High Frequency Devices and Circuit Modules for Biochemical Microsystems

This dissertation investigates high frequency devices and circuit modules for biochemical microsystems. These modules are designed towards replacing external bulky laboratory instruments and integrating with biochemical microsystems to generate and analyze signals in frequency and time domain. The first is a charge pump circuit with modified triple well diodes, which is used as an on-chip power supply. The second is an on-chip pulse generation circuit to generate high voltage short pulses. It includes a pulse-forming-line (PFL) based pulse generation circuit, a Marx generator and a Blumlein generator. The third is a six-port circuit based on four quadrature hybrids with 2.0~6.0 GHz operating frequency tuning range for analyzing signals in frequency domain on-chip. The fourth is a high-speed sample-and-hold circuit (SHC) with a 13.3 Gs/s sampling rate and ~11.5 GHz input bandwidth for analyzing signals in time domain on-chip. The fifth is a novel electron spin resonance (ESR) spectroscopy with high-sensitivity and wide frequency tuning range

High-efficiency high voltage hybrid charge pump design with an improved chip area

A hybrid charge pump was developed in a 0.13- $\mu \text{m}$ Bipolar-CMOS-DMOS (BCD) process which utilised high drain-source voltage MOS devices and low-voltage integrated metal-insulator-metal (MIM) capacitors. The design consisted of a zero-reversion loss cross-coupled stage and a new self-biased serial-parallel charge pump design. The latter has been shown to have an area reduction of 60% in comparison to a Schottky diode-based Dickson charge pump operating at the same frequency. Post-layout simulations were carried out which demonstrated a peak efficiency of 38% at the output voltage of 18.5 V; the maximum specified output voltage of 27 V was also achieved. A standalone serial-parallel charge pump was shown to have a better transient response and a flatter efficiency curve; these are preferable for time-sensitive applications with a requirement of a broader range of output currents. These findings have significant implications for reducing the total area of implantable high-voltage devices without sacrificing charge pump efficiency or maximum output voltage

A High-Temperature, High-Voltage SOI Gate Driver Integrated Circuit with High Drive Current for Silicon Carbide Power Switches

High-temperature integrated circuit (IC) design is one of the new frontiers in microelectronics that can significantly improve the performance of the electrical systems in extreme environment applications, including automotive, aerospace, well-logging, geothermal, and nuclear. Power modules (DC-DC converters, inverters, etc.) are key components in these electrical systems. Power-to-volume and power-to-weight ratios of these modules can be significantly improved by employing silicon carbide (SiC) based power switches which are capable of operating at much higher temperature than silicon (Si) and gallium arsenide (GaAs) based conventional devices. For successful realization of such high-temperature power electronic circuits, associated control electronics also need to perform at high temperature. In any power converter, gate driver circuit performs as the interface between a low-power microcontroller and the semiconductor power switches. This dissertation presents design, implementation, and measurement results of a silicon-on-insulator (SOI) based high-temperature (\u3e200 _C) and high-voltage (\u3e30 V) universal gate driver integrated circuit with high drive current (\u3e3 A) for SiC power switches. This mixed signal IC has primarily been designed for automotive applications where the under-hood temperature can reach 200 _C. Prototype driver circuits have been designed and implemented in a Bipolar-CMOS- DMOS (BCD) on SOI process and have been successfully tested up to 200 _C ambient temperature driving SiC switches (MOSFET and JFET) without any heat sink and thermal management. This circuit can generate 30V peak-to-peak gate drive signal and can source and sink 3A peak drive current. Temperature compensating and temperature independent design techniques are employed to design the critical functional units like dead-time controller and level shifters in the driver circuit. Chip-level layout techniques are employed to enhance the reliability of the circuit at high temperature. High-temperature test boards have been developed to test the prototype ICs. An ultra low power on-chip temperature sensor circuit has also been designed and integrated into the gate-driver die to safeguard the driver circuit against excessive die temperature (_ 220 _C). This new temperature monitoring approach utilizes a reverse biased p-n junction diode as the temperature sensing element. Power consumption of this sensor circuit is less than 10 uW at 200 _C

Monolithic Integration of CMOS Charge Pumps for High Voltage Generation beyond 100 V

