Performance Comparison of Stacked Dual-Metal Gate Engineered Cylindrical Surrounding Double-Gate MOSFET

In this research work, a Cylindrical Surrounding Double-Gate (CSDG) MOSFET design in a stacked-Dual Metal Gate (DMG) architecture has been proposed to incorporate the ability of gate metal variation in channel field formation. Further, the internal gate\u27s threshold voltage (VTH1) could be reduced compared to the external gate (VTH2) by arranging the gate metal work-function in Double Gate devices. Therefore, a device design of CSDG MOSFET has been realized to instigate the effect of Dual Metal Gate (DMG) stack architecture in the CSDG device. The comparison of device simulation shown optimized electric field and surface potential profile. The gradual decrease of metal work function towards the drain also improves the Drain Induced Barrier Lowering (DIBL) and subthreshold characteristics. The physics-based analysis of gate stack CSDG MOSFET that operates in saturation involving the analogy of cylindrical dual metal gates has been considered to evaluate the performance improvements. The insights obtained from the results using the gate-stack dual metal structure of CSDG are quite promising, which can serve as a guide to further reduce the threshold voltage roll-off, suppress the Hot Carrier Effects (HCEs) and Short Channel Effects (SCEs)

Performance Comparison of Stacked Dual-Metal Gate Engineered Cylindrical Surrounding Double-Gate MOSFET

In this research work, a Cylindrical Surrounding Double-Gate (CSDG) MOSFET design in a stacked-Dual Metal Gate (DMG) architecture has been proposed to incorporate the ability of gate metal variation in channel field formation. Further, the internal gate's threshold voltage (VTH1) could be reduced compared to the external gate (VTH2) by arranging the gate metal work-function in Double Gate devices. Therefore, a device design of CSDG MOSFET has been realized to instigate the effect of Dual Metal Gate (DMG) stack architecture in the CSDG device. The comparison of device simulation shown optimized electric field and surface potential profile. The gradual decrease of metal work function towards the drain also improves the Drain Induced Barrier Lowering (DIBL) and subthreshold characteristics. The physics-based analysis of gate stack CSDG MOSFET that operates in saturation involving the analogy of cylindrical dual metal gates has been considered to evaluate the performance improvements. The insights obtained from the results using the gate-stack dual metal structure of CSDG are quite promising, which can serve as a guide to further reduce the threshold voltage roll-off, suppress the Hot Carrier Effects (HCEs) and Short Channel Effects (SCEs)

Analytical Modeling of Channel Noise for Gate Material Engineered Surrounded/Cylindrical Gate (SGT/CGT) MOSFET

In this paper, an analytical modeling is presentated to describe the channel noise in GME SGT/CGT MOSFET, based on explicit functions of MOSFETs geometry and biasing conditions for all channel length down to deep submicron and is verified with the experimental data. Results shows the impact of various parameters such as gate bias, drain bias, channel length ,device diameter and gate material work function difference on drain current noise spectral density of the device reflecting its applicability for circuit design applications

Design evolution of dual-material gate structure in cylindrical surrounding double-gate (CSDG) MOSFET using physics-based analytical modeling.

