Scheduling of Batch Processors in Semiconductor Manufacturing – A Review

In this paper a review on scheduling of batch processors (SBP) in semiconductor manufacturing (SM) is presented. It classifies SBP in SM into 12 groups. The suggested classification scheme organizes the SBP in SM literature, summarizes the current research results for different problem types. The classification results are presented based on various distributions and various methodologies applied for SBP in SM are briefly highlighted. A comprehensive list of references is presented. It is hoped that, this review will provide a source for other researchers/readers interested in SBP in SM research and help simulate further interest.Singapore-MIT Alliance (SMA

Performance of a Serial-Batch Processor System with Incompatible Job Families under Simple Control Policies

A typical example of a batch processor is the diffusion furnace used in wafer fabrication facilities (otherwise known as wafer fabs). In diffusion, silicon wafers are placed inside the furnace, and dopant is flown through the wafers via nitrogen gas. The higher the temperature, the faster the dopant penetrates the wafer surface. Then, a thin layer of silicon dioxide is grown, to help the dopant diffuse into the silicon. This operation can take 10 hours or more to finish processing, as compared to one or two hours for other wafer fab operations, according to Uzsoy [8]. Diffusion furnaces typically can process six to eight lots concurrently; we call the lots processed concurrently a batch. The quantity of lots loaded into the furnace does not affect the processing time. Only lots that require the same chemical recipe and temperature may be batched together at the diffusion furnace. We wish to control the production of a manufacturing system, comprised of a serial processor feeding the batch processor. The system produces different job types, and each job can only be batched together with jobs of the same type. More specifically, we explore the idea of controlling the production of the serial processor, based on the wip found in front of the batch processor. We evaluate the performance of our manufacturing system under several simple control policies under a range of loading conditions and determine which control policies perform better under which conditions. It is hoped that the results obtained from this small system could be extended to larger systems involving a batch processor, with particular emphasis placed on the applicability of such policies in wafer fabrication.Singapore-MIT Alliance (SMA

Meta-RaPS Algorithm for the Aerial Refueling Scheduling Problem

The Aerial Refueling Scheduling Problem (ARSP) can be defined as determining the refueling completion times for each fighter aircraft (job) on multiple tankers (machines). ARSP assumes that jobs have different release times and due dates, The total weighted tardiness is used to evaluate schedule's quality. Therefore, ARSP can be modeled as a parallel machine scheduling with release limes and due dates to minimize the total weighted tardiness. Since ARSP is NP-hard, it will be more appropriate to develop a ppro~imate or heuristic algorithm to obtain solutions in reasonable computation limes. In this paper, Meta-Raps-ATC algorithm is implemented to create high quality solutions. Meta-RaPS (Meta-heuristic for Randomized Priority Search) is a recent and promising meta heuristic that is applied by introducing randomness to a construction heuristic. The Apparent Tardiness Rule (ATC), which is a good rule for scheduling problems with tardiness objective, is used to construct initial solutions which are improved by an exchanging operation. Results are presented for generated instances

Serial-batch scheduling – the special case of laser-cutting machines

The dissertation deals with a problem in the field of short-term production planning, namely the scheduling of laser-cutting machines. The object of decision is the grouping of production orders (batching) and the sequencing of these order groups on one or more machines (scheduling). This problem is also known in the literature as "batch scheduling problem" and belongs to the class of combinatorial optimization problems due to the interdependencies between the batching and the scheduling decisions. The concepts and methods used are mainly from production planning, operations research and machine learning

Dynamic set-up rules for hybrid flow shop scheduling with parallel batching machines

An S-stage hybrid (or flexible) flow shop, with sequence-independent uniform set-up times, parallel batching machines with compatible parallel batch families (like in casting or heat treatments in furnaces, chemical or galvanic baths, painting in autoclave, etc.) has been analysed with the purpose of reducing the number of tardy jobs (and the makespan); in Graham’s notation: FPB(m_1, m_2, … , m_S)|p-batch, STsi,b|SUM(Ui). Jobs are sorted dynamically (at each new delivery); batches are closed within sliding (or rolling) time windows and processed in parallel by multiple identical machines. Computation experiments have shown the better performance on benchmarks of the two proposed heuristics based on new formulations of the critical ratio (CRsetup) considering the ratio of allowance set-up and processing time in the scheduling horizon, which improves the weighted modified operation due date rule

Shop Scheduling In The Presence Of Batching, Sequence-dependent Setups And Incompatible Job Families Minimizing Earliness And Tardiness Penalties

