Ordonnancement et contrôle avancé des procédés en fabrication de semi-conducteurs.

Dans cette thèse, nous avons examiné différentes possibilités d'intégration des décisions d'ordonnancement avec des informations provenant de systèmes avancés des contrôles des procédés dans la fabrication de semi-conducteurs. Nous avons développé des idées d'intégration et défini des nouveaux problèmes d'ordonnancement originales : Problème d'ordonnancement avec des contraintes de temps (PTC) et problème d'ordonnancement avec l'état de santé des équipement (PEHF). PTC et PEHF ont des fonctions objectives multicritères.PTC est un problème d'ordonnancement des familles de jobs sur des machines parallèles non identiques en tenant compte des temps de setup et des contraintes de temps. Les machines non identiques signifient que toutes les machines ne peuvent pas traités (qualifiés) tous les types de familles d'emplois. Les contraintes de temps nommés aussi Thresholds sont inspirées des besoins de l'APC. Elle est liée à l'alimentation régulière des boucles de contrôle de l'APC. L'objectif est de minimiser la somme des dates de fin et les pertes de qualification des machines lorsqu'une famille de jobs n'est pas ordonnancée sur la machine donnée avant un seuil de temps donné.D'autre part, PEHF est une extension de PTC. Il consiste d'intégrer les indices de santé des équipements (EHF). EHF est un indicateur associé à l'équipement qui donne l'état de la. L'objectif est d'ordonnancer des tâches de familles de jobs différents sur les machines tout en minimisant la somme des temps d'achèvement, les pertes de qualification de la machine et d'optimiser un rendement attendu. Ce rendement est défini comme une fonction d'EDH et de la criticité de jobs considérés.In this thesis, we discussed various possibilities of integrating scheduling decisions with information and constraints from Advanced Process Control (APC) systems in semiconductor Manufacturing. In this context, important questions were opened regarding the benefits of integrating scheduling and APC. An overview on processes, scheduling and Advanced Process Control in semiconductor manufacturing was done, where a description of semiconductor manufacturing processes is given. Two of the proposed problems that result from integrating bith systems were studied and analyzed, they are :Problem of Scheduling with Time Constraints (PTC) and Problem of Scheduling with Equipement health Factor (PEHF). PTC and PEHF have multicriteria objective functions.PTC aims at scheduling job in families on non-identical parallel machines with setup times and time constraints.Non-identical machines mean that not all miachines can (are qualified to) process all types of job families. Time constraints are inspired from APC needs, for which APC control loops must be regularly fed with information from metrology operations (inspection) within a time interval (threshold). The objective is to schedule job families on machines while minimizing the sum of completion times and the losses in machine qualifications.Moreover, PEHF was defined which is an extension of PTC where scheduling takes into account the equipement Health Factors (EHF). EHF is an indicator on the state of a machine. Scheduling is now done by considering a yield resulting from an assignment of a job to a machine and this yield is defined as a function of machine state and job state.ST ETIENNE-ENS des Mines (422182304) / SudocGARDANNE-Centre microélec. (130412301) / SudocSudocFranceF

Analysis of production control methods for semiconductor research and development fabs using simulation

The importance of semiconductor device fabrication has been rising steadily over many years. Integrated circuit technology and innovation depends on successful research and development (R&D). R&D establishes the direction for prevailing technology in electronics and computers. To be a leader in the semiconductor industry, a company must bring technology to the market as soon as its application is deemed feasible. Using suitable production control methods for wafer fabrication in R&D fabs ensures reduction in cycle times and planned inventories, which in turn help to more quickly, transfer the new technology to the production fabs, where products are made on a commercial scale. This helps to minimize the time to market. The complex behavior of research fabs produces varying results when conventional production control methodologies are applied. Simulation modeling allows the study of the behavior of the research fab by providing statistical reports on performance measures. The goal of this research is to investigate production control methods in semiconductor R&D fabs. A representative R&D fab is modeled, where an appropriate production load is applied to the fab by using a representative product load. Simulation models are run with different levels of production volume, lot priorities, primary and secondary dispatching strategies and due date tightness as treatment combinations in a formally designed experiment. Fab performance is evaluated based on four performance measures, which include percent on time delivery, average cycle time, standard deviation of cycle time and average work-in-process. Statistical analyses are used to determine the best performing dispatching rules for given fab operating scenarios. Results indicate that the optimal combination of dispatching rules is dependent on specific fab characteristics. However, several dispatching rules are found to be robust across performance measures. A simulation study of the Semiconductor & Microsystems Fabrication Laboratory (SMFL) at the Rochester Institute of Technology (RIT) is used to verify the results

