741 research outputs found
Transfer-free graphene passivation of sub 100 nm thin Pt and PtโCu electrodes for memristive devices
Memristive switches are among the most promising building blocks for future neuromorphic computing. These devices are based on a complex interplay of redox reactions on the nanoscale. Nanoionic phenomena enable non-linear and low-power resistance transition in ultra-short programming times. However, when not controlled, the same electrochemical reactions can result in device degradation and instability over time. Two-dimensional barriers have been suggested to precisely manipulate the nanoionic processes. But fabrication-friendly integration of these materials in memristive devices is challenging.Here we report on a novel process for graphene passivation of thin platinum and platinum/copper electrodes. We also studied the level of defects of graphene after deposition of selected oxides that are relevant for memristive switching
Hybrid 2DโCMOS microchips for memristive applications
Ministry of Science and Technology
of China (grant nos. 2019YFE0124200 and 2018YFE0100800)National Natural Science
Foundation of China (grant no. 61874075)Baseline funding scheme of the King
Abdullah University of Science and Technolog
Investigation of Bipolar Resistive Switching Characteristics with Silicon Nitride device and bi-layer application by introducing the Al2O3 barrier layer
ํ์๋
ผ๋ฌธ (๋ฐ์ฌ) -- ์์ธ๋ํ๊ต ๋ํ์ : ๊ณต๊ณผ๋ํ ์ฌ๋ฃ๊ณตํ๋ถ(ํ์ด๋ธ๋ฆฌ๋ ์ฌ๋ฃ), 2020. 8. ํฉ์ฒ ์ฑ.The resistance switching random access memory (ReRAM), which changes the resistance state of the device by the external electrical stimulation, is one of the promising candidates for a next-generation nonvolatile memory. Due to its simple metal-insulator-metal (MIM) structure, low power consumption, scalability, and complementary metal-oxide-semiconductor compatibility, ReRAM has been attracted enormous attention as a highly integrated memory to replace NAND flash memory. The transition metal oxides, such as NiO, TiO2, HfO2, and Ta2O5, were the main focus on the ReRAM device fabrication and mechanism analysis. On the other hand, the insulating nitride films, such as silicon nitride (Si3N4), have no reason for not being regarded as the feasible ReRAM material. In fact, the Si:N ratio of Si3N4 can be readily controlled to induce defects inside the film, which is already in massive use for charge-trap layer in NAND flash memory. The defect generation and possible percolation of the defects to form the so-called conducting filament (CF) is the main mechanism for the fluent ReRAM performance. Therefore, N-deficient Si3N4, i.e., Si3N4-x, can be a feasible resistance switching (RS) material.
In the first part of this study, a bipolar resistive switching (BRS) property of a Si3N4-x thin film depending N-deficiency was investigated with Pt/Si3N4-x/TiN devices with various NH3 gas flow rate during plasma enhanced chemical vapor deposition process of Si3N4-x thin film. By X-ray photo-electron spectroscopy analysis, it was confirmed that the fraction of nitrogen element in Si3N4-x thin film decreased as NH3 gas flow rate decreased and the degree of N-deficiency could be controlled by changing NH3 gas flow rate. The change of N-deficiency affected the current-voltage (I-V) characteristics of Si3N4-x thin film, and the behavior of BRS and the optimized condition could be achieved. In addition, the series line resistance of Pt/TiN electrode was attributed to the self-compliance behavior, having a stable BRS behavior even without compliance current. The Si3N4-x devices didn't show cell area dependency of I-V characteristics, implying the formation and rupture of CF involved in the RS behavior. To further investigation of RS mechanism, the temperature dependent I-V behavior was examined. With a double logarithmic plot of the I-V curves, the slope of the best-linear-fitted data in the low and high voltage regions was ~1 and ~2, respectively, which coincide with the Childs law and space charge limited conduction mechanism dominated the conduction of Si3N4-x device. In addition, the activation energy and hopping distance for hopping conduction were calculated and both values decreased as NH3 gas flow rate decreased and after switching occured. From these results, CF is formed by the local repelling N to TiN BE and the percolation of the traps. The trap condition of the initial Si3N4-x played an important role in the formation of CF, otherwise the device underwent a hard breakdown.
On the basis of the BRS property of a Si3N4-x thin film in the first part of this study, Al2O3 interfacial barrier layer (IBL) was inserted between the Si3N4-x thin film with optimized deposition condition (Si3N3.0) and Pt top electrode, forming the Pt/Al2O3/Si3N3.0/Ti devices with various Al2O3 film thickness (3-5 nm). The seperation between Al2O3 and Si3N3.0 layer could be identified with TEM image and EDS mapping image. While the Pt/Si3N3.0/Ti device showed filamentary BRS, the Pt/Al2O3/Si3N3.0/Ti devices showed electronic BRS with forming free property. In addition, the devices had self-rectifying and nonlinearity characteristics, which is necessary to prevent sneak current for big crossbar-array structure, due to the high band gap of Al2O3 IBL. The devices showed area dependency at HRS and LRS, indicating the interfacial electronic BRS dominated the RS mechanism. The temperature dependency analysis revealed the trap depth of trap sites in Si3N3.0 layer and schottky barreir height between Pt and Al2O3. Thus, the device switched its resistance state by trapping/detrapping of electrons at the trap sites in Si3N3.0 RS layer. To estimate the available maximum crossbar-array size (CBA), HSPICE simulation was performed and it was confirmed that ~106 density could be obtained.
