Integrated sensors for process monitoring and health monitoring in microsystems

This thesis presents the development of integrated sensors for health monitoring in Microsystems, which is an emerging method for early diagnostics of status or “health” of electronic systems and devices under operation based on embedded tests. Thin film meander temperature sensors have been designed with a minimum footprint of 240 m × 250 m. A microsensor array has been used successfully for accurate temperature monitoring of laser assisted polymer bonding for MEMS packaging. Using a frame-shaped beam, the temperature at centre of bottom substrate was obtained to be ~50 ºC lower than that obtained using a top-hat beam. This is highly beneficial for packaging of temperature sensitive MEMS devices. Polymer based surface acoustic wave humidity sensors were designed and successfully fabricated on 128° cut lithium niobate substrates. Based on reflection signals, a sensitivity of 0.26 dB/RH% was achieved between 8.6 %RH and 90.6 %RH. Fabricated piezoresistive pressure sensors have also been hybrid integrated and electrically contacted using a wire bonding method. Integrated sensors based on both LiNbO3 and ZnO/Si substrates are proposed. Integrated sensors were successfully fabricated on a LiNbO3 substrate with a footprint of 13 mm × 12 mm, having multi monitoring functions for simultaneous temperature, measurement of humidity and pressure in the health monitoring applications

Characterisation and humidity-sensing properties of aluminium (oxy)-hydroxide films prepared by cathodically induced precipitation

Cathodically-induced precipitated aluminium (oxy)-hydroxide films, prepared using hydrogen-sorbing palladium electrodes, have been characterised and their humidity-sensing electrical properties studied. Infrared (IR) spectroscopy demonstrated that the films are hygroscopic, and this property allows their use as the active component in a humidity sensor. Films formed as bridging precipitates between twin palladium electrodes were tested for electrical parameter response to relative humidity changes. A linear correlation with impedance is obtained on application of a 100 mV applied ac signal amplitude at 1 kHz. The linearity of response is comparable to commercial sensors. Cathodically-induced precipitate films contain 24 wt% aluminium and 10 wt% sulfate, the balance being oxygen and hydrogen. As-deposited films are amorphous, but change to a crystalline form after heat treatment at high temperature. XRD patterns taken as films are heated reveal transformation into γ- Al2O3, followed by production of α-Al2O3 at temperatures greater than 1100°C. An electrochemical quartz crystal nanobalance (EQCN) study demonstrated that dissolution of the precipitate is possible at positive potentials, cycling to which allows film compaction

Preparation and humidity sensitive impedance of spinel ceramic nickel germanate

This thesis concerns the formation, sintering and humidity dependent electrical behaviour of the spinel ceramic material nickel germanate, Ni(_2)Ge0(_4).Ni(_2)Ge0(_4) has been prepared via the solid state reaction between NiO and GeO(_2) over a range of temperatures, and characterised using a number of techniques. The sintering behaviour of pressed pellets of Ni(_2)Ge0(_4) has also been investigated, together with a characterisation of the microstructure of the sintered bodies. Substitutional doping of Ni(_2)GeO(_4) with Li as a replacement for Ni is found to promote a high degree of shrinkage in the sintering process, probably due to the formation of a liquid phase. XRD revealed that even when 10 % of the Ni atoms were replaced with Li, no change in the crystal structure could be detected. A C. impedance spectroscopy of Ni(_2)Ge0(_4) samples was used to investigate the humidity sensitivity of this material. Equivalent circuit analysis, based on a network of resistors and constant phase elements, shows that the humidity sensitivity is due to conduction in a surface layer of water, in agreement with the models currently popular in the Uterature. Measurement of the water adsorption isotherm of Ni(_2)Ge0(_4) in pellet form indicates that a single monolayer of water is formed at around 20 %R(_H), with an approximately linear increase in water layer thickness up to around 80 %R(_H), after which capillary condensation causes a large increase in the volume of adsorbed water. The information gained on the thickness of this layer of water has been correlated with the resistance of the layer measured by impedance spectroscopy, and subsequently used to provide evidence for a model of the humidity sensitive conduction. The conduction in the surface layer is thought to be due to dissociation of the water, where the amount of dissociation is exponentially dependent on the humidity

