Power-Scavenging MEMS Robots

This thesis includes the design, modeling, and testing of novel, power-scavenging, biologically inspired MEMS microrobots. Over one hundred 500-μm and 990-μm microrobots with two, four, and eight wings were designed, fabricated, characterized. These microrobots constitute the smallest documented attempt at powered flight. Each microrobot wing is comprised of downward-deflecting, laser-powered thermal actuators made of gold and polysilicon; the microrobots were fabricated in PolyMUMPs® (Polysilicon Multi-User MEMS Processes). Characterization results of the microrobots illustrate how wing-tip deflection can be maximized by optimizing the gold-topolysilicon ratio as well as the dimensions of the actuator-wings. From these results, an optimum actuator-wing configuration was identified. It also was determined that the actuator-wing configuration with maximum deflection and surface area yet minimum mass had the greatest lift-to-weight ratio. Powered testing results showed that the microrobots successfully scavenged power from a remote 660-nm laser. These microrobots also demonstrated rapid downward flapping, but none achieved flight. The results show that the microrobots were too heavy and lacked sufficient wing surface area. It was determined that a successfully flying microrobot can be achieved by adding a robust, light-weight material to the optimum actuator-wing configuration—similar to insect wings. The ultimate objective of the flying microrobot project is an autonomous, fully maneuverable flying microrobot that is capable of sensing and acting upon a target. Such a microrobot would be capable of precise lethality, accurate battle-damage assessment, and successful penetration of otherwise inaccessible targets

Concept, modeling and experimental characterization of the modulated friction inertial drive (MFID) locomotion principle:application to mobile microrobots

A mobile microrobot is defined as a robot with a size ranging from 1 in3 down to 100 µm3 and a motion range of at least several times the robot's length. Mobile microrobots have a great potential for a wide range of mid-term and long-term applications such as minimally invasive surgery, inspection, surveillance, monitoring and interaction with the microscale world. A systematic study of the state of the art of locomotion for mobile microrobots shows that there is a need for efficient locomotion solutions for mobile microrobots featuring several degrees of freedom (DOF). This thesis proposes and studies a new locomotion concept based on stepping motion considering a decoupling of the two essential functions of a locomotion principle: slip generation and slip variation. The proposed "Modulated Friction Inertial Drive" (MFID) principle is defined as a stepping locomotion principle in which slip is generated by the inertial effect of a symmetric, axial vibration, while the slip variation is obtained from an active modulation of the friction force. The decoupling of slip generation and slip variation also has lead to the introduction of the concept of a combination of on-board and off-board actuation. This concept allows for an optimal trade-off between robot simplicity and power consumption on the one hand and on-board motion control on the other hand. The stepping motion of a MFID actuator is studied in detail by means of simulation of a numeric model and experimental characterization of a linear MFID actuator. The experimental setup is driven by piezoelectric actuators that vibrate in axial direction in order to generate slip and in perpendicular direction in order to vary the contact force. After identification of the friction parameters a good match between simulation and experimental results is achieved. MFID motion velocity has shown to depend sinusoidally on the phase shift between axial and perpendicular vibration. Motion velocity also increases linearly with increasing vibration amplitudes and driving frequency. Two parameters characterizing the MFID stepping behavior have been introduced. The step efficiency ηstep expresses the efficiency with which the actuator is capable of transforming the axial vibration in net motion. The force ratio qF evaluates the ease with which slip is generated by comparing the maximum inertial force in axial direction to the minimum friction force. The suitability of the MFID principle for mobile microrobot locomotion has been demonstrated by the development and characterization of three locomotion modules with between 2 and 3 DOF. The microrobot prototypes are driven by piezoelectric and electrostatic comb drive actuators and feature a characteristic body length between 20 mm and 10 mm. Characterization results include fast locomotion velocities up to 3 mm/s for typical driving voltages of some tens of volts and driving frequencies ranging from some tens of Hz up to some kHz. Moreover, motion resolutions in the nanometer range and very low power consumption of some tens of µW have been demonstrated. The advantage of the concept of a combination of on-board and off-board actuation has been demonstrated by the on-board simplicity of two of the three prototypes. The prototypes have also demonstrated the major advantage of the MFID principle: resonance operation has shown to reduce the power consumption, reduce the driving voltage and allow for simple driving electronics. Finally, with the fabrication of 2 × 2 mm2 locomotion modules with 2 DOF, a first step towards the development of mm-sized mobile microrobots with on-board motion control is made

