Bi-stable buckled energy harvesters actuated via torque arms.

Vibrational energy harvesters (VEH) are one way to generate electricity. Though the energy quantities are not enough to run desktop computers, they can power remote devices such as temperature, pressure, and accelerometer sensors or power biological implants. New versions of the Bluetooth protocol can even be used with VEH technology to send wireless data. An important aspect of VEH devices is the power output, operating frequency, and bandwidth. This dissertation investigates a novel method of actuating the primary buckled energy harvesting structure using torque arms as a force amplification mechanism. Buckled structures can exhibit snap-through and has the potential to broaden the operating frequency for the VEH. Macro and MEMS size prototypes are fabricated and evaluated via a custom made shaker table. The effect of compliance arms, which pin the center beam with piezoelectric strips, are also evaluated along with damping ratios. ANSYS models evaluating generated power are created for use in future optimization studies. Lastly, high energy orbitals (HEO) are observed in the devices. Results show that buckling lowers and broadens the output power of the new devices. Reverse sweeps drastically increase the operating frequency during snap-through. Rectangular compliance arms made of poly-lactic acid (PLA) generated the most power of all compliance arms tested. HEO performance can be induced by perturbing the system while maintaining the same input force which increases power output

Dynamic analysis and fabrication of a bi-stable structure designed for MEMS energy harvesting applications.

Thanks to the rapid growth in demand for power in remote locations, scientists’ attention has been drawn to vibration energy harvesting as an alternative to batteries. Over the past ten years, the energy harvesting community has focused on bistable structures as a means of broadening the working frequency range and, by extension, the effective efficiency of vibration-based power scavenging systems. In the current study, a new method is implemented to statically and dynamically analyze a bistable buckled, multi-component coupled structure designed specifically for low-frequency vibration energy harvesting systems in both macro and MEMS-scale sizes. Furthermore, several micro-fabrication steps using advanced manufacturing technology methods were applied to design and fabricate a micro-scale version of the energy harvester at the University of Louisville Micro/Nano Technology Center. First, previously efforts performed on different aspects of vibration energy harvesting systems are reviewed to show the current challenges associated with such devices. The coupled structure proposed in this project is then introduced and its equations of motion are developed based on nonlinear Euler-Bernoulli beam theory. These governing equations are discretized and solved using a Galerkin method in two different approaches: with some known shape functions which only satisfies the geometrical boundary conditions; with the exact shape functions obtained from solving the linearized coupled structure as a one single system. An experimental setup is also used to verify the advantages of designed structure in capturing bistable motion at low-frequency range. To validate the modeling approaches, the obtained results are compared with the ones captured from both FEA model and the experimental setup, which shows the superiority of the proposed approach in which exact shape functions of the system are used as the basis in the discretization process. After the validation of the proposed approach, it is applied on a micro-scale version of the system in which structural, piezoelectric, and electrode layers are all considered as they exist in an actual device. Furthermore, a different bistable system, which was previously studied by other researchers in the area, is analyzed by this method to show the reliability of the proposed model. For all these cases, the amplitude-frequency response of the system and snap-through regime with the variation of various parameters, including exciting frequency, base vibration, and buckling loads are investigated based on the developed model. It is shown that bisatble motion and other nonlinear phenomena such as super-harmonic behavior in the system can be captured under certain circumstances, which can significantly impact major system functionalities such as output voltage response and is crucial for the performance of energy harvesting devices. As mentioned above, various micro-fabrication techniques were also used to design and fabricate a micro-scale version of the proposed system, which eventually led to the successful fabrication of a MEMS device as a result of experimental efforts performed to overcome the challenges and issues associated with the designed manufacturing process

Development of MEMS Piezoelectric Vibration Energy Harvesters with Wafer-Level Integrated Tungsten Proof-Mass for Ultra Low Power Autonomous Wireless Sensors