To form crossbar-array structure with ReRAM, sneak current is main issue for proper operation of selected cell. To suppress the sneak current, using transistor is a solution. However, relatively large size of transistor device hinders the scaling-down of ReRAM device. In this respect, selector device ,which has simple MIM sutucture, could replace a transistor while suppressing sneak current sufficiently. Therefore, it is needed to investigate the issue of integrated device with 1 selector and 1 RS material (1S1R). In the third part of this study, 1S1R device was fabricated with the Pt/Si3N4-x/TiN RS layer in the first part of this study and Pt/TiO2/TiN selector layer using the atomic-layer deposited TiO2 film. The device was fabricated via lift-off process with single cell, 2 by 2 and 9 by 9 crossbar-array pattern. By comparing each device, optimized deposition condition of selector and RS layer could be founded and additional issue to overcome was identified.์ธ๋ถ ์๊ทน์ ์ํด ์์์ ์ ํญ์ํ๋ฅผ ๋ณํ์ํค๋ ์ ํญ ๋ณํ ๋ฉ๋ชจ๋ฆฌ๋ ์ฐจ์ธ๋ ๋นํ๋ฐ์ฑ ๋ฉ๋ชจ๋ฆฌ์ ์ ๋งํ ํ๋ณด ์ค ํ๋์ด๋ค. ๊ฐ๋จํ MIM ๊ตฌ์กฐ, ์ ์ ๋ ฅ ์๋ชจ, ๊ณ ์ง์ ์ฑ ๊ทธ๋ฆฌ๊ณ CMOS ์ ํฉ์ฑ์ผ๋ก ์ธํด ์ ํญ ๋ณํ ๋ฉ๋ชจ๋ฆฌ๋ NAND ํ๋์ ๋ฉ๋ชจ๋ฆฌ๋ฅผ ๋์ฒดํ ๊ณ ์ง์ ๋ฉ๋ชจ๋ฆฌ๋ก ๋ง์ ๊ธฐ๋๋ฅผ ๋ฐ๊ณ ์๋ค. NiO, TiO2, HfO2 ๊ทธ๋ฆฌ๊ณ Ta2O5์ ๊ฐ์ ์ ์ด๊ธ์ ์ฐํ๋ฌผ์ด ์ ํญ๋ณํ ๋ฉ๋ชจ๋ฆฌ ์์ ์ ์๊ณผ ๊ฑฐ๋ ๋ถ์์ ์ฃผ๋ ์ด์ ์ด์๋ค. ๋ฐ๋ฉด์ Si3N4์ ๊ฐ์ ์งํ๋ง ๋ํ ์ ํญ ๋ณํ ๋ฉ๋ชจ๋ฆฌ๋ก ์ฐ์ด์ง ์์ ์ด์ ๊ฐ ์์ ๊ฒ์ด๋ค. ์ค์ ๋ก Si3N4์ Si์ N์ ๋น์จ์ ๋ฐ๋ง๋ด์ ๊ฒฐํจ์ ์ ๋ํ๊ธฐ์ํด ์์ฝ๊ฒ ์กฐ์ ๊ฐ๋ฅํ๋ฉฐ, NAND ํ๋์ ๋ฉ๋ชจ๋ฆฌ์์์ charge trap layer๋ก์๋ ์ด๋ฏธ ๋๋ฆฌ ์ฐ์ฌ์ง๊ณ ์๋ค. ๊ฒฐํจ์ ์์ฑ์ผ๋ก ์ธํ ์ผ๋ช
, ์ ๋ ํ๋ผ๋ฉํธ๋ ์ ํญ ๋ณํ ๋ฉ๋ชจ๋ฆฌ์ ์ฃผ๋ ๊ฑฐ๋์ด๋ค. ๋ฐ๋ผ์ N ์์๊ฐ ๋ถ์กฑํ Si3N4 ์ฆ Si3N4-x๋ ์ ํญ๋ณํ ๋ฌผ์ง๋ก ์ฌ์ฉ ๊ฐ๋ฅ ํ ๊ฒ์ด๋ค.