DESIGN, MODELING, AND FABRICATION OF MICROROBOT LEGS

This dissertation presents work done in the design, modeling, and fabrication of magnetically actuated microrobot legs. Novel fabrication processes for manufacturing multi-material compliant mechanisms have been used to fabricate effective legged robots at both the meso and micro scales, where the meso scale refers to the transition between macro and micro scales. This work discusses the development of a novel mesoscale manufacturing process, Laser Cut Elastomer Refill (LaCER), for prototyping millimeter-scale multi-material compliant mechanisms with elastomer hinges. Additionally discussed is an extension of previous work on the development of a microscale manufacturing process for fabricating micrometer-sale multi-material compliant mechanisms with elastomer hinges, with the added contribution of a method for incorporating magnetic materials for mechanism actuation using externally applied fields. As both of the fabrication processes outlined make significant use of highly compliant elastomer hinges, a fast, accurate modeling method for these hinges was desired for mechanism characterization and design. An analytical model was developed for this purpose, making use of the pseudo rigid-body (PRB) model and extending its utility to hinges with significant stretch component, such as those fabricated from elastomer materials. This model includes 3 springs with stiffnesses relating to material stiffness and hinge geometry, with additional correction factors for aspects particular to common multi-material hinge geometry. This model has been verified against a finite element analysis model (FEA), which in turn was matched to experimental data on mesoscale hinges manufactured using LaCER. These modeling methods have additionally been verified against experimental data from microscale hinges manufactured using the Si/elastomer/magnetics MEMS process. The development of several mechanisms is also discussed: including a mesoscale LaCER-fabricated hexapedal millirobot capable of walking at 2.4 body lengths per second; prototyped mesoscale LaCER-fabricated underactuated legs with asymmetrical features for improved performance; 1 centimeter cubed LaCER-fabricated magnetically-actuated hexapods which use the best-performing underactuated leg design to locomote at up to 10.6 body lengths per second; five microfabricated magnetically actuated single-hinge mechanisms; a 14-hinge, 11-link microfabricated gripper mechanism; a microfabricated robot leg mechansim demonstrated clearing a step height of 100 micrometers; and a 4 mm x 4 mm x 5 mm, 25 mg microfabricated magnetically-actuated hexapod, demonstrated walking at up to 2.25 body lengths per second

Bilateral Macro-Micro Teleoperation Using A Magnetic Actuation Mechanism

In recent years, there has been increasing interest in the advancement of microrobotic systems in micro-engineering, micro-fabrication, biological research and biomedical applications. Untethered magnetic-based microrobotic systems are one of the most widely developing groups of microrobotic systems that have been extensively explored for biological and biomedical micro-manipulations. These systems show promise in resolving problems related to on-board power supply limitations as well as mechanical contact sealing and lubrication. In this thesis, a high precision magnetic untethered microrobotic system is demonstrated for micro-handling tasks. A key aspect of the proposed platform concerns the integration of magnetic levitation technology and bilateral macro-micro teleoperation for human intervention to avoid imperceptible failures in poorly observed micro-domain environments. The developed platform has three basic subsystems: a magnetic untethered microrobotic system (MUMS), a haptic device, and a scaled bilateral teleoperation system. The MUMS produces and regulates a magnetic field for non-contact propelling of a microrobot. In order to achieve a controlled motion of the magnetically levitated microrobot, a mathematical force model of the magnetic propulsion mechanism is developed and used to design various control systems. In the workspace of 30 × 32 × 32 mm 3, both PID and LQG\LTR controllers perform similarly the position accuracy of 10 µ m in a vertical direction and 2 µ m in a horizontal motion. The MUMS is equipped with an eddy-current damper to enhance its inherent damping factor in the microrobot's horizontal motions. This paper deals with the modeling and analysis of an eddy-current damper that is formed by a conductive plate placed below the levitated microrobot to overcome inherent dynamical vibrations and improve motion precision. The modeling of eddy-current distribution in the conductive plate is investigated by solving the diffusion equation for vector magnetic potential, and an analytical expression for the horizontal damping force is presented and experimentally validated. It is demonstrated that eddy-current damping is a crucial technique for increasing the damping coefficient in a non-contact way and for improving levitation performance. The damping can be widely used in applications of magnetic actuation systems in micro-manipulation and micro-fabrication. To determine the position of the microrobot in a workspace, the MUMS uses high-accuracy laser sensors. However, laser positioning techniques can only be used in highly transparent environments. A novel technique based on real-time magnetic flux measurement has been proposed for the position estimation of the microrobot in case of laser beam blockage, whereby a combination of Hall-effect sensors is employed to find the microrobot's position in free motion by using the produced magnetic flux. In free motion, the microrobot tends to move toward the horizontally zero magnetic field gradient, Bmax location. As another key feature of the magnetic flux measurement, it was realized that the applied force from the environment to the microrobot can be estimated as linearly proportional to the distance of the microrobot from the Bmax location. The developed micro-domain force estimation method is verified experimentally with an accuracy of 1.27 µ N. A bilateral macro-micro teleoperation technique is employed in the MUMS for the telepresence of a human operator in the task environment. A gain-switching position-position teleoperation scheme is employed and a human operator controls the motion of the microrobot via a master manipulator for dexterous micro-manipulation tasks. The operator can sense a strong force during micro-domain tasks if the microrobot encounters a stiff environment, and the effect of hard contact is fed back to the operator's hand. The position-position method works for both free motion and hard contact. However, to enhance the feeling of a micro-domain environment in the human operator, the scaled force must be transferred to a human, thereby realizing a direct-force-reflection bilateral teleoperation. Additionally, a human-assisted virtual reality interface is developed to improve a human operator's skills in using the haptic-enabled platform, before carrying out an actual dexterous task.1 yea

