MEMS tunable infrared metamaterial and mechanical sensors

Sub-wavelength resonant structures open the path for fine controlling the near-field at the nanoscale dimension. They constitute into macroscopic “metamaterials” with macroscale properties such as transmission, reflection, and absorption being tailored to exhibit a particular electromagnetic response. The properties of the resonators are often fixed at the time of fabrication wherein the tunability is demanding to overcome fabrication tolerances and afford fast signal processing. Hybridizing dynamic components such as optically active medium into the device makes tunable devices. Microelectromechanical systems (MEMS) compatible integrated circuit fabrication process is a promising platform that can be merged with photonics or novel 2D materials. The prospect of enormous freedom in integrating nanophotonics, MEMS actuators and sensors, and microelectronics into a single platform has driven the rapid development of MEMS-based sensing devices. This thesis describes the design and development of four tunable plasmonic structures based on active media or MEMS, two graphene-based MEMS sensors and a novel tape-based cost-effective nanotransfer printing techniques. First of all, we present two tunable plasmonic devices with the use of two active medium, which are electrically controlled liquid crystals and temperature-responsive hydrogels, respectively. By incorporating a nematic liquid crystal layer into quasi-3D mushroom plasmonic nanostructures and thanks to the unique coupling between surface plasmon polariton and Rayleigh anomaly, we have achieved the electrical tuning of the properties of plasmonic crystal at a low operating electric field. We also present another tunable plasmonic device with the capability to sense environmental temperature variations. The device is bowtie nanoantenna arrays coated with a submicron-thick, thermos-responsive hydrogel. The favorable scaling of plasmonic dimers at the nanometer scale and ionic diffusion at the submicron scale is leveraged to achieve strong optical resonance and rapid hydrogel response, respectively. Secondly, we present two MEMS -based tunable near-to-mid infrared metamaterials on a silicon-on-insulator wafer via electrically and thermally actuating the freestanding nanocantilevers. The two devices are developed on the basis of the same fabrication process and are easy-to-implement. The electrostatically driven metamaterial affords ultrahigh mechanical modulation (several tens of MHz) of an optical signal while the thermo-mechanically tunable metamaterial provides up to 90% optical signal modulation at a wavelength of 3.6 õm. Next, we present MEMS graphene-based pressure and gas flow sensors realized by transferring a large area and few-layered graphene onto a suspended silicon nitride thin membrane perforated with micro-through-holes. Due to the increased strain in the through-holes, the pressure sensor exhibits a very high sensitivty outperformed than most existing MEMS-based pressure sensors using graphene, silicon, and carbon nanotubes. An air flow sensor is also demonstrated via patterning graphene sheets with flow-through microholes. The flow rate of the air is measured by converting the mechanically deflection of the membrane into the electrical readout due to the graphene piezeroresistors. Finally, we present a tape-based multifunctional nanotransfer printing process based on a simple stick-and-peel procedure. It affords fast production of large-area metallic and dielectric nanophotonic sensing devices and metamaterials using Scotch tape

Multispectral Metamaterial Detectors for Smart Imaging

The ability to produce a high quality infrared image has significantly improved since its initial development in the 1950s. The first generation consisted of a single pixel that required a two-dimensional raster scan to produce an image. The second generation comprised of a linear array of pixels that required a mechanical sweep to produce an image. The third generation utilizes a two-dimensional array of pixels to eliminate the need for a mechanical sweep. Third generation imaging technology incorporates pixels with single color or broadband sensitivity, which results in \u27black and white\u27 images. The research presented in this dissertation focuses on the development of 4th generation infrared detectors for the realization of a new generation of infrared focal plane array. To achieve this goal, we investigate metamaterials to realize multicolor detectors with enhanced quantum efficiency for similar function to a human retina. The key idea is to engineer the pixel such that it not only has the ability to sense multimodal data such as color, polarization, dynamic range and phase but also the intelligence to transmit a reduced data set to the central processing unit (neurophotonics). In this dissertation, we utilize both a quantum well infrared photodetector (QWIP) and interband cascade detector (ICD) hybridized with a metamaterial absorber for enhanced multicolor sensitivity in the infrared regime. Through this work, along with some design lessons throughout this iterative process, we design, fabricate and demonstrate the first deep-subwavelength multispectral infrared detector using an ultra-thin type-II superlattice (T2-SL) detector coupled with a metamaterial absorber with 7X enhanced quantum efficiency. We also identify useful versus non-useful absorption through a combination of absolute absorption and quantum efficiency measurements. In addition to these research efforts, we also demonstrate a dynamic multicolor metamaterial in the terahertz regime with electronically tunable frequency and gain for the first time. Utilizing an electronically tunable metamaterial, one can design an imaging system that can take multiple spectral responses within one frame for the classification of objects based on their spectral fingerprint.\u2

Review of foundational concepts and emerging directions in metamaterial research: Design, phenomena, and applications

