Développement de procédés avancés d'encapsulation de composants microélectroniques basés sur les techniques de thermocompression

L'un des grands défis de la recherche et développement est d'optimiser l'ensemble du cycle de fabrication d'un produit microélectronique, depuis sa conception jusqu’à sa tenue mécanique en service. Un objectif essentiel des entreprises était de réduire le temps de cycles d’assemblage afin de minimiser les coûts de production. La phase d’assemblage des composants microélectroniques est l'une des étapes clé qui doit être bien optimisée afin d’atteindre l’objectif de minimisation du temps de cycle. La méthode d'assemblage traditionnelle des puces par refusion (en anglais mass reflow MR) convenait généralement à une fabrication à grand volume, en particulier pour des puces à pas standard d'environ 150 μm. Cependant, la forte demande du marché pour des interconnexions à pas plus fin, pour permettre un nombre d'entrée/sortie (Input/Output : I/O) plus élevé dans un facteur de forme plus petit, a entraîné une transition du processus de la liaison MR conventionnel à l'assemblage par thermocompression (en anglais ThermoCompression Bonding TCB). Bien que le procédé TCB offre un assemblage de plus grande précision et permet l'utilisation des pas d'interconnexion plus fins, il présente également de nouveaux défis. L'un des problèmes majeurs de l'assemblage TCB est qu'il s'agit d'un processus assez long, dans lequel chaque puce doit être passée indépendamment à travers un cycle TCB complet, incluant le chauffage, le maintien de la température et le refroidissement. Cela entraîne une diminution significative de la productivité par rapport au MR. Le débit de production peut être amélioré en réduisant le temps nécessaire pour atteindre les températures de processus requises. Cependant, des variations thermiques peuvent se produire aux interfaces de liaison, entraînant une mauvaise uniformité de température sur la surface de la puce et conduisant à des régions où le point de fusion de la brasure n'est pas atteint. Ainsi, il est extrêmement important de prévoir et contrôler la température réelle à l'interface de liaison afin d’obtenir une bonne uniformité thermique et des joints de brasure sans défaut. C'est dans cette perspective que s'inscrit les travaux menés dans la première partie de la thèse. Le premier objectif de cette étude était donc de déterminer la durée minimum de temps de chauffe nécessaire assurant une uniformité de température optimal et par conséquent des joints de brasure de bonne qualité. Pour atteindre cet objectif, il fallait alors proposer et valider une nouvelle méthodologie pour estimer la température d'interface lors d'un processus TCB. Une évaluation de l'influence de différentes vitesses de chauffe sur la distribution de température à travers la surface de la puce, ainsi que sur la qualité de liaison résultante, a été réalisée à l’aide d’un capteur de type RTD (). Les résultats ont montré que les défauts de brasure observés aux interfaces de liaison peuvent éventuellement être liés à une mauvaise uniformité de température, liée à des vitesses de chauffe élevées. Des variations thermiques acceptables ont été trouvées à une faible vitesse de chauffage de 80°C/s. Par conséquent, pour surmonter les températures de processus élevées et leurs effets néfastes sur la productivité, le développement d'une nouvelle méthode d’assemblage TCB à basse température devient primordiale. Le développement d’une nouvelle méthode de liaison par thermocompression à l'état solide détecteur de température résistif, Resistance Temperature Detector en anglais était donc notre second objectif dans cette étude. Cette méthode est basée sur la création d'une liaison mécanique temporaire initiale au début du processus de packaging (en utilisant une pression à une température inférieure au point de fusion de la brasure). Les joints de iv brasure seront entièrement refondus à la fin du processus de packaging, lorsque les billes de brasure BGA (ball-grid-array) seront brasées au substrat. Cette nouvelle méthode peut surmonter les limitations associées au processus TCB conventionnel, notamment la température élevée, le processus d'assemblage lent et les contraintes mécaniques élevées. Une investigation a été menée pour déterminer les conditions d'assemblage appropriées à appliquer pendant ce processus. Des investigations supplémentaires ont été également menées pour explorer le mécanisme d'assemblage responsable de l’assemblage mécanique temporaire. Les résultats préliminaires de cette méthode sont prometteurs, montrant des joints de brasure de bonne qualité formés en un temps d'assemblage très court (6 secondes) et à des températures bien inférieures au TCB conventionnel (200°C)

