Sliding-mode control of a flexure based mechanism using piezoelectric actuators

The position control of designed 3 PRR flexure based mechanism is examined in this paper. The aims of the work are to eliminate the parasitic motions of the stage, misalignments of the actuators, errors of manufacturing and hysteresis of the system by having a redundant mechanism with the implementation of a sliding mode control and a disturbance observe. x-y motion of the end-effector is measured by using a laser position sensor and the necessary references for the piezoelectric actuators are calculated using the pseudo inverse of the transformation matrix coming from the experimentally determined kinematics of the mechanism. The effect of the observer and closed loop control is presented by comparing the results with open loop control. The system is designed to be redundant to enhance the position control. In order to see the effects of the redundant system firstly the closed loop control for active 2 piezoelectric actuators experiments then for active 3 piezoelectric actuators experiments are presented. As a result, our redundant mechanism tracks the desired trajectory accurately and its workspace is bigger

Continuous time controller based on SMC and disturbance observer for piezoelectric actuators

Abstract – In this work, analog application for the Sliding Mode Control (SMC) to piezoelectric actuators (PEA) is presented. DSP application of the algorithm suffers from ADC and DAC conversions and mainly faces limitations in sampling time interval. Moreover piezoelectric actuators are known to have very large bandwidth close to the DSP operation frequency. Therefore, with the direct analog application, improvement of the performance and high frequency operation are expected. Design of an appropriate SMC together with a disturbance observer is suggested to have continuous control output and related experimental results for position tracking are presented with comparison of DSP and analog control application

Design and control of a 6-degree-of-freedom precision positioning system

This paper presents the design and test of a6-degree-of-freedom (DOF) precision positioning system, which is assembledby two different 3-DOF precision positioning stages each driven by three piezoelectric actuators (PEAs). Based on the precision PEAs and flexure hinge mechanisms, high precision motion is obtained.The design methodology and kinematic characteristics of the6-DOF positioning system areinvestigated. According to an effective kinematic model, the transformation matrices are obtained, which is used to predict the relationship between the output displacement from the system arrangement and the amountof PEAsexpansion. In addition, the static and dynamic characteristics of the 6-DOF system have been evaluated by finite element method (FEM) simulation andexperiments. The design structure provides a high dynamic bandwidth withthe first naturalfrequency of 586.3 Hz.Decoupling control is proposed to solve the existing coupling motion of the 6-DOF system. Meanwhile, in order to compensate for the hysteresis of PEAs, the inverse Bouc-Wen model was applied as a feedforward hysteresis compensator in the feedforward/feedback hybrid control method. Finally, extensive experiments were performed to verify the tracking performance of the developed mechanism

PKM mechatronic clamping adaptive device

This study proposes a novel adaptive fixturing device based on active clamping systems for smart micropositioning of thin-walled precision parts. The modular architecture and the structure flexibility make the system suitable for various industrial applications. The proposed device is realized as a Parallel Kinematic Machine (PKM), opportunely sensorized and controlled, able to perform automatic error-free workpiece clamping procedures, drastically reducing the overall fixturing set-up time. The paper describes the kinematics and dynamics of this mechatronic system. A first campaign of experimental trails has been carried out on the prototype, obtaining promising results

Design of a Piezoelectric-actuated microgripper with a three-stage flexure-based amplification

This paper presents a novel microgripper mechanism for micromanipulation and assembly. The microgripper is driven by a piezoelectric actuator, and a three-stage flexure-based amplification has been designed to achieve large jaw displacements. The kinematic, static and dynamic models of the microgripper have been established and optimized considering the crucial parameters that determine the characteristics of the microgripper. Finite element analysis was conducted to evaluate the characteristics of the microgripper, and wire electro discharge machining technique was utilized to fabricate the monolithic structure of the microgripper mechanism. Experimental tests were carried out to investigate the performance of the microgripper and the results show that the microgripper can grasp microobjects with the maximum jaw motion stroke of 190 μm corresponding to the 100-V applied voltage. It has an amplification ratio of 22.8 and working mode frequency of 953 Hz

A novel monolithic piezoelectric actuated flexure-mechanism based wire clamp for microelectronic device packaging

