785 research outputs found

    Thin-film quantum dot photodiode for monolithic infrared image sensors

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    Imaging in the infrared wavelength range has been fundamental in scientific, military and surveillance applications. Currently, it is a crucial enabler of new industries such as autonomous mobility (for obstacle detection), augmented reality (for eye tracking) and biometrics. Ubiquitous deployment of infrared cameras (on a scale similar to visible cameras) is however prevented by high manufacturing cost and low resolution related to the need of using image sensors based on flip-chip hybridization. One way to enable monolithic integration is by replacing expensive, small-scale III-V-based detector chips with narrow bandgap thin-films compatible with 8- and 12-inch full-wafer processing. This work describes a CMOS-compatible pixel stack based on lead sulfide quantum dots (PbS QD) with tunable absorption peak. Photodiode with a 150-nm thick absorber in an inverted architecture shows dark current of 10(-6) A/cm(2) at 2 V reverse bias and EQE above 20% at 1440 nm wavelength. Optical modeling for top illumination architecture can improve the contact transparency to 70%. Additional cooling (193 K) can improve the sensitivity to 60 dB. This stack can be integrated on a CMOS ROIC, enabling order-of-magnitude cost reduction for infrared sensors

    Ligand Exchange Optimization for Quantum Dot Based Infrared Thin-film Photodetectors

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    Image in the infrared wavelength range offers several advantages when compared with the visible range. The information that is impossible to acquire with our naked eyes can be used for different industries such as quality control, surveillance, augmented and virtual reality, medical diagnostics, and others. Colloidal quantum dots (QDs) have been gathering increased attention and becoming one of the most promising candidates for infrared optoelectronic devices, being praised for their size-dependent bandgap tunability, low-cost manufacturing when comparing to III-V semiconductors, and suitability for deposition on large and flexible substrates. However, the main challenge to accomplish is precise control over their material properties through surface passivation. The work performed in this thesis is focused on exploring the effect of different strategies of surface ligand treatments to colloidal QDs for further integration as an active layer of thin-film photodetectors. Therefore, thin-films made from solution-phase ligand exchange lead sulfide (PbS) QDs deposited on glass substrates were analyzed in terms of their optical and morphological properties through multiple characterization techniques. Full processing and fabrication of thin-film photodiode detectors were then carried out, pursuing the highest devices performance according to their electrical characterization. In the end, the developed PbS QD-based photodiode stack successfully completed the proposed optimization by reaching dark currents values close to 10-5 A/cm2 at -3 V and external quantum efficiency of 29% at 1450 nm

    Miniaturized Silicon Photodetectors

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    Silicon (Si) technologies provide an excellent platform for the design of microsystems where photonic and microelectronic functionalities are monolithically integrated on the same substrate. In recent years, a variety of passive and active Si photonic devices have been developed, and among them, photodetectors have attracted particular interest from the scientific community. Si photodiodes are typically designed to operate at visible wavelengths, but, unfortunately, their employment in the infrared (IR) range is limited due to the neglectable Si absorption over 1100 nm, even though the use of germanium (Ge) grown on Si has historically allowed operations to be extended up to 1550 nm. In recent years, significant progress has been achieved both by improving the performance of Si-based photodetectors in the visible range and by extending their operation to infrared wavelengths. Near-infrared (NIR) SiGe photodetectors have been demonstrated to have a โ€œzero changeโ€ CMOS process flow, while the investigation of new effects and structures has shown that an all-Si approach could be a viable option to construct devices comparable with Ge technology. In addition, the capability to integrate new emerging 2D and 3D materials with Si, together with the capability of manufacturing devices at the nanometric scale, has led to the development of new device families with unexpected performance. Accordingly, this Special Issue of Micromachines seeks to showcase research papers, short communications, and review articles that show the most recent advances in the field of silicon photodetectors and their respective applications

    3-5์กฑ ํ™”ํ•ฉ๋ฌผ ๋ฐ˜๋„์ฒด์˜ ์›จ์ดํผ ์ ‘ํ•ฉ๊ณผ ์—ํ”ผํƒ์…œ ๋ฆฌํ”„ํŠธ ์˜คํ”„๋ฅผ ํ†ตํ•œ ๋‹ค์ค‘ ํŒŒ์žฅ ๊ด‘ ๊ฒ€์ถœ๊ธฐ

