Alternative Post-Processing on a CMOS Chip to Fabricate a Planar Microelectrode Array

We present an alternative post-processing on a CMOS chip to release a planar microelectrode array (pMEA) integrated with its signal readout circuit, which can be used for monitoring the neuronal activity of vestibular ganglion neurons in newborn Wistar strain rats. This chip is fabricated through a 0.6 μm CMOS standard process and it has 12 pMEA through a 4 × 3 electrodes matrix. The alternative CMOS post-process includes the development of masks to protect the readout circuit and the power supply pads. A wet etching process eliminates the aluminum located on the surface of the p+-type silicon. This silicon is used as transducer for recording the neuronal activity and as interface between the readout circuit and neurons. The readout circuit is composed of an amplifier and tunable bandpass filter, which is placed on a 0.015 mm2 silicon area. The tunable bandpass filter has a bandwidth of 98 kHz and a common mode rejection ratio (CMRR) of 87 dB. These characteristics of the readout circuit are appropriate for neuronal recording applications

The potential of microelectrode arrays and microelectronics for biomedical research and diagnostics

Planar microelectrode arrays (MEAs) are devices that can be used in biomedical and basic in vitro research to provide extracellular electrophysiological information about biological systems at high spatial and temporal resolution. Complementary metal oxide semiconductor (CMOS) is a technology with which MEAs can be produced on a microscale featuring high spatial resolution and excellent signal-to-noise characteristics. CMOS MEAs are specialized for the analysis of complete electrogenic cellular networks at the cellular or subcellular level in dissociated cultures, organotypic cultures, and acute tissue slices; they can also function as biosensors to detect biochemical events. Models of disease or the response of cellular networks to pharmacological compounds can be studied in vitro, allowing one to investigate pathologies, such as cardiac arrhythmias, memory impairment due to Alzheimer's disease, or vision impairment caused by ganglion cell degeneration in the retin

MAPPING LOW-FREQUENCY FIELD POTENTIALS IN BRAIN CIRCUITS WITH HIGH-RESOLUTION CMOS ELECTRODE ARRAY RECORDINGS

Neurotechnologies based on microelectronic active electrode array devices are on the way to provide the capability to record electrophysiological neural activity from a thousands of closely spaced microelectrodes. This generates increasing volumes of experimental data to be analyzed, but also offers the unprecedented opportunity to observe bioelectrical signals at high spatial and temporal resolutions in large portions of brain circuits. The overall aim of this PhD was to study the application of high-resolution CMOS-based electrode arrays (CMOS-MEAs) for electrophysiological experiments and to investigate computational methods adapted to the analysis of the electrophysiological data generated by these devices. A large part of my work was carried out on cortico-hippocampal brain slices by focusing on the hippocampal circuit. In the history of neuroscience, a major technological advance for hippocampal research, and also for the field of neurobiology, was the development of the in vitro hippocampal slice preparation. Neurobiological principles that have been discovered from work on in vitro hippocampal preparations include, for instance, the identification of excitatory and inhibitory synapses and their localization, the characterization of transmitters and receptors, the discovery of long-term potentiation (LTP) and long-term depression (LTD) and the study of oscillations in neuronal networks. In this context, an initial aim of my work was to optimize the preparation and maintenance of acute cortico-hippocampal brain slices on planar CMOS-MEAs. At first, I focused on experimental methods and computational data analysis tools for drug-screening applications based on LTP quantifications. Although the majority of standard protocols still use two electrodes platforms for quantifying LTP, in my PhD I investigate the potential advantages of recording the electrical activity from many electrodes to spatiotemporally characterized electrically induced responses. This work also involved the collaboration with 3Brain AG and a CRO involved in drug-testing, and led to a software tool that was licensed for developing its exploitation. In a second part of my work I focused on exploiting the recording resolution of planar CMOS-MEAs to study the generation of sharp wave ripples (SPW-Rs) in the hippocampal circuit. This research activity was carried out also by visiting the laboratory of Prof. A. Sirota (Ludwig Maximilians University, Munich). In addition to set-up the experimental conditions to record SPW-Rs from planar CMOS-MEAs integrating 4096 microelectrodes, I also explored the implementation of a data analysis pipeline to identify spatiotemporal features that might characterize different type of in-vitro generated SPW-R events. Finally, I also contributed to the initial implementation of high-density implantable CMOS-probes for in-vivo electrophysiology with the aim of evaluating in vivo the algorithms that I developed and investigated on brain slices. With this aim, in the last period of my PhD I worked on the development of a Graphical User Interface for controlling active dense CMOS probes (or SiNAPS probes) under development in our laboratory. I participated to preliminary experimental recordings using 4-shank CMOS-probes featuring 1024 simultaneously recording electrodes and I contributed to the development of a software interface for executing these experiments