La génération d’énergie localisée et à petite échelle, par transformation de l’énergie vibratoire disponible dans l’environnement, est une solution attrayante pour améliorer l’autonomie de certains noeuds de capteurs sans-fil pour l’Internet des objets (IoT). Grâce à des microdispositifs inertiels résonants piézoélectriques, il est possible de transformer l’énergie mécanique en électricité. Cette thèse présente une étude exhaustive de cette technologie et propose un procédé pour fabriquer des microgénérateurs MEMS offrant des performances surpassant l’état de l’art. On présente d’abord une revue complète des limites physiques et technologiques pour identifier le meilleur chemin d’amélioration. En évaluant les approches proposées dans la littérature (géométrie, architecture, matériaux, circuits, etc.), nous suggérons des métriques pour comparer l’état de l’art. Ces analyses démontrent que la limite fondamentale est l’énergie absorbée par le dispositif, car plusieurs des solutions existantes répondent déjà aux autres limites. Pour un générateur linéaire résonant, l’absorption d’énergie dépend donc des vibrations disponibles, mais aussi de la masse du dispositif et de son facteur de qualité. Pour orienter la conception de prototypes, nous avons réalisé une étude sur le potentiel des capteurs autonomes dans une automobile. Nous avons évalué une liste des capteurs présents sur un véhicule pour leur compatibilité avec cette technologie. Nos mesures de vibrations sur un véhicule en marche aux emplacements retenus révèlent que l’énergie disponible pour un dispositif linéaire résonant MEMS se situe entre 30 à 150 Hz. Celui-ci pourrait produire autour de 1 à 10 μW par gramme. Pour limiter la taille d’un générateur MEMS pouvant produire 10 μW, il faut une densité supérieure à celle du silicium, ce qui motive l’intégration du tungstène. L’effet du tungstène sur la sensibilité du dispositif est évident, mais nous démontrons également que l’usage de ce matériau permet de réduire l’impact de l’amortissement fluidique sur le facteur de qualité mécanique Qm. En fait, lorsque l’amortissement fluidique domine, ce changement peut améliorer Qm d’un ordre de grandeur, passant de 103 à 104 dans l’air ambiant. Par conséquent, le rendement du dispositif est amélioré sans utiliser un boîtier sous vide. Nous proposons ensuite un procédé de fabrication qui intègre au niveau de la tranche des masses de tungstène de 500 μm d’épais. Ce procédé utilise des approches de collage de tranches et de gravure humide du métal en deux étapes. Nous présentons chaque bloc de fabrication réalisé pour démontrer la faisabilité du procédé, lequel a permis de fabriquer plusieurs prototypes. Ces dispositifs ont été testés en laboratoire, certains démontrant des performances records en terme de densité de puissance normalisée. Notre meilleur design se démarque par une métrique de 2.5 mW-s-1/(mm3(m/s2)2), soit le meilleur résultat répertorié dans l’état de l’art. Avec un volume de 3.5 mm3, il opère à 552.7 Hz et produit 2.7 μW à 1.6 V RMS à partir d’une accélération de 1 m/s2. Ces résultats démontrent que l’intégration du tungstène dans les microgénérateurs MEMS est très avantageuse et permet de s’approcher davantage des requis des applications réelles.Small scale and localized power generation, using vibration energy harvesting, is considered as an attractive solution to enhance the autonomy of some wireless sensor nodes used in the Internet of Things (IoT). Conversion of the ambient mechanical energy into electricity is most often done through inertial resonant piezoelectric microdevices. This thesis presents an extensive study of this technology and proposes a process to fabricate MEMS microgenerators with record performances compared to the state of the art. We first present a complete review of the physical and technological limits of this technology to asses the best path of improvement. Reported approaches (geometries, architectures, materials, circuits) are evaluated and figures of merit are proposed to compare the state of the art. These analyses show that the fundamental limit is the absorbed energy, as most proposals to date partially address the other limits. The absorbed energy depends on the level of vibrations available, but also on the mass of the device and its quality factor for a linear resonant generator. To guide design of prototypes, we conducted a study on the potential of autonomous sensors in vehicles. A survey of sensors present on a car was realized to estimate their compatibility with energy harvesting technologies. Vibration measurements done on a running vehicle at relevant locations showed that the energy available for MEMS devices is mostly located in a frequency range of 30 to 150 Hz and could generate power in the range of 1-10 μW per gram from a linear resonator. To limit the size of a MEMS generator capable of producing 10 μW, a higher mass density compared to silicon is needed, which motivates the development of a process that incorporates tungsten. Although the effect of tungsten on the device sensitivity is well known, we also demonstrate that it reduces the impact of the fluidic damping on the mechanical quality factor Qm. If fluidic damping is dominant, switching to tungsten can improve Qm by an order of magnitude, going from 103 to 104 in ambient air. As a result, the device efficiency is improved despite the lack of a vacuum package. We then propose a fabrication process flow to integrate 500 μm thick tungsten masses at the wafer level. This process combines wafer bonding with a 2-step wet metal etching approach. We present each of the fabrication nodes realized to demonstrate the feasibility of the process, which led to the fabrication of several prototypes. These devices are tested in the lab, with some designs demonstrating record breaking performances in term of normalized power density. Our best design is noteworthy for its figure of merit that is around 2.5 mW-s-1/(mm3(m/s2)2), which is the best reported in the state of the art. With a volume of 3.5 mm3, it operates at 552.7 Hz and produces 2.7 μW at 1.6 V RMS from an acceleration of 1 m/s2. These results therefore show that tungsten integration in MEMS microgenerators is very advantageous, allowing to reduce the gap with needs of current applications

High-Performance Accelerometer Based On Asymmetric Gapped Cantilevers For Physiological Acoustic Sensing

