structure of LZO pyrochlore phase. Forcomparison, LZO layers deposited by Metalorganic Chemical Vapor Deposition (MOCVD) were also studied. In this last case, the film is compact without voids and thestructure corresponds to pyrochlore phase. Thus, the formation of nanovoids is a characteristic feature of MOD grown films

Deposition of La2Zr2O7 Film by Chemical Solution Deposition

La2Zr2O7 (LZO) formation of bulk powders and of films by Chemical Solution Deposition (CSD) process have been studied using propionates. The treatment involved a one step cycle in the reducing forming gas (Ar-5%H2) to be compatible with Ni-5at%W RABITS. Large amount of residual carbon was found in LZO powders formed in these conditions (10 wt %). The volume fraction of the cube texture in LZO films on Ni-5at%w RABITS was found to be a function of the speed of the gas flown above sample. This phenomenon is discussed in considering the C deposited from the carbon-containing gases emitted during the pyrolysis of the precursor. Using proper conditions (950 ^\circC and the speed of gas of 6.8\times10^{-2} m/s), LZO films with good surface crystallinity could be obtained on Ni-5at%W RABITS as demonstrated by X-ray diffraction, electron backscattered diffraction and RHEED. The existence of residual carbon in oxide films is a common question to films deposited by CSD processes under reducing condition

Coherent control for the spherical symmetric box potential in short and intensive XUV laser fields

Coherent control calculations are presented for a spherically symmetric box potential for non-resonant two photon transition probabilities. With the help of a genetic algorithm (GA) the population of the excited states are maximized and minimized. The external driving field is a superposition of three intensive extreme ultraviolet (XUV) linearly polarized laser pulses with different frequencies in the femtosecond duration range. We solved the quantum mechanical problem within the dipole approximation. Our investigation clearly shows that the dynamics of the electron current has a strong correlation with the optimized and neutralizing pulse shape.Comment: 11 Pages 3 Figure

Attochirp-free High-order Harmonic Generation

A method is proposed for arbitrarily engineering the high-order harmonic generation phase achieved by shaping a laser pulse and employing xuv light or x rays for ionization. This renders the production of bandwidth-limited attosecond pulses possible while avoiding the use of filters for chirp compensation. By adding the first 8 Fourier components to a sinusoidal field of $10^{16}$W/cm$^2$, the bandwidth-limited emission of 8 as is shown to be possible from a Li$^{2+}$ gas. The scheme is extendable to the zs-scale

XUV digital in-line holography using high-order harmonics

A step towards a successful implementation of timeresolved digital in-line holography with extreme ultraviolet radiation is presented. Ultrashort XUV pulses are produced as high-order harmonics of a femtosecond laser and a Schwarzschild objective is used to focus harmonic radiation at 38 nm and to produce a strongly divergent reference beam for holographic recording. Experimental holograms of thin wires are recorded and the objects reconstructed. Descriptions of the simulation and reconstruction theory and algorithms are also given. Spatial resolution of few hundreds of nm is potentially achievable, and micrometer resolution range is demonstrated.Comment: 8 pages, 8 figure

Design and characterization of extreme-ultraviolet broadband mirrors for attosecond science

International audienceA novel multilayer mirror was designed and fabricated based on a recently developed three-material technology aimed both at reaching reflectivities of about 20% and at controlling dispersion over a bandwidth covering photon energies between 35 and 50 eV. The spectral phase upon reflection was retrieved by measuring interferences in a two-color ionization process using high-order harmonics produced from a titanium: sapphire laser. We demonstrate the feasibility of designing and characterizing phase-controlled broadband optics in the extreme-ultraviolet domain, which should facilitate the manipulation of attosecond pulses for applications

EUV microexposures at the ALS using the 0.3-NA MET projectionoptics

The recent development of high numerical aperture (NA) EUV optics such as the 0.3-NA Micro Exposure Tool (MET) optic has given rise to a new class of ultra-high resolution microexposure stations. Once such printing station has been developed and implemented at Lawrence Berkeley National Laboratory's Advanced Light Source. This flexible printing station utilizes a programmable coherence illuminator providing real-time pupil-fill control for advanced EUV resist and mask development. The Berkeley exposure system programmable illuminator enables several unique capabilities. Using dipole illumination out to {sigma}=1, the Berkeley tool supports equal-line-space printing down to 12 nm, well beyond the capabilities of similar tools. Using small-sigma illumination combined with the central obscuration of the MET optic enables the system to print feature sizes that are twice as small as those coded on the mask. In this configuration, the effective 10x-demagnification for equal lines and spaces reduces the mask fabrication burden for ultra-high-resolution printing. The illuminator facilitates coherence studies such as the impact of coherence on line-edge roughness (LER) and flare. Finally the illuminator enables novel print-based aberration monitoring techniques as described elsewhere in these proceedings. Here we describe the capabilities of the new MET printing station and present system characterization results. Moreover, we present the latest printing results obtained in experimental resists. Limited by the availability of high-resolution photoresists, equal line-space printing down to 25 nm has been demonstrated as well as isolated line printing down to 29 nm with an LER of approaching 3 nm

Couches minces pour rubans supraconducteurs élaborées à partir de précurseurs moléculaires

Le cuprate YBa2Cu3O7-x (YBCO), supraconducteur à 90K, a des applications potentielles très importantes dans le domaine du transport de l'énergie. Cependant, sa mise en forme de longs rubans souples (coated conductors) est indispensable et peut être réalisée par des techniques de dépôts en solutions (MOD). Les nouveaux matériaux sont structurés à partir d'une architecture complexe de couches intermédiaires (tampons) et d'YBCO. Notre travail a consisté à utiliser des carboxylates pour l'élaboration de couches tampons et à synthétiser de nouveaux précurseurs moléculaires d'yttrium et de baryum. Des films minces de CeO2, servant de couches tampons entre le Ni et la couche d'YBCO, ont été obtenues à partir de couches de 2-éthylhexanoate de Ce, calcinées sous atmosphère réductrice. Nous avons caractérisé un alcoxyde d'yttrium [Y(OC2H4OiPr)3]8 (4) et un dérivé de l'iodure de baryum BaI2 (MeOC2H4OH)2 (1). Des solutions de précurseurs iodures ont été déposées en couches minces, par spin coating, sur des substrats monocristallins (SrTiO3, LaAlO3)LYON1-BU.Sciences (692662101) / SudocTOULOUSE-ENSIACET (315552325) / SudocSudocFranceF