Neuronal Population Encoding of Sensory Information in the Rat Barrel Cortex: Local Field Potential Recording and Characterization by an Innovative High-Resolution Brain-Chip Interface

Neuronal networks are at the base of information processing in the brain. They are series of interconnected neurons whose activation defines a recognizable linear pathway. The main goal of studying neural ensembles is to characterize the relationship between the stimulus and the individual or general neuronal responses and the relation amongst the electrical activities of neurons within the network, also understanding how topology and connectivity relates to their function. Many techniques have been developed to study these complex systems: single-cell approaches aim to investigate single neurons and their connections with a limited number of other nerve cells; on the opposite side, low-resolution large-scale approaches, such as functional MRI (Magnetic Resonance Imaging) or electroencephalography (EEG), record signal changes in the brain that are generated by large populations of cells. More recently, multisite recording techniques have been developed to overcome the limitations of previous approaches, allowing to record simultaneously from huge neuronal ensembles with high spatial resolution and in different brain regions, i.e. by using implantable semiconductor chips. Local Field Potentials (LFPs), the part of electrophysiological signals that has frequencies below 500 Hz, capture key integrative synaptic processes that cannot be measured by analyzing the spiking activity of few neurons alone. Several studies have used LFPs to investigate cortical network mechanisms involved in sensory processing, motor planning and higher cognitive processes, like memory and perception. LFPs are also promising signals for steering neuroprosthetic devices and for monitoring neural activity even in human beings, since they are more easily and stably recorded in chronic settings than neuronal spikes. In this work, LFP profiles recorded in the rat barrel cortex through high-resolution CMOS-based needle chips are presented and compared to those obtained by means of conventional Ag/AgCl electrodes inserted into glass micropipettes, which are widely used tools in electrophysiology. The rat barrel cortex is a well-known example of topographic mapping where each of the whiskers on the snout of the animal is mapped onto a specific cortical area, called a barrel. The barrel cortex contains the somatosensory representation of the whiskers and forms an early stage of cortical processing for tactile information, along with the trigeminal ganglion and the thalamus. It is an area of great importance for understanding how the cerebral cortex works, since the cortical columns that form the basic building blocks of the neocortex can be actually seen within the barrel. Moreover, the barrel cortex has served as a test-bed system for several new methodologies, partly because of its unique and instantly identifiable form, and partly because the species that have barrels, i.e. rodents, are the most commonly used laboratory mammal. The barrel cortex, the whiskers that activate it and the intervening neural pathways have been increasingly the subject of focus by a growing number of research groups for quite some time. Nowadays, studies (such this one) are directed not only at understanding the barrel cortex itself but also at investigating issues in related fields using the barrel cortex as a base model. In this study, LFP responses were evoked in the target barrel by repeatedly deflecting the corresponding whisker in a controlled fashion, by means of a specifically designed closed-loop piezoelectric bending system triggered by a custom LabView acquisition software. Evoked LFPs generated in the barrel cortex by many consecutive whiskers' stimulations show large variability in shapes and timings. Moreover, anesthetics can deeply affect the profile of evoked responses. This work presents preliminary results on the variability and the effect of commonly used anesthetics on these signals, by comparing the distributions of evoked responses