Continuous or mobile monitoring of physiological sounds is expected to play important role in the emerging mobile healthcare field. Because of the miniature size, low cost, and easy installation, accelerometer is an excellent choice for continuous physiological acoustic signal monitoring. However, in order to capture the detailed information in the physiological signals for clinical diagnostic purpose, there are more demanding requirements on the sensitivity/noise performance of accelerometers. In this thesis, a unique piezoelectric accelerometer based on the asymmetric gapped cantilever which exhibits significantly improved sensitivity is extensively studied. A meso-scale prototype is developed for capturing the high quality cardio and respiratory sounds on healthy people as well as on heart failure patients. A cascaded gapped cantilever based accelerometer is also explored for low frequency vibration sensing applications such as ballistocardiogram monitoring. Finally, to address the power issues of wireless sensors such as wireless wearable health monitors, a wide band vibration energy harvester based on a folded gapped cantilever is developed and demonstrated on a ceiling air condition unit

Numerical and experimental evaluation of the magnetic interaction for frequency up-conversion in piezoelectric vibration energy harvesters

The purpose of this work is to improve the modelling process for the application of permanent magnets in a frequency up-conversion (FuC) mechanism for piezoelectric energy harvesters. More specifically, the aim is to avoid the burdensome finite element analyses (FEA) in the framework of electromechanical devices design. The analytical calculations are compared with experimental tests conducted by an ad-hoc set up and with FEA. After investigations on the interaction, an application of FuC mechanism is proposed on a meso-scale case study in which a low frequency seismic mass (LFM) interacts non-linearly, due to magnetic field, with an high frequency piezoelectric vibration energy harvester (PVEH). Numerical simulations have been carried out in the time domain (step-by-step analysis) under a harmonic low-frequency input acceleration signal. The peculiar behavior, due to non-linear dynamics, is investigated in both the repulsive and the attractive configurations of the magnets. The results confirm the effectiveness of magnetic FuC and show that the repulsive case allows the device to recover a larger amount of energy than the attractive configuration

Performance Enhancement of Cantilever Beam Piezoelectric Energy Harvesters

During the last decade, driven by the need, energy harvesting has drawn considerable attention due to the cost-effectiveness and simplicity of the structure. The most important feature or advantage of energy harvesters is their energy sources which are coming from the energy that would be wasted otherwise to the ambient surroundings. Among the three types of energy conversion methodologies, piezoelectric energy harvesters (PEHs) have been highlighted as a self-power source of energy for small wireless sensors with low required power input due to their simple converting structure. While conventional piezoelectric materials possess ideal sensing properties, the microfabrication of these structures typically requires access to the sophisticated equipment and cleanroom facilities. Moreover, the fabrication process is time-consuming and expensive, researchers found it interesting to resort to micro-electromechanical system (MEMS) designs with inexpensive, simple and green-based materials and simple fabrication techniques such as paper. Generally, the paper-based devices have offered significant benefits but their recorded performance is significantly below that of the ones of the commercial smart structures. Their development is still in the early stage of growth and they need to be properly designed to satisfy the general requirements of the commercial products. Geometry optimization, sizing and functionalizing are among the strategies which can be adopted to boost the performance of all types of piezoelectric energy harvesters including the paper-based piezoelectric energy harvesters (PPEH). Therefore, the major contributions of this work are improvement of the performance of piezoelectric energy harvesters using the geometry modification, sizing analysis and functionalizing. In this work, the governing equations of piezoelectric cantilevers based on both Euler-Bernoulli and Timoshenko beam theories are developed and solved using one type of element with a great rate of convergence called superconvergent element (SCE). The theoretical analysis was validated against results published in the open literature and the results indicate that the proposed method yields higher accurate results. Further, the effect of non-uniformity on the electrical output and efficiency of Piezoelectric Energy Harvesters (PEH) are studied. Then, the influence of sizing and application of a series of piezoelectric cantilever energy harvesters on the performance of structure are studied. The effect of the shape of the piezoelectric elements is also investigated below. Eventually, development of functionally graded piezoelectric materials (FGPMs) for non-uniform beams are presented to evaluate the effect of functionalizing

SUSTAINABLE ENERGY HARVESTING TECHNOLOGIES – PAST, PRESENT AND FUTURE

Chapter 8: Energy Harvesting Technologies: Thick-Film Piezoelectric Microgenerato

MEMS Technology for Biomedical Imaging Applications

Biomedical imaging is the key technique and process to create informative images of the human body or other organic structures for clinical purposes or medical science. Micro-electro-mechanical systems (MEMS) technology has demonstrated enormous potential in biomedical imaging applications due to its outstanding advantages of, for instance, miniaturization, high speed, higher resolution, and convenience of batch fabrication. There are many advancements and breakthroughs developing in the academic community, and there are a few challenges raised accordingly upon the designs, structures, fabrication, integration, and applications of MEMS for all kinds of biomedical imaging. This Special Issue aims to collate and showcase research papers, short commutations, perspectives, and insightful review articles from esteemed colleagues that demonstrate: (1) original works on the topic of MEMS components or devices based on various kinds of mechanisms for biomedical imaging; and (2) new developments and potentials of applying MEMS technology of any kind in biomedical imaging. The objective of this special session is to provide insightful information regarding the technological advancements for the researchers in the community