In the past two decades, artificial structures known as metamaterials have been found to exhibit extraordinary material properties that enable the unprecedented manipulation of electromagnetic waves, elastic waves, molecules, and particles. Phenomena such as negative refraction, bandgaps, near perfect wave absorption, wave focusing, negative Poissons ratio, negative thermal conductivity, etc., all are possible with these materials. Metamaterials were originally theorized and fabricated in electrodynamics, but research into their applications has expanded into acoustics, thermodynamics, seismology, classical mechanics, and mass transport. In this Research Update we summarize the history, current state of progress, and emerging directions of metamaterials by field, focusing the unifying principles at the foundation of each discipline. We discuss the different designs and mechanisms behind metamaterials as well as the governing equations and effective material parameters for each field. Also, current and potential applications for metamaterials are discussed. Finally, we provide an outlook on future progress in the emerging field of metamaterials.Comment: 22 pages, 3 figures, 1 tabl

A Metamaterial Path Towards Optical Integrated Nanocircuits

Metamaterials are known to demonstrate exotic electromagnetic and optical properties. The extra control over manipulation of waves and fields afforded by metamaterials can be exploited towards exploring various platforms, e.g., optical integrated circuits. Nanophotonic integrated circuits have been the topic of past and ongoing research in multiple fields including, but not limited to, electrical engineering, optics and materials science. In the present work, we theoretically study and analyze metamaterial properties that can be potentially utilized in the future design of optical integrated circuits. On this path, we seek inspiration from electronics to tackle multiple issues in developing such layered nanocircuitry. We identify modularity, directionality/isolation and tunability as three useful features of electronics and we theoretically explore mimicking them in nanoscale optics. Using epsilon-near-zero (ENZ) and mu-near-zero (MNZ) properties we propose concepts to transplant some aspects of modular design of electronic passive circuits and filters into nanophotonics. We also exploit ENZ materials to develop “transformer-like” functionality in optical nanocircuits. To bring directional selectivity and isolation to this domain we develop concepts for both spatial filtering of light using ENZ layered structures as well as identifying new regimes of nonreciprocal one-way surface wave propagation on the surface of magneto-optical materials. In order to have tunability in some of the proposed concepts in this work, we numerically study a wire-medium metamaterial whose permittivity can be tuned at will. All the proposed structures have simple geometries and layered structures wherever possible, which are more convenient for analysis, design and future implementation

Recent progress in terahertz metamaterial modulators

The terahertz (0.1–10 THz) range represents a fast-evolving research and industrial field. The great interest for this portion of the electromagnetic spectrum, which lies between the photonics and the electronics ranges, stems from the unique and disruptive sectors where this radiation finds applications in, such as spectroscopy, quantum electronics, sensing and wireless communications beyond 5G. Engineering the propagation of terahertz light has always proved to be an intrinsically difficult task and for a long time it has been the bottleneck hindering the full exploitation of the terahertz spectrum. Amongst the different approaches that have been proposed so far for terahertz signal manipulation, the implementation of metamaterials has proved to be the most successful one, owing to the relative ease of realisation, high efficiency and spectral versatility. In this review, we present the latest developments in terahertz modulators based on metamaterials, while highlighting a few selected key applications in sensing, wireless communications and quantum electronics, which have particularly benefitted from these developments

Wave Interaction With Epsilon-znd-Mu-Near-Zero (emnz) Platforms and Nonreciprocal Metastructures

The concept of metamaterials has offered platforms for unconventional tailoring and manipulation of the light-matter interaction. In this dissertation, we explore several concepts and designs within this scope. We investigate some of the electromagnetic characteristics of the concept of “static optics”, i.e., wave interaction with structures in which both the relative effective permittivity and permeability attain near-zero values at a given operating frequency and thus the spatial distributions of the electric and magnetic fields exhibit curl-free features, while the fields are temporally dynamic. Using such structures, one might in principle ‘open up’ and ‘stretch’ the space, and have regions behaving electromagnetically as ‘single points’ despite being electrically large. We study some of the wave-matter interaction in these platforms and suggest possible designs for implementation of such structures in different frequency regimes and experimentally verify our findings in the microwave regime. Another research direction that is explored in this dissertation is the development of some nonreciprocal metaplatforms. We investigate theoretically an approach through which one-way electromagnetic wave flow can be achieved using properly designed nonlinearity combined with structural asymmetry. The approach is rather general and applicable for any desired frequency regime and opens doors for high performance “electromagnetic diodes” and nonreciprocal metasurfaces and metastructures. We also theoretically study the usage of time-dependent materials in achieving wave flow isolation within plasmonic waveguides environments. We also provide physical remarks on our various findings

Superconducting Quantum Metamaterials

Superconducting quantum metamaterials extend the idea of their classical counterpart to a regime where their constituent meta-atoms are quantum objects, which can hold their quantum coherence for longer than the propagation time of light through the medium. In this work, we have realized a quantum metamaterial consisting of eight individually controllable superconducting transmon qubits, which are coupled to the mode continuum of a one-dimensional coplanar waveguide. This system can be described within the framework of waveguide-quantum electrodynamics, which predicates that the mutual interaction of the qubits with the waveguide gives rise to long-range interactions of the qubits. In spectroscopic measurements we observe the formation of super- and subradiant collective metamaterial excitations, as well as the emergence of a polaritonic band gap and study their dependence on the number of participating resonant qubits. We utilize the collective Autler-Townes splitting of the metamaterial to demonstrate control over its band gap. Furthermore, we exploit the control over the band structure for a first realization of slowly propagating light in the metamaterial. Our findings show that superconducting quantum metamaterials are a suitable platform to study fundamental excitations in solids and pave way to applications in quantum information processing like quantum memories