Catalyst-Free Vapor-Phase Method for Direct Integration of Gas Sensing Nanostructures with Polymeric Transducing Platforms

Tungsten oxide nanoneedles (NNs) are grown and integrated directly with polymeric transducing platforms for gas sensors via aerosol-assisted chemical vapor deposition (AACVD) method. Material analysis shows the feasibility to grow highly crystalline nanomaterials in the form of NNs with aspect ratios between 80 and 200 and with high concentration of oxygen vacancies at the surface, whereas gas testing demonstrates moderate sensing responses to hydrogen at concentrations between 10 ppm and 50 ppm, which are comparable with results for tungsten oxide NNs grown on silicon transducing platforms. This method is demonstrated to be an attractive route to fabricate next generation of gas sensors devices, provided with flexibility and functionality, with great potential in a cost effective production for large-scale applications

Placa homogeneizadora de temperatura para microdispositivos térmicamente aislados

Referencia OEPM: P9601571.-- Fecha de solicitud: 12/07/1996.-- Titular: Consejo Superior de Investigaciones Científicas (CSIC).Placa homogeneizadora de temperatura para microdispositivos térmicamente aislados (ver figura en archivo de texto adjunto). El objeto de la presente invención es el desarrollo de una microestructura térmicamente aislada con zonas de temperatura muy homogénea y controlada. Dichas estructuras son la base de distintos tipos de sensores microelectrónicos ya existentes, en los que un cierto material o elemento sensible se deposita sobre una estructura térmica que debe trabajar a una temperatura conocida. Es aplicable a sistemas de medida microelectrónica basados en microsensores de silicio.Peer reviewe

Improvement of the quality factor of RF integrated inductors by layout optimization

A systematic method to improve the quality (Q) factor of RF integrated inductors is presented in this paper. The proposed method is based on the layout optimization to minimize the series resistance of the inductor coil, taking into account both ohmic losses, due to conduction currents, and magnetically induced losses, due to eddy currents. The technique is particularly useful when applied to inductors in which the fabrication process includes integration substrate removal. However, it is also applicable to inductors on low-loss substrates. The method optimizes the width of the metal strip for each turn of the inductor coil, leading to a variable strip-width layout. The optimization procedure has been successfully applied to the design of square spiral inductors in a silicon-based multichip-module technology, complemented with silicon micromachining postprocessing. The obtained experimental results corroborate the validity of the proposed method. A Q factor of about 17 have been obtained for a 35-nH inductor at 1.5 GHz, with Q values higher than 40 predicted for a 20-nH inductor working at 3.5 GHz. The latter is up to a 60% better than the best results for a single strip-width inductor working at the same frequency

Love-Wave Sensors Combined with Microfluidics for Fast Detection of Biological Warfare Agents

The following paper examines a time-efficient method for detecting biological warfare agents (BWAs). The method is based on a system of a Love-wave immunosensor combined with a microfluidic chip which detects BWA samples in a dynamic mode. In this way a continuous flow-through of the sample is created, promoting the reaction between antigen and antibody and allowing a fast detection of the BWAs. In order to prove this method, static and dynamic modes have been simulated and different concentrations of BWA simulants have been tested with two immunoreactions: phage M13 has been detected using the mouse monoclonal antibody anti-M13 (AM13), and the rabbit immunoglobulin (Rabbit IgG) has been detected using the polyclonal antibody goat anti-rabbit (GAR). Finally, different concentrations of each BWA simulants have been detected with a fast response time and a desirable level of discrimination among them has been achieved.This work was supported by the Spanish Science and Innovation Ministry under the project TEC2010-21357-C05-04, and a postdoctoral fellowship at the National Autonomous University of Mexico.We acknowledge support by the CSIC Open Access Publication Initiative through its Unit of Information Resources for Research (URICI)Peer reviewe

Residual Stress Measurement on a MEMS Structure With High-Spatial Resolution

A new approach to the local measurement of residual stress in microstructures is described in this paper. The presented technique takes advantage of the combined milling-imaging features of a focused ion beam (FIB) equipment to scale down the widely known hole drilling method. This method consists of drilling a small hole in a solid with inherent residual stresses and measuring the strains/displacements caused by the local stress release, that takes place around the hole. In the presented case, the displacements caused by the milling are determined by applying digital image correlation (DIC) techniques to high resolution micrographs taken before and after the milling process. The residual stress value is then obtained by fitting the measured displacements to the analytical solution of the displacement fields. The feasibility of this approach has been demonstrated on a micromachined silicon nitride membrane showing that this method has high potential for applications in the field of mechanical characterization of micro/nanoelectromechanical systems