Properties and behaviour of Pb-free solders in flip-chip scale solder interconnections

Due to pending legislations and market pressure, lead-free solders will replace Sn–Pb solders in 2006. Among the lead-free solders being studied, eutectic Sn–Ag, Sn–Cu and Sn–Ag–Cu are promising candidates and Sn–3.8Ag–0.7Cu could be the most appropriate replacement due to its overall balance of properties. In order to garner more understanding of lead-free solders and their application in flip-chip scale packages, the properties of lead free solders, including the wettability, intermetallic compound (IMC) growth and distribution, mechanical properties, reliability and corrosion resistance, were studied and are presented in this thesis. [Continues.

All-copper chip-to-substrate interconnects for high performance integrated circuit devices

In this work, all-copper connections between silicon microchips and substrates are developed. The semiconductor industry advances the transistor density on a microchip based on the roadmap set by Moore's Law. Communicating with a microprocessor which has nearly one billion transistors is a daunting challenge. Interconnects from the chip to the system (i.e. memory, graphics, drives, power supply) are rapidly growing in number and becoming a serious concern. Specifically, the solder ball connections that are formed between the chip itself and the package are challenging to make and still have acceptable electrical and mechanical performance. These connections are being required to increase in number, increase in power current density, and increase in off-chip operating frequency. Many of the challenges with using solder connections are limiting these areas. In order to advance beyond the limitations of solder for electrical and mechanical performance, a novel approach to creating all-copper connections from the chip-to-substrate has been developed. The development included characterizing the electroless plating and annealing process used to create the connections, designing these connections to be compatible with the stress requirements for fragile low-k devices, and finally by improving the plating/annealing process to become process time competitive with solder. It was found that using a commercially available electroless copper bath for the plating, followed by annealing at 180 C for 1 hour, the shear strength of the copper-copper bond was approximately 165 MPa. This work resulted in many significant conclusions about the mechanism for bonding in the all-copper process and the significance of materials and geometry on the mechanical design for these connections.Ph.D.Committee Chair: Kohl, Paul; Committee Member: Bidstrup Allen, Sue Ann; Committee Member: Fuller, Thomas; Committee Member: Hesketh, Peter; Committee Member: Hess, Dennis; Committee Member: Meindl, Jame

Effects of underfill material on solder deformation and damage in 3D packages

This paper will examine the effects of the introduction of a periodic boundary condition and the presence of underfill material on the stress and strain fields and evolution of failure of an FEA model that is representative of a solder joint in a 3D IC package. The model solder joint is placed between two silicon substrates in contact with through-silicon vias without any other devices or components attached. Differing solder joint thicknesses, both with and without underfill, will be examined to study the effect on the stress and strain fields as well as the evolution of failure in the solder joint. A dynamic loading on the FEA model will be used to examine the fracture pattern and mode of failure when the solder thickness is varied both with and without underfill material present

Bed of nails(B0N) - 100 microns pitch wafer level off-chip interconnects for microelectronic packaging applications