The NASA SBIR product catalog

The purpose of this catalog is to assist small business firms in making the community aware of products emerging from their efforts in the Small Business Innovation Research (SBIR) program. It contains descriptions of some products that have advanced into Phase 3 and others that are identified as prospective products. Both lists of products in this catalog are based on information supplied by NASA SBIR contractors in responding to an invitation to be represented in this document. Generally, all products suggested by the small firms were included in order to meet the goals of information exchange for SBIR results. Of the 444 SBIR contractors NASA queried, 137 provided information on 219 products. The catalog presents the product information in the technology areas listed in the table of contents. Within each area, the products are listed in alphabetical order by product name and are given identifying numbers. Also included is an alphabetical listing of the companies that have products described. This listing cross-references the product list and provides information on the business activity of each firm. In addition, there are three indexes: one a list of firms by states, one that lists the products according to NASA Centers that managed the SBIR projects, and one that lists the products by the relevant Technical Topics utilized in NASA's annual program solicitation under which each SBIR project was selected

Intelligent shop scheduling for semiconductor manufacturing

Semiconductor market sales have expanded massively to more than 200 billion dollars annually accompanied by increased pressure on the manufacturers to provide higher quality products at lower cost to remain competitive. Scheduling of semiconductor manufacturing is one of the keys to increasing productivity, however the complexity of manufacturing high capacity semiconductor devices and the cost considerations mean that it is impossible to experiment within the facility. There is an immense need for effective decision support models, characterizing and analyzing the manufacturing process, allowing the effect of changes in the production environment to be predicted in order to increase utilization and enhance system performance. Although many simulation models have been developed within semiconductor manufacturing very little research on the simulation of the photolithography process has been reported even though semiconductor manufacturers have recognized that the scheduling of photolithography is one of the most important and challenging tasks due to complex nature of the process. Traditional scheduling techniques and existing approaches show some benefits for solving small and medium sized, straightforward scheduling problems. However, they have had limited success in solving complex scheduling problems with stochastic elements in an economic timeframe. This thesis presents a new methodology combining advanced solution approaches such as simulation, artificial intelligence, system modeling and Taguchi methods, to schedule a photolithography toolset. A new structured approach was developed to effectively support building the simulation models. A single tool and complete toolset model were developed using this approach and shown to have less than 4% deviation from actual production values. The use of an intelligent scheduling agent for the toolset model shows an average of 15% improvement in simulated throughput time and is currently in use for scheduling the photolithography toolset in a manufacturing plant

NASA SBIR abstracts of 1990 phase 1 projects

The research objectives of the 280 projects placed under contract in the National Aeronautics and Space Administration (NASA) 1990 Small Business Innovation Research (SBIR) Phase 1 program are described. The basic document consists of edited, non-proprietary abstracts of the winning proposals submitted by small businesses in response to NASA's 1990 SBIR Phase 1 Program Solicitation. The abstracts are presented under the 15 technical topics within which Phase 1 proposals were solicited. Each project was assigned a sequential identifying number from 001 to 280, in order of its appearance in the body of the report. The document also includes Appendixes to provide additional information about the SBIR program and permit cross-reference in the 1990 Phase 1 projects by company name, location by state, principal investigator, NASA field center responsible for management of each project, and NASA contract number

Literature survey about elements of manufacturing shop floor operation key performance indicators