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    ํ•™์œ„๋…ผ๋ฌธ (๋ฐ•์‚ฌ)-- ์„œ์šธ๋Œ€ํ•™๊ต ๋Œ€ํ•™์› : ๊ณต๊ณผ๋Œ€ํ•™ ์žฌ๋ฃŒ๊ณตํ•™๋ถ€, 2019. 2. ์œค์˜์ค€.Group III-V compound semiconductors, having a band gap from ultraviolet to infrared regions, have been widely used as imagers to visualize a single band. With the recent arrival of the Internet-of-things (IOTs) era, new applications such as time of flight (TOF) sensors, normalized difference vegetation index (NVDI) and night vision systems have gained interest. Therefore, the importance of multicolor photodetectors is raised. To implement multicolor photodetectors, an epitaxy method has been commonly used with III-V compound semiconductors. For example, quantum wells, quantum dots and type-II based structures and metamorphically grown bulk heteroepitaxial structures have been employed. Although an epitaxy method seems to be quite simple, there are several problems including limitation of material choice due to the discrepancy of lattice constants between thin films and substrates, performance degradation originated from internal defects and complexity of growth. Therefore, to avoid these disadvantages of the epitaxy method, a heterogeneous integration method has been an alternative because the integration of devices grown on different substrates is possible. Thus, it has been considered to be a promising method to combine photodetectors with simple bulk structures. However, although there is a significant advantage to the heterogeneous integration method, current multicolor photodetectors have exhibited limitations regarding pixel density and vertical misalignment due to problems related to conventional integration methods. Therefore, in this thesis, the heterogeneous integration of III-V compound semiconductors was investigated for fabricating multicolor photodetectors with high pixel density and highly accurate alignment. Firstly, a research on heterogeneous integration of GaAs based thin film devices with other substrates was carried out. We studied wafer bonding and epitaxial lift off process which have advantages including large area transferability, cost-effectiveness and high quality of layers compared with wafer splitting and transfer printing methods. To fabricate multicolor photodetectors on single substrates, a stable rigid-to-rigid heterogeneous integration method is highly required. However, there have only been few reports regarding rigid-to-rigid transfer by using epitaxial lift off due to the difficulty involving byproducts and gas bubbles generated during the wet etching of the sacrificial layer for wafer separation. This has been a hindrance compared with