The motivation of this research investigation stems from a particular job shop production environment at a large international communications and information technology company in which electro-mechanical assemblies (EMAs) are produced. The production environment of the EMAs includes the continuous arrivals of the EMAs (generally called jobs), with distinct due dates, degrees of importance and routing sequences through the production workstations, to the job shop. Jobs are processed in batches at the workstations, and there are incompatible families of jobs, where jobs from different product families cannot be processed together in the same batch. In addition, there are sequence-dependent setups between batches at the workstations. Most importantly, it is imperative that all product deliveries arrive on time to their customers (internal and external) within their respective delivery time windows. Delivery is allowed outside a time window, but at the expense of a penalty. Completing a job and delivering the job before the start of its respective time window results in a penalty, i.e., inventory holding cost. Delivering a job after its respective time window also results in a penalty, i.e., delay cost or emergency shipping cost. This presents a unique scheduling problem where an earlinesstardiness composite objective is considered. This research approaches this scheduling problem by decomposing this complex job shop scheduling environment into bottleneck and non-bottleneck resources, with the primary focus on effectively scheduling the bottleneck resource. Specifically, the problem of scheduling jobs with unique due dates on a single workstation under the conditions of batching, sequence-dependent iii setups, incompatible job families in order to minimize weighted earliness and tardiness is formulated as an integer linear program. This scheduling problem, even in its simplest form, is NP-Hard, where no polynomial-time algorithm exists to solve this problem to optimality, especially as the number of jobs increases. As a result, the computational time to arrive at optimal solutions is not of practical use in industrial settings, where production scheduling decisions need to be made quickly. Therefore, this research explores and proposes new heuristic algorithms to solve this unique scheduling problem. The heuristics use order review and release strategies in combination with priority dispatching rules, which is a popular and more commonly-used class of scheduling algorithms in real-world industrial settings. A computational study is conducted to assess the quality of the solutions generated by the proposed heuristics. The computational results show that, in general, the proposed heuristics produce solutions that are competitive to the optimal solutions, yet in a fraction of the time. The results also show that the proposed heuristics are superior in quality to a set of benchmark algorithms within this same class of heuristic

Optimization Models and Approximate Algorithms for the Aerial Refueling Scheduling and Rescheduling Problems

The Aerial Refueling Scheduling Problem (ARSP) can be defined as determining the refueling completion times for fighter aircrafts (jobs) on multiple tankers (machines) to minimize the total weighted tardiness. ARSP can be modeled as a parallel machine scheduling with release times and due date-to-deadline window. ARSP assumes that the jobs have different release times, due dates, and due date-to-deadline windows between the refueling due date and a deadline to return without refueling. The Aerial Refueling Rescheduling Problem (ARRP), on the other hand, can be defined as updating the existing AR schedule after being disrupted by job related events including the arrival of new aircrafts, departure of an existing aircrafts, and changes in aircraft priorities. ARRP is formulated as a multiobjective optimization problem by minimizing the total weighted tardiness (schedule quality) and schedule instability. Both ARSP and ARRP are formulated as mixed integer programming models. The objective function in ARSP is a piecewise tardiness cost that takes into account due date-to-deadline windows and job priorities. Since ARSP is NP-hard, four approximate algorithms are proposed to obtain solutions in reasonable computational times, namely (1) apparent piecewise tardiness cost with release time rule (APTCR), (2) simulated annealing starting from random solution (SArandom ), (3) SA improving the initial solution constructed by APTCR (SAAPTCR), and (4) Metaheuristic for Randomized Priority Search (MetaRaPS). Additionally, five regeneration and partial repair algorithms (MetaRE, BestINSERT, SEPRE, LSHIFT, and SHUFFLE) were developed for ARRP to update instantly the current schedule at the disruption time. The proposed heuristic algorithms are tested in terms of solution quality and CPU time through computational experiments with randomly generated data to represent AR operations and disruptions. Effectiveness of the scheduling and rescheduling algorithms are compared to optimal solutions for problems with up to 12 jobs and to each other for larger problems with up to 60 jobs. The results show that, APTCR is more likely to outperform SArandom especially when the problem size increases, although it has significantly worse performance than SA in terms of deviation from optimal solution for small size problems. Moreover CPU time performance of APTCR is significantly better than SA in both cases. MetaRaPS is more likely to outperform SAAPTCR in terms of average error from optimal solutions for both small and large size problems. Results for small size problems show that MetaRaPS algorithm is more robust compared to SAAPTCR. However, CPU time performance of SA is significantly better than MetaRaPS in both cases. ARRP experiments were conducted with various values of objective weighting factor for extended analysis. In the job arrival case, MetaRE and BestINSERT have significantly performed better than SEPRE in terms of average relative error for small size problems. In the case of job priority disruption, there is no significant difference between MetaRE, BestINSERT, and SHUFFLE algorithms. MetaRE has significantly performed better than LSHIFT to repair job departure disruptions and significantly superior to the BestINSERT algorithm in terms of both relative error and computational time for large size problems