recorded from rats anesthetized with tiletamine-xylazine, which mainly blocks the excitatory NMDA receptors, and urethane, which conversely affects both the excitatory and inhibitory system, in a complex and balanced way yet preserving the synaptic plasticity. Representative signal shape characteristics (e.g., latencies and amplitude of events) extracted from evoked responses acquired from different cortical layers are analyzed and discussed. Statistical distributions of these parameters are estimated for all the different depths, in order to assess the variability of LFPs generated by individual mechanical stimulations of single whiskers along the entire cortical column. Preliminary results showed a great variability in cortical responses, which varied both in latency and amplitude across layers. We found significant difference in the latency of the first principal peak of the responses: under tiletamine-xylazine anesthetic, the responses or events of the evoked LFPs occurred later than the ones recorded while urethane was administered. Furthermore, the distributions of this parameter in all cortical layers were narrower in case of urethane. This behavior should be attributed to the different effects of these two anesthetics on specific synaptic receptors and thus on the encoding and processing of the sensory input information along the cortical pathway. The role of the ongoing basal activity on the modulation of the evoked response was also investigated. To this aim, spontaneous activity was recorded in different cortical layers of the rat barrel cortex under the two types of anesthesia and analyzed in the statistical context of neuronal avalanches. A neuronal avalanche is a cascade of bursts of activity in neural networks, whose size distribution can be approximated by a power law. The event size distribution of neuronal avalanches in cortical networks has been reported to follow a power law of the type P(s)= s^-a, with exponent a close to 1.5, which represent a reflection of long-range spatial correlations in spontaneous neuronal activity. Since negative LFP peaks (nLFPs) originates from the sum of synchronized Action Potentials (AP) from neurons within the vicinity of the recording electrode, we wondered if it were possible to model single nLFPs recorded in the basal activity traces by means of only one electrode as the result of local neuronal avalanches, and thus we analyzed the size (i.e. the amplitude in uV) distribution of these peaks so as to identify a suitable power-law distribution that could describe also these single-electrode records. Finally, the results of the first ever measurements of evoked LFPs within an entire column of the barrel cortex obtained by means of the latest generation of CMOS-based implantable needles, having 256 recording sites arranged into two different array topologies (i.e. 16 x 16 or 4 x 64, pitches in the x- and y-direction of 15 um and 33 um respectively), are presented and discussed. A propagation dynamics of the LFP can be already recognized in these first cortical profiles. In the next future, the use of these semiconductor devices will help, among other things, to understand how degenerating syndromes like Parkinson or Alzheimer evolve, by coupling detected behaviors and symptoms of the disease to neuronal features. Implantable chips could then be used as 'electroceuticals', a newly coined term that describes one of the most promising branch of bioelectronic medicine: they could help in reverting the course of neurodegenerative diseases, by constituting the basis of neural prostheses that physically supports or even functionally trains impaired neuronal ensembles. High-resolution extraction and identification of neural signals will also help to develop complex brain-machine interfaces, which can allow intelligent prostheses to be finely controlled by their wearers and to provide sophisticated feedbacks to those who have lost part of their body or brain functions

Design, characterization and testing of a thin-film microelectrode array and signal conditioning microchip for high spatial resolution surface laplacian measurement.