thin film on flexible substrates which can accelerate wafer separation by using strain and external equipment. In order to overcome this problem, high throughput epitaxial lift off process was proposed through a pre-patterning process and surface hydrophilization. The pre-patterning process can maximize the etching area of the AlAs sacrificial layer and rapidly remove bubbles. In addition, acetone, which is a hydrophilic solution, was mixed with hydrofluoric acid in order to reduce the surface contact angle and viscosity. It resulted in an effective penetration of the etching solution and the suppression of byproducts. Consequently, it was possible to transfer GaAs thin films on rigid substrates within 30 minutes for a 2 inch wafer which has been the fastest compared with previous reports. Also, using this template, electronic and optoelectronic devices were successfully fabricated and operated. Secondly, we have studied to overcome restrictions of bulk photodetector for InSb binary material including the detection limit and cryogenic operation. To extend the detection limit of bulk InSb toward the LWIR range, the ideal candidate of III-V bulk materials is indium arsenide antimonide (InAsSb) material due to its corresponding band gaps ranging from SWIR to LWIR. By combining bulk InAsSb with other bulk materials with previously developed integration methods, we could ultimately fabricate a multicolor photodetector ranging from ultraviolet to LWIR with only bulk structures. Thus, in order to verify the viability of this material, a p-i-n structure based photodetector with an InAs0.81Sb0.19 absorption layer was grown on a GaAs substrate. To enhance an ability to be operated at a high temperature, an optimum InAlSb barrier layer was designed by technology computer aided design (TCAD). Also, InAsSb/InAlSb heterojunction photodetector was grown by molecular beam epitaxy (MBE). As a result, we have demonstrated the first room temperature operation of heterojunction photodetectors in MWIR range among InAsSb photodetectors with similar Sb compositions. Additionally, it has a higher responsivity of 15 mA/W compared with commercialized photodetectors. This MWIR photodetector with room temperature operability could help the reduction of the volume for final detector systems due to the elimination of Dewar used in InSb photodetectors. In other words, from this experiments, it is suggested that there is a strong potential of InAsSb bulk structures for detecting LWIR. Finally, the study on the monolithic integration was carried out to verify the feasibility of multicolor photodetectors by integration of bulk structures. Among procured