Conducting metal oxide materials for printed electronics

Printed electronics as a manufacturing process has many advantages, mainly, it allows for the high throughput rapid fabrication of thin, flexible electronic components with minimal waste. There are many printing processes that can be utilised for printing electronics and although each process can differ vastly, the materials currently used in these processes are generally the same, silver and carbon. However, to develop printing as a more mainstream manufacturing method for electronics, a wider variety of materials are required which can provide better stability and longevity of components, new functionality for printed applications and allow for in-situ processing and tuning of components. Conducting metal oxides are a good candidate for integrating into printed electronics processes, these materials are typically semiconductors, they have bandgaps, and properties can be altered via altering the band gap. They are also oxides, so they cannot oxidise further and therefore atmospheric damage is reduced compared to pure metals. They can also be fabricated into a wide range of particle morphologies, all with advantages in different fields and electronic applications. Therefore, the ability to print these materials is valuable to the field. In this thesis, the integration of conducting metal oxide electro-ceramic materials into the field of printed electronics has been explored. This was performed through the completion of five research objectives including, the selection of appropriate materials for the research, the formulation of conductive inks with the materials, the investigation of post-processing techniques for printed films and further research into passive component fabrication and sensor applications. Firstly, following an extensive literature review, four materials were selected including three doped zinc oxide materials synthesised via different methods. The fourth material is commercially sourced indium tin oxide (ITO). A nitrocellulose vehicle was determined to be the most compatible with the oxides and selected for ink formulation. Inks were then formulated with all four materials, with optical and electrical properties analysed. Gallium doped Zinc Oxide (GZO) and ITO were selected for further investigation based on the excellent conductivity of the indium tin oxide (57.77Ω□-1) and the highly transparent optical properties of the gallium doped zinc oxide (>84% transmittance). Laser processing was selected as a post processing method. It was found that the laser processing dramatically increased conductivity. The GZO improving from a non-conductive film to 10.21% of bulk conductivity. The ITO improved from 3.46% to 40.47% of the bulk conductivity. It was also found that the laser processing invoked a carbothermal reduction process allowing for a rapid manufacturing process for converting spherical particles into useful nanoparticle morphologies (nanorods, nanowires etc). Following this, resistive and capacitive applications involving laser processing and conventionally heat-treated conductive oxide inks were developed. Combining the new materials and manufacturing processes, tuneable printed resistors with a tuning range of 50 to 20M could be fabricated. All metal oxide, ITO based capacitors were also fabricated and characterised. These were then developed into humidity sensors which provided excellent humidity sensing properties, showing linearity between 5 and 95% relative humidity (RH) and sensitivities of up to 7.76pF/RH%, demonstrating higher performance than commercial equivalents (0.2 – 0.5pF/RH%). In conclusion, this work provides a breakthrough for conductive metal oxide materials research and its place in Printed Electronics research by providing insight into the processes required to make these materials conduct and by developing useful manufacturing methods, post processing techniques and applications.</div

Aerometry instrumentation study Final report

Techniques and instruments for meteorological measurements in Mars and Venus atmosphere

Factors affecting low temperature performance of zirconia gas sensors.