Cardiac mapping has become an important area of research for understanding the mechanisms responsible for cardiac arrhythmias and the associated diseases. Current technologies for measuring electrical potentials on the surface of the heart are limited due to poor spatial resolution, localization issues, signal distortion due to noise, tissue damage, etc. Therefore, the purpose of this study is to design, develop, characterize and investigate a custom-made microfabricated, polyimide-based, flexible Thin-Film MicroElectrode Array (TFMEA) that is directly interfaced to an integrated Signal Conditioning Microchip (SCM) to record cardiac surface potentials on the cellular level to obtain high spatial resolution Surface Laplacian (SL) measurement. TFMEAs consisting of five fingers (Cover area = 4 mm2 and 16 mm2), which contained five individual microelectrodes placed in orthogonal directions (25-µm in diameter, 75-µm interelectrode spacing) to one another, were fabricated within a flexible polyimide substrate and capable of recording electrical activities of the heart on the order of individual cardiomyocytes. A custom designed SCM consisting of 25 channels of preamplification stages and second order band-pass filters was interfaced directly with the TFMEA in order to improve the signal-to-noise ratio (SNR) characteristics of the high spatial resolution recording data. Metrology characterization using surface profilometry and high resolution Scanning Electron Microscope (SEM) indicated the geometry of fabricated TFMEAs closely matched the design parameters \u3c 0.4%). The DC resistances of the 25 individual micro electrodes were consistent (1.050 ± 0.026 kO). The simulation and testing results of the SCM verified the pre-amplification and filter stages met the designed gain and frequency parameters within 2.96%. The functionality of the TFMEA-SCM system was further characterized on a TX 151 conductive gel. The characterization results revealed that the system functionality was sufficient for high spatial cardiac mapping. In vivo testing results clearly demonstrated feasibility of using the TFMEA-SCM system to obtain cellular level SL measurements with significantly improved the SNRs during normal sinus rhythm and Ventricular Fibrillation (VF). Local activation times were detected via evaluating the zero crossing of the SL electro grams, which coincided with the gold standard (dV/dt)min of unipolar electro grams within ± 1%. The in vivo transmembrane current densities calculated from the high spatial resolution SLs were found to be significantly higher than the transmembrane current densities computed using electrodes with higher interelectrode spacings. In conclusion, the custom-made TFMEASCM systems demonstrated feasibility as a tool for measuring cardiac potentials and to perform high resolution cardiac mapping experiments

A Low-Power Wireless Multichannel Microsystem for Reliable Neural Recording.

This thesis reports on the development of a reliable, single-chip, multichannel wireless biotelemetry microsystem intended for extracellular neural recording from awake, mobile, and small animal models. The inherently conflicting requirements of low power and reliability are addressed in the proposed microsystem at architectural and circuit levels. Through employing the preliminary microsystems in various in-vivo experiments, the system requirements for reliable neural recording are identified and addressed at architectural level through the analytical tool: signal path co-optimization. The 2.85mm×3.84mm, mixed-signal ASIC integrates a low-noise front-end, programmable digital controller, an RF modulator, and an RF power amplifier (PA) at the ISM band of 433MHz on a single-chip; and is fabricated using a 0.5µm double-poly triple-metal n-well standard CMOS process. The proposed microsystem, incorporating the ASIC, is a 9-channel (8-neural, 1-audio) user programmable reliable wireless neural telemetry microsystem with a weight of 2.2g (including two 1.5V batteries) and size of 2.2×1.1×0.5cm3. The electrical characteristics of this microsystem are extensively characterized via benchtop tests. The transmitter consumes 5mW and has a measured total input referred voltage noise of 4.74µVrms, 6.47µVrms, and 8.27µVrms at transmission distances of 3m, 10m, and 20m, respectively. The measured inter-channel crosstalk is less than 3.5% and battery life is about an hour. To compare the wireless neural telemetry systems, a figure of merit (FoM) is defined as the reciprocal of the power spent on broadcasting one channel over one meter distance. The proposed microsystem’s FoM is an order of magnitude larger compared to all other research and commercial systems. The proposed biotelemetry system has been successfully used in two in-vivo neural recording experiments: i) from a freely roaming South-American cockroach, and ii) from an awake and mobile rat.Ph.D.Electrical EngineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttp://deepblue.lib.umich.edu/bitstream/2027.42/91542/1/aborna_1.pd