photodetectors with detection ranging from visible to MWIR at room temperature operation, visible GaAs and near-infrared InGaAs photodetector were used for establishing the optimized fabrication process due to materials process maturity. By using previously developed high throughput ELO process, GaAs photodetectors were transferred onto InGaAs photodetectors to form visible/near-infrared multicolor photodetectors. It was found that top GaAs PD and bottom InGaAs PD were vertically well aligned without an off-axis tilt in x-ray diffraction (XRD) measurement. Also, similar dark currents of each photodetector were observed compared with reference photodetectors. Finally, with incidence of laser illumination, photoresponses were clearly revealed in visible band and near-infrared band of material characteristics, respectively. These results suggested high throughput ELO process enables the monolithic integration of bulk based multicolor photodetectors on a single substrate with high pixel density and nearly perfect vertical alignment. In the future, depending on the target applications, photodetectors with desired wavelengths could be simply grown as bulk structures and fabricated for multicolor imagers.์ž์™ธ์„ ๋ถ€ํ„ฐ ์ ์™ธ์„  ์˜์—ญ์˜ ๋ฐด๋“œ๊ฐญ์„ ๊ฐ€์ง„ 3-5์กฑ ํ™”ํ•ฉ๋ฌผ ๋ฐ˜๋„์ฒด๋Š” ๋‹จ์ผ ํŒŒ์žฅ๋Œ€์—ญ์„ ์‹œ๊ฐํ™”ํ•˜๋Š” imager ๋กœ ๋„๋ฆฌ ์‚ฌ์šฉ๋˜๊ณ  ์žˆ๋‹ค. ๊ทธ๋Ÿฌ๋‚˜, ์ตœ๊ทผ ์‚ฌ๋ฌผ์ธํ„ฐ๋„ท ์‹œ๋Œ€๊ฐ€ ๋„๋ž˜ํ•จ์— ๋”ฐ๋ผ, time of flight (TOF) ์„ผ์„œ, ์‹์ƒ์ง€์ˆ˜ ์ธก์ •, night vision ๋“ฑ์˜ ์ƒˆ๋กœ์šด ์‘์šฉ์ฒ˜๊ฐ€ ์ฆ๊ฐ€ํ•˜๊ณ  ์žˆ๋‹ค. ๋”ฐ๋ผ์„œ ๊ธฐ์กด์˜ ๋‹จ์ผํŒŒ์žฅ ๊ด‘ ๊ฒ€์ถœ๊ธฐ๊ฐ€ ์•„๋‹Œ, ๋‹ค์ค‘ํŒŒ์žฅ ๊ด‘ ๊ฒ€์ถœ๊ธฐ์˜ ์ค‘์š”์„ฑ์ด ์ฆ๋Œ€๋˜๊ณ  ์žˆ์œผ๋ฉฐ, ์ด๋Ÿฐ ๋‹ค์ค‘ํŒŒ์žฅ ๊ด‘ ๊ฒ€์ถœ๊ธฐ๋ฅผ ๊ตฌํ˜„ํ•˜๊ธฐ ์œ„ํ•ด์„œ 3-5์กฑ์„ ํ™”ํ•ฉ๋ฌผ ๋ฐ˜๋„์ฒด์˜ epitaxy ๋ฐฉ๋ฒ•์ด ํ”ํžˆ ์‚ฌ์šฉ๋˜์–ด ์™”๋‹ค. ์˜ˆ๋ฅผ ๋“ค์–ด, ๋‹ค๋ฅธ ๊ฒฉ์ž ์ƒ์ˆ˜๋ฅผ ๊ฐ€์ง„ ๋ฒŒํฌ ๊ตฌ์กฐ๋ฅผ metamorphic ์„ฑ์žฅ๋ฒ•์„ ์ด์šฉํ•˜์—ฌ ์„ฑ์žฅํ•˜๊ฑฐ๋‚˜, ๋˜๋Š” ์–‘์ž์šฐ๋ฌผ, ์–‘์ž์  ๊ทธ๋ฆฌ๊ณ  type-II ๊ธฐ๋ฐ˜์˜ ๊ตฌ์กฐ๊ฐ€ ์ ์šฉ๋˜์–ด์•ผ๋งŒ ํ–ˆ๋‹ค. Epitaxy ๋ฐฉ๋ฒ•์€ ๋งค์šฐ ๊ฐ„๋‹จํ•œ ๋ฐฉ๋ฒ•์ฒ˜๋Ÿผ ๋ณด์ด์ง€๋งŒ, ๊ธฐํŒ๊ณผ ์„ฑ์žฅํ•˜๋ ค๋Š” ๋ฌผ์งˆ๊ฐ„์˜ ๊ฒฉ์ž์ƒ์ˆ˜์˜ ์ฐจ์ด๋กœ ์ธํ•ด ์ œํ•œ๋˜๋Š” ๋ฌผ์งˆ ์„ ํƒ, ๋‚ด๋ถ€ ๊ฒฐํ•จ์— ์˜ํ•œ ์„ฑ๋Šฅ๊ฐ์†Œ ๊ทธ๋ฆฌ๊ณ  ์„ฑ์žฅ์˜ ๋ณต์žกํ•จ ๋“ฑ ์—ฌ๋Ÿฌ ๋ฌธ์ œ๊ฐ€ ์กด์žฌํ•œ๋‹ค. ๊ทธ๋ž˜์„œ, epitaxy ๋ฐฉ๋ฒ•์˜ ๋‹จ์ ๋“ค์„ ํšŒํ”ผํ•˜๊ธฐ ์œ„ํ•˜์—ฌ, ๋‹ค๋ฅธ ๊ธฐํŒ์—์„œ ์„ฑ์žฅ๋œ ์†Œ์ž์˜ ์ง‘์ ์„ ๊ฐ€๋Šฅํ•˜๊ฒŒ ํ•  ์ˆ˜ ์žˆ๋Š”, ์ด์ข… ์ง‘์  ๋ฐฉ๋ฒ•์ด ๋Œ€์•ˆ์ด ๋˜์–ด์™”๋‹ค. ์ด๋ฅผ ์ด์šฉํ•˜๋ฉด, ๊ฐ„๋‹จํ•œ ๋ฒŒํฌ ๊ตฌ์กฐ์˜ ๊ด‘ ๊ฒ€์ถœ๊ธฐ๋ฅผ ๊ฒฐํ•ฉํ•  ์ˆ˜ ์žˆ๊ธฐ ๋•Œ๋ฌธ์— ๋งค์šฐ ์œ ๋งํ•œ ๋ฐฉ๋ฒ•์œผ๋กœ ์—ฌ๊ฒจ์ง€๊ณ  ์žˆ๋‹ค. ๊ทธ๋Ÿฌ๋‚˜, ์ด์ข… ์ง‘์  ๋ฐฉ๋ฒ•์˜ ๋›ฐ์–ด๋‚œ ์žฅ์ ์—๋„ ๋ถˆ๊ตฌํ•˜๊ณ , ํ˜„์žฌ์˜ ๋‹ค์ค‘ํŒŒ์žฅ ๊ด‘ ๊ฒ€์ถœ๊ธฐ๋Š” ์ง‘์  ๋ฐฉ๋ฒ•์˜ ๋ฌธ์ œ๋กœ ์ˆ˜์ง ์ •๋ ฌ ์˜ค์ฐจ ๋ฐ ํ”ฝ์…€ ๋ฐ€๋„ ์ธก๋ฉด์—์„œ ํ•œ๊ณ„์ ์„ ๋ณด์—ฌ์ฃผ์—ˆ๋‹ค. ๋”ฐ๋ผ์„œ, ๋ณธ ๋…ผ๋ฌธ์—์„œ๋Š” ๊ณ ๋ฐ€๋„/ ๊ณ ์ •๋ ฌ๋œ ๋‹ค์ค‘ํŒŒ์žฅ ๊ด‘ ๊ฒ€์ถœ๊ธฐ ์ œ์ž‘์„ ์œ„ํ•œ 3-5์กฑ ๊ธฐ๋ฐ˜์˜ ํ™”ํ•ฉ๋ฌผ ๋ฐ˜๋„์ฒด์˜ ์ด์ข… ์ง‘์  ๋ฐฉ๋ฒ•์— ๋Œ€ํ•œ ์—ฐ๊ตฌ๋ฅผ ์ง„ํ–‰ํ•˜์˜€๋‹ค. ๋จผ์ €, 3-5์กฑ GaAs ๊ธฐ๋ฐ˜์˜ ๋ฐ•๋ง‰์†Œ์ž๋ฅผ ๋‹ค๋ฅธ ๊ธฐํŒ๊ณผ ์ด์ข… ์ง‘์ ํ•˜๋Š” ์—ฐ๊ตฌ๋ฅผ ์ˆ˜ํ–‰ํ•˜์˜€๋‹ค. ๊ธฐ์กด์˜ wafer splitting ๊ณผ transfer printing ๋ฐฉ๋ฒ•๊ณผ ๋น„๊ตํ–ˆ์„ ๋•Œ ๋Œ€๋ฉด์  ์ „์‚ฌ, ์ €๋ ดํ•œ ๊ฐ€๊ฒฉ ๊ทธ๋ฆฌ๊ณ  ๊ณ ํ’ˆ์งˆ layer๋“ฑ ์žฅ์ ๋“ค์ด ์žˆ๋Š” ์›จ์ดํผ ์ ‘ํ•ฉ๊ณผ ์—ํ”ผํƒ์…œ ๋ฆฌํ”„ํŠธ ์˜คํ”„ (epitaxial lift off) ๋ฐฉ๋ฒ•์— ๋Œ€ํ•ด์„œ ์—ฐ๊ตฌ๋ฅผ ํ•˜์˜€๋‹ค. ๋‹จ์ผ ๊ธฐํŒ์ƒ์— ๋‹ค์ค‘ํŒŒ์žฅ ๊ด‘ ๊ฒ€์ถœ๊ธฐ๋ฅผ ์ œ์ž‘ํ•˜๊ธฐ ์œ„ํ•ด์„œ๋Š”, rigid-to-rigid ์ด์ข… ์ง‘์  ๋ฐฉ๋ฒ•์ด ๋ฐ˜๋“œ์‹œ ํ•„์š”ํ•˜๋‹ค. ๊ทธ๋Ÿฌ๋‚˜, strain ๊ณผ ์™ธ๋ถ€ ์žฅ์น˜๋ฅผ ์ด์šฉํ•˜์—ฌ ๊ธฐํŒ ๋ถ„๋ฆฌ๋ฅผ ๊ฐ€์†ํ™” ์‹œํ‚ฌ ์ˆ˜ ์žˆ๋Š” ์œ ์—ฐ๊ธฐํŒ ์ƒ์˜ ๋ฐ•๋ง‰์ „์‚ฌ์™€ ๋‹ฌ๋ฆฌ, ์Šต์‹ ์‹๊ฐ ์‹œ ์ƒ์„ฑ๋˜๋Š” ๋ถ€์‚ฐ๋ฌผ๋“ค๊ณผ ๊ฐ€์Šค ๊ธฐํฌ๋“ค ๋•Œ๋ฌธ์— ์—ํ”ผํƒ์…œ ๋ฆฌํ”„ํŠธ ์˜คํ”„ ๋ฐฉ๋ฒ•์„ ์ด์šฉํ•œ rigid-to-rigid ์ „์‚ฌ์— ๋Œ€ํ•ด์„œ๋Š” ๋งค์šฐ ์ ์€ ๊ฒฐ๊ณผ๋งŒ์ด ๋ณด๊ณ ๋˜์—ˆ๋‹ค. ์ด๋Ÿฐ ๋ฌธ์ œ๋ฅผ ๊ทน๋ณตํ•˜๊ธฐ ์œ„ํ•ด์„œ, pre-patterning ๊ณผ์ •๊ณผ ํ‘œ๋ฉด ์นœ์ˆ˜ํ™”๋ฅผ ํ†ตํ•œ ๊ณ ์† ์—ํ”ผํƒ์…œ ๋ฆฌํ”„ํŠธ ์˜คํ”„๋ฅผ ์ œ์•ˆํ•˜์˜€๋‹ค. ์ด pre-patterning ๊ณผ์ •์€ AlAs ํฌ์ƒ์ธต์˜ ์‹๊ฐ ์˜์—ญ์„ ๊ทน๋Œ€ํ™” ์‹œํ‚ฌ ์ˆ˜ ์žˆ์œผ๋ฉฐ, ๊ธฐํฌ๋ฅผ ๋น ๋ฅด๊ฒŒ ์ œ๊ฑฐํ•  ์ˆ˜ ์žˆ๋‹ค. ๊ทธ๋ฆฌ๊ณ , ์นœ์ˆ˜์„ฑ ์šฉ์•ก์ธ ์•„์„ธํ†ค์„ ๋ถˆ์‚ฐ๊ณผ ์„ž์–ด์ฃผ๋ฉด ์ ๋„์™€ ํ‘œ๋ฉด ์ ‘์ด‰ ๊ฐ์„ ์ค„์ผ ์ˆ˜ ์žˆ๋‹ค. ์ด๊ฒƒ์€ ์‹๊ฐ ์šฉ์•ก์˜ ํšจ๊ณผ์ ์ธ ์นจํˆฌ์™€ ๋ถ€์‚ฐ๋ฌผ์„ ์–ต์ œ์‹œํ‚ค๋Š” ๊ฒฐ๊ณผ๋ฅผ ๋ณด์˜€๋‹ค. ๊ฒฐ๊ณผ์ ์œผ๋กœ, 2 ์ธ์น˜ ํฌ๊ธฐ์˜GaAs ๊ธฐ๋ฐ˜ ๋ฐ•๋ง‰๋“ค์„ rigid ๊ธฐํŒ์ƒ์— 30๋ถ„ ์ด๋‚ด๋กœ ์ „์‚ฌ๊ฐ€ ๊ฐ€๋Šฅํ–ˆ์œผ๋ฉฐ ์ด๋Š” ๊ธฐ์กด์˜ ๋ณด๊ณ ๋“ค๊ณผ ๋น„๊ตํ–ˆ์„ ๋•Œ ๊ฐ€์žฅ ๋น ๋ฅธ ๊ฒฐ๊ณผ์ด๋‹ค. ๋˜ํ•œ ์ด ํ…œํ”Œ๋ฆฟ์„ ์ด์šฉํ•˜์—ฌ ๊ด‘/์ „์ž ์†Œ์ž๋ฅผ ์„ฑ๊ณต์ ์œผ๋กœ ์ œ์ž‘ ๋ฐ ๋™์ž‘์‹œ์ผฐ๋‹ค. ๋‘ ๋ฒˆ์งธ๋กœ, ๊ธฐ์กด์˜ InSb ๋ฌผ์งˆ์„ ์ด์šฉํ•œ ๋ฒŒํฌ ๊ตฌ์กฐ์˜ ๊ด‘ ๊ฒ€์ถœ๊ธฐ๊ฐ€ ๊ฐ€์ง„ ํŒŒ์žฅํ•œ๊ณ„ ๊ทธ๋ฆฌ๊ณ  ์ €์˜จ๋™์ž‘ ๋“ฑ์˜ ์ œ์•ฝ๋“ค์„ ๊ทน๋ณตํ•˜๊ธฐ ์œ„ํ•œ ์—ฐ๊ตฌ๋ฅผ ์ง„ํ–‰ํ•˜์˜€๋‹ค. ๋ฒŒํฌ ๊ตฌ์กฐ์˜ ํŒŒ์žฅ ํ•œ๊ณ„๋ฅผ ์›์ ์™ธ์„  ๋Œ€์—ญ๊นŒ์ง€ ๋Š˜์ด๊ธฐ ์œ„ํ•œ, 3-5์กฑ ๋ฌผ์งˆ ์ค‘ ์ด์ƒ์ ์ธ ๋ฌผ์งˆ์€ ์ธ๋“ ์•„์„ธ๋‚˜์ด๋“œ ์•ˆํ‹ฐ๋ชจ๋‚˜์ด๋“œ (indium arsenide antimonide) ์ด๋‹ค. ์™œ๋ƒํ•˜๋ฉด InAsxSb1-x๋Š” SWIR ๋ถ€ํ„ฐ LWIR ์˜ ํ•ด๋‹นํ•˜๋Š” ๋ฐด๋“œ ๊ฐญ์„ ๊ฐ€์ง€๊ณ  ์žˆ๊ธฐ ๋•Œ๋ฌธ์ด๋‹ค. ์ด ๋ฌผ์งˆ ๊ธฐ๋ฐ˜์˜ ๊ตฌ์กฐ์™€ ๊ฐœ๋ฐœ๋œ ๊ณต์ •์„ ์‚ฌ์šฉํ•˜๋ฉด, ์šฐ๋ฆฌ๋Š” ๊ถ๊ทน์ ์œผ๋กœ ์ž์™ธ์„ ๋ถ€ํ„ฐ ์›์ ์™ธ์„ ๊นŒ์ง€์˜ ์˜์—ญ์„ ๋ฒŒํฌ ๊ตฌ์กฐ๋งŒ์„ ์‚ฌ์šฉํ•˜์—ฌ ๋‹ค์ค‘ํŒŒ์žฅ ๊ด‘ ๊ฒ€์ถœ๊ธฐ๋ฅผ ๊ตฌํ˜„ํ•  ์ˆ˜ ์žˆ๊ฒŒ ๋œ๋‹ค. ๋”ฐ๋ผ์„œ, ์ด ๋ฌผ์งˆ์˜ ๊ฐ€๋Šฅ์„ฑ์„ ๊ฒ€์ฆํ•˜๊ธฐ ์œ„ํ•ด์„œ, InAs0.81Sb0.19 ์˜ ํก์ˆ˜์ธต์„ ๊ฐ€์ง„ p-i-n ๊ตฌ์กฐ ๊ธฐ๋ฐ˜์˜ ๊ด‘ ๊ฒ€์ถœ๊ธฐ๋ฅผ GaAs ๊ธฐํŒ์ƒ์—์„œ ์„ฑ์žฅํ•˜์˜€๋‹ค. ๊ณ ์˜จ์—์„œ ๋™์ž‘ ํŠน์„ฑ์„ ํ–ฅ์ƒ์‹œํ‚ค๊ธฐ ์œ„ํ•˜์—ฌ, ์ตœ์ ์˜ InAlSb ๋ฐฐ๋ฆฌ์–ด๋ฅผ TCAD๋กœ ๋””์ž์ธํ•˜์˜€๋‹ค. ์ด๋Ÿฌํ•œ, InAsSb/InAlSb ์ด์ข… ์ ‘ํ•ฉ ๊ด‘ ๊ฒ€์ถœ๊ธฐ๋Š” ๋ถ„์ž์„  ์ฆ์ฐฉ ์žฅ๋น„๋ฅผ ์ด์šฉํ•˜์—ฌ ์„ฑ์žฅ๋˜์—ˆ๋‹ค. ๊ทธ ๊ฒฐ๊ณผ๋กœ, ์šฐ๋ฆฌ๋Š” ๋น„์Šทํ•œ Sb ์กฐ์„ฑ์„ ๊ฐ€์ง„ InAsSb ๊ธฐ๋ฐ˜์˜ ๊ด‘ ๊ฒ€์ถœ๊ธฐ๋“ค ์ค‘์—์„œ, ์ฒ˜์Œ์œผ๋กœ ์ค‘์ ์™ธ์„  ๋Œ€์—ญ์˜ ์ด์ข… ์ ‘ํ•ฉ ๊ตฌ์กฐ์˜ ๊ด‘ ๊ฒ€์ถœ๊ธฐ๋ฅผ ์ƒ์˜จ ๋™์ž‘ ํ•˜๋Š” ๊ฒƒ์„ ์‹œ์—ฐํ•˜์˜€๋‹ค. ๊ฒŒ๋‹ค๊ฐ€, ๊ทธ๊ฒƒ์€ ์ƒ์šฉํ™” ๋œ ๊ด‘ ๊ฒ€์ถœ๊ธฐ๋ณด๋‹ค ๋†’์€ ๊ด‘ ์‘๋‹ต ํŠน์„ฑ(15 mA/W)์„ ๋ณด์—ฌ์ฃผ์—ˆ๋‹ค. ์ด ์ƒ์˜จ์—์„œ ๋™์ž‘ํ•˜๋Š” ์ค‘์ ์™ธ์„  ๊ด‘ ๊ฒ€์ถœ๊ธฐ๋Š” InSb ๊ด‘ ๊ฒ€์ถœ๊ธฐ์— ์‚ฌ์šฉ๋˜๋Š” Dewar ๋ฅผ ์ œ๊ฑฐํ•จ์œผ๋กœ์จ, ์ตœ์ข… ๊ฒ€์ถœ๊ธฐ ์‹œ์Šคํ…œ์˜ ๋ถ€ํ”ผ๋ฅผ ๊ฐ์†Œ ์‹œํ‚ฌ ์ˆ˜ ์žˆ๋‹ค. ์ด ์‹คํ—˜์œผ๋กœ๋ถ€ํ„ฐ, ๋ฒŒํฌ ๊ตฌ์กฐ๋กœ ์›์ ์™ธ์„  ๋Œ€์—ญ์„ ๊ฒ€์ถœํ•˜๊ธฐ ์œ„ํ•œ InAsSb ๋ฌผ์งˆ์˜ ํฐ ์ž ์žฌ์„ฑ์ด ์žˆ๋‹ค๋Š” ๊ฒƒ์„ ์˜๋ฏธํ•œ๋‹ค. ๋งˆ์ง€๋ง‰์œผ๋กœ, ๋ฒŒํฌ ๊ตฌ์กฐ์˜ ์ง‘์ ์„ ํ†ตํ•œ ๋‹ค์ค‘ํŒŒ์žฅ ๊ด‘ ๊ฒ€์ถœ๊ธฐ์˜ ์‹คํ˜„์ด ๊ฐ€๋Šฅํ•œ์ง€ ํ™•์ธํ•˜๊ธฐ ์œ„ํ•ด์„œ ๋ชจ๋†€๋ฆฌ์‹(monolithic) ์ง‘์ ์— ๊ด€ํ•œ ์—ฐ๊ตฌ๋ฅผ ์ˆ˜ํ–‰ํ•˜์˜€๋‹ค. ํ™•๋ณด๋œ ์ƒ์˜จ ๋™์ž‘์ด ๊ฐ€๋Šฅํ•œ ๊ฐ€์‹œ๊ด‘์„ ๋ถ€ํ„ฐ MWIR ๊ฒ€์ถœ ํŒŒ์žฅ์„ ๊ฐ€์ง„ ๊ด‘ ๊ฒ€์ถœ๊ธฐ๋“ค ์ค‘์—์„œ, ์ตœ์ ์˜ ์ œ์ž‘ ์ˆœ์„œ๋ฅผ ํ™•๋ฆฝํ•˜๊ธฐ ์œ„ํ•ด์„œ ๋ฌผ์งˆ์— ๊ด€ํ•œ ์„ฑ์ˆ™๋„๊ฐ€ ๋†’์€ ๊ฐ€์‹œ๊ด‘์„  GaAs ๊ทธ๋ฆฌ๊ณ  ๊ทผ์ ์™ธ์„  InGaAs ๊ด‘ ๊ฒ€์ถœ๊ธฐ๋ฅผ ์‚ฌ์šฉํ•˜์˜€๋‹ค. ๊ฐ€์‹œ๊ด‘/๊ทผ์ ์™ธ์„  ๋Œ€์—ญ์˜ ๋‹ค์ค‘ํŒŒ์žฅ ๊ด‘ ๊ฒ€์ถœ๊ธฐ๋ฅผ ํ˜•์„ฑํ•˜๊ธฐ ์œ„ํ•ด์„œ, GaAs ๊ด‘ ๊ฒ€์ถœ๊ธฐ๋ฅผ InGaAs ๊ด‘ ๊ฒ€์ถœ๊ธฐ ์ƒ์œผ๋กœ ๊ฐœ๋ฐœ๋œ ๊ณ ์† ์—ํ”ผํƒ์…œ ๋ฆฌํ”„ํŠธ ์˜คํ”„ ๊ธฐ๋ฒ•์„ ์‚ฌ์šฉํ•˜์—ฌ ์ „์‚ฌํ•˜์˜€๋‹ค. GaAs ๊ด‘ ๊ฒ€์ถœ๊ธฐ์™€ InGaAs ๊ด‘ ๊ฒ€์ถœ๊ธฐ๋Š” off-axis ์—†์ด ์ˆ˜์ง์œผ๋กœ ์ž˜ ์ •๋ ฌ๋˜์—ˆ์Œ์„ x-ray ๋ถ„๊ด‘๋ฒ•์„ ์ด์šฉํ•˜์—ฌ ํ™•์ธํ•˜์˜€๋‹ค. ๋˜ํ•œ, ๊ฐ๊ฐ์˜ ๊ด‘ ๊ฒ€์ถœ๊ธฐ์˜ ๊ธฐ์ค€ ์†Œ์ž๋“ค๊ณผ ๋น„๊ตํ–ˆ์„ ๋•Œ ๋น„์Šทํ•œ ์•” ์ „๋ฅ˜๊ฐ€ ๋‚˜ํƒ€๋‚ฌ๋‹ค. ๋งˆ์ง€๋ง‰์œผ๋กœ, ๋ ˆ์ด์ € ์ž…์‚ฌ๋ฅผ ํ†ตํ•ด, ๋‘ ๊ฐœ์˜ ๊ด‘ ๊ฒ€์ถœ๊ธฐ ๋Œ€ํ•œ ๊ด‘ ๋ฐ˜์‘์€ ๋ฌผ์งˆ ํŠน์„ฑ๋“ค์— ๋”ฐ๋ผ ๊ฐ€์‹œ๊ด‘๊ณผ ๊ทผ์ ์™ธ์„ ์—์„œ ๊ฐ๊ฐ ๋ช…ํ™•ํ•˜๊ฒŒ ๋‚˜ํƒ€๋‚ฌ๋‹ค. ์ด๋Ÿฌํ•œ ๊ฒฐ๊ณผ๋“ค์€ ๊ณ ์† ์—ํ”ผํƒ์…œ ๋ฆฌํ”„ํŠธ ์˜คํ”„ ๊ธฐ๋ฒ•์ด ๋†’์€ ํ”ฝ์…€ ๋ฐ€๋„ ๋ฐ ๊ฑฐ์˜ ์™„๋ฒฝํ•œ ์ˆ˜์ง ์ •๋ ฌ๋„๋ฅผ ๊ฐ–๋Š” ํ•œ ๊ธฐํŒ์ƒ์˜ ๋ฒŒํฌ ๊ธฐ๋ฐ˜์˜ ๋‹ค์ค‘ํŒŒ์žฅ ๊ด‘ ๊ฒ€์ถœ๊ธฐ๋ฅผ ์ง‘์ ํ•  ์ˆ˜ ์žˆ๋‹ค๋Š” ๊ฒƒ์„ ์˜๋ฏธํ•œ๋‹ค. ๋ฏธ๋ž˜์˜ ๋ชฉํ‘œํ•˜๋Š” ์‘์šฉ์ฒ˜์— ๋”ฐ๋ผ, ์›ํ•˜๋Š” ํŒŒ์žฅ๋“ค์„ ๊ฐ–๋Š” ๊ด‘ ๊ฒ€์ถœ๊ธฐ๋ฅผ ๋ฒŒํฌ ๊ตฌ์กฐ๋กœ ๊ฐ„๋‹จํ•˜๊ฒŒ ์„ฑ์žฅํ•  ์ˆ˜ ์žˆ๊ณ , ๋‹ค์ค‘ํŒŒ์žฅ ์ด๋ฏธ์ง• ์‹œ์Šคํ…œ์„ ์ œ์ž‘ ํ•  ์ˆ˜ ์žˆ๋‹ค.List of Figures i Chapter.1 Introduction 1 1.1 Photodetectors based on III-V compound semiconductors 1 1.2 Imaging applications 4 1.2.1. Single color imaing 4 1.2.2. Multicolor imaing 4 1.2.3. Development trend of photodetectors 5 1.3 Approches for forming multicolor photodectors 9 