10 research outputs found

    Cu direct electrodeposition using step current for superfilling on Ru-Al2O3 layer

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    A Ru-Al2O3 layer can be used as an integrated material in a diffusion barrier and a Cu seed layer for Cu electrodeposition. This layer can effectively inhibit the formation of Cu silicide, and it is also applicable to Cu direct electrodeposition. Because the electrical conductivity of the Ru-Al2O3 layer is relatively high compared to the Cu seed or pure Ru layer, the ohmic drop within the wafer, known as the terminal effect, should be investigated. In this study, the superfilling of Cu on the Ru-Al2O3 layers and the terminal effect of Cu electrodeposition are reported. Electrodeposition with constant current results in severe variations in both the deposition amount and Cu property within the wafer. Step current electrodeposition is adopted to solve these problems. At the initial stage, a high current density is briefly applied to render enough overpotential on the whole wafer inducing substantial nucleation. This is followed by a low current density for stable growth and superfilling of Cu with a small terminal effect. The changes in superfilling according to the conditions of the first step and the composition of the Ru-Al2O3 are clarified. Under the optimal conditions, the successful superfilling is obtained with small variation in the deposition amount within the wafer. (C) 2014 Elsevier Ltd. All rights reserved

    Highly Sensitive Multifilament Fiber Strain Sensors with Ultrabroad Sensing Range for Textile Electronics

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    Highly stretchable fiber strain sensors are one of the most important components for various applications in wearable electronics, electronic textiles, and biomedical electronics. Herein, we present a facile approach for fabricating highly stretchable and sensitive fiber strain sensors by embedding Ag nanoparticles into a stretchable fiber with a multifilament structure. The multifilament structure and Ag-rich shells of the fiber strain sensor enable the sensor to simultaneously achieve both a high sensitivity and largely wide sensing range despite its simple fabrication process and components. The fiber strain sensor simultaneously exhibits ultrahigh gauge factors (∼9.3 × 10<sup>5</sup> and ∼659 in the first stretching and subsequent stretching, respectively), a very broad strain-sensing range (450 and 200% for the first and subsequent stretching, respectively), and high durability for more than 10 000 stretching cycles. The fiber strain sensors can also be readily integrated into a glove to control a hand robot and effectively applied to monitor the large volume expansion of a balloon and a pig bladder for an artificial bladder system, thereby demonstrating the potential of the fiber strain sensors as candidates for electronic textiles, wearable electronics, and biomedical engineering

    Highly Sensitive Multifilament Fiber Strain Sensors with Ultrabroad Sensing Range for Textile Electronics

    No full text
    Highly stretchable fiber strain sensors are one of the most important components for various applications in wearable electronics, electronic textiles, and biomedical electronics. Herein, we present a facile approach for fabricating highly stretchable and sensitive fiber strain sensors by embedding Ag nanoparticles into a stretchable fiber with a multifilament structure. The multifilament structure and Ag-rich shells of the fiber strain sensor enable the sensor to simultaneously achieve both a high sensitivity and largely wide sensing range despite its simple fabrication process and components. The fiber strain sensor simultaneously exhibits ultrahigh gauge factors (∼9.3 × 10<sup>5</sup> and ∼659 in the first stretching and subsequent stretching, respectively), a very broad strain-sensing range (450 and 200% for the first and subsequent stretching, respectively), and high durability for more than 10 000 stretching cycles. The fiber strain sensors can also be readily integrated into a glove to control a hand robot and effectively applied to monitor the large volume expansion of a balloon and a pig bladder for an artificial bladder system, thereby demonstrating the potential of the fiber strain sensors as candidates for electronic textiles, wearable electronics, and biomedical engineering

    Highly Sensitive Multifilament Fiber Strain Sensors with Ultrabroad Sensing Range for Textile Electronics

    No full text
    Highly stretchable fiber strain sensors are one of the most important components for various applications in wearable electronics, electronic textiles, and biomedical electronics. Herein, we present a facile approach for fabricating highly stretchable and sensitive fiber strain sensors by embedding Ag nanoparticles into a stretchable fiber with a multifilament structure. The multifilament structure and Ag-rich shells of the fiber strain sensor enable the sensor to simultaneously achieve both a high sensitivity and largely wide sensing range despite its simple fabrication process and components. The fiber strain sensor simultaneously exhibits ultrahigh gauge factors (∼9.3 × 10<sup>5</sup> and ∼659 in the first stretching and subsequent stretching, respectively), a very broad strain-sensing range (450 and 200% for the first and subsequent stretching, respectively), and high durability for more than 10 000 stretching cycles. The fiber strain sensors can also be readily integrated into a glove to control a hand robot and effectively applied to monitor the large volume expansion of a balloon and a pig bladder for an artificial bladder system, thereby demonstrating the potential of the fiber strain sensors as candidates for electronic textiles, wearable electronics, and biomedical engineering

    Adaptive self-healing electronic epineurium for chronic bidirectional neural interfaces

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    Electronic implantable devices should be soft and stretchable, such that nerves can adapt mechanically and autonomously. Here, the authors present an adaptive self-healing electronic epineurium which can form compressive stress-free and strain-insensitive electronics-nerve interfaces

    Factors in electrode fabrication for performance enhancement of anion exchange membrane water electrolysis

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    To improve the cell performance for alkaline anion exchange membrane water electrolysis (AEMWE), the effects of the amount of polytetrafluoroethylene (PTFE) non-ionomeric binder in the anode and the hot-pressing conditions during the fabrication of the membrane electrode assemblies (MEAs) on cell performances are studied. The electrochemical impedance data indicates that hot-pressing at 50 °C for 1 min during MEA construction can reduce the polarization resistance of AEMWE by ∼12%, and increase the initial water electrolysis current density at 1.8 V (from 195 to 243 mA cm−2). The electrochemical polarization and impedance results also suggest that the AEMWE performance is significantly affected by the content of PTFE binder in the anode electrode, and the optimal content is found to be 9 wt% between 5 and 20 wt%. The AEMWE device fabricated with the optimized parameters exhibits good water splitting performance (299 mA cm−2 at 1.8 V) without noticeable degradation in voltage cycling operations. © 2017 Published by Elsevier B.V.1561sciescopu
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