X‐ray microscopy and automatic detection of defects in through silicon vias in three‐dimensional integrated circuits

Through silicon vias (TSVs) are a key enabling technology for interconnection and realization of complex three-dimensional integrated circuit (3D-IC) components. In order to perform failure analysis without the need of destructive sample preparation, x-ray microscopy (XRM) is a rising method of analyzing the internal structure of samples. However, there is still a lack of evaluated scan recipes or best practices regarding XRM parameter settings for the study of TSVs in the current state of literature. There is also an increased interest in automated machine learning and deep learning approaches for qualitative and quantitative inspection processes in recent years. Especially deep learning based object detection is a well-known methodology for fast detection and classification capable of working with large volumetric XRM datasets. Therefore, a combined XRM and deep learning object detection workflow for automatic micrometer accurate defect location on liner-TSVs was developed throughout this work. Two measurement setups including detailed information about the used parameters for either full IC device scan or detailed TSV scan were introduced. Both are able to depict delamination defects and finer structures in TSVs with either a low or high resolution. The combination of a 0.4 objective with a beam voltage of 40 kV proved to be a good combination for achieving optimal imaging contrast for the full-device scan. However, detailed TSV scans have demonstrated that the use of a 20 objective along with a beam voltage of 140 kV significantly improves image quality. A database with 30,000 objects was created for automated data analysis, so that a well-established object recognition method for automated defect analysis could be integrated into the process analysis. This RetinaNet-based object detection method achieves a very strong average precision of 0.94. It supports the detection of erroneous TSVs in both top view and side view, so that defects can be detected at different depths. Consequently, the proposed workflow can be used for failure analysis, quality control or process optimization in R&D environments

Solid immersion lens applications for nanophotonic devices

Solid immersion lens (SIL) microscopy combines the advantages of conventional microscopy with those of near-field techniques, and is being increasingly adopted across a diverse range of technologies and applications. A comprehensive overview of the state-of-the-art in this rapidly expanding subject is therefore increasingly relevant. Important benefits are enabled by SIL-focusing, including an improved lateral and axial spatial profiling resolution when a SIL is used in laser-scanning microscopy or excitation, and an improved collection efficiency when a SIL is used in a light-collection mode, for example in fluorescence micro-spectroscopy. These advantages arise from the increase in numerical aperture (NA) that is provided by a SIL. Other SIL-enhanced improvements, for example spherical-aberration-free sub-surface imaging, are a fundamental consequence of the aplanatic imaging condition that results from the spherical geometry of the SIL. Beginning with an introduction to the theory of SIL imaging, the unique properties of SILs are exposed to provide advantages in applications involving the interrogation of photonic and electronic nanostructures. Such applications range from the sub-surface examination of the complex three-dimensional microstructures fabricated in silicon integrated circuits, to quantum photoluminescence and transmission measurements in semiconductor quantum dot nanostructures

The Public Service Media and Public Service Internet Manifesto

This book presents the collectively authored Public Service Media and Public Service Internet Manifesto and accompanying materials.The Internet and the media landscape are broken. The dominant commercial Internet platforms endanger democracy. They have created a communications landscape overwhelmed by surveillance, advertising, fake news, hate speech, conspiracy theories, and algorithmic politics. Commercial Internet platforms have harmed citizens, users, everyday life, and society. Democracy and digital democracy require Public Service Media. A democracy-enhancing Internet requires Public Service Media becoming Public Service Internet platforms – an Internet of the public, by the public, and for the public; an Internet that advances instead of threatens democracy and the public sphere. The Public Service Internet is based on Internet platforms operated by a variety of Public Service Media, taking the public service remit into the digital age. The Public Service Internet provides opportunities for public debate, participation, and the advancement of social cohesion. Accompanying the Manifesto are materials that informed its creation: Christian Fuchs’ report of the results of the Public Service Media/Internet Survey, the written version of Graham Murdock’s online talk on public service media today, and a summary of an ecomitee.com discussion of the Manifesto’s foundations

Correlative Framework of Techniques for the Inspection, Evaluation, and Design of Micro-electronic Devices

Trillions of micro- and nano-electronic devices are manufactured every year. They service countless electronic systems across a diverse range of applications ranging from civilian, military, and medical sectors. Examples of these devices include: packaged and board-mounted semiconductor devices such as ceramic capacitors, CPUs, GPUs, DSPs, etc., biomedical implantable electrochemical devices such as pacemakers, defibrillators, and neural stimulators, electromechanical sensors such as MEMS/NEMS accelerometers and positioning systems and many others. Though a diverse collection of devices, they are unified by their length scale. Particularly, with respect to the ever-present objectives of device miniaturization and performance improvement. Pressures to meet these objectives have left significant room for the development of widely applicable inspection and evaluation techniques to accurately and reliably probe new and failed devices on an ever-shrinking length scale. Presented in this study is a framework of correlative, cross-modality microscopy workflows coupled with novel in-situ experimentation and testing, and computational reverse engineering and modeling methods, aimed at addressing the current and future challenges of evaluating micro- and nano-electronic devices. The current challenges are presented through a unique series of micro- and nano-electronic devices from a wide range of applications with ties to industrial relevance. Solutions were reached for the challenges and through the development of these workflows, they were successfully expanded to areas outside the immediate area of the original project. Limitations on techniques and capabilities were noted to contextualize the applicability of these workflows to other current and future challenges

Nonradiating Photonics with Resonant Dielectric Nanostructures

Nonradiating sources of energy have traditionally been studied in quantum mechanics and astrophysics, while receiving a very little attention in the photonics community. This situation has changed recently due to a number of pioneering theoretical studies and remarkable experimental demonstrations of the exotic states of light in dielectric resonant photonic structures and metasurfaces, with the possibility to localize efficiently the electromagnetic fields of high intensities within small volumes of matter. These recent advances underpin novel concepts in nanophotonics, and provide a promising pathway to overcome the problem of losses usually associated with metals and plasmonic materials for the efficient control of the light-matter interaction at the nanoscale. This review paper provides the general background and several snapshots of the recent results in this young yet prominent research field, focusing on two types of nonradiating states of light that both have been recently at the center of many studies in all-dielectric resonant meta-optics and metasurfaces: optical {\em anapoles} and photonic {\em bound states in the continuum}. We discuss a brief history of these states in optics, their underlying physics and manifestations, and also emphasize their differences and similarities. We also review some applications of such novel photonic states in both linear and nonlinear optics for the nanoscale field enhancement, a design of novel dielectric structures with high-$Q$ resonances, nonlinear wave mixing and enhanced harmonic generation, as well as advanced concepts for lasing and optical neural networks.Comment: 22 pages, 9 figures, review articl