53 research outputs found

    Enhancement of quantum well intermixing on InP/InGaAs/InGaAsP heterostructures using titanium oxide surface stressors to induce forced point defect diffusion

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    Quantum well intermixing was studied on InPInGaAsInGaAsP heterostructures under stress induced by a Ti Ox surface stressor. Results provide a comparison of thermal emission wavelength shift and effective emission wavelength shift for samples intermixed with and without applied stress. It is shown that Ti Ox decreases the measured thermal shift depending on the amplitude of the induced stress. It is also shown that the diffusion of point defects created during ion implantation prior to Ti Ox stressor deposition is significantly enhanced. This results in an increase of the effective wavelength shift by up to 300%. © 2006 American Institute of Physics.A. François, V. Aimez, J. Beauvais, M. Gendry and P. Regren

    Isolation of III-V/Ge Multijunction Solar Cells by Wet Etching

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    Microfabrication cycles of III-V multijunction solar cells include several technological steps and end with a wafer dicing step to separate individual cells. This step introduces damage at lateral facets of the junctions that act as charge trapping centers, potentially causing performance and reliability issues, which become even more important with today’s trend of cell size reduction. In this paper we propose a process of wet etching of microtrenches that allows electrical isolation of individual solar cells with no damage to the sidewalls. Etching with bromine-methanol, the solution that is typically used for nonselective etching of III-V compounds, results in the formation of unwanted holes on the semiconductor surfaces. We investigate the origin of holes formation and discuss methods to overcome this effect. We present an implementation of the isolation step into a solar cell fabrication process flow. This improved fabrication process opens the way for improved die strength, yield, and reliability

    SEM characterization of nanodevices and nanomaterials

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    The scanning electron microscope (SEM) can be used to study and characterize a wide variety of materials used in nanoelectronic and photonic applications. Several different techniques make use of this versatile tool. These include voltage contrast in secondary electron imaging, charge collection for semiconductor samples and cathodoluminescence. These techniques are important in device nanofabrication process development and nanomaterials characterization. © 2006 IEEE
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