High-precision Control of a Piezo-driven Nanopositioner Using Fuzzy Logic Controllers

Acknowledgments: The authors would like to thank Douglas Russell for the technical help and Andres San-Millan for data measurements. Financial support via the Elphinstone Research Scholarship, provided by the School of Engineering, University of Aberdeen, to fund Mohammed Altaher’s Ph.D. work is highly appreciated.Peer reviewedPublisher PD

Enhanced Positioning Bandwidth in Nanopositioners via Strategic Pole Placement of the Tracking Controller

Funding: This research received no external funding.Peer reviewedPublisher PD

Global fast non-singular terminal sliding-mode control for high-speed nanopositioning

Peer reviewedPostprin

Improvement in the Imaging Performance of Atomic Force Microscopy: A Survey

Nanotechnology is the branch of science which deals with the manipulation of matters at an extremely high resolution down to the atomic level. In recent years, atomic force microscopy (AFM) has proven to be extremely versatile as an investigative tool in this field. The imaging performance of AFMs is hindered by: 1) the complex behavior of piezo materials, such as vibrations due to the lightly damped low-frequency resonant modes, inherent hysteresis, and creep nonlinearities; 2) the cross-coupling effect caused by the piezoelectric tube scanner (PTS); 3) the limited bandwidth of the probe; 4) the limitations of the conventional raster scanning method using a triangular reference signal; 5) the limited bandwidth of the proportional-integral controllers used in AFMs; 6) the offset, noise, and limited sensitivity of position sensors and photodetectors; and 7) the limited sampling rate of the AFM's measurement unit. Due to these limitations, an AFM has a high spatial but low temporal resolution, i.e., its imaging is slow, e.g., an image frame of a living cell takes up to 120 s, which means that rapid biological processes that occur in seconds cannot be studied using commercially available AFMs. There is a need to perform fast scans using an AFM with nanoscale accuracy. This paper presents a survey of the literature, presents an overview of a few emerging innovative solutions in AFM imaging, and proposes future research directions.This work was supported in part by the Australian Research Council (ARC) under Grant FL11010002 and Grant DP160101121 and the UNSW Canberra under a Rector's Visiting Fellowshi

Piezoelectric Ceramic Transducers as Time-Varying Displacement Sensors in Nanopositioners

We present a direct measurement of stage displacement in piezo- driven nanopositioners via piezoelectric (PZT) ceramics. In addition to compactness and affordability, our study shows that within the sensing bandwidth, the sensor is able to track time-varying large signal profiles of stage displacement accurately without utilizing signal conditioning devices. Also, the sensor can be used to capture cross coupling effect in orthogonal axes of motion. For the full-scale range, accuracy of the suggested sensor is less than 27 nm in the sensing bandwidths when the sensor is calibrated with a constant scaling factor. The 3s-resolution of the sensor is 1.9 nm

High-Performance Tracking for Piezoelectric Actuators Using Super-Twisting Algorithm Based on Artificial Neural Networks

Piezoelectric actuators (PEA) are frequently employed in applications where nano-Micr-odisplacement is required because of their high-precision performance. However, the positioning is affected substantially by the hysteresis which resembles in an nonlinear effect. In addition, hysteresis mathematical models own deficiencies that can influence on the reference following performance. The objective of this study was to enhance the tracking accuracy of a commercial PEA stack actuator with the implementation of a novel approach which consists in the use of a Super-Twisting Algorithm (STA) combined with artificial neural networks (ANN). A Lyapunov stability proof is bestowed to explain the theoretical solution. Experimental results of the proposed method were compared with a proportional-integral-derivative (PID) controller. The outcomes in a real PEA reported that the novel structure is stable as it was proved theoretically, and the experiments provided a significant error reduction in contrast with the PID.This research was funded by Basque Government and UPV/EHU projects

Advanced Control of Piezoelectric Actuators.

168 p.A lo largo de las últimas décadas, la ingeniería de precisión ha tenido un papel importante como tecnología puntera donde la tendencia a la reducción de tamaño de las herramientas industriales ha sido clave. Los procesos industriales comenzaron a demandar precisión en el rango de nanómetros a micrómetros. Pese a que los actuadores convencionales no pueden reducirse lo suficiente ni lograr tal exactitud, los actuadores piezoeléctricos son una tecnología innovadora en este campo y su rendimiento aún está en estudio en la comunidad científica. Los actuadores piezoeléctricos se usan comúnmente en micro y nanomecatrónica para aplicaciones de posicionamiento debido a su alta resolución y fuerza de actuación (pueden llegar a soportar fuerzas de hasta 100 Newtons) en comparación con su tamaño. Todas estas características también se pueden combinar con una actuación rápida y rigidez, según los requisitos de la aplicación. Por lo tanto, con estas características, los actuadores piezoeléctricos pueden ser utilizados en una amplia variedad de aplicaciones industriales. Los efectos negativos, como la fluencia, vibraciones y la histéresis, se estudian comúnmente para mejorar el rendimiento cuando se requiere una alta precisión. Uno de los efectos que más reduce el rendimiento de los PEA es la histéresis. Esto se produce especialmente cuando el actuador está en una aplicación de guiado, por lo que la histéresis puede inducir errores que pueden alcanzar un valor de hasta 22%. Este fenómeno no lineal se puede definir como un efecto generado por la combinación de acciones mecánicas y eléctricas que depende de estados previos. La histéresis se puede reducir principalmente mediante dos estrategias: rediseño de materiales o algoritmos de control tipo feedback. El rediseño de material comprende varias desventajas por lo que el motivo principal de esta tesis está enfocado al diseño de algoritmos de control para reducir la histéresis. El objetivo principal de esta tesis es el desarrollo de estrategias de control avanzadas que puedan mejorar la precisión de seguimiento de los actuadores piezoeléctricos comerciale