Monolithic integration of step-up DC-DC converters used to be one of the largest challenges in high voltage CMOS SoCs. Charge pumps are considered as the most promising solution regarding in- tegration levels compared to boost converter with bulky inductors. However, conventional charge pump architectures usually show significant drawbacks and reliability problems, when used as on- chip high voltage generators. Hence, innovative charge pump architectures are required to realize the monolithic integration of charge pumps in high voltage applications. In this dissertation, three 4-phase charge pump architectures with the dynamic body biasing tech- nique and clock schemes with dead time techniques were proposed to overcome drawbacks such as body effect and reverse current problem of traditional Pelliconi charge pump. The influences of high voltage CMOS sandwich capacitors on the voltage gain and power efficiency of charge pumps were extensively investigated. The most reasonable 4-phase charge pump architecture with a suitable configuration of high voltage sandwich capacitors regarding the voltage gain and power efficiency was chosen to implement two high voltage ASICs in an advanced 120 V 0.35 μm high voltage CMOS technology. The first test chip operates successfully and is able to generate up to 120 V from a 3.7 V low voltage DC supply, which shows the highest output voltage among all the reported fully integrated CMOS charge pumps. The measurement results confirmed the benefits of the proposed charge pump architectures and clock schemes. The second chip providing a similar output voltage has a reduced chip size mainly due to decreased capacitor areas by increased clock frequencies. Fur- thermore, the second chip with an on-chip clock generator works independently of external clock signals which shows the feasibility of integrated charge pumps as part of high voltage SoCs. Based on the successful implementation of those high voltage CMOS ASICs, further discussions on the stability of the output voltage, levels of integration and limitations in the negative high voltage generation of high voltage CMOS charge pumps are held with the aid of simulation or measurement results. Feed- back regulation by adjusting the clock frequency or DC power supply is able to stabilize the voltage performance effectively while being easily integrated on-chip. Increasing the clock frequency can significantly reduce the required capacitor values which results in reduced chip sizes. An application example demonstrates the importance of fully integrated high voltage charge pumps. Besides, a new design methodology for the on-chip high voltage generation using CMOS technolo- gies was proposed. It contains a general design flow focusing mainly on the feasibility and reliability of high voltage CMOS ASICs and design techniques for on-chip high voltage generators. In this dissertation, it is proven that CMOS charge pumps using suitable architectures regarding the required chip size and circuit reliability are able to be used as on-chip high voltage generators for voltages beyond 100 V . Several methods to improve the circuit performance and to extend the functionalities of high voltage charge pumps are suggested for future works

Integrated Circuits/Microchips

With the world marching inexorably towards the fourth industrial revolution (IR 4.0), one is now embracing lives with artificial intelligence (AI), the Internet of Things (IoTs), virtual reality (VR) and 5G technology. Wherever we are, whatever we are doing, there are electronic devices that we rely indispensably on. While some of these technologies, such as those fueled with smart, autonomous systems, are seemingly precocious; others have existed for quite a while. These devices range from simple home appliances, entertainment media to complex aeronautical instruments. Clearly, the daily lives of mankind today are interwoven seamlessly with electronics. Surprising as it may seem, the cornerstone that empowers these electronic devices is nothing more than a mere diminutive semiconductor cube block. More colloquially referred to as the Very-Large-Scale-Integration (VLSI) chip or an integrated circuit (IC) chip or simply a microchip, this semiconductor cube block, approximately the size of a grain of rice, is composed of millions to billions of transistors. The transistors are interconnected in such a way that allows electrical circuitries for certain applications to be realized. Some of these chips serve specific permanent applications and are known as Application Specific Integrated Circuits (ASICS); while, others are computing processors which could be programmed for diverse applications. The computer processor, together with its supporting hardware and user interfaces, is known as an embedded system.In this book, a variety of topics related to microchips are extensively illustrated. The topics encompass the physics of the microchip device, as well as its design methods and applications

