Real-time measurement of the three-axis contact force distribution using a flexible capacitive polymer tactile sensor

In this paper, we report real-time measurement results of various contact forces exerted on a new flexible capacitive three-axis tactile sensor array based on polydimethylsiloxane (PDMS). A unit sensor consists of two thick PDMS layers with embedded copper electrodes, a spacer layer, an insulation layer and a bump layer. There are four capacitors in a unit sensor to decompose a contact force into its normal and shear components. They are separated by a wall-type spacer to improve the mechanical response time. Four capacitors are arranged in a square form. The whole sensor is an 8 _ 8 array of unit sensors and each unit sensor responds to forces in all three axes. Measurement results show that the full-scale range of detectable force is around 0–20 mN (250 kPa) for all three axes. The estimated sensitivities of a unit sensor with the current setup are 1.3, 1.2 and 1.2%/mN for the x- , y- and z -axes, respectively. A simple mechanical model has been established to calculate each axial force component from the measured capacitance value. Normal and shear force distribution images are captured from the fabricated sensor using a real-time measurement system. The mechanical response time of a unit sensor has been estimated to be less than 160 ms. The flexibility of the sensor has also been demonstrated by operating the sensor on a curved surface of 4 mm radius of curvature.Peer Reviewedhttp://deepblue.lib.umich.edu/bitstream/2027.42/90798/1/0960-1317_21_3_035010.pd

A low-voltage Two-axis Electromagnetically Actuated Micromirror with Bulk Silicon Mirror

ABSTRACT In this paper, a new micromirror structure has been proposed and fabricated. The proposed micromirror is electromagnetically actuated along two-axis at low voltage using an external magnetic field. The mirror plates and torsion bars are made of bulk silicon and the actuation coils are made of electroplated copper. The maximum deflection angles have been measured as ±4.35° for x-axis actuation and ±15.7° for y-axis actuation. The actuation voltages are below 4.2V for xaxis actuation and 1.76V for y-axis actuation, respectively

A Modular Expandable Tactile Sensor Using Flexible Polymer

In this paper, we have proposed and demonstrated a modular expandable tactile sensor using PDMS elastomer. A sensor module consists of 16 ?? 16 tactile cells with 1 mm spatial resolution, similar to that of human skin, and interconnection lines for expandability. Tactile response of a cell has been measured with a force gauge. Initial capacitance of each cell is about 180 fF. The fabricated cell shows a sensitivity of 3%/mN within the full scale range of 40 mN (250 kPa). Four tactile modules have been successfully attached by using ACP to demonstrate expandability. Various tactile images have been successfully captured by one sensor module as well as the expanded 32 ?? 32 modular array sensors