1.3.1. Epitaxy 9 1.3.2. Heterogeneous integration 17 1.3.3. Summary of each method 21 1.4 Overview of heterogeneous integration technology 23 1.4.1. Introduction 23 1.4.2. Direct bonding 24 1.4.3. Cold-weld bonding 26 1.4.4. Eutectic bonding 26 1.4.5. Adhesive bonding 28 1.4.7. Wafer splitting 31 1.4.8. Epitaxial lift off (ELO) 33 1.4.9. Benchmark of differenct heterogeneous intergration methods 35 1.5 Thesis overview 37 1.6 Bibliography 40 Chapter. 2 Method for heterogeneous integration of III-V compound semiconductors on other substrates 45 2.1 Introduction 45 2.1.1 The origin of low throughput in conventional ELO 46 2.1.2 Previous works for ehancement of ELO throughput 48 2.1.3 Approach: high-throughput ELO process 53 2.1.4 Experimental procedure 55 2.2 Results and discussion 57 2.3 Summary 65 2.4 Biblography 66 Chapter. 3 Verification of thin film devices by using a high throughput heterogeneous integration method 70 3.1 Introduction 70 3.2 Growth of device structures and heterogeneous integration 72 3.2.1. Device structures 72 3.2.2. Wafer bonding and ELO 74 3.3 Y2O3 bonded HEMTs on Si substrate 75 3.3.1 Fabrication process 75 3.3.2. Material characterization of HEMTs on Si 76 3.3.3. Electrical characterization of HEMTs on Si 80 3.3.4. Investigation of wafer reusability by using HEMT structure 83 3.4 Pt/Au bonded optoelectonic devices 86 3.4.1. Fabrication process of solar cells and HPTs on Si 86 3.4.2. Evaluation of Pt/Au metal bonding 88 3.4.3. Characterization of solar cells and HPTs 91 3.5 Estimation of production cost via recycling III-V wafers 95 3.6 Summary 101 3.7 Bibliography 102 Chapter. 4 Design and characterization of III-V based photodtectors 106 4.1 Introduction 106 4.1.1. The potential of Induim arsenide antimonide (InAsSb) 106 4.1.2. Challenges of InAsSb p-i-n PDs for compact detector systems 110 4.2 Barrier layer design and material characterization for growing HJPDs 113 4.2.1. Simulation of an optimum barrier layer for InAs0.8Sb0.2 113 4.2.2. Growth of a high quality InAsSb layer with an AlGaSb buffer layer grown on GaAs substrates 115 4.2.3. Ohmic contact formation with metal species 120 4.2.4. Growth and fabrication of InAsSb based HJPDs 126 4.3 Analysis of electrical and optical characteristics for fabricated PDs 129 4.4 Summary 138 4.5 Bibliography 139 Chapter. 5 Monolithic integration of visible/near-infrared photodetectors 145 5.1 Introduction 145 5.2 Fabrication process and material characterization of multicolor PD 148 5.3 Analysis of the electrical and optical characteristics of the fabricated multicolor PDs 154 5.4 Summary 163 5.5 Bibliography 164 Chapter. 6 Conclusions 169 ๊ตญ ๋ฌธ ์ดˆ ๋ก 172Docto

