Silicon on Nothing Mems Electromechanical Resonator

The very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performances radio frequencies (RF) components. Micro Electro Mechanical Systems (MEMS) are good candidates to allow reconfigurable RF functions such as filters, oscillators or antennas. This paper will focus on the MEMS electromechanical resonators which show interesting performances to replace SAW filters or quartz reference oscillators, allowing smaller integrated functions with lower power consumption. The resonant frequency depends on the material properties, such as Young's modulus and density, and on the movable mechanical structure dimensions (beam length defined by photolithography). Thus, it is possible to obtain multi frequencies resonators on a wafer. The resonator performance (frequency, quality factor) strongly depends on the environment, like moisture or pressure, which imply the need for a vacuum package. This paper will present first resonator mechanisms and mechanical behaviors followed by state of the art descriptions with applications and specifications overview. Then MEMS resonator developments at STMicroelectronics including FEM analysis, technological developments and characterization are detailed.Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing

SILICON ON NOTHING MEMS ELECTROMECHANICAL RESONATOR

International audienceThe very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performances radio frequencies (RF) components. Micro Electro Mechanical Systems (MEMS) are good candidates to allow reconfigurable RF functions such as filters, oscillators or antennas. This paper will focus on the MEMS electromechanical resonators which show interesting performances to replace SAW filters or quartz reference oscillators, allowing smaller integrated functions with lower power consumption. The resonant frequency depends on the material properties, such as Young's modulus and density, and on the movable mechanical structure dimensions (beam length defined by photolithography). Thus, it is possible to obtain multi frequencies resonators on a wafer. The resonator performance (frequency, quality factor) strongly depends on the environment, like moisture or pressure, which imply the need for a vacuum package. This paper will present first resonator mechanisms and mechanical behaviors followed by state of the art descriptions with applications and specifications overview. Then MEMS resonator developments at STMicroelectronics including FEM analysis, technological developments and characterization are detailed

Scientific diving in France: an overview of the current practices in science

International audienceThe French National Committee for Scientific Diving (CNPS) takes on different tasks including acting as an observatory of occupational scientific diving practices and innovations (Thouzeau et al., 2019). Since 1991 in France, scientific diving has been recognized by law as an occupational sector and is therefore regulated with the aim to reduce the hyperbaric risk. Currently, French scientific diving encompasses many fields such as underwater life sciences and ecology, geosciences, social & cultural sciences including archeology, health & food, engineering sciences, energy... Due to the existence of overseas territories - with France's maritime spaces representing the world's second largest exclusive economic zone - French territories display an extensive variety of submarine habitats. Furthermore, the historical richness of scientific diving in France has led the French scientific diving community to be involved in all oceans worldwide. All subaquatic ecosystems, from the polar regions to the tropical belt, from drowned karsts to freshwater and high altitude lakes, including mesocosms and artificial structures are studied by diving scientists. On top of the traditional diving methods (apnea, open circuit and hookah) scientific diving benefited in recent years from the use of closed-circuit rebreathers but also from combining CCR and saturation methods, which greatly enhanced the study of the mesophotic zones. In light of the diversity of environments, disciplines and scientific issues, scientific divers are continuously innovating to perform outstanding research. This presentation will give an overview of recent work from the last decade, highlighting the importance of scientific diving in science in France

Scientific diving in France: an overview of the current practices in science

The French National Committee for Scientific Diving (CNPS) takes on different tasks including acting as an observatory of occupational scientific diving practices and innovations (Thouzeau et al., 2019). Since 1991 in France, scientific diving has been recognized by law as an occupational sector and is therefore regulated with the aim to reduce the hyperbaric risk. Currently, French scientific diving encompasses many fields such as life sciences and ecology, geosciences, social & cultural sciences including archeology, health & food, engineering sciences, energy... Due to the existence of overseas territories - with France's maritime spaces representing the world's second largest exclusive economic zone - French territories display an extensive variety of submarine habitats. Furthermore, the historical richness of scientific diving in France has led the French scientific diving community to be involved in all oceans worldwide. All subaquatic ecosystems, from the polar regions to the tropical belt, from drowned karsts to freshwater and high altitude lakes, including mesocosms and artificial structures are studied by diving scientists. On top of the traditional diving methods (apnea, open circuit and hookah) scientific diving benefits in recent years from the use of closed-circuit rebreathers but also from combining CCR and saturation methods, which greatly enhanced the study of the mesophotic zones. In light of the diversity of environments, disciplines and scientific issues, scientific divers are continuously innovating to perform outstanding research. This presentation will outline the recent work of the last decade highlighting the importance of scientific diving in science (in France)

