22 research outputs found

    Deposition and characterization of B4_{4}C/CeO2_{2} multilayers at 6.x nm extreme ultraviolet wavelengths

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    New multilayers of boron carbide/cerium dioxide (B4C/CeO2) combination on silicon (Si) substrate are manufactured to represent reflective-optics candidates for future lithography at 6.x nm wavelength. This is one of only a few attempts to make multilayers of this kind. Combination of several innovative experiments enables detailed study of optical properties, structural properties, and interface profiles of the multilayers in order to open up a room for further optimization of the manufacturing process. The interface profile is visualized by high-angle annular dark-field imaging which provides highly sensitive contrast to atomic number. Synchrotron based at-wavelength extreme ultraviolet(EUV) reflectance measurements near the boron (B) absorption edge allow derivation of optical parameters with high sensitivity to local atom interactions. X-ray reflectivity measurements at Cu-Kalpha(8 keV) determine the period of multilayers with high in-depth resolution. By combining these measurements and choosing robust nonlinear curve fitting algorithms, accuracy of the results has been significantly improved. It also enables a comprehensive characterization of multilayers.Interface diffusion is determined to be a major cause for the low reflectivity performance. Optical constants of B4C and CeO2 layers are derived in EUV wavelengths. Besides, optical properties and asymmetric thicknesses of inter-diffusion layers (interlayers) in EUV wavelengths near the boron edge are determined. Finally, ideal reflectivity of the B4C/CeO2 combination is calculated by using optical constants derived from the proposed measurements in order to evaluate the potentiality of the design

    Solar alpha particles damage effects on UV and EUV optical coatings

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    Multilayers coatings for space and solar applications are usually exposed to harsh environments. Thermal stress, ion bombardments and natural aging process can affect their performances over time. We have investigated the α–particles stability of UV and EUV optical coatings suitable for high–performance solar instrumentation. Experimental procedures, analysis and preliminary results are discussed hereafter

    Alignment procedure for the Gregorian telescope of the Metis coronagraph for the Solar Orbiter ESA mission

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    Metis is a solar coronagraph mounted on-board the Solar Orbiter ESA spacecraft. Solar Orbiter is scheduled for launch in February 2020 and it is dedicated to study the solar and heliospheric physics from a privileged close and inclined orbit around the Sun. Perihelion passages with a minimum distance of 0.28 AU are foreseen. Metis features two channels to image the solar corona in two different spectral bands: in the HI Lyman ∝ at 121.6 nm, and in the polarized visible light band (580 – 640 nm). Metis is a solar coronagraph adopting an “inverted occulted” configuration. The inverted external occulter (IEO) is a circular aperture followed by a spherical mirror which back rejects the disk light. The reflected disk light exits the instrument through the IEO aperture itself, while the passing coronal light is collected by the Metis telescope. Common to both channels, the Gregorian on-axis telescope is centrally occulted and both the primary and the secondary mirror have annular shape. Classic alignment methods adopted for on-axis telescope cannot be used, since the on-axis field is not available. A novel and ad hoc alignment set-up has been developed for the telescope alignment. An auxiliary visible optical ground support equipment source has been conceived for the telescope alignment. It is made up by four collimated beams inclined and dimensioned to illuminate different sections of the annular primary mirror without being vignetted by other optical or mechanical elements of the instrument
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