๋ณธ ์ฐ๊ตฌ์ ์ฒซ๋ฒ์งธ ํํธ์์๋ N์์์ ๋ถ์กฑํ ์ ๋์ ๋ฐ๋ฅธ Si3N4-x์ ์๊ทน์ฑ ์ ํญ๋ณํ ํน์ฑ (BRS) ์ ์กฐ์ฌํ๊ธฐ์ํด Si3N4-x๋ฐ๋ง์ plasma enhanced chemical vapor deposition ๊ณผ์ ์ค์ ์ฌ์ฉ๋๋ NH3๊ฐ์ค ์ ๋์ ๋ค์ํ๊ฒ ํ์ฌ Pt/Si3N4-x/TiN ์์๋ฅผ ์ ์ํ์๋ค. X-ray photo-electron spectroscopy ๋ถ์์ ํตํด, NH3 ๊ฐ์ค ์ ๋์ด ๊ฐ์ํจ์ ๋ฐ๋ผ Si3N4-x ๋ฐ๋ง๋ด์ ์ง์ ์์์ ๋ถ์จ์ด ๊ฐ์ํจ์ ํ์ธํ ์ ์์๊ณ NH3๊ฐ์ค ์ ๋์ ์กฐ์ ํจ์ผ๋ก์ ์ง์ ์์์ ๋ถ์กฑํ ์ ๋๋ฅผ ์กฐ์ ํ ์ ์์์ ์์๋ด์๋ค. ์ง์ ์์์ ๋ถ์กฑํ ์ ๋๋ Si3N4-x์ ์ ๋ฅ-์ ์ ํน์ฑ๊ณผ BRS ๊ฑฐ๋์ ์ํฅ์ ๋ฏธ์น๋ฉฐ ์ต์ ํ๋ ์กฐ๊ฑด์ ์ฐพ์ ์ ์์๋ค. ๋ํ Pt/TiN ์ ๊ทน์ ์ง๋ ฌ ์ ์ ํญ์ผ๋ก ์ธํด compliance ์ ๋ฅ ์์ด ์์ ์ ์ธ BRS ๊ฑฐ๋์ ๋ณด์ด๋self-compliance ๊ฑฐ๋์ด ๋ํ๋จ์ ํ์ธํ์๋ค. Si3N4-x ์์๋ ์ ๋ฅ-์ ์ ํน์ฑ์์ ๋ฉด์ ์์กด์ฑ์ ๋ณด์ด์ง ์์์ผ๋ฉฐ ์ด๋ ์ ๋ ํ๋ผ๋ฉํธ์ ํ์ฑ๊ณผ ๋์ด์ง์ ์ํด ์ ํญ ๋ณํ ๊ฑฐ๋์ด ๋ณด์์ ์์ํ์๋ค. ์ ํญ ๋ณํ ๊ฑฐ๋์ ์ถ๊ฐ์ ์ธ ๋ถ์์ ์ํด ์ ๋ฅ-์ ์ ํน์ฑ์ ์จ๋์์กด์ฑ ์ธก์ ์ ์งํํ์๋ค. ์ ๋ฅ-์ ์ ๊ทธ๋ํ์ ๋๋ธ ๋ก๊ทธ ํ๋กฏ์ ํตํด, ์ ์ ์๊ณผ ๊ณ ์ ์ ์์ญ๋์์ ํผํ
์ ํ ๊ฒฐ๊ณผ 1๊ณผ 2๊ฐ ๊ฐ๊ฐ ๋์ด์ ํ์ธํ์์ผ๋ฉฐ ์ด๋ childs law๋ฅผ ๋ฐ๋ฅด๋ฉฐ Si3N4-x์ ์ ๋๊ฐ space charge limited conduction์ ์ํด ์ด๋ฃจ์ด์ง์ ์ ์ ์์๋ค. ๋ํ hopping conduction์ ์ํ ํ์ฑํ ์๋์ง์ hopping๊ฑฐ๋ฆฌ๋ ๊ณ์ฐํ์์ผ๋ฉฐ ๋๊ฐ์ ๊ฐ ๋ชจ๋ NH3๊ฐ์ค ์ ๋์ด ๊ฐ์ํจ์๋ฐ๋ผ, ๊ทธ๋ฆฌ๊ณ ์ค์์นญ์ด ๋ํ๋ ํ์ ๊ฐ์ํจ์ ์ ์ ์์๋ค. ์ด๋ฌํ ๊ฒฐ๊ณผ๋ก๋ถํฐ ์ง์ ์์๊ฐ TiN ํ๋ถ์ ๊ทน์ผ๋ก ๋ฐ๋ ค๋๊ฐ๋ฉฐ trap๋ค์ด ๋ญ์นจ์ผ๋ก ์ธํด ์ ๋ ํ๋ผ๋ฉํธ๊ฐ ํ์ฑ๋จ์ ํ์ธํ ์ ์์๋ค. ๋ํ ์ด๊ธฐ Si3N4-x์ trap ์ํ๊ฐ ์ ๋ ํ๋ผ๋ฉํธ ํ์ฑ์ ์ค์ํ ์ญํ ์ ํ๋ฉฐ ๊ทธ๋ ์ง ์์ผ๋ฉด ์์๋ ๋ง๊ฐ์ง๋ ๊ฒ์ ํ์ธํ์๋ค.
๋ณธ ์ฐ๊ตฌ์ ์ฒซ ๋ฒ์งธ ํํธ์์์ Si3N4-x ๋ฐ๋ง์ BRS ํน์ฑ์ ๊ธฐ์ดํ์ฌ, Al2O3 ๊ณ๋ฉด ์ฅ๋ฒฝ ์ธต์ด ์ต์ ํ ๋ ์ฆ์ฐฉ ์กฐ๊ฑด์ผ๋ก ๋ง๋ค์ด์ง Si3N3.0์ธต๊ณผ Pt ์๋ถ ์ ๊ทน ์ฌ์ด์ ์ฝ์