A reduction in the operation temperature of zirconia ceramic gas sensors is highly desirable for a number of practical reasons. This work seeks to investigate the factors that prevent a reduction in operation temperature and propose methods by which these may be resolved. A novel approach to sensor fabrication has been developed and employed with the advantage of reduced device complexity that should lead to subsequent cost and reliability benefits. Leakage rates in these devices have been shown to be small and electrochemical in origin. Leakage was greater than reported for gold seal devices, partly due to increased electrode activity. The flexibility of device configuration allows a variety of sensor geometries and functions to be realised. This flexibility led to the characterisation of sensors at the upper and lower ends of measurement range and the identification of deviations from theoretical performance. These deviations have been reconciled with theory extended to cover these limits. Such sensors are known to be sensitive to reducible gas species such as CO2 and H2O with a second limiting plateau allowing quantification of these gases. Such analysis capabilities have been found to be extended by incorporating a second pair of electrodes. These effects have not previously been reported. Sensors have been shown to be more sensitive to H2O than to CO2. To investigate the low temperature response of sensors, a variety of techniques and analyses have been developed and are employed with varying success. Impedance spectroscopy was by far the most useful and revealing tool but this is a function of the highly developed hardware and sophisticated control and analysis software bought as a complete system. Gas step changes and current / voltage sweeps were also useful as comparative techniques but could not separate out component mechanisms. Scanning electron microscopy proved to be a vital tool as it allowed vital information to be obtained concerning electrode and electrolyte microstructure. Again this is a function of a highly developed and sophisticated instrument. The techniques of pressure and concentration modulation were limited in terms of ease of use, measurement range and results interpretation. The main drawbacks were limited frequency ranges and laborious data collection and analysis. They do both however show large potential for improvement. Both amperometric and potentiometric sensors response rates were analysed with a variety of noble metal electrodes using each technique. Electrode material proved to have a marked effect on sensor performance with the best results obtained with silver and electro-deposited platinum. Scanning electron microscopy of silver showed that a finely divided and openly porous electrode was not required for high performance contrary to expectations. This is thought to be due to the solubility of oxygen in this metal. With platinum however, the improved microstructure is thought to be a signifîcant factor in electro-deposited and cermet electrode performance. Response rates in amperometric sensors did not show any significant temperature dependence although a restriction in measurement range was observed. Response rates were suspected to be mainly influenced by sensor geometry whilst measurement range was a function of sensor geometry, electrolyte conductivity and electrode activity. Improved electrolytes will provide improvements and may come in the form of attention to the YSZ system or by employing an alternative ion conductor such as ceria. Close attention to sensor dimensions provides possibility for enhancements. In amperometric devices for instance a long, thin diffusion barrier is required leading to a small internal cavity with a large electrode surface area and a thin electrolyte membrane

CHARACTERIZATION OF CARBON NANOTUBES BASED RESISTIVE AND CAPACITIVE GAS SENSORS

A preliminary gas detection study was conducted on as-grown multi-walled carbon nanotubes and anodized aluminum oxide (MWNTs/AAO) template. The material demonstrated room temperature gas sensitivity and p-type semiconductor characteristics. Plasma-etched MWNTs/AAO templates were employed to construct capacitive gas sensors. The capacitances of the sensors were sensitive to both reducing and oxidizing gases at room temperature. Single-walled carbon nanotubes (SWNTs) dispersed in binder andamp;aacute;-terpineol were applied on sensor platforms to form resistive gas sensors. The sensors demonstrated excellent sensitivity to low concentrations of reducing and oxidizing gases at room temperature, which suggests the p-type semiconducting behavior of SWNTs. The sensor recovery was found to be incomplete at room temperature in flow of nitrogen and air, thus possible solutions were investigated to enhance sensor performance. The sensor operating principles and suggestions for possible future work are discussed. The room temperature and air background functionality of the sensor suggest that SWNT is a promising gas sensing material for application in ambient conditions

Indium tin oxide thin film preparation and property relationship for humidity sensing: a review.

This review aims to present a critical overview of indium tin oxide (ITO) thin film preparation methods, structure–property relationship and its application in humidity sensing. A range of passive and active humidity sensors with thin films (based on metal oxides) detect humidity. ITO thin film has advantageous properties, such as low resistivity and high stability, making it highly suitable for humidity sensing applications. ITO thin film has shown an efficient level of humidity sensing and a compatible size of humidity sensor can monitor the interface conditions' humidity. So far, the application of ITO thin film for humidity measurement has yet to be explored at commercial scale, specifically in the detection of lower environmental humidity range (below 5% relative humidity (RH)). The research reveals a gap in improving ITO thin film properties with an optimal range of preparation conditions. The research opportunities in the preparation, properties, characteristics and efficient humidity sensitivity of ITO thin film are reviewed in this work