A novel monolithic piezoelectric actuated wire clamp is presented in this paper to achieve fast, accurate, and robust microelectronic device packaging. The wire clamp has compact, flexure-based mechanical structure and light weight. To obtain large and robust jaw displacements and ensure parallel jaw grasping, a two-stage amplification composed of a homothetic bridge type mechanism and a parallelogram leverage mechanism was designed. Pseudo-rigid-body model and Lagrange approaches were employed to conduct the kinematic, static, and dynamic modeling of the wire clamp and optimization design was carried out. The displacement amplification ratio, maximum allowable stress, and natural frequency were calculated. Finite element analysis (FEA) was conducted to evaluate the characteristics of the wire clamp and wire electro discharge machining technique was utilized to fabricate the monolithic structure. Experimental tests were carried out to investigate the performance and the experimental results match well with the theoretical calculation and FEA. The amplification ratio of the clamp is 20.96 and the working mode frequency is 895 Hz. Step response test shows that the wire clamp has fast response and high accuracy and the motion resolution is 0.2 μm. High speed precision grasping operations of gold and copper wires were realized using the wire clamper

A flexure-based kinematically decoupled micropositioning stage with a centimeter range dedicated to micro/nano manufacturing

Precision positioning stages with large strokes and high positioning accuracy are attractive for high-performance micro/nano manufacturing. This paper presents the dynamic design and characteristic investigation of a novel XY micropositioning stage. Firstly, the mechanism of the stage was introduced. The XY stage was directly driven by two linear motors, and the X- and Y- axes kinematic decoupling was realized through a novel flexible decoupling mechanism based on flexure hinges and preloaded spring. The dynamic model of the XY stage was established, and the influences of the rotational stiffness of the flexure hinge and the initial positions of the working table on the dynamic rotation of the positioning stage were investigated. The stiffness and geometric parameters of the flexure hinges were determined at the condition that the angular displacements of the working table were within ±0.5° with a motion stroke of ±25 mm. Finally the stage performance was investigated through simulation and experiments, the X- and Y-axes step responses, the rotation angular and positioning accuracy of the stage were obtained. The results show that the stage exhibits good performance and can be used for micro/nano manufacturing

Micro position control of a designed 3-PRR compliant mechanism using experimental models

A new compliant stage based on 3-PRR kinematic structure is designed to be used as a planar micro positioner. The mechanism is actuated by using piezoelectric actuators and center position of the stage is measured using a dual laser position sensor. It's seen that manufactured mechanism has unpredictable motion errors due to manufacturing and assembly faults. Thus, sliding mode control with disturbance observer is chosen to be implemented as position control in x-y axes of the center of the mechanism. Instead of piezoelectric actuator models, experimental models are extracted for each actuation direction in order to be used as nominal plants for the disturbance observer. The position control results are compared with the previous position control using linear piezoelectric actuator models and it's seen that the implemented control methodology is better in terms of errors in x and y axes. Besides, the position errors are lowered down to ±0.06 microns, which is the accuracy of the dual laser position sensor

A dynamics-driven approach to precision machines design for micro-manufacturing and its implementation perspectives

Precision machines are essential elements in fabricating high quality micro products or micro features and directly affect the machining accuracy, repeatability and efficiency. There are a number of literatures on the design of industrial machine elements and a couple of precision machines commercially available. However, few researchers have systematically addressed the design of precision machines from the dynamics point of view. In this paper, the design issues of precision machines are presented with particular emphasis on the dynamics aspects as the major factors affecting the performance of the precision machines and machining processes. This paper begins with a brief review of the design principles of precision machines with emphasis on machining dynamics. Then design processes of precision machines are discussed, and followed by a practical modelling and simulation approaches. Two case studies are provided including the design and analysis of a fast tool servo system and a 5-axis bench-top micro-milling machine respectively. The design and analysis used in the two case studies are formulated based on the design methodology and guidelines

An inverse Prandtl–Ishlinskii model based decoupling control methodology for a 3-DOF flexure-based mechanism

A modified Prandtl–Ishlinskii (P–I) hysteresis model is developed to form the feedforward controller for a 3-DOF flexure-based mechanism. To improve the control accuracy of the P–I hysteresis model, a hybrid structure that includes backlash operators, dead-zone operators and a cubic polynomial function is proposed. Both the rate-dependent hysteresis modeling and adaptive dead-zone thresholds selection method are investigated. System identification was used to obtain the parameters of the newly-developed hysteresis model. Closed-loop control was added to reduce the influence from external disturbances such as vibration and noise, leading to a combined feedforward/feedback control strategy. The cross-axis coupling motion of the 3-DOF flexure-based mechanism has been explored using the established controller. Accordingly, a decoupling feedforward/feedback controller is proposed and implemented to compensate the coupled motion of the moving platform. Experimental tests are reported to examine the tracking capability of the whole system and features of the controller. It is demonstrated that the proposed decoupling control methodology can distinctly reduce the coupling motion of the moving platform and thus improve the positioning accuracy and trajectory tracking capability