Study of tantalum and iridium as adhesion layers for Pt/LGS high temperature SAW devices

International audienceIn this paper, we report on the use of tantalum and iridium as adhesion layers for platinum electrodes used in high temperature SAW devices based on langasite substrates (LGS). Unlike iridium, tantalum exhibits a great adhesive strength, and a very low mobility through the Pt film, ensuring a device lifetime of at least half an hour at 1000°C. The latter is limited by morphological modifications of platinum, starting by the apparition of crystallites on the surface, and followed by important terracing and breaking of the film continuity. SNMS and XRD measurements allowed us to show that these phenomena are likely intrinsic to platinum film, whatever be the nature of the adhesion layer. Finally, after having outlined a possible scenario leading to this deterioration, we consider some solutions that could replace platinum in order to increase the lifetime of LGS-based SAW devices in high temperatures conditions

Magnetic SAW RFID Sensor Based on Love Wave for Detection of Magnetic Field and Temperature

Magnetic field measurement including a temperature compensation is essential for a magnetic field sensor. This study investigates a magnetic surface acoustic wave (MSAW) sensor in a reflective delay line configuration with two acoustic propagation paths with and without magnetic field sensitive layer. The delay in path with sensitive layer leads to magnetic field detection and the one without enable temperature measurement and thus compensation for the first path. The developed sensor is based on a ZnO/LiNbO$_3$ Ycut (X-direction) layered structure as Love wave platform. Love wave as a shear wave being more favorable for magnetic detection. Co-Fe-B is considered as sensitive layer to detect magnetic field changes and is deposited on the top of ZnO, but only on one of the two paths. We combined an original configuration of connected IDTs with a high electromechanical coupling coefficient (K$^2$) mode to improve the signal amplitude. The achieved sensor exhibits a high temperature and magnetic field sensitivity of -63 ppm/$^\circ$C and -781 ppm/mT, respectively. The temperature compensation method for magnetic field measurement is demonstrated using a differential measurement by subtracting the delay times obtained for the two paths with and without the sensitive layer. Finally, The sensor exhibited good repeatability at various temperatures. Moreover, the device developed allows in addition to the multisensor functionality, the radio frequency identification (RFID) which is necessary for the deployment of sensor networks

Wireless strain and temperature monitoring in reinforced concrete using Surface Acoustic Wave (SAW) sensors

Monitoring the health of civil engineering structures using implanted deformation, temperature and corrosion sensors would further improve maintenance and extend the service life of those structures. However, sensor integration poses a number of problems, due to the presence of cables and on-board electronics. Passive, wireless SAW sensors offer a very promising solution, here. We used commercial SAW devices mounted on steel rebars to carry out an initial feasibility study. Without cables or embedded electronics, we were able to measure the deformation of a concrete beam subjected to bending load. We were also able to measure the temperature continuously over a three-week period

SAW RFID devices using connected IDTs as an alternative to conventional reflectors for harsh environments

International audienceRemote interrogation of surface acoustic wave ID-tags imposes a high signal amplitude which is related to a high coupling coefficient value (K 2) and low propagation losses (α). In this paper, we propose and discuss an alternative configuration to the standard one. Here, we replaced the conventional configuration, i.e. one interdigital transducer (IDT) and several reflectors, by a series of electrically connected IDTs. The goal is to increase the amplitude of the detected signal using direct transmission between IDTs instead of the reflection from passive reflectors. This concept can therefore increase the interrogation scope of ID-tags made on conventional substrate with high K 2 value. Moreover, it can also be extended to suitable substrates for harsh environments such as high temperature environments: the materials used exhibit limited performances (low K 2 value and relatively high propagation losses) and are therefore rarely used for identification applications. The concept was first tested and validated using the lithium niobate 128°Y-X cut substrate, which is commonly used in ID-tags. A good agreement between experimental and numerical results was obtained for the promising concept of connected IDTs. The interesting features of the structure were also validated using a langasite substrate, which is well-known to operate at very high temperatures. Performances of both substrates (lithium niobate and langasite) were tested with an in-situ RF characterization up to 600°C. Unexpected results regarding the resilience of devices based on congruent lithium niobate were obtained. Index Terms-high temperature, lithium niobate, radio frequency identification (RFID), surface acoustic wave (SAW

Intrinsic versus shape anisotropy in micro-structured magnetostrictive thin films for magnetic surface acoustic wave sensors

International audienceThis work aims at studying the interaction between surface acoustic waves (SAW) and micro-structured magnetostrictive layers under a magnetic field with a perspective to develop magnetic field sensors. The impact of the competition between the strong intrinsic magnetic anisotropy of the magnetic material and the shape anisotropy of the interdigitated transducer (IDT) fingers introduced by the micro-structuration is investigated. Therefore, the macroscopic and microscopic magnetic properties of the IDT and their influence on the magneto-acoustic response are studied. A SAW resonator with the IDTs made of the magnetostrictive thin film was elaborated and the magnetic surface acoustic wave (MSAW) response under a magnetic field was performed and discussed. Depending on the energy balance, the anisotropy gets modified and a correlation with the MSAW sensitivity to an externally applied magnetic field is made

Caractérisation et simulation de l'IGBT dans le but d'optimiser ses performances au moyen d'irradiation par électrons