๋์ผ๋ฉฐ ๊ทธ ๊ฒฐ๊ณผ ๋ค์ํ Al2O3 ๋ง ๋๊ป (3-5 nm)๋ฅผ ๊ฐ๋ Pt/Al2O3/Si3N3.0/Ti ์์๋ฅผ ํ์ฑ ํ์๋ค. TEM ์ด๋ฏธ์ง์ EDS ๋งคํ ์ด๋ฏธ์ง๋ก Al2O3์ Si3N3.0 ์ธต ์ฌ์ด์ ๋ถ๋ฆฌ๋ฅผ ํ์ธ ๊ฐ๋ฅํ์๋ค. Pt/Si3N3.0/Ti ์์๋ ํ๋ผ๋ฉํธ์ BRS ํน์ฑ์ ๋ํ๋ด์ง๋ง, Pt/Al2O3/Si3N3.0/Ti ์์๋ forming-freeํน์ฑ์ ๊ฐ๋ e-BRSํน์ฑ์ ๋ํ๋๋ค. ๋ํ ์ด ์์๋ ์์ฒด ์ ๋ฅ ํน์ฑ ๋ฐ ๋น์ ํ์ฑ ํน์ฑ์ ๊ฐ์ง๋๋ฐ, ์ด๋ฌํ ํน์ฑ์ ํฐ ์ฌ์ด์ฆ์ ํฌ๋ก์ค๋ฐ ์ด๋ ์ด (CBA) ๊ตฌ์กฐ์์ ๋์ค์ ๋ฅ๋ฅผ ๋ฐฉ์งํ๋๋ฐ ๋์์ด ๋๋ฉฐ, Al2O3์ธต์ ๋์ ๋ฐด๋ ๊ฐญ์ผ๋ก ์ธํด ์ด๋ฌํ ํน์ฑ์ด ๋ํ๋๊ฒ ๋๋ค. ์ฅ์น๋ HRS ๋ฐ LRS์์ ๋ฉด์ ์์กด์ฑ์ ๋ณด์ฌ ์ฃผ์์ผ๋ฉฐ ์ด๋ ๊ณ๋ฉด์ e-BRS ์ ํญ ๋ณํ ๋ฉ์ปค๋์ฆ์ ์ง๋ฐฐ ํ๋ค๋ ๊ฒ์ ๋ํ๋ธ๋ค. ๋ํ ์จ๋ ์์กด์ฑ ๋ถ์์ ํตํด Si3N3.0 ์ธต์ ์กด์ฌํ๋ trap site์ trap ๊น์ด ๋ฐ Pt์ Al2O3 ์ฌ์ด์ ์ผํธํค ๋ฐฐ๋ฆฌ์ด ๋์ด๋ฅผ ์์๋ผ ์ ์์๋ค. ๋ฐ๋ผ์, ํด๋น ์์๋ Si3N3.0 ์ ํญ ๋ณํ์ธต์ trap site์์ ์ ์๋ฅผ ํธ๋ํ / ๋ํธ๋ฉํํ์ฌ ์ ํญ ์ํ๋ฅผ ๋ฐ๊พผ๋ค๋ ๊ฑธ ํ์ธ ๊ฐ๋ฅํ์๋ค. ๋ํ ๊ฐ๋ฅํ ์ต๋ CBA ํฌ๊ธฐ๋ฅผ ์ถ์ ํ๊ธฐ ์ํด HSPICE ์๋ฎฌ๋ ์ด์
์ ์ํํ์์ผ๋ฉฐ ์ฝ 106 ์ ๊ฐ์ ์ป์ ์ ์์์ ํ์ธํ์๋ค.
์ ํญ ๋ณํ ๋ฉ๋ชจ๋ฆฌ๋ก CBA ๊ตฌ์กฐ๋ฅผ ํ์ฑํ ๋, ์ ํ๋ ์
์ ์ ์ ํ ๊ตฌ๋์ ์ํด์ ๋์ค ์ ๋ฅ๊ฐ ๊ฐ์ฅ ํฐ ๋ฌธ์ ์ด๋ค. ๋์ค ์ ๋ฅ๋ฅผ ์ต์ ํ๊ธฐ ์ํด, ํธ๋์ง์คํฐ์ ์ฌ์ฉ์ ํ๋์ ํด๊ฒฐ์ฑ
์ด ๋ ์ ์๋ค. ํ์ง๋ง, ์๋์ ์ผ๋ก ํฐ ์ฌ์ด์ฆ์ ํธ๋์ง์คํฐ ์์๋ ์ ํญ ๋ณํ ๋ฉ๋ชจ๋ฆฌ์ ๊ณ ์ง์ ์ ๋ฐฉํดํ๊ฒ ๋๋ค. ์ด๋ฌํ ์ ์์ ๊ฐ๋จํ MIM๊ตฌ์กฐ๋ฅผ ๊ฐ๋ ์ ํ์์๋ ๋์ค์ ๋ฅ๋ฅผ ์ถฉ๋ถํ ์ต์ ํ๋ฉด์ ํธ๋์ง์คํฐ๋ฅผ ๋์ฒดํ ์ ์์๊ฒ์ด๋ค. ๋ฐ๋ผ์ 1 ์ ํ์์ 1 ์ ํญ๋ณํ ๋ฌผ์ง์ ์ ์ธต๋ ์์ (1S1R) ์์ ์๊ธธ ์ ์๋ ๋ฌธ์ ์ ์ ๋ํด ์กฐ์ฌํ ํ์๊ฐ ์๋ค. ๋ณธ ์ฐ๊ตฌ์ ์ธ๋ฒ์งธ ํํธ์์๋, ์ฒซ๋ฒ์งธ ํํธ์์์ Pt/Si3N4-x/TiN ์ ํญ ๋ณํ ์์์ ALD TiO2 ๋ฐ๋ง์ ์ฌ์ฉํ Pt/TiO2/TiN ์ ํ์์๋ฅผ ์ด์ฉํ์ฌ 1S1R์์๋ฅผ ์ ์ํ์๋ค. ํด๋น ์์๋ lift-off ๊ณต์ ์ ํตํด ๋จ์ผ์์, 2 by 2 ๊ทธ๋ฆฌ๊ณ 9 by 9 CBA ํจํด์ผ๋ก ์ ์๋์๋ค. ๊ฐ๊ฐ์ ์์๋ฅผ ๋น๊ตํ๋ฉด์ ์ ํ์์์ ์ ํญ๋ณํ ์ธต์ ์ต์ ํ๋ ์ฆ์ฐฉ ์กฐ๊ฑด์ ์ฐพ์๋ด์๊ณ ๊ทน๋ณตํด์ผํ ์ถ๊ฐ์ ์ธ ๋ฌธ์ ๋ํ ํ์ธ ํ์๋ค.1. Introduction 16
