High-Q-factor Al [subscript 2]O[subscript 3] micro-trench cavities integrated with silicon nitride waveguides on silicon

We report on the design and performance of high-Q integrated optical micro-trench cavities on silicon. The microcavities are co-integrated with silicon nitride bus waveguides and fabricated using wafer-scale silicon-photonics-compatible processing steps. The amorphous aluminum oxide resonator material is deposited via sputtering in a single straightforward post-processing step. We examine the theoretical and experimental optical properties of the aluminum oxide micro-trench cavities for different bend radii, film thicknesses and near-infrared wavelengths and demonstrate experimental Q factors of > 10[superscript 6]. We propose that this high-Q micro-trench cavity design can be applied to incorporate a wide variety of novel microcavity materials, including rare-earth-doped films for microlasers, into wafer-scale silicon photonics platforms

A Tellurium Oxide Microcavity Resonator Sensor Integrated On-Chip with a Silicon Waveguide

We report on thermal and evanescent field sensing from a tellurium oxide optical microcavity resonator on a silicon photonics platform. The on-chip resonator structure is fabricated using silicon-photonics-compatible processing steps and consists of a silicon-on-insulator waveguide next to a circular trench that is coated in a tellurium oxide film. We characterize the device’s sensitivity by both changing the temperature and coating water over the chip and measuring the corresponding shift in the cavity resonance wavelength for different tellurium oxide film thicknesses. We obtain a thermal sensitivity of up to 47 pm/°C and a limit of detection of 2.2 × 10−3 RIU for a device with an evanescent field sensitivity of 10.6 nm/RIU. These results demonstrate a promising approach to integrating tellurium oxide and other novel microcavity materials into silicon microphotonic circuits for new sensing applications

Progress on a hybrid tellurite glass and silicon nitride waveguide platform for passive, active, and nonlinear photonic integrated circuits

We present on recent progress on a hybrid tellurite glass and silicon nitride photonic platform. We show low loss waveguides and Q factors < 10^6 in microring resonators. We also show rare-earth-doped active devices, including erbium-doped and thulium-doped waveguide amplifiers and thulium-doped microring lasers. Using the same approach, we demonstrate nonlinear functionalities including efficient four-wave-mixing, supercontinuum generation and third harmonic generation in compact microring resonators and waveguides. The platform is highly promising for compact and low-cost passive, active and nonlinear photonic integrated circuits for applications in computing, communications, sensing and metrolog

Silicon photonics based high-energy passively Q-switched laser

Chips-scale, CMOS-compatible high energy passively Q-switched lase