Neuartige Charakterisierungsmethoden für moderne Thermische Interface-Materialien einschließlich deren Struktur-Eigenschafts-Korrelation

Die fortschreitende Miniaturisierung von elektronischen Systemen begleitet von steigender Leistung und Funktionalität führt zur Erhöhung der Leistungsdichte. Um diesem Trend zu entsprechen, werden neue Entwärmungskonzepte benötigt, die wiederum neuartige Materialien und Materialverbünde fordern. Ein wichtiger Aspekt dieser Arbeit ist deshalb die Konzentration auf die für den Wärmetransport entscheidenden Materialien. Diese Arbeit befasst sich mit der Entwicklung von Methoden für die umfassende thermische Charakterisierung von den verschiedenen Materialien und Materialklassen, die in der Elektronikindustrie verwendet werden. Die Messsysteme wurden so entworfen und entwickelt, dass spezifische Anwendungsbedingungen berücksichtigt werden können, keine aufwändige Probenherstellung notwendig ist und gleichzeitig eine hohe Messgenauigkeit gewährleistet ist. Es wurden vier verschiedene Messsysteme innerhalb dieser Arbeit entwickelt und realisiert, die in ihrer Gesamtheit die Charakterisierung von fast allen Package-Materialien unter gewünschten Randbedingungen ermöglichen. Zahlreiche Materialien und Effekte wurden daraufhin im Rahmen dieser Arbeit mit den entwickelten Messsystemen untersucht und diskutiert.The continuous miniaturization of electronic systems accompanied by increasing performance and functionality leads to an increase in power density. In order to comply this trend, new heat dissipation concepts are needed which demand new materials and material composites. An important aspect of this work is therefore the concentration on the materials that are decisive for the heat flow. This thesis deals with the development of Methods for comprehensive thermal characterization of the different materials and material classes used in the electronics industry. The measuring systems have been designed and developed in such a way that they enable to take into account specific application conditions, no costly sample preparation is necessary and at the same time high measuring accuracy is ensured. Four different measuring systems were developed and realized within this work, which, in their entirety, enable the characterization of almost all package materials under desired boundary conditions. Based on this, numerous materials and effects were investigated and discussed in the context of this work with the developed measurement systems

Neuartige Charakterisierungsmethoden für moderne Thermische Interface-Materialien einschließlich deren Struktur-Eigenschafts-Korrelation

Die fortschreitende Miniaturisierung von elektronischen Systemen begleitet von steigender Leistung und Funktionalität führt zur Erhöhung der Leistungsdichte. Um diesem Trend zu entsprechen, werden neue Entwärmungskonzepte benötigt, die wiederum neuartige Materialien und Materialverbünde fordern. Ein wichtiger Aspekt dieser Arbeit ist deshalb die Konzentration auf die für den Wärmetransport entscheidenden Materialien. Diese Arbeit befasst sich mit der Entwicklung von Methoden für die umfassende thermische Charakterisierung von den verschiedenen Materialien und Materialklassen, die in der Elektronikindustrie verwendet werden. Die Messsysteme wurden so entworfen und entwickelt, dass spezifische Anwendungsbedingungen berücksichtigt werden können, keine aufwändige Probenherstellung notwendig ist und gleichzeitig eine hohe Messgenauigkeit gewährleistet ist. Es wurden vier verschiedene Messsysteme innerhalb dieser Arbeit entwickelt und realisiert, die in ihrer Gesamtheit die Charakterisierung von fast allen Package-Materialien unter gewünschten Randbedingungen ermöglichen. Zahlreiche Materialien und Effekte wurden daraufhin im Rahmen dieser Arbeit mit den entwickelten Messsystemen untersucht und diskutiert.The continuous miniaturization of electronic systems accompanied by increasing performance and functionality leads to an increase in power density. In order to comply this trend, new heat dissipation concepts are needed which demand new materials and material composites. An important aspect of this work is therefore the concentration on the materials that are decisive for the heat flow. This thesis deals with the development of Methods for comprehensive thermal characterization of the different materials and material classes used in the electronics industry. The measuring systems have been designed and developed in such a way that they enable to take into account specific application conditions, no costly sample preparation is necessary and at the same time high measuring accuracy is ensured. Four different measuring systems were developed and realized within this work, which, in their entirety, enable the characterization of almost all package materials under desired boundary conditions. Based on this, numerous materials and effects were investigated and discussed in the context of this work with the developed measurement systems

Sensors for Thermal Characterization of Solid and Liquid Samples by 3-Omega Method

Microchips have been designed and fabricated for the fast thermal characterization of samples by extension of the 3-omega method. Both solid and liquid samples can be measured by applying a small amount of material under investigation on the chip containing a micro heater/sensor. Two types of chips have been fabricated and tested: silicon chips with porous silicon (PS) layer as thermal isolator and glass chips with through glass vias (TGVs) for the back side contacting of the top side heater/sensor

Development, design and fabrication of a measurement chip for thermal material characterization based on the 3-omega method

International audienc

Microfabricated sensor platform with through-glass vias for bidirectional 3-omega thermal characterization of solid and liquid samples

A novel microfabricated, all-electrical measurement platform is presented for a direct, accurate and rapid determination of the thermal conductivity and diffusivity of liquid and solid materials. The measurement approach is based on the bidirectional 3-omega method. The platform is composed of glass substrates on which sensor structures and a very thin dielectric nanolaminate passivation layer are fabricated. Using through-glass vias for contacting the sensors from the chip back side leaves the top side of the platform free for deposition, manipulation and optical inspection of the sample during 3-omega measurements. The thin passivation layer, which is deposited by atomic layer deposition on the platform surface, provides superior chemical resistance and allows for the measurement of electrically conductive samples, while maintaining the conditions for a simple thermal analysis. We demonstrate the measurement of thermal conductivities of borosilicate glass, pure water, glycerol, 2-propanol, PDMS, cured epoxy, and heat-sink compounds. The results compare well with both literature values and values obtained with the steady-state divided bar method. Small sample volumes (~0.02 mm$^2$) suffice for accurate measurements using the platform, allowing rapid temperature-dependent measurements of thermal properties, which can be useful for the development, optimization and quality testing of many materials, such as liquids, gels, pastes and solids

Microfabricated sensor platform with through-glass vias for bidirectional 3-omega thermal characterization of solid and liquid samples

A novel microfabricated, all-electrical measurement platform is presented for a direct, accurate and rapid determination of the thermal conductivity and diffusivity of liquid and solid materials. The measurement approach is based on the bidirectional 3-omega method. The platform is composed of glass substrates on which sensor structures and a very thin dielectric nanolaminate passivation layer are fabricated. Using through-glass vias for contacting the sensors from the chip back side leaves the top side of the platform free for deposition, manipulation and optical inspection of the sample during 3-omega measurements. The thin passivation layer, which is deposited by atomic layer deposition on the platform surface, provides superior chemical resistance and allows for the measurement of electrically conductive samples, while maintaining the conditions for a simple thermal analysis. We demonstrate the measurement of thermal conductivities of borosilicate glass, pure water, glycerol, 2-propanol, PDMS, cured epoxy, and heat-sink compounds. The results compare well with both literature values and values obtained with the steady-state divided bar method. Small sample volumes (~0.02 mm$^2$) suffice for accurate measurements using the platform, allowing rapid temperature-dependent measurements of thermal properties, which can be useful for the development, optimization and quality testing of many materials, such as liquids, gels, pastes and solids