In the era of globalisation, manufacturing industries are compelled to continuously monitor their manufacturing operations to maintain competitiveness. As a result, manufacturers have integrated several measurement models to inspect their manufacturing operations. These models comprise of a set of Key Performance Indicators (KPIs), which are capable to enumerate the effectiveness, competence, efficiency and proficiency of manufacturing operations. This paper presents a review of manufacturing shop floor operation KPIs that has been studied in the recent literature. Based on the reviewed literature author proposes various KPI elements such as: description, category, scope, formula, unit of measure, range, trend, mode of display, viewers and manufacturing approach. These elements can help manufacturers to better describe, classify, analyze and measure the appropriate KPIs for their shop floor operations. Thus, enabling manufacturers to accomplish and uphold great quality, increased productivity and throughput

UC Berkeley's Cory Hall: Evaluation of Challenges and Potential Applications of Building-to-Grid Implementation

From September 2009 through June 2010, a team of researchers developed, installed, and tested instrumentation on the energy flows in Cory Hall on the UC Berkeley campus to create a Building-to-Grid testbed. The UC Berkeley team was headed by Professor David Culler, and assisted by members from EnerNex, Lawrence Berkeley National Laboratory, California State University Sacramento, and the California Institute for Energy & Environment. While the Berkeley team mapped the load tree of the building, EnerNex researched types of meters, submeters, monitors, and sensors to be used (Task 1). Next the UC Berkeley team analyzed building needs and designed the network of metering components and data storage/visualization software (Task 2). After meeting with vendors in January, the UCB team procured and installed the components starting in late March (Task 3). Next, the UCB team tested and demonstrated the system (Task 4). Meanwhile, the CSUS team documented the methodology and steps necessary to implement a testbed (Task 5) and Harold Galicer developed a roadmap for the CSUS Smart Grid Center with results from the testbed (Task 5a) and evaluated the Cory Hall implementation process (Task 5b). The CSUS team also worked with local utilities to develop an approach to the energy information communication link between buildings and the utility (Task 6). The UC Berkeley team then prepared a roadmap to outline necessary technology development for Building-to-Grid, and presented the results of the project in early July (Task 7). Finally, CIEE evaluated the implementation, noting challenges and potential applications of Building-to-Grid (Task 8). These deliverables are available at the i4Energy site: http://i4energy.org/

Predictive Modeling for Intelligent Maintenance in Complex Semiconductor Manufacturing Processes.

Semiconductor fabrication is one of the most complicated manufacturing processes, in which the current prevailing maintenance practices are preventive maintenance, using either time-based or wafer-based scheduling strategies, which may lead to the tools being either “over-maintained” or “under-maintained”. In literature, there rarely exists condition-based maintenance, which utilizes machine conditions to schedule maintenance, and almost no truly predictive maintenance that assesses remaining useful lives of machines and plans maintenance actions proactively. The research presented in this thesis is aimed at developing predictive modeling methods for intelligent maintenance in semiconductor manufacturing processes, using the in-process tool performance as well as the product quality information. In order to achieve an improved maintenance decision-making, a method for integrating data from different domains to predict process yield is proposed. The self-organizing maps have been utilized to discretize continuous data into discrete values, which will tremendously reduce the computational cost of Bayesian network learning process that can discover the stochastic dependences among process parameters and product quality. This method enables one to make more proactive product quality prediction that is different from traditional methods based on solely inspection results. Furthermore, a method of using observable process information to estimate stratified tool degradation levels has been proposed. Single hidden Markov model (HMM) has been employed to represent the tool degradation process under a single recipe; and the concatenation of multiple HMMs can be used to model the tool degradation under multiple recipes. To validate the proposed method, a simulation study has been conducted, which shows that HMMs are able to model the stratified unobservable degradation process under variable operating conditions. This method enables one to estimate the condition of in-chamber particle contamination so that maintenance actions can be initiated accordingly. With these two novel methods, a methodological framework to perform better maintenance in complex manufacturing processes is established. The simulation study shows that the maintenance cost can be reduced by performing predictive maintenance properly while highest possible yield is retained. This framework provides a possibility of using abundant equipment monitoring data and product quality information to coordinate maintenance actions in a complex manufacturing environment.Ph.D.Mechanical EngineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttp://deepblue.lib.umich.edu/bitstream/2027.42/58530/1/yangliu_1.pd