Master'sMASTER OF ENGINEERIN

Peripheral soldering of flip chip joints on passive RFID tags

Flip chip is the main component of a RFID tag. It is used in billions each year in electronic packaging industries because of its small size, high performance and reliability as well as low cost. They are used in microprocessors, cell phones, watches and automobiles. RFID tags are applied to or incorporated into a product, animal, or person for identification and tracking using radio waves. Some tags can be read from several meters away or even beyond the line of sight of the reader. Passive RFID tags are the most common type in use that employ external power source to transmit signals. Joining chips by laser beam welding have wide advantages over other methods of joining, but they are seen limited to transparent substrates. However, connecting solder bumps with anisotropic conductive adhesives (ACA) produces majority of the joints. A high percentage of them fail in couple of months, particularly when exposed to vibration. In the present work, failure of RFID tags under dynamic loading or vibration was studied; as it was identified as one of the key issue to explore. Earlier investigators focused more on joining chip to the bump, but less on its assembly, i.e., attaching to the substrate. Either of the joints, between chip and bump or between antenna and bump can fail. However, the latter is more vulnerable to failure. Antenna is attached to substrate, relatively fixed when subjected to oscillation. It is the flip chip not the antenna moves during vibration. So, the joint with antenna suffers higher stresses. In addition to this, the strength of the bonding agent i.e., ACA also much smaller compared to the metallic bond at the other end of the bump. Natural frequency of RFID tags was calculated both analytically and numerically, found to be in kilohertz range, high enough to cause resonance. Experimental investigations were also carried out to determine the same. However, the test results for frequency were seen to be in hundred hertz range, common to some applications. It was recognized that the adhesive material, commonly used for joining chips, was primarily accountable for their failures. Since components to which the RFID tags are attached to experience low frequency vibration, chip joints fail as they face resonance during oscillation. Adhesives having much lower modulus than metals are used for attaching bumps to the substrate antennas, and thus mostly responsible for this reduction in natural frequency. Poor adhesive bonding strength at the interface and possible rise in temperature were attributed to failures under vibration. In order to overcome the early failure of RFID tag joints, Peripheral Soldering, an alternative chip joining method was devised. Peripheral Soldering would replace the traditional adhesive joining by bonding the peripheral surface of the bump to the substrate antenna. Instead of joining solder bump directly to the antenna, holes are to be drilled through antenna and substrate. S-bond material, a less familiar but more compatible with aluminum and copper, would be poured in liquid form through the holes on the chip pad. However, substrates compatible to high temperature are to be used; otherwise temperature control would be necessary to avoid damage to substrate. This S-bond would form metallic joints between chip and antenna. Having higher strength and better adhesion property, S-bond material provides better bonding capability. The strength of a chip joined by Peripheral Soldering was determined by analytical, numerical and experimental studies. Strength results were then compared to those of ACA. For a pad size of 60 micron on a 0.5 mm square chip, the new chip joints with Sbond provide an average strength of 0.233N analytically. Numerical results using finite element analysis in ANSYS 11.0 were about 1% less than the closed form solutions. Whereas, ACA connected joints show the maximum strength of 0.113N analytically and 0.1N numerically. Both the estimates indicate Peripheral Soldering is more than twice stronger than adhesive joints. Experimental investigation was carried out to find the strength attained with S-bond by joining similar surfaces as those of chip pad and antenna, but in larger scale due to limitation in facilities. Results obtained were moderated to incorporate the effect of size. Findings authenticate earlier predictions of superior strengths with S-bond. A comparison with ACA strength, extracted from previous investigations, further indicates that S-bond joints are more than 10 times stronger. Having higher bonding strength than in ACA joints, Peripheral Soldering would provide better reliability of the chip connections, i.e., RFID tags. The benefits attained would pay off complexities involved in tweaking

Ultra thin ultrafine-pitch chip-package interconnections for embedded chip last approach

Ever growing demands for portability and functionality have always governed the electronic technology innovations. IC downscaling with Moore s law and system miniaturization with System-On-Package (SOP) paradigm has resulted and will continue to result in ultraminiaturized systems with unprecedented functionality at reduced cost. The trend towards 3D silicon system integration is expected to downscale IC I/O pad pitches from 40µm to 1- 5 µm in future. Device- to- system board interconnections are typically accomplished today with either wire bonding or solders. Both of these are incremental and run into either electrical or mechanical barriers as they are extended to higher density of interconnections. Alternate interconnection approaches such as compliant interconnects typically require lengthy connections and are therefore limited in terms of electrical properties, although expected to meet the mechanical requirements. As supply currents will increase upto 220 A by 2012, the current density will exceed the maximum allowable current density of solders. The intrinsic delay and electromigration in solders are other daunting issues that become critical at nanometer size technology nodes. In addition, formation of intermetallics is also a bottleneck that poses significant mechanical issues. Recently, many research groups have investigated various techniques for copper-copper direct bonding. Typically, bonding is carried out at 400oC for 30 min followed by annealing for 30 min. High thermal budget in such process makes it less attractive for integrated systems because of the associated process incompatibilities. In the present study, copper-copper bonding at ultra fine-pitch using advanced nano-conductive and non-conductive adhesives is evaluated. The proposed copper-copper based interconnects using advanced conductive and non-conductive adhesives will be a new fundamental and comprehensive paradigm to solve all the four barriers: 1) I/O pitch 2) Electrical performance 3) Reliability and 4) Cost. This thesis investigates the mechanical integrity and reliability of copper-copper bonding using advanced adhesives through test vehicle fabrication and reliability testing. Test vehicles were fabricated using low cost electro-deposition techniques and assembled onto glass carrier. Experimental results show that proposed copper-copper bonding using advanced adhesives could potentially meet all the system performance requirements for the emerging micro/nano-systems.M.S.Committee Chair: Prof. Rao R Tummala; Committee Member: Dr. Jack Moon; Committee Member: Dr. P M Ra

