Overview and status of the 0.5NA EUV microfield exposure tool at Berkeley Lab

A 0.5-NA extreme ultraviolet micro-field exposure tool has been installed and commissioned at beamline 12.0.1.4 of the Advanced Light Source synchrotron facility at Lawrence Berkeley National Laboratory. Commissioning has demonstrated a patterning resolution of 13 nm half-pitch with annular 0.35-0.55 illumination; a patterning resolution of 8 nm half-pitch with annular 0.1-0.2 illumination; critical dimension (CD) uniformity of 0.7 nm 1σ on 16 nm nominal CD across 80% of the 200 um x 30 um aberration corrected field of view; aerial image vibration relative to the wafer of 0.75 nn RMS and focus control and focus stepping better than 15 nm

RAFT aqueous dispersion polymerization yields poly(ethylene glycol)-based diblock copolymer nano-objects with predictable single phase morphologies

A poly(ethylene glycol) (PEG) macromolecular chain transfer agent (macro-CTA) is prepared in high yield (>95%) with 97% dithiobenzoate chain-end functionality in a three-step synthesis starting from a monohydroxy PEG113 precursor. This PEG113-dithiobenzoate is then used for the reversible addition-fragmentation chain transfer (RAFT) aqueous dispersion polymerization of 2-hydroxypropyl methacrylate (HPMA). Polymerizations conducted under optimized conditions at 50 °C led to high conversions as judged by 1H NMR spectroscopy and relatively low diblock copolymer polydispersities (Mw/Mn < 1.25) as judged by GPC. The latter technique also indicated good blocking efficiencies, since there was minimal PEG113 macro-CTA contamination. Systematic variation of the mean degree of polymerization of the core-forming PHPMA block allowed PEG113-PHPMAx diblock copolymer spheres, worms, or vesicles to be prepared at up to 17.5% w/w solids, as judged by dynamic light scattering and transmission electron microscopy studies. Small-angle X-ray scattering (SAXS) analysis revealed that more exotic oligolamellar vesicles were observed at 20% w/w solids when targeting highly asymmetric diblock compositions. Detailed analysis of SAXS curves indicated that the mean number of membranes per oligolamellar vesicle is approximately three. A PEG 113-PHPMAx phase diagram was constructed to enable the reproducible targeting of pure phases, as opposed to mixed morphologies (e.g., spheres plus worms or worms plus vesicles). This new RAFT PISA formulation is expected to be important for the rational and efficient synthesis of a wide range of biocompatible, thermo-responsive PEGylated diblock copolymer nano-objects for various biomedical applications

Aqueous worm gels can be reconstituted from freeze-dried diblock copolymer powder.

Worm-like diblock copolymer nanoparticles comprising poly(glycerol monomethacrylate) (PGMA) as a stabilizer block and poly(2-hydroxypropyl methacrylate) (PHPMA) as a core-forming block were readily synthesized at 10% w/w solids via aqueous dispersion polymerization at 70 °C using Reversible Addition-Fragmentation chain Transfer (RAFT) chemistry. On cooling to 20 °C, soft transparent free-standing gels are formed due to multiple inter-worm interactions. These aqueous PGMA-PHPMA diblock copolymer worms were freeze-dried, then redispersed in water with cooling to 3-5 °C before warming up to 20 °C; this protocol ensures molecular dissolution of the copolymer chains, which aids formation of a transparent aqueous gel. Rheology, SAXS and TEM studies confirm that such reconstituted gels comprise formed PGMA-PHPMA copolymer worms and they possess essentially the same physical properties determined for the original worm gels prior to freeze-drying. Such worm gel reconstitution is expected to be highly beneficial in the context of various biomedical applications, since it enables worm gels to be readily prepared using a wide range of cell growth media as the continuous aqueous phase

RAFT polymerization of hydroxy-functional methacrylic monomers under heterogeneous conditions: effect of varying the core-forming block

Statistical copolymerization of a 1 : 1 molar ratio of a water-miscible monomer (2-hydroxyethyl methacrylate, HEMA) with a water-immiscible monomer (4-hydroxybutyl methacrylate, HBMA) has been conducted in water via reversible addition–fragmentation chain transfer (RAFT) polymerization using a water-soluble poly(glycerol monomethacrylate) macromolecular chain transfer agent (PGMA macro- CTA). In principle, such a hybrid formulation might be expected to be intermediate between RAFT dispersion polymerization and RAFT emulsion polymerization. Under such circumstances, it is of particular interest to examine whether both monomers are actually consumed and, if so, whether their rates of reaction are comparable. Given the water-solubility of both the PGMA macro-CTA and the free radical azo initiator, it is perhaps counter-intuitive that the water-immiscible HBMA is initially consumed significantly faster than the water-miscible HEMA, as judged by 1H NMR studies of this copolymerization. However, both comonomers are eventually almost fully consumed at 70 �C. A detailed phase diagram has been constructed for this RAFT formulation that enables reproducible syntheses of various pure copolymer morphologies, including spheres, worms and vesicles. It is emphasized that utilizing a 1 : 1 HEMA/HBMA molar ratio produces a core-forming statistical copolymer block that is isomeric with the poly(2-hydroxypropyl methacrylate) (PHPMA) core-forming block previously synthesized via RAFT aqueous dispersion polymerization (see A. Blanazs et al., Macromolecules, 2012, 45, 5099–5107). Hence it is rather remarkable that the thermo-responsive behavior of PGMA–P(HBMA-stat-HEMA) statistical block copolymer worm gels differs qualitatively from that exhibited by PGMA–PHPMA diblock copolymer worm gels