Doctoral Degree. University of KwaZulu- Natal, Durban.The Metal Oxide Semiconductor Field Effect Transistor (MOSFET) is the fundamental component in present Micro and Nano-electronics device applications, such as switching, memory devices, communication devices, etc. MOSFET’s dimension has shrunk down following Moore’s law to attain high-speed operation and packing density integration. The scaling of conventional MOSFET has been the most prominent technological challenge in the past few years because the decreasing device dimensions increase the charge sharing from the source to the drain and that in turn give rises to the reduced gate-control over the channel, hot carrier induced degradation, and other SCEs. These undesired effects devaluate the device performance that compels optimum device design analysis for particular operating conditions. Therefore, several innovative device design/architectures, including Double-gate, FinFET, Surrounding gate MOSFET, etc., have been developed to mitigate device scaling challenges. Comprehensive research can be traced long for one such promising gate-all-around MOSFET, i.e., Cylindrical Surrounding Double-Gate (CSDG) MOSFET centrally hollow concentric structure, provides an additional internal control gate that improves the device electrical performance and offers easy accessibility. There have been several developments in terms of improvements, and applications of CSDG MOSFET have been practiced since after its evolution. This thesis’s work has been targeted to incorporate the gate material engineering in the CSDG structure after appropriate analysis of device physics-based modeling. In particular to the proposed structure, the electric field, pinch off capacitance, and after that thickness of the device parameters’ dependence have been mathematically derived from attaining the objective. Finally, a model based on a dual-material gate in CSDG MOSFET has been proposed. The electrical field in CSDG MOSFET has been analyzed in detail using a mathematical derivation of device physics, including the Surface-Potential, threshold voltage, and the gate-oxide capacitances of the internal and external part of the device. Further, the gate-oxide capacitance of CSDG MOSFET, particularly to the device pinch-off condition, has been derived. Since the device operation and analysis at the shorter channel are not similar to conventional long-channel MOSFETs, the depletion-width variation has been studied. The identified notion has been applied to derive the approximate numerical solution and silicon thickness inducing parameters for CSDG MOSFET to deploy the improvements in the device performance and novel design modifications. As the gate-material and gate-stack engineering is an alternative to overcome the device performance degradation by enhancing the charge transport efficiency, the CSDG MOSFET in a novel Dual-Metal Gate (DMG) structure design has been proposed and analyzed using the solution of 2D Poisson’s equations in the geometrical boundary conditions of the device. The model expressions obtained solution using the proposed structure has been compared with a single metal gate structure. Finally, it has been analyzed that the proposed model exhibits an excellent match with the analytical model. The obtained DMG device structure advances the carrier velocity and transport efficiency, resulting in the surface-potential profile caused by dissimilar gate metal work-function. The superior device characteristics obtained employing a dual-material structure in CSDG are promising and can reduce the threshold voltage roll-off, suppress the hot-carrier effects and SCEs

PERFORMANCE AND A NEW 2-D ANALYTICAL MODELING OF A DUAL-HALO DUAL-DIELECTRIC TRIPLE-MATERIAL SURROUNDING-GATE-ALL-AROUND (DH-DD-TM-SGAA) MOSFET

This proposed work covers the effect of dual halo structure with dual dielectric. A 2-D analytical model for potential distribution, threshold voltage, electric field and sub-threshold swing has been described through the Poisson’s equation solution for a novel structure known as dual-halo dual-dielectric triple-material surrounding-gate MOSFET to diminish short channel effects. The new device has been incorporated with Dual halo near the source and drain sides, while the electrode at the gate incorporates three dissimilar work function metals. A relative estimation of short channel effects (SCEs) for DHDD-TM-SG, triple-material surrounding-gate (TM-SG) and single-halo triplematerial surrounding-gate (SH-TM-SG) MOSFETs has also been carried out in terms of threshold-voltage-roll-off, drain induced barrier lowering, hot carrier effects, and also sub-threshold swing. The proposed novel structure significantly reduces the SCEs. Therefore, DH-DD-TM-SG MOSFETs have superior performance than TM-SG and SH-TM-SG MOSFETs. The efficiency of the Dual halo-doped device is investigated. The proposed model demonstrates its validity by a comparing the simulated results from already published devices obtained by using TCAD Silvaco

Charge-based compact model of gate-all-around floating gate nanowire with variable oxide thickness for flash memory cell