Climbing and Walking Robots

Nowadays robotics is one of the most dynamic fields of scientific researches. The shift of robotics researches from manufacturing to services applications is clear. During the last decades interest in studying climbing and walking robots has been increased. This increasing interest has been in many areas that most important ones of them are: mechanics, electronics, medical engineering, cybernetics, controls, and computers. Today’s climbing and walking robots are a combination of manipulative, perceptive, communicative, and cognitive abilities and they are capable of performing many tasks in industrial and non- industrial environments. Surveillance, planetary exploration, emergence rescue operations, reconnaissance, petrochemical applications, construction, entertainment, personal services, intervention in severe environments, transportation, medical and etc are some applications from a very diverse application fields of climbing and walking robots. By great progress in this area of robotics it is anticipated that next generation climbing and walking robots will enhance lives and will change the way the human works, thinks and makes decisions. This book presents the state of the art achievments, recent developments, applications and future challenges of climbing and walking robots. These are presented in 24 chapters by authors throughtot the world The book serves as a reference especially for the researchers who are interested in mobile robots. It also is useful for industrial engineers and graduate students in advanced study

Proceedings of the 2018 Canadian Society for Mechanical Engineering (CSME) International Congress

Published proceedings of the 2018 Canadian Society for Mechanical Engineering (CSME) International Congress, hosted by York University, 27-30 May 2018

