We present a direct measurement of stage displacement in piezo- driven nanopositioners via piezoelectric (PZT) ceramics. In addition to compactness and affordability, our study shows that within the sensing bandwidth, the sensor is able to track time-varying large signal profiles of stage displacement accurately without utilizing signal conditioning devices. Also, the sensor can be used to capture cross coupling effect in orthogonal axes of motion. For the full-scale range, accuracy of the suggested sensor is less than 27 nm in the sensing bandwidths when the sensor is calibrated with a constant scaling factor. The 3s-resolution of the sensor is 1.9 nm
