A comparison between detailed and configuration-averaged collisional-radiative codes applied to non-local thermal equilibrium plasma

A collisional-radiative model describing nonlocal-thermodynamic-equilibrium plasmas is developed. It is based on the HULLAC (Hebrew University Lawrence Livermore Atomic Code) suite for the transitions rates, in the zero-temperature radiation field hypothesis. Two variants of the model are presented: the first one is configuration averaged, while the second one is a detailed level version. Comparisons are made between them in the case of a carbon plasma; they show that the configuration-averaged code gives correct results for an electronic temperature Te=10 eV (or higher) but fails at lower temperatures such as Te=1 eV. The validity of the configuration-averaged approximation is discussed: the intuitive criterion requiring that the average configuration-energy dispersion must be less than the electron thermal energy turns out to be a necessary but far from sufficient condition. Another condition based on the resolution of a modified rate-equation system is proposed. Its efficiency is emphasized in the case of low-temperature plasmas. Finally, it is shown that near-threshold autoionization cascade processes may induce a severe failure of the configuration-average formalism.Comment: 9

Laser-produced plasma EUV source based on tin-rich, thin-layer targets

In this paper a new approach to a laser-produced plasma EUV source based on a tin target is presented. A thin layer of pure tin and composite layers consisting of Sn with Si, SiO and LiF are investigated. The target composed of several thin layers produces less debris than the other targets and provides a conversion efficiency (CE) in the 13.5-nm +/- 1% band at least comparable to the CE for the pure tin slab target. The largest CE was observed for the target composed of a mixture of Sn and LiF, due to the fact that lithium, similarly to tin, is a strong emitter at 13.5 nm

Numerical study of nanosecond laser interactions with micro-sized single droplets and sprays of xenon.

We present a thorough numerical study on interactions of a nanosecond laser with micro-sized xenon droplets. We developed a code which allows simulation of laser interactions with a single droplet as well as a spray. We give a detailed description of the code, and we present results on the dynamics of a microplasma produced by irradiation of a single xenon droplet with a laser focused at peak vacuum intensity in the 5×1010−5×1012 W/cm2 range. We find that the heating of the plasma depends dramatically on the laser parameters (duration, pulse shape, and intensity) on one hand, and on the droplet diameter on the other. We also present results obtained with a spray which show that the dynamics of the microplasmas is very sensitive to the position of the droplets in the interaction volume. The predictions of our model agree well with recent experimental observations performed on laser-produced plasma sources for extreme ultraviolet lithography. In particular, the postprocessing of our data with a sophisticated atomic physics code has allowed us to reproduce quite well the spectrum emitted in the extreme ultraviolet range by a xenon plasma generated by laser irradiation of a spray of droplets

Characterization and optimization of the laser-produced plasma EUV source at 13.5 nm based on a double-stream Xe/He gas puff target

The paper describes a debris-free, efficient laser-produced plasma source emitting EUV radiation. The source is based on a double-stream Xe/He gas-puff. Its properties and spectroscopic signatures are characterized and discussed. The spatio-spectral features of the EUV emission are investigated. We show a large body of results related to the intensity and brightness of the EUV emission, its spatial, temporal, and angular behavior and the effect of the repetition rate as well. A conversion efficiency of laser energy into EUV in-band energy at 13.5 nm of 0.42% has been gained. The electron temperature and electron density of the source were estimated by means of a novel method using the FLY code. The experimental data and the Hullac code calculations are compared and discussed. The source is well suited for EUV metrology purposes. The potential of the source for application in EUV lithography was earlier demonstrated in the optical characterization of Mo/Si multi-layer mirrors and photo-etching of polymers

Theoretical interpretation for 2

The 2p − nd absorption structures in medium Z elements present a valuable benchmark for atomic models since they exhibit a complex dependence on temperature and density. For these transitions lying in the X-ray range, one observes a competition between the spin-orbit splitting and the broadening associated to the excitation of complex structures. Detailed opacity codes based on the HULLAC or FAC suites agree with the statistical code SCO; but in iron computations predict higher peak absorption than measured. An addition procedure on opacities calculated with detailed codes is proposed and successfully tested

Theoretical interpretation for 2p − nd absorption spectra of iron, nickel, and copper in X-ray range measured at the LULI2000 facility

The 2p − nd absorption structures in medium Z elements present a valuable benchmark for atomic models since they exhibit a complex dependence on temperature and density. For these transitions lying in the X-ray range, one observes a competition between the spin-orbit splitting and the broadening associated to the excitation of complex structures. Detailed opacity codes based on the HULLAC or FAC suites agree with the statistical code SCO; but in iron computations predict higher peak absorption than measured. An addition procedure on opacities calculated with detailed codes is proposed and successfully tested

Transition wavelengths and unresolved transition array statistics of ions with Z = 72 − 89

Potential extreme ultraviolet and soft x-ray radiation sources have been identified, using the flexible atomic code (FAC), as emission peaks arising from the 4d–4f and 4p–4d transitions in Pd-like to Rb-like ions of hafnium through actinium. The effects of configuration interaction are investigated and for increasing nuclear charge, these strong emitters are seen to separate and move to shorter wavelengths. Each source is characterized using the unresolved transition array model. They are proposed to complement the currently used nitrogen and argon sources in the 'water window', and as possible successors to tin in next-generation lithography.Science Foundation Irelan