Polymer Bound Photobase Generators And Photoacid Generators For Pitch Division Lithography

The semiconductor industry is pursuing several process options that provide pathways to printing images smaller than the theoretical resolution limit of 193 nm projection scanners. These processes include double patterning, side wall deposition and pitch division. Pitch doubling lithography (PDL), the achievement of pitch division by addition of a photobase generator (PBG) to typical 193 nm resist formulations was recently presented. 1 Controlling the net acid concentration as a function of dose by incorporating both a photoacid generator (PAG) and a PBG in the resist formulation imparts a resist dissolution rate response modulation at twice the frequency of the aerial image. Simulation and patterning of 45 nm half pitch L/S patterns produced using a 90 nm half pitch mask were reported. 2 Pitch division was achieved, but the line edge roughness of the resulting images did not meet the current standard. To reduce line edge roughness, polymer bound PBGs and polymer bound PAGs were investigated in the PDL resist formulations. The synthesis, purification, analysis, and functional performance of various polymers containing PBG or PAG monomers are described herein. Both polymer bound PBG with monomeric PAG and polymer bound PAG with monomeric PBG showed a PDL response. The performance of the polymer bound formulations is compared to the same formulations with small molecule analogs of PAG and PBG.Chemical Engineerin

Photobase Generator Enabled Pitch Division: A Progress Report

Pitch division lithography (PDL) with a photobase generator (PBG) allows printing of grating images with twice the pitch of a mask. The proof-of-concept has been published in the previous paper[1, 2] and demonstrated by others[1]. Forty five nm half-pitch (HP) patterns were produced using a 90nm HP mask, but the image had line edge roughness (LER) that does not meet requirements. Efforts have been made to understand and improve the LER in this process. Challenges were summarized toward low LER and good performing pitch division. Simulations and analysis showed the necessity for an optical image that is uniform in the z direction in order for pitch division to be successful. Two-stage PBGs were designed for enhancement of resist chemical contrast. New pitch division resists with polymer-bound PAGs and PBGs, and various PBGs were tested. This paper focuses on analysis of the LER problems and efforts to improve patterning performance in pitch division lithography.Chemical Engineerin

Outer jet X-ray and radio emission in R Aquarii: 1999.8 to 2004.0

Chandra and VLA observations of the symbiotic star R Aqr in 2004 reveal significant changes over the three to four year interval between these observations and previous observations taken with the VLA in 1999 and with Chandra in 2000. This paper reports on the evolution of the outer thermal X-ray lobe-jets and radio jets. The emission from the outer X-ray lobe-jets lies farther away from the central binary than the outer radio jets, and comes from material interpreted as being shock heated to ~10^6 K, a likely result of collision between high speed material ejected from the central binary and regions of enhanced gas density. Between 2000 and 2004, the Northeast (NE) outer X-ray lobe-jet moved out away from the central binary, with an apparent projected motion of ~580 km s^-1. The Southwest (SW) outer X-ray lobe-jet almost disappeared between 2000 and 2004, presumably due to adiabatic expansion and cooling. The NE radio bright spot also moved away from the central binary between 2000 and 2004, but with a smaller apparent velocity than of the NE X-ray bright spot. The SW outer lobe-jet was not detected in the radio in either 1999 or 2004. The density and mass of the X-ray emitting material is estimated. Cooling times, shock speeds, pressure and confinement are discussed.Comment: 23 pages, 8 figure

The impact of multiple sclerosis on the identity of mothers in Italy

Purpose: This paper reports on one of the themes that emerged from the analysis of the study, regarding the perceived influence of multiple sclerosis (MS) on the identity of mothers in the socio-cultural context of Italy. Method: In-depth interviews were conducted with 16 women at various stages of MS, with follow up interviews with seven of the women. Phenomenology guided the methodology and the analysis was conducted using interpretative phenomenological analysis. Results: Through the research the value of motherhood to the women who participated emerged. The findings illustrated how many strove to maintain controlof their MS, which led to some making comparisons of themselves and other mothers and feeling different. Some women described how they adjusted their roles and found strength in being mothers but others spoke of their feelings of loss. Most women described living in the moment, appreciating the present and living each day as it came. Another significant experience was fear of stigma, both realized in the form of “pity” from others, and the perceived and actual associated stigma for their families. This contributed to why some women were reluctant to disclose their condition. The mothers who took part in this study differed in how they perceived their disabled identity. Conclusion: Although this study was conducted in the socio-cultural setting of Italy, the findings have implications for professionals working with disabled mothers and women with MS in Italy and beyond; including recognizing the value associated with fully identifying oneself as a mother, rather than solely focusing on doingmothering tasks. • Implications for Rehabilitation • Professionals need to be mindful of the value of motherhood for women with multiple sclerosis. • Professionals should support women who feel like they are battling with maintaining control of their multiple sclerosis, who may be adjusting their identity as mothers; recognizing that they may be influenced by the stage of their multiple sclerosis and whether they were diagnosed before or after having their children. • Women can have feelings of loss related to their ability to fully participate in their children’s lives and professionals should work with women to help them identify the value of their mothering role not only in physically participating in activities but also in being emotionally and physically present as a mother

A Note on Encodings of Phylogenetic Networks of Bounded Level

Driven by the need for better models that allow one to shed light into the question how life's diversity has evolved, phylogenetic networks have now joined phylogenetic trees in the center of phylogenetics research. Like phylogenetic trees, such networks canonically induce collections of phylogenetic trees, clusters, and triplets, respectively. Thus it is not surprising that many network approaches aim to reconstruct a phylogenetic network from such collections. Related to the well-studied perfect phylogeny problem, the following question is of fundamental importance in this context: When does one of the above collections encode (i.e. uniquely describe) the network that induces it? In this note, we present a complete answer to this question for the special case of a level-1 (phylogenetic) network by characterizing those level-1 networks for which an encoding in terms of one (or equivalently all) of the above collections exists. Given that this type of network forms the first layer of the rich hierarchy of level-k networks, k a non-negative integer, it is natural to wonder whether our arguments could be extended to members of that hierarchy for higher values for k. By giving examples, we show that this is not the case