Local Epitaxial Overgrowth for Stacked Complementary MOS Transistor Pairs

A three-dimensional silicon processing technology for CMOS circuits was developed and characterized. The first fully depleted SOI devices with individually biasable gates on both sides of the silicon film were realized. A vertically stacked CMOS Inverter built by lateral overgrowth was reported for the first time. Nucleation-free epitaxial lateral overgrowth of silicon over thin oxides was developed for both a pancake and a barrel-type epitaxy reactor: This process was optimized to limit damage to gate oxides and minimize dopant diffusion within the Substrate. Autodoping from impurities of the MOS transistors built in the substrate was greatly reduced. A planarisation technique was developed to reduce the silicon film thickness from 13μm to below 0.5μm for full depletion. Chemo-mechanical polishing was modified to yield an automatic etch stop with the corresponding control and uniformity of the silicon film. The resulting wafer topography is more planar than in a conventional substrate CMOS process. PMOS transistors which match the current drive of bulk NM0S devices of equal geometry were characterized, despite the three-times lower hole mobility. Devices realized in the substrate, at the bottom and on top of the SOI film were essentially indistinguishable from bulk devices. A novel device with two insulated gates controlling the same channel was characterized. Inverters were realized both as joint-gate configuration and with symmetric performance of n- and p-channel. These circuits were realized in the area of a single NMOS transistor

Self-powered Time-Keeping and Time-of-Occurrence Sensing

Self-powered and passive Internet-of-Things (IoT) devices (e.g. RFID tags, financial assets, wireless sensors and surface-mount devices) have been widely deployed in our everyday and industrial applications. While diverse functionalities have been implemented in passive systems, the lack of a reference clock limits the design space of such devices used for applications such as time-stamping sensing, recording and dynamic authentication. Self-powered time-keeping in passive systems has been challenging because they do not have access to continuous power sources. While energy transducers can harvest power from ambient environment, the intermittent power cannot support continuous operation for reference clocks. The thesis of this dissertation is to implement self-powered time-keeping devices on standard CMOS processes. In this dissertation, a novel device that combines the physics of quantum tunneling and floating-gate (FG) structures is proposed for self-powered time-keeping in CMOS process. The proposed device is based on thermally assisted Fowler-Nordheim (FN) tunneling process across high-quality oxide layer to discharge the floating-gate node, therefore resulting in a time-dependent FG potential. The device was fully characterized in this dissertation, and it does not require external powering during runtime, making it feasible for passive devices and systems. Dynamic signature based on the synchronization and desynchronization behavior of the FN timer is proposed for authentication of IoT devices. The self-compensating physics ensure that when distributed timers are subjected to identical environment variances that are common-mode noise, they can maintain synchronization with respect to each other. On the contrary, different environment conditions will desynchronize the timers creating unique signatures. The signatures could be used to differentiate between products that belong to different supply-chains or products that were subjected to malicious tampering. SecureID type dynamic authentication protocols based on the signature generated by the FN timers are proposed and they are proven to be robust to most attacks. The protocols are further analyzed to be lightweight enough for passive devices whose computational sources are limited. The device could also be applied for self-powered sensing of time-of-occurrence. The prototype was verified by integrating the device with a self-powered mechanical sensor to sense and record time-of-occurrence of mechanical events. The system-on-chip design uses the timer output to modulate a linear injector to stamp the time information into the sensing results. Time-of-occurrence can be reconstructed by training the mathematical model and then applying that to the test data. The design was verified to have a high reconstruction accuracy

Integrated CMOS Polymerase Chain Reaction Lab-on-chip

Considerable effort has recently been directed toward the miniaturization of quantitative-polymerase-chain-reaction [QPCR] instrumentation in an effort to reduce both cost and form factor for point-of-care applications. Notable gains have been made in shrinking the required volumes of PCR reagents, but resultant prototypes retain their bench-top form factor either due to heavy heating plates or cumbersome optical sensing instrumentation. In this thesis, we describe the use of complementary-metal-oxide semiconductor (CMOS) integrated circuit (IC) technology to produce a fully integrated qPCR lab-on-chip. Exploiting a 0.35-µm high-voltage CMOS process, the IC contains all of the key components for performing qPCR. Integrated resistive heaters and temperature sensors regulate the surface temperature of the chip to 0.45°C. Electrowetting-on-dielectric microfluidic pixels are actively driven from the chip surface, allowing for droplet generation and transport down to volumes of less than 1.2 nanoliters. Integrated single-photon avalanche diodes [SPAD] are used for fluorescent monitoring of the reaction, allowing for the quantification of target DNA with more than four-orders-of-magnitude of dynamic range with sensitivities down to a single copy per droplet. Using this device, reliable and sensitive real-time proof-of-concept detection of Staphylococcus aureus (S. aureus) is demonstrated