1.1. Resistive switching Random Access Memory 16
1.2. Research scope and objective 20
2. Bipolar resistive switching property of Si3N4-x thin film depending on N-deficiency 22
2.1. Introduction 22
2.2. Experimental 25
2.3. Results and Discussions 26
2.4. Conclusion 45
3. Area-type electronic bipolar resistive switching of Pt/Al2O3/Si3N3.0/Ti with forming free, self-rectification, and nonlinearity characteristics 46
3.1. Introduction 46
3.2. Experimental 49
3.3. Results and Discussions 51
3.4. Conclusion 69
4. 1S1R property with Pt/Si3N4-x/TiN resistive switching device and Pt/TiO2/TiN selector device 71
4.1. Introduction 71
4.2. Experimental 73
4.3. Results and Discussions 74
4.4. Conclusion 81
5. Bibliography 82
6. Conclusion 88
List of publications 92
Abstract (in Korean) 104Docto
์ฐํ๋ฌผ/์งํ๋ฌผ ๋ณตํฉ๊ตฌ์กฐ๋ฅผ ์ด์ฉํ ์ ์ฐํ ์ ์ ๋ฐ ๊ด์ ์์ ์์ฉ
ํ์๋
ผ๋ฌธ (๋ฐ์ฌ) -- ์์ธ๋ํ๊ต ๋ํ์ : ์์ฐ๊ณผํ๋ํ ๋ฌผ๋ฆฌํ๊ณผ, 2020. 8. ์ด๊ท์ฒ .๋ฌผ๋ฆฌ์ ์ผ๋ก ๊ฐํ๊ณ ์ ์ฐํ ๊ทธ๋ํ๊ณผ ๊ฐ์ 2์ฐจ์ ์์ฌ์์ ์ฑ์ฅ๋ ๋ฌด๊ธฐ๋ฌผ ๋๋
ธ์์ฌ๋ก ๊ตฌ์ฑ๋ ๋ณตํฉ์ฐจ์ ๋๋
ธ์์ฌ๋ ์ ์ฐํ ๋๋ฉด์ ์ ์ ๋ฐ ๊ด์ ์์๋ก์ ์์ฉ์ ์ ํฉํ ํํ์ ์์ฌ ๊ตฌ์กฐ์ด๋ฉฐ, ์ค์ ๋ก ์ด๋ฅผ ๊ธฐ๋ฐ์ผ๋ก ํ ์ ์ฐํ ์์งํ ์ ๊ณํจ๊ณผ ํธ๋์ง์คํฐ ๋ฐ ๋ฐ๊ด๋ค์ด์ค๋ ๋ฑ์ ํฌํจํ ๋ง์ ์์๋ค์ด ๊ฐ๋ฐ๋๊ณ ์๋ค. ํ์ง๋ง, ์ฒ๋ฆฌ๋ ์ ๋ณด๋ฅผ ์ ์ฅํ๊ณ ์ด๋ฅผ ์ฌ์ฉ์์๊ฒ ์ ๋ฌํ๋ ๊ธฐ๋ฅ์ ์ํํ๊ธฐ ์ํด์ ๋ณด๋ค ๋ค์ํ ์์๋ค์ด ๊ฐ๋ฐ๋์ด์ผ ํ ํ์๊ฐ ์๋ค. ๋ณธ ํ์๋
ผ๋ฌธ์ ์ด๋ฌํ ์์๋ฅผ ์ถฉ์กฑ์ํค๊ธฐ ์ํด, ๋ณตํฉ์ฐจ์ ๋๋
ธ์์ฌ ๊ธฐ๋ฐ ์ ์ฐํ ๋๋ฉด์ ์ฐจ์ธ๋ ๋นํ๋ฐ์ฑ ๋ฉ๋ชจ๋ฆฌ ๋ฐ ์ ์ฐํ ๋๋ฉด์ ๋คํ์ฅ ๋ฐ๊ด ๋ค์ด์ค๋์ ๊ฐ๋ฐ์ ๋ํ์ฌ ๋ค๋ฃจ๊ณ ์๋ค.