Dust-trapping vortices and a potentially planet-triggered spiral wake in the pre-transitional disk of V1247 Orionis (article)

This is the final version of the article. Available from American Astronomical Society via the DOI in this record.The dataset associated with this article is located in ORE at: https://doi.org/10.24378/exe.1804The radial drift problem constitutes one of the most fundamental problems in planet formation theory, as it predicts particles to drift into the star before they are able to grow to planetesimal size. Dust-trapping vortices have been proposed as a possible solution to this problem, as they might be able to trap particles over millions of years, allowing them to grow beyond the radial drift barrier. Here, we present ALMA 0.04′′-resolution imaging of the pre-transitional disk of V1247 Orionis that reveals an asymmetric ring as well as a sharply-confined crescent structure, resembling morphologies seen in theoretical models of vortex formation. The asymmetric ring (at 0.17′′=54 au separation from the star) and the crescent (at 0.38′′=120 au) seem smoothly connected through a one-armed spiral arm structure that has been found previously in scattered light. We propose a physical scenario with a planet orbiting at ∼ 0.3′′≈100 au, where the onearmed spiral arm detected in polarised light traces the accretion stream feeding the protoplanet. The dynamical influence of the planet clears the gap between the ring and the crescent and triggers two vortices that trap mm-sized particles, namely the crescent and the bright asymmetry seen in the ring. We conducted dedicated hydrodynamics simulations of a disk with an embedded planet, which results in similar spiral-arm morphologies as seen in our scattered light images. At the position of the spiral wake and the crescent we also observe 12CO (3-2) and H12CO+ (4-3) excess line emission, likely tracing the increased scale-height in these disk regions.This paper makes use of ALMA data set ADS/JAO.ALMA#2015.1.00986.S. We thank the German ALMA ARC for support, in particular Stefanie M¨uhle and Benjamin Magnelli. Our team acknowledges support from the European Research Council (Grant Agreement Numbers 639889 and 339248), an STFC Rutherford Fellowship/Grant (ST/J004030/1, ST/K003445/1), Philip Leverhulme Prize (PLP-2013-110), NAOJ ALMA Scientific Research Grant (Number 2016-02A), and NASA Exoplanet Research Program grants NNX16AJ75G and NNX17AF88G. ALMA is a partnership of ESO (representing its member states), NSF (USA) and NINS (Japan), together with NRC (Canada), MOST and ASIAA (Taiwan), and KASI (Republic of Korea), in cooperation with the Republic of Chile. The Joint ALMA Observatory is operated by ESO, AUI/NRAO and NAOJ. This work used the DiRAC Complexity system, operated by the University of Leicester IT Services, which forms part of the STFC DiRAC HPC Facility. This equipment is funded by BIS National E-Infrastructure capital grant ST/K000373/1 and STFC DiRAC Operations grant ST/K0003259/1

Combined analysis of solar neutrino and solar irradiance data: further evidence for variability of the solar neutrino flux and its implications concerning the solar core

A search for any particular feature in any single solar neutrino dataset is unlikely to establish variability of the solar neutrino flux since the count rates are very low. It helps to combine datasets, and in this article we examine data from both the Homestake and GALLEX experiments. These show evidence of modulation with a frequency of 11.85 yr-1, which could be indicative of rotational modulation originating in the solar core. We find that precisely the same frequency is prominent in power spectrum analyses of the ACRIM irradiance data for both the Homestake and GALLEX time intervals. These results suggest that the solar core is inhomogeneous and rotates with sidereal frequency 12.85 yr-1. We find, by Monte Carlo calculations, that the probability that the neutrino data would by chance match the irradiance data in this way is only 2 parts in 10,000. This rotation rate is significantly lower than that of the inner radiative zone (13.97 yr-1) as recently inferred from analysis of Super-Kamiokande data, suggesting that there may be a second, inner tachocline separating the core from the radiative zone. This opens up the possibility that there may be an inner dynamo that could produce a strong internal magnetic field and a second solar cycle.Comment: 22 pages, 9 tables, 10 figure

Limits on I-band microvariability of the Galactic Bulge Miras

We search for microvariability in a sample of 485 Mira variables with high quality I-band light curves from the second generation Optical Gravitational Lensing Experiment (OGLE-II). Rapid variations with amplitudes in the ~0.2-1.1 mag range lasting hours to days were discovered in Hipparcos data by de Laverny et al. (1998). Our search is primarily sensitive to events with time-scales of about 1 day, but retains a few percent efficiency (per object) for detecting unresolved microvariability events as short as 2 hours. We do not detect any candidate events. Assuming that the distribution of the event time profiles is identical to that from the Hipparcos light curves we derive the 95% confidence level upper limit of 0.038 per year per star for the rate of such events (1 per 26 years per average object of the ensemble). The high event rates of the order of 1 per year per star implied by the Hipparcos study in the H_P band are excluded with high confidence by the OGLE-II data in the I band. Our non-detection could still be explained by much redder spectral response of the I filter compared to the H_P band or by population differences between the bulge and the solar neighborhood. In any case, the OGLE-II I-band data provide the first limit on the rate of the postulated microvariability events in Mira stars and offer new quantitative constraints on their properties. Similar limits are obtained for other pulse shapes and a range of the assumed time-scales and size-frequency distributions.Comment: Accepted for publication in Ap