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Our primary goal during the previous support periods was to determine the interrelationship among the structure of the CaF{sub 2}/Si interface, the growth kinetics, the structure and morphology of the overlying film, and the intrinsic dielectric properties of the interface itself. The experiments were designed (i) to determine the CaF{sub 2} overlayer structure and morphology as a function of kinetic conditions [Den93a, Den93b, Won93, Den95, Hes95], (ii) to develop and test models explaining the observed structures [Den95, Hes95], (iii) to investigate the stability of the interface structure [Les97] and (iv) to determine and interpret the photoelectron kinetic energy distributions as a function of the emitting atom location [Rot93, Rot94, Rot96]. As summarized below, we were successful in accomplishing these experiments and in largely fulfilling our original goal

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Photograph of rock garden, Ryoanji Temple, Kyoto, JapanQ24 KANSO. Garden at Ryoan-ji Temple, Kyoto