Micro light plates for low-power photoactivated (gas) sensors

We report a miniaturized device integrating a photoactive material with a highly efficient Light Emitting Diode light source. This so-called micro light plate configuration allows for maximizing the irradiance impinging on the photoactive material, with a minimum power consumption, excellent uniformity, and accurate control of the illumination. We demonstrate these advantages with an example application: photoactivated gas sensors with a power consumption as low as 30 μW (this is 1000 times lower than the best figures reported to date). The letter also presents a quantitative model and a set of design rules to implement it in further integrated applications

A parts per billion (ppb) sensor for NO2 with microwatt (μW) power requirements based on micro light plates

A film of gas sensitive ZnO nanoparticles has been coupled with a low-power micro light plate (μLP) to achieve a NO2-parts-per-billion conductometric gas sensor operating at room temperature. In this μLP configuration, an InGaN-based LED (emitting at 455 nm) is integrated at a few hundred nanometers distance from the sensor material, leading to sensor photoactivation with well controlled, uniform, and high irradiance conditions, and very low electrical power needs. The response curves to different NO2 concentrations as a function of the irradiance displayed a bell-like shape. Responses of 20% to 25 ppb of NO2 were already observed at irradiances of 5 mWatts·cm-2 (applying an electrical power as low as 30 μW). In the optimum illumination conditions (around 60 mWatts·cm-2, or 200 μW of electric power), responses of 94% to 25 ppb were achieved, corresponding to a lower detection limit of 1 ppb of NO2. Higher irradiance values worsened the sensor response in the parts-per-billion range of NO2 concentrations. The responses to other gases such as NH3, CO, and CH4 were much smaller, showing a certain selectivity toward NO2. The effects of humidity on the sensor response are also discussed

ZnO Structures with Surface Nanoscale Interfaces Formed by Au, Fe2O3, or Cu2O Modifier Nanoparticles: Characterization and Gas Sensing Properties

Zinc oxide rod structures are synthetized and subsequently modified with Au, Fe2O3, or Cu2O to form nanoscale interfaces at the rod surface. X-ray photoelectron spectroscopy corroborates the presence of Fe in the form of oxide-Fe2O3; Cu in the form of two oxides-CuO and Cu2O, with the major presence of Cu2O; and Au in three oxidation states-Au3+, Au+, and Au-0, with the content of metallic Au being the highest among the other states. These structures are tested towards nitrogen dioxide, ethanol, acetone, carbon monoxide, and toluene, finding a remarkable increase in the response and sensitivity of the Au-modified ZnO films, especially towards nitrogen dioxide and ethanol. The results for the Au-modified ZnO films report about 47 times higher response to 10 ppm of nitrogen dioxide as compared to the non-modified structures with a sensitivity of 39.96% ppm(-1) and a limit of detection of 26 ppb to this gas. These results are attributed to the cumulative effects of several factors, such as the presence of oxygen vacancies, the gas-sensing mechanism influenced by the nano-interfaces formed between ZnO and Au, and the catalytic nature of the Au nanoparticles

Site-selectively grown SnO2 NWs networks on micromembranes for efficient ammonia sensing in humid conditions

SnO2 NWs networks on heated micromembranes have been characterized as ammonia sensors. The approach allows achieving reproducible growth and stable and long-lasting ammonia sensors with site-specific grown SnO2 NWs. The devices have been tested both in dry and humid conditions showing response time down to two minutes. Sensors have been tested up to 1 month, only presenting variation of the base resistance with full retention of the response towards the gaseous analytes. Different concurrent sensing mechanisms have been identified relating the determined sensing kinetics with previous theoretical calculations. Specifically, oxygen dissociation seems to play a key role in the overall ammonia sensing sequence. In humid conditions, moisture reduces the response to ammonia but also lowers the activation energy of the reaction process

Locally grown SnO2 NWs as low power ammonia sensor

Localized growth of SnO2 nanowires on top of CMOS compatible micromembranes that incorporate a buried heater and prepatterned interdigitated electrodes has been achieved that presents the advantage that it allows to easily and directly integrate the advantageous properties of quasi-one dimensional structures in an advanced electronic device by a Vapor Liquid Solid (VLS) mechanism. A NWs based sensor of this type is characterized as a low power gas sensor towards NH3 at different temperatures. Stable and reproducible response is obtained, that allows detecting concentrations below the time-weighted average exposure limit for 8 h