๋ณตํฉ์ฐจ์ ๋๋
ธ์์ฌ๋ฅผ ๊ธฐ๋ฐ์ผ๋ก ์ฐจ์ธ๋ ๋นํ๋ฐ์ฑ ๋ฉ๋ชจ๋ฆฌ๋ฅผ ๊ตฌํํ๊ธฐ ์ํด ๋์ผ ์ฐํ๋ฌผ ๋ฐ ์งํ๊ฐ๋ฅจ ์ด์ข
๊ตฌ์กฐ๋ก ๊ตฌ์ฑ๋ ๋ง์ดํฌ๋ก๋์คํฌ ํํ์ ์์ฌ๋ฅผ ๊ทธ๋ํ ์์ ์ฑ์ฅํ๊ณ , ๋ณธ ์์ฌ์ ์๋ถ ๋ฐ ํ๋ถ์ ์ ๊ทน์ ์ฆ์ฐฉํ์ฌ ์ ๊ทน/์ฐํ๋ฌผ/์ ๊ทน์ผ๋ก ๊ตฌ์ฑ๋ ํํ์ ์ฐํ๋ฌผ ๊ธฐ๋ฐ ์ ํญ๋ณํ ๋ฉ๋ชจ๋ฆฌ๋ฅผ ์ ์กฐํ ์ ์์๋ค. ๋ง์ดํฌ๋ก๋์คํฌ ํํ์ ์์ฌ์ ์ฌ์ด๊ฐ ๋จ์ด์ ธ์๊ธฐ ๋๋ฌธ์ ๋ณธ ์์๋ฅผ ์ ์ฐํ ํํ์์ ๊ตฌํํ๊ฑฐ๋ 1,000 ํ ์ด์์ ๊ตฌ๋ถ๋ฆผ ๋ค ์์์ ํน์ฑ์ ํ์
ํ ๋ ์์ ํน์ฑ์ ํฐ ๋ณํ ์์ด ์ ๋ณด๊ฐ ์์ ์ ์ผ๋ก ์ ์ฅ๋๋ ํน์ฑ์ ํ์ธํ ์ ์์๋ค. ๋ฟ๋ง ์๋๋ผ, ๋์ผ ์ฐํ๋ฌผ ๊ธฐ๋ฐ ์ ํญ๋ณํ๋ฉ๋ชจ๋ฆฌ๋ฅผ ๋์ํ ๋, ์ฐํ๋ฌผ ๋ด๋ถ์ ์ ๋์ฑ์ด ๋์ ๋์ผ ์ฐํ๋ฌผ์ด ํ๋ผ๋ฉํธ ํํ๋ก ๊ตฌ์ฑ๋๋๋ฐ, ์ด๋ฅผ ๋ฐ๊ด๋ค์ด์ค๋์ ๋๋
ธ์ ๊ทน์ผ๋ก ์ฌ์ฉํ์ฌ ์ ํญ๋ณํ๋ฉ๋ชจ๋ฆฌ ๋ด๋ถ์ ํ๋ผ๋ฉํธ ์ญํ์ ๋ํด์๋ ์ฐ๊ตฌํ ์ ์์๋ค.
ํํธ, ์ ์ฅ๋ ์ ๋ณด๋ฅผ ์ฌ์ฉ์์๊ฒ ์ ํํ๊ฒ ์ ๋ฌํ๊ธฐ ์ํด์ ๋ฐ๊ด๋ค์ด์ค๋์ ํ ํฝ์
(pixel) ์ ํฌ๊ธฐ๊ฐ ์ ๋ง์ดํฌ๋ก๋ฏธํฐ ์ดํ๋ก ์์์ผํ๊ณ , ๋นจ๊ฐ, ์ด๋ก, ํ๋์์ ๋น์ ๋ฐ๊ดํ ์ ์์ด์ผ ํ๋๋ฐ ์ด๋ ํ์ฌ ์ด์ฉ๋๊ณ ์๋ ํฝ ์ค ํ๋ ์ด์ค (pick and place) ๊ธฐ์ ์ ์ด์ฉํ์ฌ ์ ์กฐํ ๋ ์์ ์ ์กฐ์ ํจ์จ์ฑ ๋ฐ ์ฌํ์ฑ์ ํ๊ณ๋ฅผ ๋ณด์ด๊ณ ์๋ค. ๋ณธ ํ์๋
ผ๋ฌธ์์๋ ์ด๋ฅผ ๊ทน๋ณตํ๊ธฐ ์ํ ๋ฐฉ๋ฒ์ ํ๋๋ก, ๋ค์ํ ์์ ๋ฐ๊ดํ ์ ์๋ ๋ฐ๊ด๋ค์ด์ค๋๋ฅผ ํ๋์ ๊ทธ๋ํ ๊ธฐํ์์ ๋์์ ์ฑ์ฅํ๋ ๋ฐฉ๋ฒ์ ์ ์ํ๊ณ ์ด๋ฅผ ์ ์ฐํ ๋คํ์ฅ ๋ฐ๊ด๋ค์ด์ค๋๋ก ๊ตฌํํ๋ ๋ฐฉ๋ฒ์ ๋ํด ๊ธฐ์ ํ๊ณ ์๋ค. ๋ณธ ์์๋ฅผ ๊ตฌํํ๊ธฐ ์ํด ๋ค์ํ ๋ชจ์์ ์งํ๊ฐ๋ฅจ ๋ฐ ์ฐํ์์ฐ ์ด์ข
๊ตฌ์กฐ๋ฅผ ๊ทธ๋ํ ์์ ์ฑ์ฅํ๋ ๋ฐฉ๋ฒ์ ๊ฐ๋ฐํ์๋๋ฐ, ์ฐํ์์ฐ ๋๋
ธํ๋ธ์ ๊ฐ๊ฒฉ์ ๋ค๋ฅด๊ฒ ์ค์ ํ์ฌ ์ฑ์ฅํ๊ณ ์ด ์์ ์งํ๊ฐ๋ฅจ์ ์ฑ์ฅํ๋ฉด ์งํ๊ฐ๋ฅจ์ ์ฑ์ฅ๋ฅ ์ด ๋๋
ธํ๋ธ์ ๊ฐ๊ฒฉ์ ๋ฐ๋ผ ๋ค๋ฅด๊ฒ ํ์ฑ๋์ด ๋ค๋ฅธ ๋ชจ์์ ๋ง์ดํฌ๋ก ๋ฐ๊ด๋ค์ด์ค๋๊ฐ ์ฑ์ฅ๋๋ ๊ฒ์ ์ด์ฉํ์๋ค. ๊ฐ๊ธฐ ๋ค๋ฅธ ๋ฐ๊ด๋ค์ด์ค๋์ ๊ฐ์ ์ ์์ ๊ฐํด์คฌ์ ๋ ์ฑ์ฅ๋ฅ ์ ์ฐจ์ด๋ก ์ธํ ๋ค์ค ์์ ์ฐ๋ฌผ ์กฐ์ฑ์ ๋ณํ ๋ฐ ์์ฌ ๋ด๋ถ์ ๊ฒฐํจ์ผ๋ก ์ธํด ๊ฐ๊ธฐ ๋ค๋ฅธ ํ์ฅ์ ์์ด ๋ฐ๊ด๋๋ ํน์ฑ์ ํ์ธํ์๊ณ , ์ ์ฐํ ํํ์์๋ ์์ ์ ์ผ๋ก ๋ฐ๊ดํน์ฑ์ด ์ ์ง๋๋ ๊ฒ์ ํ์ธํ ์ ์์๋ค.The hybrid dimensional nanostructrures composed of high-quality inorganic nanostructures grown directly on two-dimensional (2D) materials such as graphene offers a novel material system for flexible electronics and optoelectronics. Indeed, the hybrid dimensional nanostructures have been fabricated to flexible electronics/optoelectronics and attracted many attentions with their excellent performances. Despite of the demonstration of flexible devices using the hybrid dimensional nanostructures, there remains a lot of devices that need to be further investigated in order to realize future electronics/optoelectronics such as wearable devices. This thesis presents the hybrid material system composed of oxide/nitrid heterostructures grown on graphene films and their applications on flexible non-volatile memory and flexible multi-color LEDs.Abstract
Chapter 1. General Introduction 1
1.1. Motivation: Potentials of hybrid dimensional nanomaterials for flexible electronic/optoelectronic device applications 1
1.2. Thesis objective and approach 3
1.3. Thesis outline 4
Chapter 2. Literature survey 6
2.1. Oxide-based flexible electronics 6
2.1.1. Current status of oxide-based electronics 8
2.1.2. Next generation oxide-based electronics: ReRAM 12
2.1.3. Flexible ReRAM 17
2.1.3.1. ReRAM on plastic substrates 17
2.1.3.2. Transfer of ReRAM layers on flexible substrates 20
2.2. Nitride-based flexible optoelectronics 23
2.2.1. Current status of nitride-based optoelectronics 23
2.2.2. Next generation nitride-based optoelectronics: flexible & high-resolution LED 29
2.3. Hybrid dimensional material systems for flexible electronics and Optoelectronics 34
2.3.1. Growth of oxide & nitride nano-/micro-structures on graphene layers35
2.3.2. Functional devices using hybrid dimensional material Systems 45
2.3.2.1. Electronics 47
2.3.2.2. Optoelectronics 50
Chapter 3. Experimental Techniques 53
3.1. Growth techniques 53
3.1.1. Metalorganic vapor-phase epitaxy system 53
3.1.1.1. Gas delivery system 53
3.1.1.2. Reactor and temperature controller 55
3.1.1.3. Exhaust disposal system and low pressure pumping System 56
3.2. Structural characterization 57
3.2.1. Morphology inspection 57
3.2.2. Crystallographic and microstructural investigations 57
3.2.2.1. Transmission electron microscopy 57
3.3. Optical characterization 58
3.3.1. Photoluminescence & electroluminescence spectroscopy 58
3.4. Electrical characterization 59
3.4.1. Current-Voltage measurement 59
Chapter 4. Flexible ReRAM based on hybrid dimensional material systems 60
4.1. Introduction 60
4 .2. Growth of oxide/nitride hybrid structures on graphene layers 61
