Application of single poise counterweight method in adjusting grinding uniformity of silicon wafer

为提高硅片研磨的均匀性,提出了一种通过改变调节砝码位置的新方法。对单砝码配重法的原理、步骤及物理模型进行了详细的论述,并基于lAbVIEW软件对该方法进行了可视化。在精密研磨抛光机上进行实验,并用膜厚仪进行均匀性测量。结果表明:在给定的条件下使9.9 CM硅片的均匀性从单靠自重研磨的20μM提高到用配重法调节后的3μM,显著提高了硅片研磨的均匀性。单砝码配重法为解决硅片研磨均匀性问题提供了一种既精确又简便的方法。To improve the grinding uniformity of silicon wafer,this paper proposed a new approach by changing the position of poise.The principle,procedure and physical model of the single poise counterweight method were described in detail,and then the visualization of this method basing on LabVIEW software was realized.Experiment was carried out on a precision grinding and polishing machine,and the thickness uniformity was measured on the thickness monitor.Experimental results show that the uniformity of three inches silicon wafer is improved from 20 μm to 3 μm comparing to conventional deadweight grinding,so the grinding uniformity of silicon wafer is enhanced markedly.Therefore,the single poise counterweight method provides a precise and convenient way to solve the grinding uniformity problem of silicon wafer.航空科学基金(20110868001

JUNO Sensitivity on Proton Decay p→νˉK+p\to \bar\nu K^+ Searches

The Jiangmen Underground Neutrino Observatory (JUNO) is a large liquid scintillator detector designed to explore many topics in fundamental physics. In this paper, the potential on searching for proton decay in $p\to \bar\nu K^+$ mode with JUNO is investigated.The kaon and its decay particles feature a clear three-fold coincidence signature that results in a high efficiency for identification. Moreover, the excellent energy resolution of JUNO permits to suppress the sizable background caused by other delayed signals. Based on these advantages, the detection efficiency for the proton decay via $p\to \bar\nu K^+$ is 36.9% with a background level of 0.2 events after 10 years of data taking. The estimated sensitivity based on 200 kton-years exposure is $9.6 \times 10^{33}$ years, competitive with the current best limits on the proton lifetime in this channel

JUNO sensitivity on proton decay p → ν K + searches*

The Jiangmen Underground Neutrino Observatory (JUNO) is a large liquid scintillator detector designed to explore many topics in fundamental physics. In this study, the potential of searching for proton decay in the $p\to \bar{\nu} K^+$ mode with JUNO is investigated. The kaon and its decay particles feature a clear three-fold coincidence signature that results in a high efficiency for identification. Moreover, the excellent energy resolution of JUNO permits suppression of the sizable background caused by other delayed signals. Based on these advantages, the detection efficiency for the proton decay via $p\to \bar{\nu} K^+$ is 36.9% ± 4.9% with a background level of $0.2\pm 0.05({\rm syst})\pm$$0.2({\rm stat})$ events after 10 years of data collection. The estimated sensitivity based on 200 kton-years of exposure is $9.6 \times 10^{33}$ years, which is competitive with the current best limits on the proton lifetime in this channel and complements the use of different detection technologies