Conception, fabrication et caractérisation de dispositifs innovants de protection contre les décharges électrostatiques en technologie FDSOI

FDSOI architecture (Fully Depleted Silicon On Insulator) allows a significantimprovement of the electrostatic behavior of the MOSFETs transistors for the advancedtechnologies. It is industrially employed from the 28 nm node. However, theimplementation of ESD (Electrostatic Discharges) protections in these technologies isstill a challenge. While the standard approach relies on SOI substrate hybridization (byetching the BOX (buried oxide)), allowing to fabricate vertical power devices, we focushere on structures where the current flows laterally, in the silicon film. In this work,alternative approaches using innovative devices (Z²-FET and BBC-T) are proposed. Theirstatic, quasi-static and transient characteristics are studied in detail, with TCADsimulations and electrical characterizations.L’architecture FDSOI (silicium sur isolant totalement déserté) permet une amélioration significative du comportement électrostatique des transistors MOSFETs pour les technologies avancées et est employée industriellement à partir du noeud 28 nm.L’implémentation de protections contre les décharges électrostatiques (ESD pour« Electro Static Discharge ») dans ces technologies reste un défi. Alors que l’approche standard repose sur l’hybridation du substrat SOI (gravure de l’oxyde enterré : BOX)permettant de fabriquer des dispositifs de puissance verticaux, nous nous intéressons ici à des structures dans lesquelles la conduction s’effectue latéralement, dans le film de silicium. Dans ces travaux, des approches alternatives utilisant des dispositifs innovants(Z²-FET et BBC-T) sont proposées. Leurs caractéristiques statiques, quasi-statiques et transitoires sont étudiées, par le biais de simulations TCAD et de caractérisations électriques

Design, fabrication and characterization of innovative ESD protection devices for 28 nm and 14 nm FDSOI technologies

L’architecture FDSOI (silicium sur isolant totalement déserté) permet une amélioration significative du comportement électrostatique des transistors MOSFETs pour les technologies avancées et est employée industriellement à partir du noeud 28 nm.L’implémentation de protections contre les décharges électrostatiques (ESD pour« Electro Static Discharge ») dans ces technologies reste un défi. Alors que l’approche standard repose sur l’hybridation du substrat SOI (gravure de l’oxyde enterré : BOX)permettant de fabriquer des dispositifs de puissance verticaux, nous nous intéressons ici à des structures dans lesquelles la conduction s’effectue latéralement, dans le film de silicium. Dans ces travaux, des approches alternatives utilisant des dispositifs innovants(Z²-FET et BBC-T) sont proposées. Leurs caractéristiques statiques, quasi-statiques et transitoires sont étudiées, par le biais de simulations TCAD et de caractérisations électriques.FDSOI architecture (Fully Depleted Silicon On Insulator) allows a significantimprovement of the electrostatic behavior of the MOSFETs transistors for the advancedtechnologies. It is industrially employed from the 28 nm node. However, theimplementation of ESD (Electrostatic Discharges) protections in these technologies isstill a challenge. While the standard approach relies on SOI substrate hybridization (byetching the BOX (buried oxide)), allowing to fabricate vertical power devices, we focushere on structures where the current flows laterally, in the silicon film. In this work,alternative approaches using innovative devices (Z²-FET and BBC-T) are proposed. Theirstatic, quasi-static and transient characteristics are studied in detail, with TCADsimulations and electrical characterizations

Properties and mechanisms of Z2-FET at variable temperature

International audienceThis paper presents a systematic study of Z2-FET (Zero Subthreshold Swing and Zero Impact Ionization transistor) fabricated in advanced Fully Depleted Silicon On Insulator (FDSOI) 28 nm technology with Ultra-Thin Body and Buried Oxide (UTBB). It is a recent sharp-switching device that achieves remarkable performance in terms of leakage current and triggering control. The device features an extremely sharp on-switch, an adjustable triggering voltage (VON), and is considered for Electro-Static Discharge (ESD) protection. The operation principle relies on the modulation of electrons and holes injection barriers. Experimental results show the effect of low and high temperature on the output characteristics, triggering voltage and leakage current. Previous article in issu

Innovative sharp-switching nano-devices based on band modulation

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Sharp-switching band-modulation back-gated devices in advanced FDSOI technology

International audienceA band-modulation device with a free top surface, named Z3-FET (Zero front-gate, Zero swing slope and Zero impact ionization) and fabricated in the most advanced Fully Depleted Silicon-On-Insulator technology, is demonstrated experimentally. Since the device has no front gate, the operation mechanism is controlled by two adjacent heavily doped buried ground planes acting as back-gates. Characteristics such as sharp quasi-vertical switching, low leakage, and tunable trigger voltage are measured and discussed. We explore several variants (thin and thick silicon or SiGe body) and show promising results in terms of high current, switching performance and ESD capability with relatively low back-gate and drain bias operation

Z2-FET: A promising FDSOI device for ESD protection

International audienceIn this work, the use of the Z2-FET (Zero subthreshold swing and Zero impact ionization FET) for Electro-Static Discharge (ESD) protections is demonstrated. The device, fabricated with Ultra-Thin Body and Buried Oxide (UTBB) Silicon-On-Insulator technology, features an extremely sharp off-on switch and an adjustable triggering voltage (Vt1). The principle of operation, relying on the modulation of electron and hole injection barriers, is reviewed. The impact of process modules and design parameters on electrical characteristics is analyzed with TCAD simulations, showing that very low leakage current (Ileak) and triggering capability adapted to local protection schemes are achievable. Experimental results validate the possible use of this device as an ESD protection in the 28 nm FDSOI technology

A band-modulation device in advanced FDSOI technology: Sharp switching characteristics

International audienceA band-modulation device is demonstrated experimentally in advanced FDSOI (Fully Depleted SOI). The Z2-FET (Zero Impact Ionization and Zero Subthreshold Slope FET) is a very recent sharp switching device which achieves remarkable performance in terms of leakage current and triggering control. The device is fabricated with Ultra-Thin Body and Buried Oxide (UTBB) Silicon-On-Insulator (SOI) technology, features an extremely sharp on-switch, low leakage and an adjustable triggering voltage (VON). The Z2-FET operation relies on the modulation of electrons and holes injection barriers. In this paper, we show, for the first time, experimental data obtained with the most advanced FDSOI node

Thin-body ESD protections in 28nm UTBB-FDSOI: From static to transient behavior

International audienceInnovative Ultra-Thin Body and Buried Oxide FDSOI protections (BBC-T and Z2-FET) are characterized and analyzed in order to assess the CDM time domain behavior. In addition to static (leakage and triggering) control, it is found that front and back gate coupling is a very efficient way to improve the transient responses of the proposed devices

A lesson from archeology: The buried gates

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