Due to high gate electrostatic control and introduction of punch and plug process technology, the gate-all-around (GAA) transistor is very promising in, and apparently has been utilized for, flash memory applications. However, GAA Floating Gate (GAA-FG) memory cell still requires high programming voltage that may be susceptible to cell-to-cell interference. Scaling down the tunnel oxide can reduce the Program/Erase (P/E) voltage but degrades the data retention capability. By using Technology-Computer-Aided-Design (TCAD) tools, the concept of tunnel barrier engineering using Variable Oxide Thickness (VARIOT) of low-k/high-k stack is utilized in compensating the trade-off between P/E operation and retention characteristics. Four high-k dielectrics (Si3N4, Al2O3, HfO2 and ZrO2) that are commonly used in semiconductor process technology are examined with SiO2 as its low-k dielectric. It is found that by using SiO2/Al2O3 as the tunnel layer, both the P/E and retention characteristics of GAA-FG can be compensated. About 30% improvement in memory window than conventional SiO2 is obtained and only 1% of charge-loss is predicted after 10 years of applying gate stress of -3.6V. Compact model of GAA-FG is initiated by developing a continuous explicit core model of GAA transistor (GAA Nanowire MOSFET (GAANWFET) and Juntionless Nanowire Transitor (JNT)). The validity of the theory and compact model is identified based on sophisticated numerical TCAD simulator for under 10% maximum error of surface potential. It is revealed that with the inclusion of partial-depletion conduction, the accuracy of the core model for GAANWFET is improved by more than 50% in the subthreshold region with doping-geometry ratio can be as high as about 0.86. As for JNT, despite the model being accurate for doping-geometry ratio upto 0.6, it is also independent of fitting parameters that may vary under different terminal biases or doping-geometry cases. The compact model of GAA-FG is completed by incorperating Charge Balance Model (CBM) into GAA transistor core model where good agreement is obtained with TCAD simulation and published experimental work. The CBM gives better accuracy than the conventional capacitive coupling approach under subthreshold region with approximately 10% error of floating gate potential. Therefore, the proposed compact model can be used to assist experimental work in extracting experimental data

Miniaturized Transistors

What is the future of CMOS? Sustaining increased transistor densities along the path of Moore's Law has become increasingly challenging with limited power budgets, interconnect bandwidths, and fabrication capabilities. In the last decade alone, transistors have undergone significant design makeovers; from planar transistors of ten years ago, technological advancements have accelerated to today's FinFETs, which hardly resemble their bulky ancestors. FinFETs could potentially take us to the 5-nm node, but what comes after it? From gate-all-around devices to single electron transistors and two-dimensional semiconductors, a torrent of research is being carried out in order to design the next transistor generation, engineer the optimal materials, improve the fabrication technology, and properly model future devices. We invite insight from investigators and scientists in the field to showcase their work in this Special Issue with research papers, short communications, and review articles that focus on trends in micro- and nanotechnology from fundamental research to applications

Simulation of FinFET Structures

The intensive downscaling of MOS transistors has been the major driving force behind the aggressive increases in transistor density and performance, leading to more chip functionality at higher speeds. While on the other side the reduction in MOSFET dimensions leads to the close proximity between source and drain, which in turn reduces the ability of the gate electrode to control the potential distribution and current flow in the channel region and also results in some undesirable effects called the short-channel effects. These limitations associated with downscaling of MOSFET device geometries have lead device designers and researchers to number of innovative techniques which include the use of different device structures, different channel materials, different gate-oxide materials, different processes such as shallow trench isolation, source/drain silicidation, lightly doped extensions etc. to enable controlled device scaling to smaller dimensions. A lot of research and development works have been done in these and related fields and more remains to be carried out in order to exploit these devices for the wider applications

Cutting Edge Nanotechnology

The main purpose of this book is to describe important issues in various types of devices ranging from conventional transistors (opening chapters of the book) to molecular electronic devices whose fabrication and operation is discussed in the last few chapters of the book. As such, this book can serve as a guide for identifications of important areas of research in micro, nano and molecular electronics. We deeply acknowledge valuable contributions that each of the authors made in writing these excellent chapters