The black silicon method II: the effect of mask material and loading on the reactive ion etching of deep silicon trenches

Very deep trenches in Si with smooth controllable profiles are etched using a fluorine-based Reactive Ion Etcher(RIE). The effect of various mask materials and loading on the profile is examined using the Black Silicon Method. It is found that most metal layers have an almost infinite selectivity. When the aspect ratio of the trenches is beyond five, RIE lag is found to be an important effect. Evidence is found that this effect is caused by the bowing of incoming ions by the electrical field

Constructing irreducible representations of discrete groups

The decomposition of unitary representations of a discrete group obtained by induction from a subgroup involves commensurators. In particular Mackey has shown that quasi-regular representations are irreducible if and only if the corresponding subgroups are self-commensurizing. The purpose of this work is to describe general constructions of pairs of groups Γ0 with Γ its own commensurator in Γ. These constructions are then applied to groups of isometries of hyperbolic spaces and to lattices in algebraic group

Amenable actions, free products and a fixed point property

We investigate the class of groups admitting an action on a set with an invariant mean. It turns out that many free products admit such an action. We give a complete characterisation of such free products in terms of a strong fixed point property.Comment: 12 page

Infinite dimensional non-positively curved symmetric spaces of finite rank

This paper concerns a study of three families of non-compact type symmetric spaces of infinite dimension. Although they have infinite dimension they have finite rank. More precisely, we show they have finite telescopic dimension. We also show the existence of Furstenberg maps for some group actions on these spaces. Such maps appear as a first step toward superrigidity results.Comment: Some references have been adde

Micromachining of buried micro channels in silicon

A new method for the fabrication of micro structures for fluidic applications, such as channels, cavities, and connector holes in the bulk of silicon wafers, called buried channel technology (BCT), is presented in this paper. The micro structures are constructed by trench etching, coating of the sidewalls of the trench, removal of the coating at the bottom of the trench, and etching into the bulk of the silicon substrate. The structures can be sealed by deposition of a suitable layer that closes the trench. BCT is a process that can be used to fabricate complete micro channels in a single wafer with only one lithographic mask and processing on one side of the wafer, without the need for assembly and bonding. The process leaves a substrate surface with little topography, which easily allows further processing, such as the integration of electronic circuits or solid-state sensors. The essential features of the technology, as well as design rules and feasible process schemes, will be demonstrated on examples from the field of ¿-fluidic

Mutual Event Observations of Io's Sodium Corona

We have measured the column density profile of Io's sodium corona using 10 mutual eclipses between the Galilean satellites. This approach circumvents the problem of spatially resolving Io's corona directly from Io's bright continuum in the presence of atmospheric seeing and telescopic scattering. The primary goal is to investigate the spatial and temporal variations of Io's corona. Spectra from the Keck Observatory and McDonald Observatory from 1997 reveal a corona that is only approximately spherically symmetric around Io. Comparing the globally averaged radial sodium column density profile in the corona with profiles measured in 1991 and 1985, we find that there has been no significant variation. However, there appears to be a previously undetected asymmetry: the corona above Io's sub-Jupiter hemisphere is consistently more dense than above the anti-Jupiter hemisphere

Discrepancies in Determinations of the Ginzburg-Landau Parameter

Long-standing discrepancies within determinations of the Ginzburg-Landau parameter $\kappa$ from supercritical field measurements on superconducting microspheres are reexamined. The discrepancy in tin is shown to result from differing methods of analyses, whereas the discrepancy in indium is a consequence of significantly differing experimental results. The reanalyses however confirms the lower $\kappa$ determinations to within experimental uncertainties.Comment: submitted to Phys. Rev.