Selecting Metal Alloy Electric Contact Materials for MEMS Switches

This paper presents a method for selecting metal alloys as the electric contact materials for microelectromechanical systems (MEMS) metal contact switches. This procedure consists of reviewing macro-switch lessons learned, utilizing equilibrium binary alloy phase diagrams, obtaining thin film material properties and, based on a suitable model, predicting contact resistance performance. After determining a candidate alloy material, MEMS switches were designed, fabricated and tested to validate the alloy selection methodology. Minimum average contact resistance values of 1.17 and 1.87 Ω were measured for micro-switches with gold (Au) and gold–platinum (Au–(6.3%)Pt) alloy electric contacts, respectively. In addition, \u27hot-switched\u27 life cycle test results of 1.02 × 108 and 2.70 × 108 cycles were collected for micro-switches with Au and Au–(6.3%)Pt contacts, respectively. These results indicate increased wear with a small increase in contact resistance for MEMS switches with metal alloy electric contacts

Micro-Switches with Sputtered Au, AuPd, Au-on-AuPt, and AuPtCu Alloy Electric Contacts

This work is the first to report on a new analytic model for predicting micro-contact resistance and the design, fabrication, and testing of microelectromechanical systems (MEMS) metal contact switches with sputtered bi-metallic (i.e. gold (Au)-on-Au-platinum (Pt), (Au-on-Au-(6%)Pt)), binary alloy (i.e. Au-palladium (Pd), (Au-(2%)Pd)), and tertiary alloy (i.e. Au-Pt-copper (Cu), (Au-(5%)Pt-(0.5%)Cu)) electric contacts. The micro-switches with bi-metallic and binary alloy contacts resulted in contact resistance between 1-2 /spl Omega/ and, when compared to micro-switches with sputtered Au electric contacts, exhibited a 3.3 and 2.6 times increase in switching lifetime, respectively. The tertiary alloy exhibited a 6.5 times increase in switch lifetime with contact resistance ranging from 0.2-1.8 /spl Omega/

Effects of Control-Feel Configuration on Airplane Longitudinal Control Response

A general study of longitudinal control feel was made with a transonic fighter-type airplane equipped with a control-feel system which 4 was adjustable in flight. The control-feel system provided a feel component with individual gain control in proportion to each of five quantities: stick deflection, stick rate, airplane normal acceleration, pitching acceleration, and pitching velocity. A number of feel configurations were investigated in flight and analytically. These feel configurations had feel components in various amounts from various combinations of these five sources. The results contained herein are all for an airplane center-of-gravity position at approximately 25 percent of the mean aerodynamic chord, a Mach number of 0.85, and an altitude of 28,000 feet. Results are presented as time histories, as plots of the variation of peak force per g with input duration, and as frequency-response plots. A number of frequency-response plots are included to illustrate the effects of choice of feel sources and gains. The results illustrate the desirability of balancing a normal-acceleration feel component with a pitching-acceleration feel component. Pitching-velocity feel is shown to be useful for shaping control-system frequency response. The results suggest the desirability of designing a control-feel system to a large extent by means of frequency-response analysis in order to keep the shapes of the frequency-response curves within desirable limits

Shaped MEMS Contact

A MEMS switch fabrication process and apparatus inclusive of a bulbous rounded surface movable contact assembly that is integral with the switch movable element and achieving of long contact wear life with low contact electrical resistance. The disclosed process is compatible with semiconductor integrated circuit fabrication materials and procedures and includes an unusual photoresist reflow step in which the bulbous contact shape is quickly defined in three dimensions from more easily achieved integrated circuit mask and etching-defined precursor shapes. A plurality of differing photoresist materials are used in the process. A large part of the contact and contact spring formation used in the invention is accomplished with low temperature processing including electroplating. Alternate processing steps achieving an alloy metal contact structure are included. Use of a subroutine of processing steps to achieve differing but related portions of the electrical contact structure is also included

Shaped MEMS Contact

A MEMS switch fabrication process and apparatus inclusive of a bulbous rounded surface movable contact assembly that is integral with the switch movable element and achieving of long contact wear life with low contact electrical resistance. The disclosed process is compatible with semiconductor integrated circuit fabrication materials and procedures and includes an unusual photoresist reflow step in which the bulbous contact shape is quickly defined in three dimensions from more easily achieved integrated circuit mask and etching-defined precursor shapes. A plurality of differing photoresist materials are used in the process. A large part of the contact and contact spring formation used in the invention is accomplished with low temperature processing including electroplating. Alternate processing steps achieving an alloy metal contact structure are included. Use of a subroutine of processing steps to achieve differing but related portions of the electrical contact structure is also included

Radio Frequency MEMS Switch Contact Metal Selection

A method for selecting metal alloys as the electric contact materials for microelectromechanical systems (MEMS) metal contact switches. This method includes a review of alloy experience, consideration of equilibrium binary alloy phase diagrams, obtaining thin film material properties and, based on a suitable model, predicting contact electrical resistance performance. After determination of a candidate alloy material, MEMS switches are conceptualized, fabricated and tested to validate the alloy selection methodology. Minimum average contact resistance values of 1.17 and 1.87 ohms are achieved for micro-switches with gold (Au) and gold-platinum (Au-(6.3 at %)Pt) alloy contacts. In addition, `hot-switched` life cycle test results of 1.02.x108 and 2.70.x108 cycles may be realized for micro-switches with Au and Au-(6.3 at %)Pt contacts. These results indicate increased wear with a small increase in contact resistance for MEMS switches with metal alloy electric contacts

Book Reviews

Science and Learning in France. With a Survey of Opportunities for American Students in French Universities. An Appreciation by American Scholars. The Society for American Fellowships in France, 1917; PP. xxxviii, 454