4.2.1. ZnO nanowall growth CVD-graphene films 62
4.2.2. Growth of GaN microdisk arrays 62
4.2.3. Growth of resistive switching layers 65
4.4. Fabrication of flexible ReRAM 65
4.5. Resistive switching characteristics 69
4.6. Discussion for the mechanism of resistive switchings using oxide/nitride hybrid structures 78
4.6.1. Fabrication of ReRAM/LED hybrid device 80
4.6.2. Real-time imaging of resistive switching dynamics 85
4.7. Summary 99
Chapter 5. Monolithic integration of morphology controlled GaN microstructures on graphene films for flexible & multi-color LEDs 101
5.1. Introduction 101
5.2. Morphology control of GaN microstructures on graphene films 103
5.2.1. Growth parameter: spacing & time 103
5.2.2. Growth behavior analysis 109
5.3. Fabrication of LEDs on graphene films 115
5.4. EL and electrical characteristics 118
5.5. High temperature operations of flexible LEDs 125
5.6. Summary 134
Chapter 6. Conclusion and Outlook 136
6.1. Conclusion 136
6.2. Future works and outlook 141
References 143
Abstract (Korean) 151Docto
Recommended from our members
The Direct Tunneling, Dielectric Breakdown Investigation, and RRAM Application in MBE Hexagonal Boron Nitride Monolayers Using Metal-Insulator-Metal Devices
In todayโs post-Morre era, low-dimensional materials and their potential electronic applications have attracted extensive attention, but high-quality material synthesis and complicated device physics investigation is still challenging. Our lab is able to use Molecular Beam Epitaxy (MBE) epitaxy to reliably grow high quality millimeter grain size continuous ultrathin 2D (two-dimensional) hexagonal boron-nitridefilm (h-BN ) on Cobalt (Co) and Nickle (Ni) catalytic transition metal substrates. This is highly advantage in 2D electronic and photonic device applications. In this thesis, we report our comprehensive electric tunneling, dielectric breakdown, and memory application of single-layer h-BN film by fabricating scalable Metal-insulator-metal (MIM) diodes. Direct tunneling and dielectric breakdown in molecular beam epitaxial hexagonal boron nitride (h-BN) monolayers were studied based on Ni/h-BN/Ni device configuration in Chapter 2. Effective tunneling areas are orders of magnitude smaller than the physical areas of the devices. Statistical Weibull analysis of the breakdown characteristics shows that breakdown area-scaling law applies to the effective areas rather than physical areas of the devices. The h-BN based MIM devices can sustain repeated DC voltage sweeping stresses up to 85 times under an extremely high compliance current of 100 mA, and the critical electric field is determined to be at least 11.8 MV/cm, demonstrating high dielectric strength and reliability of these h-BN monolayers. The mechanism of the breakdown and recovery of the h-BN monolayer MIM devices is also discussed. The second project (Chapter 3) is devoted to the evaluation of Resistive Random Access Memory (RRAM) devices and the mechanism discussion of monolayer h-BN in MIM structure. The memory performance of bipolar switching shows great endurance with 97 cycles at 100mA compliance current, and a high average of 10^3 on/off ratio, but the reliability is an issue. For this particular film, both non-volatile bipolar and unipolar resistive switching (RS) and volatile threshold (TH) switching phenomena were found to coexist and could be converted from one to the other by controlling the electrical power, which provides a better understanding of the switching models. In devices with Graphene bottom electrodes, bipolar resistive switching with self-compliance current is discovered, making h-BN potential in low-power device applications
Memristive Non-Volatile Memory Based on Graphene Materials