The IGBT is a hybrid power device which combines the advantages of MOS and bipolar technologies. This property ensures that the IGBT is adapted for a large variety of applications including its use in radiation environments of various severities such as space, nuclear, military, etc.... The designers must anticipate and account for the effects of these environments on the components. This consideration presents the main part of this thesis. Classical methods of characterization are adapted and new techniques are developed to study the IGBT behaviour. The evolution of its parameters with irradiation doses and types is also studied. A novel method for simulating the effects of electron irradiation (4MeV energy) in the IGBT, using the 2D devices simulator PISCES, was developed. 3D modeling is perfomed taking into account the cylindrical symmetry of the unit cell. The validity of the method is confirmed by comparison of simulation results with experimental ones performed on a series of IGBTs irradiated to various doses. The same approach can be applied for other devices and other irradiation types. Our analyzis shows that one can simulate results for any given dose. This procedure helps to save cost on irradiation tests. It can be applied for evaluation and prediction of irradiation effectsAlliant les avantages de la technologie bipolaire et mos, l'igbt (insulated gate bipolar transistor) a pu s'imposer dans le marche de la moyenne puissance en s'adaptant a une très large gamme d'applications. Son développement l'amènera a fonctionner de plus en plus dans des environnements radiatifs (spatial, militaire, nucléaire etc.) ce qui nécessite une caractérisation spécifique. Le travail développe dans ce mémoire s'inscrit dans cet objectif. Des méthodes de caractérisation classiques ont été adaptées et de nouvelles techniques ont été developpees pour l'étude de l'igbt. L'évolution de ses paramètres physiques et électriques a été suivie en fonction de la dose et du type de l'irradiation a laquelle il est soumis. Une méthode originale de simulation des effets induits par irradiation aux électrons sur l'igbt, utilisant le simulateur de dispositifs 2d pisces, a été proposée. Une modélisation 3d est réalisée en tenant compte de la symétrie cylindrique de la cellule de base. Sa validité a été vérifiée par la confrontation des résultats de simulation avec les mesures expérimentales réalisées sur un lot d'igbts irradie a différentes doses d'irradiation par électrons d'une énergie de 4mev. Cette méthode permet de prévoir l'évolution des différents paramètres électriques de l'igbt pour une dose d'irradiation par électrons donnée et ainsi de minimiser le nombre de cycles fabrication irradiation test. Son utilisation peut être étendue a d'autres composants et a d'autres types d'irradiatio

Contribution à l'élaboration de capteurs sans-fil, opérant à très haute température (500-1000 ), à base de dispositifs à ondes élastiques de surface (choix des matériaux constitutifs)

Éléments essentiels des systèmes de télécommunication depuis environ trente ans, les dispositifs à ondes élastiques de surface offrent également l'opportunité, de par leur sensibilité aux conditions environnementales et leur caractère passif, de réaliser des capteurs sans-fil autonomes (sans électronique ni source d'énergie embarquées), configuration particulièrement intéressante pour la mesure à haute température. Nos travaux se sont focalisés sur le choix des matériaux pouvant constituer de tels capteurs, au niveau des deux éléments les constituant : le substrat piézoélectrique et les électrodes métalliques. Ces dernières sont généralement constituées de platine, de par l'inertie chimique particulièrement importante de ce métal noble. Nos travaux nous ont permis d'attribuer la dégradation de ces électrodes, généralement observée aux alentours de 700C, à un phénomène spécifique des films minces, dénommé agglomération, nous conduisant par la suite à envisager et à tester des solutions plus efficaces. En ce qui concerne le substrat, nos efforts ont porté sur la structure bicouche AlN/Saphir, prometteuse pour de telles applications, mais encore peu étudiée. Après l'optimisation des paramètres de dépôt du film mince par pulvérisation réactive magnétron, permettant d'obtenir une couche épitaxiée, nous nous sommes intéressés à la résistance à l'oxydation de l'AlN à haute température dans l'air. L'utilisation croisée de la diffraction des rayons X, de l'ellipsométrie et de la spectroscopie de masse des ions secondaires nous a permis de montrer que l'on peut envisager l'emploi de cette structure bicouche pour les applications visées à des températures allant jusqu'à 700CSurface acoustic waves devices are key components of telecommunication systems for more than thirty years or so. Because they are passive and very sensitive to external conditions, they also offer the possibility to make autonomous wireless sensors (electronic-less and battery-less), which could be particularly interesting in high-temperature environments. Our work was focused on the choice of materials allowing the fabrication of such sensors for both parts of the device: piezoelectric substrate and metallic electrodes. The latter are generally made of platinum because of the great chemical inertness of this noble metal. Our work allowed us to attribute their degradation, starting around 700C on, to a phenomenon called agglomeration which is very specific to thin films. This result led us to consider and test more efficient solutions. Regarding the substrate, we mainly studied AlN/Sapphire bilayer structure, promising for such applications but not really studied yet. After the optimization of the deposition parameters of the thin film, realized by reactive magnetron sputtering, leading to the epitaxial quality, we studied the strength of AlN to oxidation under high temperature in air atmosphere. Results given by X-ray diffraction, ellipsometry and secondary ion mass spectroscopy converged to show that AlN/Sapphire structure is a good candidate for such applications at temperatures up to 700CNANCY1-Bib. numérique (543959902) / SudocSudocFranceF

Wireless SAW sensor for high temperature applications: material point of view

International audienc