High-Q-factor Al [subscript 2]O[subscript 3] micro-trench cavities integrated with silicon nitride waveguides on silicon

We report on the design and performance of high-Q integrated optical micro-trench cavities on silicon. The microcavities are co-integrated with silicon nitride bus waveguides and fabricated using wafer-scale silicon-photonics-compatible processing steps. The amorphous aluminum oxide resonator material is deposited via sputtering in a single straightforward post-processing step. We examine the theoretical and experimental optical properties of the aluminum oxide micro-trench cavities for different bend radii, film thicknesses and near-infrared wavelengths and demonstrate experimental Q factors of > 10[superscript 6]. We propose that this high-Q micro-trench cavity design can be applied to incorporate a wide variety of novel microcavity materials, including rare-earth-doped films for microlasers, into wafer-scale silicon photonics platforms

Silicon photonics-based high-energy passively Q-switched laser

Chip-scale, high-energy optical pulse generation is becoming increasingly important as integrated optics expands into space and medical applications where miniaturization is needed. Q-switching of the laser cavity was historically the first technique to generate high-energy pulses, and typically such systems are in the realm of large bench-top solid-state lasers and fibre lasers, especially in the long wavelength range &gt;1.8 µm, thanks to their large energy storage capacity. However, in integrated photonics, the very property of tight mode confinement that enables a small form factor becomes an impediment to high-energy applications owing to small optical mode cross-sections. Here we demonstrate a high-energy silicon photonics-based passively Q-switched laser with a compact footprint using a rare-earth gain-based large-mode-area waveguide. We demonstrate high on-chip output pulse energies of &gt;150 nJ and 250 ns pulse duration in a single transverse fundamental mode in the retina-safe spectral region (1.9 µm), with a slope efficiency of ~40% in a footprint of ~9 mm2. The high-energy pulse generation demonstrated in this work is comparable to or in many cases exceeds that of Q-switched fibre lasers. This bodes well for field applications in medicine and space.</p

A Tellurium Oxide Microcavity Resonator Sensor Integrated On-Chip with a Silicon Waveguide

We report on thermal and evanescent field sensing from a tellurium oxide optical microcavity resonator on a silicon photonics platform. The on-chip resonator structure is fabricated using silicon-photonics-compatible processing steps and consists of a silicon-on-insulator waveguide next to a circular trench that is coated in a tellurium oxide film. We characterize the device&#8217;s sensitivity by both changing the temperature and coating water over the chip and measuring the corresponding shift in the cavity resonance wavelength for different tellurium oxide film thicknesses. We obtain a thermal sensitivity of up to 47 pm/&#176;C and a limit of detection of 2.2 &#215; 10&#8722;3 RIU for a device with an evanescent field sensitivity of 10.6 nm/RIU. These results demonstrate a promising approach to integrating tellurium oxide and other novel microcavity materials into silicon microphotonic circuits for new sensing applications

Progress on a hybrid tellurite glass and silicon nitride waveguide platform for passive, active, and nonlinear photonic integrated circuits

We present on recent progress on a hybrid tellurite glass and silicon nitride photonic platform. We show low loss waveguides and Q factors < 10^6 in microring resonators. We also show rare-earth-doped active devices, including erbium-doped and thulium-doped waveguide amplifiers and thulium-doped microring lasers. Using the same approach, we demonstrate nonlinear functionalities including efficient four-wave-mixing, supercontinuum generation and third harmonic generation in compact microring resonators and waveguides. The platform is highly promising for compact and low-cost passive, active and nonlinear photonic integrated circuits for applications in computing, communications, sensing and metrolog

Silicon photonics based high-energy passively Q-switched laser

Chips-scale, CMOS-compatible high energy passively Q-switched lase