Dynamic Mechanical and Failure Properties of Solder Joints

Ph.DDOCTOR OF PHILOSOPH

Novel fine pitch interconnection methods using metallised polymer spheres

There is an ongoing demand for electronics devices with more functionality while reducing size and cost, for example smart phones and tablet personal computers. This requirement has led to significantly higher integrated circuit input/output densities and therefore the need for off-chip interconnection pitch reduction. Flip-chip processes utilising anisotropic conductive adhesives anisotropic conductive films (ACAs/ACFs) have been successfully applied in liquid crystal display (LCD) interconnection for more than two decades. However the conflict between the need for a high particle density, to ensure sufficient the conductivity, without increasing the probability of short circuits has remained an issue since the initial utilization of ACAs/ACFs for interconnection. But this issue has become even more severe with the challenge of ultra-fine pitch interconnection. This thesis advances a potential solution to this challenge where the conductive particles typically used in ACAs are selectively deposited onto the connections ensuring conductivity without bridging. The research presented in this thesis work has been undertaken to advance the fundamental understanding of the mechanical characteristics of micro-sized metal coated polymer particles (MCPs) and their application in fine or ultra-fine pitch interconnections. This included use of a new technique based on an in-situ nanomechanical system within SEM which was utilised to study MCP fracture and failure when undergoing deformation. Different loading conditions were applied to both uncoated polymer particles and MCPs, and the in-situ system enables their observation throughout compression. The results showed that both the polymer particles and MCP display viscoelastic characteristics with clear strain-rate hardening behaviour, and that the rate of compression therefore influences the initiation of cracks and their propagation direction. Selective particle deposition using electrophoretic deposition (EPD) and magnetic deposition (MD) of Ni/Au-MCPs have been evaluated and a fine or ultra-fine pitch deposition has been demonstrated, followed by a subsequent assembly process. The MCPs were successfully positively charged using metal cations and this charging mechanism was analysed. A new theory has been proposed to explain the assembly mechanism of EPD of Ni/Au coated particles using this metal cation based charging method. The magnetic deposition experiments showed that sufficient magnetostatic interaction force between the magnetized particles and pads enables a highly selective dense deposition of particles. Successful bonding to form conductive interconnections with pre-deposited particles have been demonstrated using a thermocompression flip-chip bonder, which illustrates the applicable capability of EPD of MCPs for fine or ultra-fine pitch interconnection

Ball lens embedded through-package via to enable backside coupling between silicon photonics interposer and board-level interconnects

Development of an efficient and densely integrated optical coupling interface for silicon photonics based board-level optical interconnects is one of the key challenges in the domain of 2.5D/3D electro-optic integration. Enabling high-speed on-chip electro-optic conversion and efficient optical transmission across package/board-level short-reach interconnections can help overcome the limitations of a conventional electrical I/O in terms of bandwidth density and power consumption in a high-performance computing environment. In this context, we have demonstrated a novel optical coupling interface to integrate silicon photonics with board-level optical interconnects. We show that by integrating a ball lens in a via drilled in an organic package substrate, the optical beam diffracted from a downward directionality grating on a photonics chip can be coupled to a board-level polymer multimode waveguide with a good alignment tolerance. A key result from the experiment was a 14 chip-to-package 1-dB lateral alignment tolerance for coupling into a polymer waveguide with a cross-section of 20 x 25. An in-depth analysis of loss distribution across several interfaces was done and a -3.4 dB coupling efficiency was measured between the optical interface comprising of output grating, ball lens and polymer waveguide. Furthermore, it is shown that an efficiency better than -2 dB can be achieved by tweaking few parameters in the coupling interface. The fabrication of the optical interfaces and related measurements are reported and verified with simulation results