Modeling of quad-station module cluster tools using petri nets

The semiconductor industry is highly competitive, and with the recent chip shortage, the throughput of wafers has become more important than ever. One of the tools that the industry has deployed is to use of quad-station modules instead of the traditional single-station modules that allow for higher throughput and better wafer consistency by processing multiple wafers at the same time and distributing work. The industry trend is to use multiple transfer chamber robots to stack the quad-station modules in a series, particularly for etch products. In this work, the quad-station cluster tool wafer movement is modeled by using Petri net as a process-bounded system. The system analysis and simulations are performed by using timed and colored Petri nets. The results are useful to deepen our understanding of the discrete-event dynamics of quad-station module cluster tools and offer the highly needed insight into their efficient and deadlock-free operation

Complexity theory in axiomatic design

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.Includes bibliographical references (p. 177-182).During the last couple of decades, the term complexity has been commonly found in use in many fields of science, sometimes as a measurable quantity with a rigorous but narrow definition and other times as merely an ad hoc label. With an emphasis on pragmatic engineering applications, this thesis investigates the complexity concept defined in axiomatic design theory to avoid vague use of the term 'complexity' in engineering system design, to provide deeper insight into possible causes of complexity, and to develop a systematic approach to complexity reduction. The complexity concept in axiomatic design theory is defined as a measure of uncertainty in achieving a desired set of functional requirements. In this thesis, it is revisited to refine its definition. Four different types of complexity are identified in axiomatic design complexity theory: time-independent real complexity, time-independent imaginary complexity, time-dependent combinatorial complexity and time-dependent periodic complexity. Time-independent real complexity is equivalent to the information content, which is a measure of a probability of achieving functional requirements. Time-independent imaginary complexity is defined as the uncertainty due to ignorance of the interactions between functional requirements and design parameters. Time-dependent complexity consists of combinatorial complexity and periodic complexity, depending on whether the uncertainty increases indefinitely or occasionally stops increasing at certain point and returns to the initial level of uncertainty. In this thesis, existing definitions for each of the types of complexity are further elaborated with a focus on time-dependent complexity. In particular, time-dependent complexity is clearly defined using the concepts of time-varying system ranges and time-dependent sets of functional requirements.(cont.) Clear definition of the complexity concept that properly addresses the causes of complexity leads to a systematic approach for complexity reduction. As techniques for reducing time-independent complexity are known within and beyond axiomatic design theory, this thesis focuses on dealing with time-dependent complexity. From the definition of time-dependent complexity, combinatorial complexity must be transformed into periodic complexity to prevent the uncertainty from growing unboundedly. Time-dependence of complexity is attributed to two factors. One is a time-varying system range and the other is a time-dependent set of functional requirements. This thesis shows that achieving periodicity in time-varying system ranges and maintaining functional periodicity of time-dependent sets of functional requirements prevent a system from developing time-dependent combinatorial complexity. Following this argument, a re-initialization concept as a means to achieve and maintain periodicity is presented. Three examples are drawn from different fields, tribology, manufacturing system, and the cell biology, to support the periodicity argument and illustrate the re-initialization concept.by Taesik Lee.Ph.D

