Visual approach to the imaging of magic mirrors (Makyohs)

The imaging of Japanese magic mirrors (Makyohs) is discussed by comparing the visual images of the backside relief pattern under different illumination conditions and the projected Makyoh image, rather than considering the back relief pattern as the input. It is also hypothesised that for a large number of magic mirrors, the Makyoh imaging is beyond the Laplacian regime under optimum viewing conditions, which accentuates the bright regions in the image; these correspond to reflecting highlights or step edges in the visual image. Published magic mirror images support this hypothesis. Simulations of the visual and Makyoh images are also presented

Non-linearity and related features of Makyoh (magic-mirror) imaging

Non-linearity in Makyoh (magic-mirror) imaging is analyzed using a geometrical optical approach. The sources of non-linearity are identified as (1) a topological mapping of the imaged surface due to surface gradients, (2) the hyperbolic-like dependence of the image intensity on the local curvatures, and (3) the quadratic dependence of the intensity due to local Gaussian surface curvatures. Criteria for an approximate linear imaging are given and the relevance to Makyoh-topography image evaluation is discussed

Kvantitatív Makyoh-topográfia = Quantitative Makyoh topography

A korszerű félvezető-technológiában alapvető fontosságú a szeletek felületi morfológiájának, az ideális síkjellegtől való eltérésének a minősítése. A korszerű nagy átmérőjű szeletek megjelenésével a síkjelleg problémája és így a megfelelő minősítési eljárás szükségessége fokozottabban jelentkezik. A jelen pályázat témája egy, a Távol-Keletről származó ősi, "mágikus" tulajdonságú tükör elvén alapuló optikai vizsgálati módszer, a Makyoh-topográfia alkalmassá tétele igényes metrológiai célokra. A kutatás során új koncepciójú, nagy méretű minták vizsgálatára alkalmas mérési összeállításokat valósítottunk meg. Tanulmányoztuk a felületi domborzat visszanyerésére szolgáló eljárások érzékenységét és pontosságát, valamint a leképezés alapvető tulajdonságait. A kidolgozott mérési eljárást számos félvezető-technológiai és egyéb kutatásban alkalmaztuk. Lépéseket tettünk a mérési eljárás gazdasági hasznosítása érdekében. | The assessment of the surface morphology and flatness of the wafers is a key issue in modern semiconductor technology. The need for a proper flatness characterisation method became even more important with the advent of today's large-diameter wafers. The aim of the present project is to make Makyoh topography, an optical characterisation tool based on an ancient 'magic' mirror of Far-East origin suitable for advanced metrological purposes. During our research, we have constructed novel measurement set-ups suitable for the study of large-diameter samples. We have studied the sensivity and accuracy of the numerical methods for the reconstruction of the surface topography and investigated the basic characteristics of the imaging mechanism. The developed methods have been applied in semicondutor technolgy research as well as in other areas. We have taken steps forward the industrial exploitation

Membrane Platforms for Sensors

AbstractIn the past half century the IC technology could produce an unprecedented growth and penetration into all segments of our daily life due to the achieved extreme productivity and reliability by using well established and continuously refined processing platforms. This uninterrupted trend continued also with the advent of the More than Moore-type MEMS technology allowing the combination of the signal processing capability of the mature IC technology with the exploitation of mechanical, thermal, optical properties of the materials used in IC technology in different sensing and actuation purposes. Mass producibility by monolithic integration required here also the development of appropriate unified set of techniques for the various applications, i.e. sort of standardised platforms to explore.In this paper we focus on the development of bulk micromachined membrane platforms, being exploited in such applications. At the same time this summary also offers a “case study”, a retrospective review of the development of integrable sensors from pressure measurement to nanopore-type, label-free biosensing at the Institute of Technical Physics & Materials Science - MFA, Budapest

Relationship between structural changes, hydrogen content and annealing in stacks of ultrathin Si/Ge amorphous layers

Hydrogenated multilayers (MLs) of a-Si/a-Ge have been analysed to establish the reasons of H release during annealing that has been seen to bring about structural modifications even up to well-detectable surface degradation. Analyses carried out on single layers of a-Si and a-Ge show that H is released from its bond to the host lattice atom and that it escapes from the layer much more efficiently in a-Ge than in a-Si because of the smaller binding energy of the H-Ge bond and probably of a greater weakness of the Ge lattice. This should support the previous hypothesis that the structural degradation of a-Si/a-Ge MLs primary starts with the formation of H bubbles in the Ge layers

Measurement of ion emission from plasmas obtained with a 600 fs KrF laser

Ion emission from plasmas obtained by the use of a 600 fs, 36 mJ KrF laser operating at 248 nm was measured and analysed for a variety of targets at different laser intensities. The intensity was set by changing the distance between the focusing lens and the target. It was found that the ions emitted originate from impurities and ions from the bulk of the target can be produced only in the subsequent shots. Proton emission was identified from some targets, but the energy of the protons was low (less than 12 keV). A new silicon carbide semiconductor detector proved to be applicable for the collection of the ions

Geometrical optical model of the image formation in Makyoh (magic-mirror) topography

A geometrical optical model for the image formation of Makyoh (or magic-mirror) topography is presented. General relations are given on the optical settings. Basic equations of the imaging are derived. Fundamental features of the imaging are pointed out, and optimum working conditions are established. Simulations of the image of an isolated defect (hillock or depression) and a periodic (sinusoidal) surface are presented for different optical settings. Supporting experimental images are presented

Modelling of the backside pattern transfer in magic mirror (Makyoh) imaging

A model of magic-mirror (Makyoh) imaging with the mirror backside relief as the input is described. The mechanical pattern transfer is modelled by a convolution approach while the optical imaging using a nonlinear geometrical optical model, more general than previous approaches. Characteristic features of the imaging is analysed and the linear approximation is examined. Diffraction effects are also treated. Characteristic features for the ancient mirror and applications in semiconductor wafer inspection are discussed