Resistive random access memory (RRAM), which is considered as one of the most promising next-generation non-volatile memory (NVM) devices and a representative of memristor technologies, demonstrated great potential in acting as an artificial synapse in the industry of neuromorphic systems and artificial intelligence (AI), due its advantages such as fast operation speed, low power consumption, and high device density. Graphene and related materials (GRMs), especially graphene oxide (GO), acting as active materials for RRAM devices, are considered as a promising alternative to other materials including metal oxides and perovskite materials. Herein, an overview of GRM-based RRAM devices is provided, with discussion about the properties of GRMs, main operation mechanisms for resistive switching (RS) behavior, figure of merit (FoM) summary, and prospect extension of GRM-based RRAM devices. With excellent physical and chemical advantages like intrinsic Youngโs modulus (1.0 TPa), good tensile strength (130 GPa), excellent carrier mobility (2.0 ร 105 cm2โVโ1โsโ1), and high thermal (5000 Wmโ1โKโ1) and superior electrical conductivity (1.0 ร 106 Sโmโ1), GRMs can act as electrodes and resistive switching media in RRAM devices. In addition, the GRM-based interface between electrode and dielectric can have an effect on atomic diffusion limitation in dielectric and surface effect suppression. Immense amounts of concrete research indicate that GRMs might play a significant role in promoting the large-scale commercialization possibility of RRAM devices
Recommended from our members
RESISTIVE SWITCHING CHARACTERISTICS OF NANOSTRUCTURED AND SOLUTION-PROCESSED COMPLEX OXIDE ASSEMBLIES
Miniaturization of conventional nonvolatile (NVM) memory devices is rapidly approaching the physical limitations of the constituent materials. An emerging random access memory (RAM), nanoscale resistive RAM (RRAM), has the potential to replace conventional nonvolatile memory and could foster novel type of computing due to its fast switching speed, high scalability, and low power consumption. RRAM, or memristors, represent a class of two terminal devices comprising an insulating layer, such as a metal oxide, sandwiched between two terminal electrodes that exhibits two or more distinct resistance states that depend on the history of the applied bias. While the sudden resistance reduction into a conductive state in metal oxide insulators has been known for almost 50 years, the fundamental resistive switching mechanism is a complex phenomenon that is still long-debated, complex process. Further improvements to existing memristor performance require a complete understanding of memristive properties under various operation conditions. Additional technical issues also remain, such as the development of facile, low-cost fabrication methods as an alternative to expensive, ultra-high vacuum (UHV) deposition methods.
This collection of work explores resistive switching within metal oxide-based memristive material assemblies by analyzing the fundamental physical insulating material properties. Chapter 3 aims to translate the utility and simplicity of the highly ordered anodic aluminum oxide (AAO) template structure to complex, yet more functional (memristive) materials. Functional oxides possessing ordered, scalable nanoporous arrays and nanocapacitor arrays over a large area is of interest to both the fields of next-generation electronics and energy storing/harvesting devices. Here their switching performance will be evaluated using conductive atomic force microscopy (C-AFM). Chapter 4 demonstrates a convective self-assembly fabrication method that effectively enables the synthesis of a low-cost solution processed memristor comprising binary oxide and perovskite ABO3 nanocrystals of varying diameter. Chapter 5 systematically compares the influence of inter-nanoparticle distance on the threshold switching SET voltage of hafnium oxide (HfO2) memristors. Utilizing shorter phosphonic acid ligands with higher binding affinity on the nanocrystal surface enabled a record-low SET voltage to be achieved. Chapter 6 extends the scope to the fine tuning of solution processed memristors with two types of perovskites nanocrystals. The primary advantage of nanocrystal memristors is the ability to draw from additional degrees of freedom by tuning the constituent nanocrystal material properties. Recent advancement of solution phase techniques enables a high degree of controllability over the nanocrystal size and structure. Thus, this work found in this dissertation aims to understand and decouple the effects of the geometric size and substitutional nanocrystal parameters on resistive switching
- โฆ