Towards tactile sensing active capsule endoscopy

Examination of the gastrointestinal(GI) tract has traditionally been performed using tethered endoscopy tools with limited reach and more recently with passive untethered capsule endoscopy with limited capability. Inspection of small intestines is only possible using the latter capsule endoscopy with on board camera system. Limited to visual means it cannot detect features beneath the lumen wall if they have not affected the lumen structure or colour. This work presents an improved capsule endoscopy system with locomotion for active exploration of the small intestines and tactile sensing to detect deformation of the capsule outer surface when it follows the intestinal wall. In laboratory conditions this system is capable of identifying sub-lumen features such as submucosal tumours.Through an extensive literary review the current state of GI tract inspection in particular using remote operated miniature robotics, was investigated, concluding no solution currently exists that utilises tactile sensing with a capsule endoscopy. In order to achieve such a platform, further investigation was made in to tactile sensing technologies, methods of locomotion through the gut, and methods to support an increased power requirement for additional electronics and actuation. A set of detailed criteria were compiled for a soft formed sensor and flexible bodied locomotion system. The sensing system is built on the biomimetic tactile sensing device, Tactip, \cite{Chorley2008, Chorley2010, Winstone2012, Winstone2013} which has been redesigned to fit the form of a capsule endoscopy. These modifications have required a $360^{o}$ cylindrical sensing surface with $360^{o}$ panoramic optical system. Multi-material 3D printing has been used to build an almost complete sensor assembly with a combination of hard and soft materials, presenting a soft compliant tactile sensing system that mimics the tactile sensing methods of the human finger. The cylindrical Tactip has been validated using artificial submucosal tumours in laboratory conditions. The first experiment has explored the new form factor and measured the device's ability to detect surface deformation when travelling through a pipe like structure with varying lump obstructions. Sensor data was analysed and used to reconstruct the test environment as a 3D rendered structure. A second tactile sensing experiment has explored the use of classifier algorithms to successfully discriminate between three tumour characteristics; shape, size and material hardness. Locomotion of the capsule endoscopy has explored further bio-inspiration from earthworm's peristaltic locomotion, which share operating environment similarities. A soft bodied peristaltic worm robot has been developed that uses a tuned planetary gearbox mechanism to displace tendons that contract each worm segment. Methods have been identified to optimise the gearbox parameter to a pipe like structure of a given diameter. The locomotion system has been tested within a laboratory constructed pipe environment, showing that using only one actuator, three independent worm segments can be controlled. This configuration achieves comparable locomotion capabilities to that of an identical robot with an actuator dedicated to each individual worm segment. This system can be miniaturised more easily due to reduced parts and number of actuators, and so is more suitable for capsule endoscopy. Finally, these two developments have been integrated to demonstrate successful simultaneous locomotion and sensing to detect an artificial submucosal tumour embedded within the test environment. The addition of both tactile sensing and locomotion have created a need for additional power beyond what is available from current battery technology. Early stage work has reviewed wireless power transfer (WPT) as a potential solution to this problem. Methods for optimisation and miniaturisation to implement WPT on a capsule endoscopy have been identified with a laboratory built system that validates the methods found. Future work would see this combined with a miniaturised development of the robot presented. This thesis has developed a novel method for sub-lumen examination. With further efforts to miniaturise the robot it could provide a comfortable and non-invasive procedure to GI tract inspection reducing the need for surgical procedures and accessibility for earlier stage of examination. Furthermore, these developments have applicability in other domains such as veterinary medicine, industrial pipe inspection and exploration of hazardous environments

Development and characterisation of traceable force measurement for nanotechnology

Traceable low force metrology should be an essential tool for nanotechnology. Traceable measurement of micro- and nanonewton forces would allow independent measurement and comparison on material properties, MEMS behaviour and nanodimensional measurement uncertainties. Yet the current traceability infrastructure in the UK is incomplete. This thesis describes the incremental development of the low force facility at the National Physical Laboratory (NPL). The novel contribution of this thesis has three components. First, specific modifications to the NPL Low Force Balance were undertaken. This involved developing novel or highly modified solutions to address key issues, as well as undertaking detailed comparions with external ans internal traceability references. Second, a triskelion force sensor flexure was proposed and mathematically modelled using both analytical and finite element techniques, and compared to experimentally measured spring constant estimates. The models compared satisfactorily, though fabrication defects in developed prototype artefacts limited the experimental confirmation of the models. Third, a piezoelectric sensor approach for quasistatic force measurement was proposed, experimentally evaluated and rejected. Finally, an improved design for a low force transfer artefact system is presented, harnessing the findings of the reported investigations. The proposed design combines proven strain-sensing technology with the advantageous triskelion flexure, incorporating an external stage and packaging aspects to achieve the requirements for a traceable low force transfer artefact

Using MapReduce Streaming for Distributed Life Simulation on the Cloud

Distributed software simulations are indispensable in the study of large-scale life models but often require the use of technically complex lower-level distributed computing frameworks, such as MPI. We propose to overcome the complexity challenge by applying the emerging MapReduce (MR) model to distributed life simulations and by running such simulations on the cloud. Technically, we design optimized MR streaming algorithms for discrete and continuous versions of Conway’s life according to a general MR streaming pattern. We chose life because it is simple enough as a testbed for MR’s applicability to a-life simulations and general enough to make our results applicable to various lattice-based a-life models. We implement and empirically evaluate our algorithms’ performance on Amazon’s Elastic MR cloud. Our experiments demonstrate that a single MR optimization technique called strip partitioning can reduce the execution time of continuous life simulations by 64%. To the best of our knowledge, we are the first to propose and evaluate MR streaming algorithms for lattice-based simulations. Our algorithms can serve as prototypes in the development of novel MR simulation algorithms for large-scale lattice-based a-life models.https://digitalcommons.chapman.edu/scs_books/1014/thumbnail.jp