Photoacoustic-based gas sensing: A review

The use of the photoacoustic effect to gauge the concentration of gases is an attractive alternative in the realm of optical detection methods. Even though the effect has been applied for gas sensing for almost a century, its potential for ultra-sensitive and miniaturized devices is still not fully explored. This review article revisits two fundamentally different setups commonly used to build photoacoustic-based gas sensors and presents some distinguished results in terms of sensitivity, ultra-low detection limits, and miniaturization. The review contrasts the two setups in terms of the respective possibilities to tune the selectivity, sensitivity, and potential for miniaturization.S.P. acknowledges funding from the Community of Madrid under grant number 2016-T1/AMB-1695

Doubly resonant photoacoustic spectroscopy: ultra-high sensitivity meets ultra-wide dynamic range

Photoacoustic spectroscopy (PAS) based gas sensors with high sensitivity, wide dynamic range, low cost, and small footprint are desirable across a broad range of applications in energy, environment, safety, and public health. However, most works have focused on either acoustic resonator to enhance acoustic wave or optical resonator to enhance optical wave. Herein, we develop a gas sensor based on doubly resonant PAS in which the acoustic and optical waves are simultaneously enhanced using combined optical and acoustic resonators in a centimeter-long configuration. Not only the lower detection limit is enhanced by the double standing waves, but also the upper detection limit is expanded due to the short resonators. As an example, we developed a sensor by detecting acetylene (C2H2), achieving a noise equivalent absorption of 5.7*10-13 cm-1 and a dynamic range of eight orders. Compared to the state-of-the-art PAS gas sensors, the developed sensor increases the sensitivity by two orders of magnitude and extends the dynamic range by three orders of magnitude. Besides, a laser-cavity-molecule locking strategy is proposed to provide additional flexibility of fast gas detection

A theoretical-experimental framework for the analysis of the dynamic response of a QEPAS tuning fork device immersed in a fluid medium

Quartz-enhanced photoacoustic spectroscopy (QEPAS) is a trace gas sensing technique that employs a designed high-quality factor quartz tuning fork (QTF) as acousto-electric transducer. The first in-plane skew-symmetric flexural mode of the QTF is excited when weak resonant sound waves are generated between the QTF prongs. Thus, the performance of a QEPAS sensor strongly depends on the resonance properties of the QTF, namely the determination of flexural eigenfrequencies and air damping loss. In this work, we present a mixed theoretical-experimental framework to study the dynamic response of a QTF while vibrating in a fluid environment. Due to the system linearity, the dynamic response of the resonator immersed in a fluid medium is obtained by employing a Boundary Element formulation based on an ad hoc calculated Green's function. In particular, the QTF is modelled as constituted by a pair of two Euler-Bernoulli cantilevers partially coupled by a distributed linear spring. As for the forces exerted by the fluid on QTF structure, the fluid inertia and viscosity as well as an additional diffusivity term, whose influence is crucial for the correct evaluation of the system response, have been taken into account. By corroborating the theoretical analysis with the experimental outcomes obtained by means of a vibro-acoustic setup, the fluid response coefficients and the dynamics of the QTF immersed in a fluid environment are fully determined

MEMS-Based Terahertz Photoacoustic Chemical Sensing System

Advancements in microelectromechanical system (MEMS) technology over the last several decades has been a driving force behind miniaturizing and improving sensor designs. In this work, a specialized cantilever pressure sensor was designed, modeled, and fabricated to investigate the photoacoustic (PA) response of gases to terahertz (THz) radiation under low-vacuum conditions associated with high-resolution spectroscopy. Microfabricated cantilever devices made using silicon-on-insulator (SOI) wafers were tested in a custom-built test chamber in this first ever demonstration of a cantilever-based PA chemical sensor and spectroscopy system in the THz frequency regime. The THz radiation source was amplitude modulated to excite acoustic waves in the chamber, and PA molecular spectroscopy of a gas species was performed. An optical measurement technique was used to evaluate the PA effect on the cantilever sensor; a laser beam was reflected off the cantilever tip and through an iris to a photodiode. As the cantilever movement deflected the laser beam, the beam was clipped by an iris and generated the PA signal. Experimental data indicated a predominantly linear response in signal amplitude from the photodiode measurement technique, which directly correlated to measured cantilever deflections. Using the custom-designed PA chamber and MEMS cantilever sensor, excellent low-pressure PA spectral data of methyl cyanide (CH3CN) at 2 to 40 mTorr range has been obtained. At low chamber pressures, the sensitivity of our system was 1.97 × 10−5 cm−1 and had an excellent normalized noise equivalent absorption (NNEA) coefficient of 1.39 × 10−9 cm−1 W Hz-½ using a 0.5 s signal averaging time

Quartz Enhanced Photoacoustic Spectroscopy Based on a Custom Quartz Tuning Fork.