Precision Control of Piezo Electric Actuator

芝浦工業大学201

Dynamics and Control of Smart Structures for Space Applications

Smart materials are one of the key emerging technologies for a variety of space systems ranging in their applications from instrumentation to structural design. The underlying principle of smart materials is that they are materials that can change their properties based on an input, typically a voltage or current. When these materials are incorporated into structures, they create smart structures. This work is concerned with the dynamics and control of three smart structures: a membrane structure with shape memory alloys for control of the membrane surface flatness, a flexible manipulator with a collocated piezoelectric sensor/actuator pair for active vibration control, and a piezoelectric nanopositioner for control of instrumentation. Shape memory alloys are used to control the surface flatness of a prototype membrane structure. As these actuators exhibit a hysteretic nonlinearity, they need their own controller to operate as required. The membrane structures surface flatness is then controlled by the shape memory alloys, and two techniques are developed: genetic algorithm and proportional-integral controllers. This would represent the removal of one of the main obstacles preventing the use of membrane structures in space for high precision applications, such as a C-band synthetic aperture radar antenna. Next, an adaptive positive position feedback law is developed for control of a structure with a collocated piezoelectric sensor/actuator pair, with unknown natural frequencies. This control law is then combined with the input shaping technique for slew maneuvers of a single-link flexible manipulator. As an alternative to the adaptive positive position feedback law, genetic algorithms are investigated as both system identification techniques and as a tool for optimal controller design in vibration suppression. These controllers are all verified through both simulation and experiments. The third area of investigation is on the nonlinear dynamics and control of piezoelectric actuators for nanopositioning applications. A state feedback integral plus double integral synchronization controller is designed to allow the piezoelectrics to form the basis of an ultra-precise 2-D Fabry-Perot interferometer as the gap spacing of the device could be controlled at the nanometer level. Next, an output feedback linear integral control law is examined explicitly for the piezoelectric actuators with its nonlinear behaviour modeled as an input nonlinearity to a linear system. Conditions for asymptotic stability are established and then the analysis is extended to the derivation of an output feedback integral synchronization controller that guarantees global asymptotic stability under input nonlinearities. Experiments are then performed to validate the analysis. In this work, the dynamics and control of these smart structures are addressed in the context of their three applications. The main objective of this work is to develop effective and reliable control strategies for smart structures that broaden their applicability to space systems

Performance-driven control of nano-motion systems

The performance of high-precision mechatronic systems is subject to ever increasing demands regarding speed and accuracy. To meet these demands, new actuator drivers, sensor signal processing and control algorithms have to be derived. The state-of-the-art scientific developments in these research directions can significantly improve the performance of high-precision systems. However, translation of the scientific developments to usable technology is often non-trivial. To improve the performance of high-precision systems and to bridge the gap between science and technology, a performance-driven control approach has been developed. First, the main performance limiting factor (PLF) is identified. Then, a model-based compensation method is developed for the identified PLF. Experimental validation shows the performance improvement and reveals the next PLF to which the same procedure is applied. The compensation method can relate to the actuator driver, the sensor system or the control algorithm. In this thesis, the focus is on nano-motion systems that are driven by piezo actuators and/or use encoder sensors. Nano-motion systems are defined as the class of systems that require velocities ranging from nanometers per second to millimeters per second with a (sub)nanometer resolution. The main PLFs of such systems are the actuator driver, hysteresis, stick-slip effects, repetitive disturbances, coupling between degrees-of-freedom (DOFs), geometric nonlinearities and quantization errors. The developed approach is applied to three illustrative experimental cases that exhibit the above mentioned PLFs. The cases include a nano-motion stage driven by a walking piezo actuator, a metrological AFM and an encoder system. The contributions of this thesis relate to modeling, actuation driver development, control synthesis and encoder sensor signal processing. In particular, dynamic models are derived of the bimorph piezo legs of the walking piezo actuator and of the nano-motion stage with the walking piezo actuator containing the switching actuation principle, stick-slip effects and contact dynamics. Subsequently, a model-based optimization is performed to obtain optimal drive waveforms for a constant stage velocity. Both the walking piezo actuator and the AFM case exhibit repetitive disturbances with a non-constant period-time, for which dedicated repetitive control methods are developed. Furthermore, control algorithms have been developed to cope with the present coupling between and hysteresis in the different axes of the AFM. Finally, sensor signal processing algorithms have been developed to cope with the quantization effects and encoder imperfections in optical incremental encoders. The application of the performance-driven control approach to the different cases shows that the different identified PLFs can be successfully modeled and compensated for. The experiments show that the performance-driven control approach can largely improve the performance of nano-motion systems with piezo actuators and/or encoder sensors