Control of semiconductor manufacturing: CMP & thickness variations

Master'sMASTER OF ENGINEERIN

Temperature regulation and in-situ fault detection of wafer warpage

Master'sMASTER OF ENGINEERIN

Advanced process/equipment control for thermal processing in lithography

Ph.DDOCTOR OF PHILOSOPH

In-situ measurement and control of photoresist processing in lithography

Ph.DDOCTOR OF PHILOSOPH

Study of the impact of lithography techniques and the current fabrication processes on the design rules of tridimensional fabrication technologies

Working for the photolithography tool manufacturer leader sometimes gives me the impression of how complex and specific is the sector I am working on. This master thesis topic came with the goal of getting the overall picture of the state-of-the-art: stepping out and trying to get a helicopter view usually helps to understand where a process is in the productive chain, or what other firms and markets are doing to continue improvingUniversidad de sevilla.Máster Universitario en Microelectrónica: Diseño y Aplicaciones de Sistemas Micro/Nanométrico

Thermal processing in lithography: Equipment design, control and metrology

Ph.DDOCTOR OF PHILOSOPH

Detection of Wafer warpages during thermal processing in microlithography

2004 8th International Conference on Control, Automation, Robotics and Vision (ICARCV)1485-49