    Exploring Perovskite Photodiodes:Device Physics and Applications

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    Exploring Perovskite Photodiodes:Device Physics and Applications

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    PbS colloidal quantum dots based photodetectors for integrated SWIR detection

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    Due to the low water absorption and nightglow, sensing in short wave infrared (SWIR) is very attractive in applications such as; passive night vision, biomedical imaging and remote sensing. The monolithic integration of photodetectors to the readout circuits is desirable in many applications to increase density of detectors and reduce costs, system size and power consumption. Solution-processed semiconductors are a promising alternative to conventional bulk crystalline photodetectors since their production is low cost and easy, their bandgap can be tuned depending on their sizes, and they can be easily integrated on any substrate. In this work, PbS colloidal quantum dot based photodiodes are realized that are compatible with the integration on Read Out Integrated Circuits (ROIC). Various kinds of PbS quantum dots based schottky diodes are designed on glass and silicon substrates. Spin deposition steps and solid state ligand exchange processes are optimized to create pinhole free and high mobility PbS quantum dot layers. In addition to that Integrated Circuit (IC) compatible versions of PbS colloidal quantum dot (CQD) photodiodes are realized. ROIC chip surface is mimicked on Si substrates and fabrication steps are optimized for integration. Special importance is given to optimize highly conductive and transparent indium tin oxide layer using DC magnetron sputtering. Sensitivities of 1.4x1012 Jones, comparable to the conventionally used crystalline, bulk photodetectors is achieved. Also, plasmonic scattering effects of metal nanoparticles in PbS CQD layer are studied. Absorption and responsivity enhancement of 6 fold is presented using gold nanoparticles in PbS CQD based photoconductors

    III-V Quantum Structured Infrared Photodetectors Directly Grown on Silicon

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    Direct growth of III-V infrared photodetectors on silicon substrates is a promising so- lution for realising low-cost and large-format infrared focal plane arrays. However, this heteroepitaxial growth technique will generate various defects due to the dissimilarities between III-V materials and Si. These defects can severely damage the performance of a detector. In this thesis, different III-V quantum structured infrared photodetectors directly grown on Si are investigated to understand how different structures react to the defects. The experimental chapters begin with reporting an InGaAs/GaAs quantum dot infrared pho- todetector (QDIP) on Si. By utilising a Si substrate with a high degree of offcut along with dislocation filter layers, antiphase domains have been eliminated and the threading dislocation density has been reduced by โˆผ4 orders of magnitude. The QDIP shows a dual-band photoresponse at 80 K. To reduce the noise, a sub-monolayer QD quantum cascade photodetector on Si was designed. This structure has led to a distinct reduction of dark current and noise, achieving a high operating temperature of 160 K. To further boost the quantum efficiency of infrared photodetectors on Si, InAs/GaSb type-II superlattice (T2SL) photodetectors were also studied in this thesis. Generally, T2SL photodiode structures are more sensitive to material defects than QDs. Moreover, the surface leakage current contributes to a high level of dark current. InAs/GaSb T2SL photodiodes and barrier detectors have been grown on GaAs and Si substrates. Transmission electron microscopy and X-ray diffraction results confirm that the strain energy has been released at the heteroepitaxy interface and the threading dislocation density has been reduced by โˆผ3 orders of magnitude. The bulk dark current has been reduced by implementing an nBp barrier design. As a result, a T2SL nBp detector on GaAs with surface passivation has been shown to be capable of operating at 190 K without external bias. The work described in this thesis shows that there is great potential to improve the detector performance by using novel detector designs. Future work should focus on structure optimisation, as well as material quality im- provements, in order to achieve both low dark current and high quantum efficiency. High- operating temperature detectors on Si can be attempted to further explore the potential of III-V quantum structured infrared photodetectors. Specific recommendations are made for candidate structures. In order to be compatible with the mainstream Si micro-electronics industry, fabrication on (001) Si substrates will be required. Research towards this objec- tive is therefore also proposed

    Development of type II superlattice infrared detectors monolithically integrated on silicon substrates

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    The projectโ€™s objective is the development of an InAs/GaSb type II superlattice (T2SL) medium wavelength infrared photodiode directly grown on Si substrate for the use of an infrared single pixel photodiode. The T2SL has been selected as the replacement for the state-of-the-art CdHgTe (CMT). The use of Si substrate will help with the integration into the Si-based technology by reducing the fabrication process and costs. The T2SL is a photon detector with overlapping multiple quantum well structure and a type 2 bandgap alignment. The T2SL are fabricated using a combination of materials from the group III-V in order to achieve a well-controlled ultra-thin heterostructures using molecular beam epitaxy as a growth technique. The structure within the active region is designed to enhance the performance of the T2SL architecture by manipulating the thickness and doping of each layer. The direct growth of a T2SL structure on the Si substrate has achieved similar structural and optical properties when compared to that grown on the GaAs substrate. The Si architecture has an absorption edge of 5.365ฮผm when measured at 70K: dark current density at -1V is 4x101A/cm2; responsivity (R) peak is 1.2A/W; quantum efficiency (QE) at -0.1V is 32.5%; and specific detectivity (D*) peak is 1x109cmHzยฝ/W. The pฯ€Bn has best architecture over GaAs substrate due to the wide bandgap unipolar barrier. The pฯ€Bn has an absorption edge of 6.5 ฮผm when measured at 77K: dark current density under -0.6V is 5x10-3A/cm2; R peak is 0.6A/W; QE at 0V and 3.25ฮผm is 23%; and D* peak is 1x1011cmHzยฝ/W. These results demonstrate that the D* of the pฯ€Bn structure is just one order of magnitude smaller than the state-of-the-art CMT detector which is 2x1012cmHz1/2W

    Road Map for Nanocrystal Based Infrared Photodetectors

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    Infrared (IR) sensors based on epitaxially grown semiconductors face two main challenges which are their prohibitive cost and the difficulty to rise the operating temperature. The quest for alternative technologies which will tackle these two difficulties requires the development of new IR active materials. Over the past decade, significant progresses have been achieved. In this perspective, we summarize the current state of the art relative to nanocrystal based IR sensing and stress the main materials, devices and industrial challenges which will have to be addressed over the 5 next years
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