Intelligent production control for time-constrained complex job shops

Im Zuge der zunehmenden Komplexität der Produktion wird der Wunsch nach einer intelligenten Steuerung der Abläufe in der Fertigung immer größer. Sogenannte Complex Job Shops bezeichnen dabei die komplexesten Produktionsumgebungen, die deshalb ein hohes Maß an Agilität in der Steuerung erfordern. Unter diesen Umgebungen sticht die besonders Halbleiterfertigung hervor, da sie alle Komplexitäten eines Complex Job-Shop vereint. Deshalb ist die operative Exzellenz der Schlüssel zum Erfolg in der Halbleiterindustrie. Diese Exzellenz hängt ganz entscheidend von einer intelligenten Produktionssteuerung ab. Ein Hauptproblem bei der Steuerung solcher Complex Job-Shops, in diesem Fall der Halbleiterfertigung, ist das Vorhandensein von Zeitbeschränkungen (sog. time-constraints), die die Transitionszeit von Produkten zwischen zwei, meist aufeinanderfolgenden, Prozessen begrenzen. Die Einhaltung dieser produktspezifischen Zeitvorgaben ist von größter Bedeutung, da Verstöße zum Verlust des betreffenden Produkts führen. Der Stand der Technik bei der Produktionssteuerung dieser Dispositionsentscheidungen, die auf die Einhaltung der Zeitvorgaben abzielen, basiert auf einer fehleranfälligen und für die Mitarbeiter belastenden manuellen Steuerung. In dieser Arbeit wird daher ein neuartiger, echtzeitdatenbasierter Ansatz zur intelligenten Steuerung der Produktionssteuerung für time-constrained Complex Job Shops vorgestellt. Unter Verwendung einer jederzeit aktuellen Replikation des realen Systems werden sowohl je ein uni-, multivariates Zeitreihenmodell als auch ein digitaler Zwilling genutzt, um Vorhersagen über die Verletzung dieser time-constraints zu erhalten. In einem zweiten Schritt wird auf der Grundlage der Erwartung von Zeitüberschreitungen die Produktionssteuerung abgeleitet und mit Echtzeitdaten anhand eines realen Halbleiterwerks implementiert. Der daraus resultierende Ansatz wird gemeinsam mit dem Stand der Technik validiert und zeigt signifikante Verbesserungen, da viele Verletzungen von time-constraints verhindert werden können. Zukünftig soll die intelligente Produktionssteuerung daher in weiteren Complex Job Shop-Umgebungen evaluiert und ausgerollt werden

Technology 2001: The Second National Technology Transfer Conference and Exposition, volume 2

Proceedings of the workshop are presented. The mission of the conference was to transfer advanced technologies developed by the Federal government, its contractors, and other high-tech organizations to U.S. industries for their use in developing new or improved products and processes. Volume two presents papers on the following topics: materials science, robotics, test and measurement, advanced manufacturing, artificial intelligence, biotechnology, electronics, and software engineering

Seventh Annual Workshop on Space Operations Applications and Research (SOAR 1993), volume 1

This document contains papers presented at the Space Operations, Applications and Research Symposium (SOAR) Symposium hosted by NASA/Johnson Space Center (JSC) on August 3-5, 1993, and held at JSC Gilruth Recreation Center. SOAR included NASA and USAF programmatic overview, plenary session, panel discussions, panel sessions, and exhibits. It invited technical papers in support of U.S. Army, U.S. Navy, Department of Energy, NASA, and USAF programs in the following areas: robotics and telepresence, automation and intelligent systems, human factors, life support, and space maintenance and servicing. SOAR was concerned with Government-sponsored research and development relevant to aerospace operations. More than 100 technical papers, 17 exhibits, a plenary session, several panel discussions, and several keynote speeches were included in SOAR '93

Fourth NASA Goddard Conference on Mass Storage Systems and Technologies

This report contains copies of all those technical papers received in time for publication just prior to the Fourth Goddard Conference on Mass Storage and Technologies, held March 28-30, 1995, at the University of Maryland, University College Conference Center, in College Park, Maryland. This series of conferences continues to serve as a unique medium for the exchange of information on topics relating to the ingestion and management of substantial amounts of data and the attendant problems involved. This year's discussion topics include new storage technology, stability of recorded media, performance studies, storage system solutions, the National Information infrastructure (Infobahn), the future for storage technology, and lessons learned from various projects. There also will be an update on the IEEE Mass Storage System Reference Model Version 5, on which the final vote was taken in July 1994

Graduate Catalog, 1999-2002, New Jersey Institute of Technology

https://digitalcommons.njit.edu/coursecatalogs/1004/thumbnail.jp

Space station data system analysis/architecture study. Task 2: Options development, DR-5. Volume 2: Design options

The primary objective of Task 2 is the development of an information base that will support the conduct of trade studies and provide sufficient data to make key design/programmatic decisions. This includes: (1) the establishment of option categories that are most likely to influence Space Station Data System (SSDS) definition; (2) the identification of preferred options in each category; and (3) the characterization of these options with respect to performance attributes, constraints, cost and risk. This volume contains the options development for the design category. This category comprises alternative structures, configurations and techniques that can be used to develop designs that are responsive to the SSDS requirements. The specific areas discussed are software, including data base management and distributed operating systems; system architecture, including fault tolerance and system growth/automation/autonomy and system interfaces; time management; and system security/privacy. Also discussed are space communications and local area networking

Reports to the President

A compilation of annual reports for the 1985-1986 academic year, including a report from the President of the Massachusetts Institute of Technology, as well as reports from the academic and administrative units of the Institute. The reports outline the year's goals, accomplishments, honors and awards, and future plans