Scientific diving in France: an overview of the current practices in science

European Conference on Scientific Diving, Roscoff, FRA, 14-/05/2023 - 18/05/2023International audienceThe French National Committee for Scientific Diving (CNPS) takes on different tasks including acting as an observatory of occupational scientific diving practices and innovations (Thouzeau et al., 2019). Since 1991 in France, scientific diving has been recognized by law as an occupational sector and is therefore regulated with the aim to reduce the hyperbaric risk. Currently, French scientific diving encompasses many fields such as life sciences and ecology, geosciences, social & cultural sciences including archeology, health & food, engineering sciences, energy... Due to the existence of overseas territories - with France's maritime spaces representing the world's second largest exclusive economic zone - French territories display an extensive variety of submarine habitats. Furthermore, the historical richness of scientific diving in France has led the French scientific diving community to be involved in all oceans worldwide. All subaquatic ecosystems, from the polar regions to the tropical belt, from drowned karsts to freshwater and high altitude lakes, including mesocosms and artificial structures are studied by diving scientists. On top of the traditional diving methods (apnea, open circuit and hookah) scientific diving benefits in recent years from the use of closed-circuit rebreathers but also from combining CCR and saturation methods, which greatly enhanced the study of the mesophotic zones. In light of the diversity of environments, disciplines and scientific issues, scientific divers are continuously innovating to perform outstanding research. This presentation will outline the recent work of the last decade highlighting the importance of scientific diving in science (in France).Thouzeau G., Hocdé R., Beurier J.-P., Coulange M. et al. (2019). The French National Committee on Scientific Diving (CNPS): a key actor for developing scientific diving in France. 5th European Conference on Scientific Diving (ECSD), Institute of Oceanology, Polish Academy of Sciences, Sopot, Poland, Apr 2019, Sopot, Poland. pp.61-62, doi:10.23708/fdi:01007626

The French National Committee on Scientific Diving (CNPS): a key actor for developing scientific diving in France

International audienceThe French National Committee for Scientific Diving (CNPS) is an inter-agency committee on scientific diving activities. French marine universities, research institutes (CNRS-INEE/INSU/INSHS, DRASSM, EPHE, IFREMER, INRA, INSERM, IPEV, IRD, IRSTEA) and the National Museum (MNHN) are involved or represented. The CNPS, created in 1999, is the scientific diving representative of the Ministry of Higher Education and Research to the Ministry of Labor. It includes personalities chosen for their expertise in the field of professional use of diving (scientific and technical diving, training), the law of the sea, the hyperbaric medicine and the European scientific diving panel (ESDP). The aims of this group of experts are: a) to observe the evolution of the professional scientific diving practices worldwide, b) to define common frameworks and promote the best practices, c) to provide high-level expertise and advices to Ministries of Labor and Research, d) to monitor the innovations in scientific diving, technology, field practices and hyperbaric medicine, e) to share informations and feedback with the French scientific divers community, f) to participate in the training of scientific divers, and g) to represent France at the ESDP. The CNPS has been fully involved since 2009 in the formulation of new laws and regulations dedicated to professional diving with the Ministry of Labor. The French scientific diving community is very diversified, for historical reasons, due to its 18 000 km long coastline and a strong presence overseas, through the involvement of researchers in global science issues and international collaborations. This poster presents the aims, activities and key results obtained by the CNPS. It also sets out some perspectives, especially actions in favour of a convergence of European practice patterns and standards