Comparative study of Cl₂, Cl₂/O₂, and Cl₂/N₂ inductively coupled plasma processes for etching of high-aspect-ratio photonic-crystal holes in InP

An extensive investigation has been performed on inductively coupled plasmaetching of InP. An important motivation for this work is the fabrication of high-aspect-ratio holes for photonic crystals. The essential chemistry is based on Cl₂ with the addition of N₂ or O₂ for sidewall passivation. The influence of different process parameters such as gas flows, temperature,pressure, ion energy, and inductively coupled plasma power on the hole geometry is presented. It is concluded that photonic crystals can be etched with Cl₂ only; however, temperature and pressure control is critical. Adding passivation gases largely broadens the window in the parameter space for hole etching. Most importantly, etching of narrow holes can be carried out at higher temperatures where the etching is mass limited and spontaneous etching of InP by Cl₂ occurs.Part of this research is supported by NanoNed, a technology program of the Dutch Ministry of Economic Affairs

InP-based two-dimensional photonic crystals filled with polymers

Polymer filling of the air holes of Indium Phosphide based two-dimensional photonic crystals is reported. After infiltration of the holes with a liquid monomer and solidification of the infill in situ by thermal polymerization, complete filling is proven using scanning electron microscopy. Optical transmission measurements of a filled photonic crystal structure exhibit a redshift of the air band, confirming the complete filling.Comment: To be published in Appl. Phys. Let

Design and performance of a high-resolution frictional force microscope with quantitative three-dimensional force sensitivity

Quantum Matter and Optic

Dynamic ordering and frustration of confined vortex rows studied by mode-locking experiments

The flow properties of confined vortex matter driven through disordered mesoscopic channels are investigated by mode locking (ML) experiments. The observed ML effects allow to trace the evolution of both the structure and the number of confined rows and their match to the channel width as function of magnetic field. From a detailed analysis of the ML behavior for the case of 3-rows we obtain ({\it i}) the pinning frequency $f_p$, ({\it ii}) the onset frequency $f_c$ for ML ($\propto$ ordering velocity) and ({\it iii}) the fraction $L_{ML}/L$ of coherently moving 3-row regions in the channel. The field dependence of these quantities shows that, at matching, where $L_{ML}$ is maximum, the pinning strength is small and the ordering velocity is low, while at mismatch, where $L_{ML}$ is small, both the pinning force and the ordering velocity are enhanced. Further, we find that $f_c \propto f_p^2$, consistent with the dynamic ordering theory of Koshelev and Vinokur. The microscopic nature of the flow and the ordering phenomena will also be discussed.Comment: 10 pages, 7 figure, submitted to PRB. Discussion has been improved and a figure has been adde

International patent families: from application strategies to statistical indicators

This paper provides an in-depth analysis of the characteristics of international patent families, including their domestic component. We exploit a relatively under-studied feature of patent families, namely the number of patents covering the same invention within a given jurisdiction. Using this information, we highlight common patterns in the structure of international patent families, which reflect both the patenting strategies of innovators and the peculiarities of the different patent systems. While the literature has extensively used family size, i.e. the number of countries in which a given invention is protected, as a measure of patent value, our results suggest that the number of patent filings in the priority country within a patent family as well as the timespan between the first and last fillings within a family are other insightful indicators of the value of patented innovations

Predictors of diagnostic yield in bronchoscopy: a retrospective cohort study comparing different combinations of sampling techniques

<p>Abstract</p> <p>Background</p> <p>The reported diagnostic yield from bronchoscopies in patients with lung cancer varies greatly. The optimal combination of sampling techniques has not been finally established.</p> <p>The objectives of this study were to find the predictors of diagnostic yield in bronchoscopy and to evaluate different combinations of sampling techniques.</p> <p>Methods</p> <p>All bronchoscopies performed on suspicion of lung malignancy in 2003 and 2004 were reviewed, and 363 patients with proven malignant lung disease were included in the study. Sampling techniques performed were biopsy, transbronchial needle aspiration (TBNA), brushing, small volume lavage (SVL), and aspiration of fluid from the entire procedure. Logistic regression analyses were adjusted for sex, age, endobronchial visibility, localization (lobe), distance from carina, and tumor size.</p> <p>Results</p> <p>The adjusted odds ratios (OR) with 95% confidence intervals (CI) for a positive diagnostic yield through all procedures were 17.0 (8.5–34.0) for endobronchial lesions, and 2.6 (1.3–5.2) for constriction/compression, compared to non-visible lesions; 3.8 (1.3–10.7) for lesions > 4 cm, 6.7 (2.1–21.8) for lesions 3–4 cm, and 2.5 (0.8–7.9) for lesions 2–3 cm compared with lesions <= 2 cm. The combined diagnostic yield of biopsy and TBNA was 83.7% for endobronchial lesions and 54.2% for the combined group without visible lesions. This was superior to either technique alone, whereas additional brushing, SVL, and aspiration did not significantly increase the diagnostic yield.</p> <p>Conclusion</p> <p>In patients with malignant lung disease, visible lesions and larger tumor size were significant predictors of higher diagnostic yield, after adjustment for sex, age, distance from carina, side and lobe. The combined diagnostic yield of biopsy and TBNA was significant higher than with either technique alone.</p