SU-8 microprobes for biomedical applications

152 p. : il.[ES]La presente tesis doctoral aborda el diseño, fabricación, encapsulado, y caracterización de microagujas de SU-8 para aplicaciones médicas. En la actualidad existe una amplia variedad de agujas para el registro, estimulación y dispensado de drogas, pero se han observado algunas limitaciones en relación a su diseño y material estructural utilizados. En este trabajo se han desarrollado microagujas basadas en la tecnología de SU-8 como alternativa a las agujas actuales. Primeramente se diseñan las agujas para cada tipo de aplicación, después se determinan los procedimientos de fabricación y finalmente se desarrollan los encapsulados para conectar la aguja miniaturizada con el exterior macroscópico. La aplicación de las agujas se ha centrado en dos campos biomédicos: 1) la monitorización de órganos tal como el riñón, y 2) el registro de la actividad neuronal, añadiendo la posibilidad de realizar dispensado de drogas de forma simultánea. El primer objetivo es crear microagujas que causen el menor daño posible en el tejido biológico. Las mediciones eléctricas que se llevan a cabo para conocer el estado real del tejido pueden resultar modificadas, debilitadas o destruidas si las células que constituyen el tejido han sido previamente dañadas. En este trabajo, se desarrollan microagujas basadas en la tecnología MEMS (micro electromechanical systems) para evitar daños profundos en el tejido y poder así realizar mediciones fidedignas. La tecnología MEMS integra elementos y dispositivos eléctricos, mecánicos y electrónicos miniaturizados, los cuales están basados en la industria consolidada de los Circuitos Integrados (IC). Generalmente, las dimensiones de los elementos basados en MEMS son de entre 1 y 100 micras y los dispositivos pueden variar entre 20 micras y 1 milímetro. Las técnicas base de esta tecnología son la deposición de materiales en láminas, la fotolitografía y el grabado. El silicio es el material más utilizado para crear los múltiples dispositivos MEMS, sin embargo, su rigidez y fragilidad ha motivado el estudio de otros materiales tales como los polímeros. En esta tesis se ha utilizado el polímero SU-8 como material estructural debido a sus propiedades favorables para la fabricación de microagujas. Además, la fabricación de microagujas con este polímero permite el uso de procesos de bajo coste. Esta fotoresina presenta una baja absorción a la luz UV, posibilitando exposiciones uniformes en función del espesor del polímero. Así, se obtienen perfiles verticales y un buen control dimensional para toda la estructura. Además, estudios recientes muestran una adecuada biocompatibilidad del polímero SU-8. El segundo objetivo es obtener la más alta relación señal-ruido posible en las mediciones eléctricas. Para ello se han integrado microelectrodos en las agujas y se ha estudiado la constitución física, la configuración espacial y los tratamientos superficiales de los mismos. Un determinado diseño para cada aplicación y la modificación de las técnicas de fabricación han dado como resultado una óptima capacidad sensora de los electrodos. Así, se ha demostrado su uso a través de la monitorización de episodios de isquemia y reperfusión en riñón de rata. En cuanto a las aplicaciones neuronales, se han registrado potenciales de acción con una amplitud de hasta 400-500 ¿V en hipocampo de rata. Además, se ha demostrado que los microelectrodos son capaces de discriminar diferentes fuentes neuronales. Todos estos resultados han demostrado la versatilidad del polímero para crear dispositivos sensores con aplicación en diversas áreas biomédicas. El último objetivo de esta tesis ha sido integrar canales microfluídicos en la aguja para poder dispensar drogas en aplicaciones neuronales y como resultado, detectar cambios en la actividad neuronal. Finalmente, se han llevado a cabo los primeros experimentos fluídicos in vivo en hipocampo de rata como prueba de concepto. Se dispensan 0.5 ¿l de una disolución de kainato y a continuación se registra un incremento en la actividad neuronal. Los resultados preliminares han demostrado la funcionalidad de la aguja para dispensar y monitorizar de forma simultánea aunque se tienen que realizar más experimentos y optimizar el protocolo experimental para verificar el buen funcionamiento de la aguja. En estos momentos, se están realizando más experimentos neuronales para llegar a establecer la tecnología desarrollada en esta tesis