We have designed and fabricated a custom quartz tuning fork (QTF) with a reduced fundamental frequency; a larger gap between the prongs; and the best quality factor in air at atmospheric conditions ever reported, to our knowledge. Acoustic microresonators have been added to the QTF in order to enhance the sensor sensitivity. We demonstrate a normalized noise equivalent absorption (NNEA) of 3.7 × 10-9 W.cm-1.Hz-1/2 for CO₂ detection at atmospheric pressure. The influence of the inner diameter and length of the microresonators has been studied, as well as the penetration depth between the QTF's prongs. We investigated the acoustic isolation of our system and measured the Allan deviation of the sensor

Multi-quartz-enhanced photoacoustic spectroscopy

A multi-quartz-enhanced photoacoustic spectroscopy (M-QEPAS) sensor system for trace gas detection is reported. Instead of a single quartz tuning fork (QTF) as used in QEPAS technique, a dual QTF sensor platform was adopted in M-QEPAS to increase the signal strength by the addition of the detected QEPAS signals. Water vapor was selected as the target analyte. M-QEPAS realized a 1.7 times signal enhancement as compared to the QEPAS method for the same operating conditions. A minimum detection limit of 23.9 ppmv was achieved for the M-QEPAS sensor, with a calculated normalized noise equivalent absorption coefficient of 5.95 × 10−8 cm−1W/√Hz. The M-QEPAS sensor performance can be further improved when more QTFs are employed or an acoustic micro-resonator architecture is used

Compact all-fiber quartz-enhanced photoacoustic spectroscopy sensor with a 30.72 kHz quartz tuning fork and spatially resolved trace gas detection

An ultra compact all-fiber quartz-enhanced photoacoustic spectroscopy (QEPAS) sensor using quartz tuning fork (QTF) with a low resonance frequency of 30.72 kHz was demonstrated. Such a sensor architecture has the advantages of easier optical alignment, lower insertion loss, lower cost, and more compact compared with a conventional QEPAS sensor using discrete optical components for laser delivery and coupling to the QTF. A fiber beam splitter and three QTFs were employed to perform multi-point detection and demonstrated the potential of spatially resolved measurements

Single-tube on-beam quartz-enhanced photoacoustic spectroscopy.

Quartz-enhanced photoacoustic spectroscopy (QEPAS) with a single-tube acoustic microresonator (AmR) inserted between the prongs of a custom quartz tuning fork (QTF) was developed, investigated, and optimized experimentally. Due to the high acoustic coupling efficiency between the AmR and the QTF, the single-tube on-beam QEPAS spectrophone configuration improves the detection sensitivity by 2 orders of magnitude compared to a bare QTF. This approach significantly reduces the spectrophone size with respect to the traditional on-beam spectrophone configuration, thereby facilitating the laser beam alignment. A 1σ normalized noise equivalent absorption coefficient of 1.21×10(-8) cm(-1)·W/√Hz was obtained for dry CO2 detection at normal atmospheric pressure

QEPAS based ppb-level detection of CO and N2O using a high power CW DFB-QCL

An ultra-sensitive and selective quartz-enhanced photoacoustic spectroscopy (QEPAS) sensor platform was demonstrated for detection of carbon monoxide (CO) and nitrous oxide (N2O). This sensor used a stateof- the art 4.61 μm high power, continuous wave (CW), distributed feedback quantum cascade laser (DFB-QCL) operating at 10°C as the excitation source. For the R(6) CO absorption line, located at 2169.2 cm−1, a minimum detection limit (MDL) of 1.5 parts per billion by volume (ppbv) at atmospheric pressure was achieved with a 1 sec acquisition time and the addition of 2.6% water vapor concentration in the analyzed gas mixture. For the N2O detection, a MDL of 23 ppbv was obtained at an optimum gas pressure of 100 Torr and with the same water vapor content of 2.6%. In both cases the presence of water vapor increases the detected CO and N2O QEPAS signal levels as a result of enhancing the vibrational-translational relaxation rate of both target gases. Allan deviation analyses were performed to investigate the long term performance of the CO and N2O QEPAS sensor systems. For the optimum data acquisition time of 500 sec a MDL of 340 pptv and 4 ppbv was obtained for CO and N2O detection, respectively. To demonstrate reliable and robust operation of the QEPAS sensor a continuous monitoring of atmospheric CO and N2O concentration levels for a period of 5 hours were performed